| Patents for C23F 1 - Etching metallic material by chemical means (16,062) |
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| 03/20/2012 | US8137463 Dual zone gas injection nozzle |
| 03/20/2012 | US8136479 Plasma treatment apparatus and plasma treatment method |
| 03/20/2012 | CA2511833C Components for a film-forming device and method for cleaning the same |
| 03/15/2012 | WO2012033077A1 Method of treating copper etching waste liquor |
| 03/15/2012 | WO2011157883A8 Method for manufacturing an autocompensating antenna structure by etching |
| 03/15/2012 | US20120064720 Planarization control for semiconductor devices |
| 03/15/2012 | US20120064660 Apparatus and Method for Manufacturing of Thin Film Type Solar Cell |
| 03/15/2012 | US20120063484 Distributed reflector in a microring resonator |
| 03/15/2012 | US20120062973 Moems apparatus and a method for manufacturing same |
| 03/15/2012 | US20120061809 Method for manufacturing substrate for semiconductor element, and semiconductor device |
| 03/15/2012 | US20120061351 Plasma processing apparatus, plasma processing method and storage medium for storing program for executing the method |
| 03/15/2012 | US20120061350 Methods for Controlling Plasma Constituent Flux and Deposition During Semiconductor Fabrication and Apparatus for Implementing the Same |
| 03/15/2012 | US20120061348 Large Scale Patterned Growth of Aligned One-Dimensional Nanostructures |
| 03/15/2012 | US20120061022 Plasma texturing reaction apparatus |
| 03/15/2012 | US20120061021 Substrate processing method, substrate processing system, and computer-readable storage medium |
| 03/15/2012 | US20120060915 Method for plasma texturing |
| 03/14/2012 | CN202167531U 太阳能电池片刻蚀机传输装置 Solar eclipse machine transmission apparatus moment |
| 03/14/2012 | CN202164354U 酸性蚀刻液资源回收与环保处理设备 Acid etching solution recycling and environmental treatment equipment |
| 03/14/2012 | CN202164353U 太阳电池硅片湿法刻蚀补液装置 Wet etching of silicon solar cell infusion device |
| 03/14/2012 | CN102373474A Method for recycling wool making/etching solution |
| 03/14/2012 | CN102373473A Etching composition for slope-type etching apparatus and application method thereof |
| 03/14/2012 | CN101641461B Multilayer printed wiring boards with copper filled through-holes |
| 03/13/2012 | US8133347 Vacuum plasma generator |
| 03/13/2012 | US8133323 Film forming apparatus and method, gas supply device and storage medium |
| 03/08/2012 | WO2012030500A1 System, method and apparatus for controlling ion energy distribution |
| 03/08/2012 | US20120058506 Microneedle |
| 03/08/2012 | US20120057216 Multicomponent sacrificial structure |
| 03/08/2012 | US20120055633 High throughput physical vapor deposition apparatus and method for manufacture of solid state batteries |
| 03/06/2012 | US8128783 Plasma generator and work processing apparatus provided with the same |
| 03/06/2012 | US8128752 Roll-to-roll substrate transfer apparatus, wet etching apparatus comprising the same and apparatus for manufacturing printed circuit board |
| 03/06/2012 | US8128751 Film-forming apparatus |
| 03/01/2012 | WO2012026490A1 Method for preventing elution of bi from copper alloy |
| 03/01/2012 | WO2011136597A3 Copper and titanium composition for metal layer etching solution |
| 03/01/2012 | WO2011136594A3 Copper and titanium composition for metal layer etching solution |
| 03/01/2012 | US20120053603 Wound closure clips, systems and methods |
| 03/01/2012 | US20120052690 Temperature enhanced electrostatic chucking in plasma processing apparatus |
| 03/01/2012 | US20120052689 Plasma etching method and apparatus thereof |
| 03/01/2012 | US20120052597 Recognizable carrier for optical measurement methods |
| 03/01/2012 | US20120052565 Porous and Non-Porous Cell Culture Substrate |
| 03/01/2012 | US20120052258 Patterning of and contacting magnetic layers |
| 03/01/2012 | US20120048831 Methods and apparatuses for energetic neutral flux generation for processing a substrate |
| 03/01/2012 | US20120048830 Abrasive Liquid For Metal and Method for Polishing |
| 03/01/2012 | US20120048829 Methods for discretized processing and process sequence integration of regions of a substrate |
| 03/01/2012 | US20120048468 Support fixture for acid etching of pcd inserts |
| 03/01/2012 | US20120048467 Component temperature control by coolant flow control and heater duty cycle control |
| 03/01/2012 | US20120048019 Highly sensitive capacitive sensor and methods of manufacturing the same |
| 03/01/2012 | CA2807637A1 Method for preventing elution of bi from copper alloy |
| 02/29/2012 | CN102365392A Plasma etching method |
| 02/29/2012 | CN102363885A Pretreatment solution for selective stripping of silver coating and quantitative analysis of elements in silver coating |
| 02/28/2012 | US8124541 Etchant gas and a method for removing material from a late transition metal structure |
| 02/28/2012 | US8124537 Method for etching integrated circuit structure |
| 02/28/2012 | US8123860 Apparatus for cyclical depositing of thin films |
| 02/23/2012 | WO2012024300A2 Etching solution for copper or copper alloy |
| 02/23/2012 | US20120045902 Showerhead electrodes and showerhead electrode assemblies having low-particle performance for semiconductor material processing apparatuses |
| 02/23/2012 | US20120045867 Anti-reflective photovoltaic module |
| 02/23/2012 | US20120044609 Electrostatic Chuck With Polymer Protrusions |
| 02/23/2012 | US20120043301 Method and apparatus for controlling and monitoring the potential |
| 02/23/2012 | US20120043299 Method for manufacturing composite of metal and resin |
| 02/23/2012 | US20120043024 Substrate processing apparatus and temperature adjustment method |
| 02/23/2012 | US20120043022 Plasma chamber top piece assembly |
| 02/23/2012 | US20120043021 Adjustable confinement ring assembly |
| 02/22/2012 | EP2304079B1 Acid-resistance promoting composition |
| 02/22/2012 | CN202150477U 一种湿法蚀刻太阳能电池设备专用传动滚轮组件 One kind of wet etching equipment for solar cell drive roller assembly |
| 02/22/2012 | CN102358948A Method for preparing anodic alumina template by using plastic packaging process and application thereof |
| 02/22/2012 | CN101880881B 一种高铝锌合金浸蚀剂及其使用方法 One kind of high aluminum zinc alloy etchant and method of use |
| 02/22/2012 | CN101717937B 一种用于制备单晶硅绒面的酸腐蚀溶液及其使用方法 Acid etching solution and use a method for the preparation of single-crystal silicon suede |
| 02/22/2012 | CN101684557B 液晶显示器系统中的铜、铜/钼或铜/钼合金电极蚀刻液体 Liquid crystal display system of copper, copper / molybdenum or copper / molybdenum alloy electrode etching liquid |
| 02/21/2012 | US8118940 Clamping mechanism for semiconductor device |
| 02/16/2012 | WO2012021026A2 Texture-etchant composition for crystalline silicon wafer and method for texture-etching (1) |
| 02/16/2012 | WO2012021025A2 Texture-etchant composition for crystalline silicon wafer and method for texture-etching (2) |
| 02/16/2012 | WO2002084709A3 High pressure processing chamber for semiconductor substrate including flow enhancing features |
| 02/16/2012 | US20120041153 Regiofunctional carbon nanotube beam and method |
| 02/16/2012 | US20120041121 Method for manufacturing porous structure and method for forming pattern |
| 02/16/2012 | US20120040132 Protective film, method for forming the same, semiconductor manufacturing apparatus, and plasma treatment apparatus |
| 02/16/2012 | US20120037597 Plasma processing apparatus and plasma control method |
| 02/16/2012 | US20120037596 Gas supply member, plasma treatment method, and method of forming yttria-containing film |
| 02/16/2012 | US20120037595 Method for manufacturing porous structure and method for forming pattern |
| 02/16/2012 | US20120037594 Method for manufacturing porous structure and method for forming pattern |
| 02/16/2012 | US20120037593 Method and system for removal of films from peripheral portions of a substrate |
| 02/16/2012 | US20120037592 Method for high aspect ratio patterning in a spin-on layer |
| 02/16/2012 | US20120037591 Method of fabricating a scalable nanoporous membrane filter |
| 02/16/2012 | US20120037491 Antenna for inductively coupled plasma generation, inductively coupled plasma generator, and method of driving the same |
| 02/16/2012 | US20120037316 Method of supplying etching gas and etching apparatus |
| 02/16/2012 | US20120037315 Capacitive coupling plasma processing apparatus |
| 02/16/2012 | US20120037314 Substrate processing apparatus and side wall component |
| 02/15/2012 | CN202144516U 碱性蚀刻液回收设备 Alkaline etchant recycling equipment |
| 02/15/2012 | CN101787532B 化学腐蚀加工冲压模具退料型腔的方法 Chemical etching processing stamping die cavity method strippers |
| 02/14/2012 | US8114245 Plasma etching device |
| 02/09/2012 | WO2012018366A1 Systems, methods and apparatus for separate plasma source control |
| 02/09/2012 | WO2012017814A1 Etchant composition and method for forming metal wiring |
| 02/09/2012 | US20120034423 Method of forming metal oxide film and metal oxide film |
| 02/09/2012 | US20120034419 Methods of producing structures using a developer-soluble layer with multilayer technology |
| 02/09/2012 | US20120033214 Micro-optical Electromagnetic Radiation Diffraction Grating and Method for Manufacture |
| 02/09/2012 | US20120031876 Systems, methods and apparatus for separate plasma source control |
| 02/09/2012 | US20120031875 Plasma processing method and plasma processing apparatus |
| 02/09/2012 | US20120031874 Method for making a cavity in the thickness of a substrate which may form a site for receiving a component |
| 02/09/2012 | US20120031873 Etching device and method for manufacturing printed circuit board using same |
| 02/09/2012 | US20120031872 Conductive film removal agent and conductive film removal method |
| 02/09/2012 | US20120031563 Plasma processing device |
| 02/09/2012 | US20120031562 Plasma processing apparatus |