C23F 1 - Etching metallic material by chemical means

Patents for C23F 1 - Etching metallic material by chemical means (16,062)
12/2011
12/15/2011	US20110305995 Resin film forming method
12/15/2011	US20110303643 Substrate processing method and substrate processing apparatus
12/15/2011	US20110303642 Substrate processing system, substrate processing method, and storage medium
12/15/2011	US20110303641 Temperature controlled plasma processing chamber component with zone dependent thermal efficiencies
12/15/2011	US20110303639 Methods for processing substrates having metal hard masks
12/15/2011	US20110303638 Method for Fabricating a Micromirror
12/15/2011	US20110303635 Dry etching apparatus and method of dry etching
12/15/2011	US20110303634 Method and system for manufacturing nanostructures
12/15/2011	US20110303365 Plasma Etching Apparatus
12/15/2011	US20110303363 Plasma processing apparatus
12/15/2011	US20110303362 Plasma processing apparatus and processing gas supply structure thereof
12/15/2011	US20110303361 Outside Air Shut-Off Container and Pressure-Reducible Processing Apparatus
12/14/2011	EP2395394A2 Method for printing etch masks using phase-change materials
12/14/2011	CN202072766U 单片杯式旋转蚀刻装置 Monolithic rotary cup etching device
12/14/2011	CN1942606B 液体处理装置和液体处理方法 Liquid processing apparatus and liquid processing method
12/14/2011	CN102282645A 导电密封环静电吸盘 Conductive sealing ring electrostatic chuck
12/14/2011	CN102280529A 一种具有高绒度值的透明导电薄膜及其制备方法 Having a transparent conductive film and preparation method of high value Cashmere
12/14/2011	CN102277574A 单晶硅太阳电池及其的腐蚀液、制绒方法和制备方法和光伏组件 Monocrystalline silicon solar cells and the etching solution, texturing methods and preparation methods and PV modules
12/14/2011	CN102277573A 液晶显示屏用铬蚀刻液及其制备方法 LCD screen with chrome etching solution and its preparation method
12/14/2011	CN102277572A 一种钢丝腐蚀机 A wire - etching machine
12/13/2011	US8075790 Film removal method and apparatus
12/13/2011	US8075733 Plasma processing apparatus
12/13/2011	US8075732 EUV collector debris management
12/13/2011	US8075730 Apparatus for manufacturing a semiconductor device
12/13/2011	US8075728 Gas flow equalizer plate suitable for use in a substrate process chamber
12/13/2011	US8075692 Fluid bed reactor
12/13/2011	US8075690 Diffuser gravity support
12/13/2011	US8074599 Plasma uniformity control by gas diffuser curvature
12/08/2011	WO2011151328A1 Method for etching of copper and copper alloys
12/08/2011	WO2011150532A1 System and method for recovering spent etching solution
12/08/2011	US20110300338 Graphene nano ribbons and methods of preparing the same
12/08/2011	US20110299969 Device for grasping and active release of micro and nano objects
12/08/2011	US20110299842 Optical image stabilizer and method of manufacturing the same
12/08/2011	US20110297873 Etching solution compositions for metal laminate films
12/08/2011	US20110297646 Methods Of Forming Patterns On Substrates
12/08/2011	US20110297642 Nanowire-based transparent conductors and applications thereof
12/07/2011	EP2392694A1 Method for etching of copper and copper alloys
12/07/2011	CN202063996U 一种化学铣切机 A chemical milling machine
12/07/2011	CN102268674A 无氰化学褪镍溶液 No cyanide chemistry faded nickel solution
12/07/2011	CN102268662A 一种具有缓蚀性能的超疏水表面的白铜b30的制备方法 Preparation method of inhibition performance has superhydrophobic surface of the copper-nickel alloy b30
12/07/2011	CN102268183A 铝或铝合金与塑料的复合体及其制作方法 Aluminum or aluminum alloy and plastic composite body and its production methods
12/07/2011	CN101976700B 太阳能电池用多晶硅片的后清洗工艺 After the polysilicon film solar cells with a cleaning process
12/07/2011	CN101572996B 绝缘导热金属基板上真空溅镀形成导电线路的方法 Thermally conductive metal on the insulating substrate, vacuum sputtering method for forming a conductive circuit
12/07/2011	CN101524829B 通过耦合涡流传感器测量薄膜厚度的方法和设备 Method and apparatus for measuring film thickness by eddy current sensor coupled
12/07/2011	CN101399197B 一种腔室的衬 One kind of the chamber liner
12/06/2011	US8070972 Etching method and etching apparatus
12/06/2011	US8070926 Multi-chamber workpiece processing
12/06/2011	US8070911 Capacitive coupling plasma processing apparatus
12/06/2011	US8070910 Shower head structure and treating device
12/06/2011	US8070880 Substrate processing apparatus
12/06/2011	US8070879 Apparatus and method for hybrid chemical processing
12/06/2011	US8069817 Showerhead electrodes and showerhead electrode assemblies having low-particle performance for semiconductor material processing apparatuses
12/01/2011	WO2011150118A2 Ultra-low fractional area coverage flow diverter for treating aneurysms and vascular diseases
12/01/2011	WO2011147448A1 Composition and method for micro etching of copper and copper alloys
12/01/2011	US20110294234 Thin film solar fabrication process, etching method, device for etching, and thin film solar device
12/01/2011	US20110291026 Optically accessible microfluidic diagnostic device
12/01/2011	US20110290760 Method for producing plastic shell
12/01/2011	US20110290759 Pattern formation method
12/01/2011	US20110290419 Plasma processing apparatus
12/01/2011	US20110290380 Method for manufacturing metal laminated substrate for semiconductor element formation and metal laminated substrate for semiconductor element formation
12/01/2011	US20110290183 Plasma Uniformity Control By Gas Diffuser Hole Design
12/01/2011	US20110290022 Inertial sensor and method of manufacturing the same
12/01/2011	DE102011102594A1 Strukturierter Monokristall Structured monocrystal
12/01/2011	DE102007054485B4 Siliziumoberflächen-Strukturierungs-Verfahren Silicon surface texturing process
11/2011
11/30/2011	CN202059691U 一种智能控制pcb腐蚀箱 An intelligent control box pcb corrosion
11/30/2011	CN1550894B 化学放大型光刻胶组合物 Chemical amplification type resist composition
11/30/2011	CN102265712A 电子电路的形成方法 The method of forming an electronic circuit
11/30/2011	CN102265711A 电子电路用的压延铜箔或电解铜箔及使用它们形成电子电路的方法 Rolled copper foil or an electrolytic copper foil using an electronic circuit and a method which form an electronic circuit
11/30/2011	CN102265710A 电子电路用的压延铜箔或电解铜箔及使用它们形成电子电路的方法 Rolled copper foil or an electrolytic copper foil and the use of electronic circuits forming an electronic circuit are a method
11/30/2011	CN102264951A 电子电路用的压延铜箔或电解铜箔及使用它们形成电子电路的方法 Rolled copper foil or an electrolytic copper foil using an electronic circuit and a method which form an electronic circuit
11/30/2011	CN102263154A 一种改善太阳能电池制绒表面状况的方法 A method to improve the solar cell textured surface conditions
11/30/2011	CN102260872A 一种氮化物硬质反应膜的退除方法 Stripping method nitride hard reaction film
11/30/2011	CN102260871A 印刷线路板微蚀刻剂 Printed circuit board microetching agent
11/30/2011	CN102260870A 一种亚微米尺寸二维介质柱型光子晶体的制备方法 A method for preparing a two-dimensional medium submicron size cylindrical photonic crystals
11/30/2011	CN102259087A 一种具有耐蚀性能的黄铜超疏水表面的制备方法 Brass superhydrophobic surface preparation method has the corrosion resistance
11/30/2011	CN101473022B 用于金属表面的酸性清洁剂 Acid cleaner for metal surfaces
11/30/2011	CN101405431B 有凹口的沉积环 There deposition ring recess
11/30/2011	CN101102909B 从用于等离子体处理设备的硅和碳化硅电极表面除去黑硅和黑碳化硅的方法 Removed from the silicon and silicon carbide electrode surface for plasma processing apparatus of black silicon and silicon carbide
11/29/2011	US8067352 Aqueous cleaning composition for semiconductor copper processing
11/29/2011	US8067067 Clean, dense yttrium oxide coating protecting semiconductor processing apparatus
11/29/2011	US8066895 Method to control uniformity using tri-zone showerhead
11/29/2011	US8066815 Multi-workpiece processing chamber
11/24/2011	US20110288497 Nano-Scale Coatings and Related Methods Suitable for In-Vivo Use
11/24/2011	US20110287227 Method for producing a metal-oxide-coated workpiece surface with predeterminable hydrophobic behaviour
11/24/2011	US20110287223 Metallic articles with hydrophobic surfaces
11/24/2011	US20110287203 Articles with super-hydrophobic and/or self-cleaning surfaces and method of making same
11/24/2011	US20110287070 Bone repair material and method for producing the same
11/24/2011	US20110286896 Patterning Of Surfaces To Control The Storage, Mobility And Transport Of Liquids For Microfluidic Applications
11/24/2011	US20110285547 External Conditions Audio Playback System and Method
11/24/2011	US20110285409 Nanofluidic channel with embedded transverse nanoelectrodes and method of fabricating for same
11/24/2011	US20110284497 Plasma processing apparatus and method of manufacturing magnetic recording medium
11/24/2011	US20110284494 Method for Manufacturing an Opto-Electronic Component
11/24/2011	US20110284188 Heat spreader with high heat flux and high thermal conductivity
11/24/2011	US20110284167 Plasma processing equipment and plasma generation equipment
11/24/2011	US20110284165 Plasma processing apparatus
11/24/2011	US20110284163 Plasma processing apparatus
11/23/2011	CN1777691B Method and apparatus for reducing substrate backside deposition during processing
11/23/2011	CN102257180A Etching solution for copper or copper alloy, etching method, and method for managing reproduction of etching solution
11/23/2011	CN102256447A Etching device and circuit board etching method
11/23/2011	CN102251286A Micron/nanocone array of germanium and preparation method thereof

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