| Patents for C23F 1 - Etching metallic material by chemical means (16,062) |
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| 01/11/2012 | CN102312239A Corrosive chemical liquid used for corrosion of silicon magma on surface of silicon chip and corrosion method thereof |
| 01/11/2012 | CN102312215A Production method of diamond film coating of microbit |
| 01/10/2012 | US8092703 Manufacturing method of semiconductor device |
| 01/10/2012 | US8092695 Endpoint detection for photomask etching |
| 01/10/2012 | US8092643 Method and apparatus for cleaning and surface conditioning objects using plasma |
| 01/10/2012 | US8092642 Plasma processing apparatus |
| 01/10/2012 | US8092640 Plasma processing apparatus and semiconductor device manufactured by the same apparatus |
| 01/10/2012 | US8092638 Capacitively coupled plasma reactor having a cooled/heated wafer support with uniform temperature distribution |
| 01/10/2012 | US8092637 Manufacturing method in plasma processing apparatus |
| 01/10/2012 | US8092605 Magnetic confinement of a plasma |
| 01/10/2012 | US8091506 High velocity method for depositing diamond films from a gaseous phase in SHF discharge plasma and a plasma reactor for carrying out said method |
| 01/05/2012 | WO2012002969A1 Molybdenum containing targets |
| 01/05/2012 | WO2012000950A1 Treatment device for transport and storage boxes |
| 01/05/2012 | US20120004673 Medical material for in vivo implantation containing softening agent and/or moisturizing agent, method for controlling content of softening agent and/or moisturizing agent in the medical material, and method for producing the medical material for in vivo implantation |
| 01/05/2012 | US20120004614 Production Process for a Microneedle Arrangement and Corresponding Microneedle Arrangement and Use |
| 01/05/2012 | US20120003836 Movable ground ring for a plasma processing chamber |
| 01/05/2012 | US20120003779 Abrasion-etch texturing of glass |
| 01/05/2012 | US20120003675 Method for Preparing Small Volume Reaction Containers |
| 01/05/2012 | US20120003444 Aluminum-plastic composite structure |
| 01/05/2012 | US20120003142 Vapor-phase process apparatus, vapor-phase process method, and substrate |
| 01/05/2012 | US20120002285 Optical element and method for manufacturing the same |
| 01/05/2012 | US20120001890 Switchable 3-Dimensional Conversion Device, Method for Manufacturing the Same and Stereoscopic Image Display Device Using the Same |
| 01/05/2012 | US20120000887 Plasma treatment apparatus and plasma treatment method |
| 01/05/2012 | US20120000886 Substrate processing apparatus and substrate processing method |
| 01/05/2012 | US20120000610 Microwave Plasma Processing Apparatus |
| 01/05/2012 | US20120000608 C-shaped confinement ring for a plasma processing chamber |
| 01/05/2012 | US20120000607 Mass flow control system, plasma processing apparatus, and flow control method |
| 01/05/2012 | US20120000606 Plasma uniformity system and method |
| 01/05/2012 | US20120000605 Consumable isolation ring for movable substrate support assembly of a plasma processing chamber |
| 01/04/2012 | EP2401422A2 Method and device for regenerating peroxodisulfate pickling solution |
| 01/04/2012 | EP2401421A1 Mems device with integrated via and spacer |
| 01/04/2012 | CN102304766A Method for preparing silicon surface light trapping structure through sliver mirror reaction |
| 01/04/2012 | CN102304714A Aluminum film-containing etching solution for liquid crystal display screen |
| 01/04/2012 | CN101572994B Method for forming conducting wire on radiating substrate in a vacuum sputtering way |
| 01/03/2012 | US8088299 Multiple zone carrier head with flexible membrane |
| 01/03/2012 | US8088297 Combined etching and doping media for silicon dioxide layers and underlying silicon |
| 01/03/2012 | US8088293 Methods of forming reticles configured for imprint lithography |
| 01/03/2012 | US8087379 Localized plasma processing |
| 01/03/2012 | CA2514858C Gas gate for isolating regions of differing gaseous pressure |
| 01/03/2012 | CA2501416C Process for increasing strength, flexibility and fatigue life of metals |
| 12/29/2011 | WO2011162086A1 Method for producing unidirectional electromagnetic steel sheet |
| 12/29/2011 | US20110319786 Apparatus and Method for Measuring Physiological Functions |
| 12/29/2011 | US20110318936 Etch process for reducing silicon recess |
| 12/29/2011 | US20110318935 Method of setting thickness of dielectric and substrate processing apparatus having dielectric disposed in electrode |
| 12/29/2011 | US20110318930 Methods of manufacturing semiconductor devices |
| 12/29/2011 | US20110318585 Metal-and-resin composite and method for making the same |
| 12/29/2011 | US20110318525 Nanowire fabrication |
| 12/29/2011 | US20110317972 Optical device, optical arrangement and optical element holder |
| 12/29/2011 | US20110317300 Magnetic transfer master substrate, magnetic transfer method and method of manufacturing the substrate |
| 12/29/2011 | US20110317160 Broad band structures for surface enhanced raman spectroscopy |
| 12/29/2011 | US20110316948 Bubble tolerant manifold design for a liquid ejecting head |
| 12/29/2011 | US20110316270 Methods of using semiconductor fabrication techniques for making imagery |
| 12/29/2011 | US20110315661 Etching apparatus, analysis apparatus, etching treatment method, and etching treatment program |
| 12/29/2011 | US20110315660 Method for recycling of silica waste and method for preparing nanoporous or spherical materials |
| 12/29/2011 | US20110315659 Pattern formation method and imprint material |
| 12/29/2011 | US20110315658 Aluminum oxide film remover and method for surface treatment of aluminum or aluminum alloy |
| 12/29/2011 | US20110315655 Method of processing graphene sheet material and method of manufacturing electronic device |
| 12/29/2011 | US20110315318 Focus ring and manufacturing method therefor |
| 12/29/2011 | DE102006059046B4 Vorrichtung zum beschleunigten nasschemischen Behandeln von Oberflächen Apparatus for accelerated wet-chemical treatment of surfaces |
| 12/28/2011 | EP2400042A1 Metal-and-resin composite and method for making same |
| 12/28/2011 | CN102301838A 电子电路用的压延铜箔或电解铜箔及使用它们形成电子电路的方法 Rolled copper foil or an electrolytic copper foil using an electronic circuit and a method which form an electronic circuit |
| 12/28/2011 | CN102301445A 通过蚀刻来制造元件的方法 Method of manufacturing an element by etching |
| 12/28/2011 | CN102296369A 一种多晶硅酸法制绒工艺 One kind of legal velvet acid polysilicon process |
| 12/28/2011 | CN102296294A 一种金属腐蚀保护液及其应用 Liquid metal corrosion protection and its application |
| 12/28/2011 | CN102296293A 印刷线路板微蚀刻剂 Printed circuit board microetching agent |
| 12/28/2011 | CN101880879B 硅杯腐蚀夹具 Silicon Cup fixture corrosion |
| 12/28/2011 | CN101775602B 一种硬质合金刀具表面氮铝钛涂层浸蚀剂及其使用方法 One kind of carbide surface coating of titanium aluminum nitride etchant and method of use |
| 12/28/2011 | CN101228288B 注射型等离子体处理设备和方法 Injection type plasma treatment apparatus and method |
| 12/27/2011 | US8084190 Process for producing sublithographic structures |
| 12/27/2011 | US8083963 Removal of process residues on the backside of a substrate |
| 12/27/2011 | US8083961 Method and system for controlling the uniformity of a ballistic electron beam by RF modulation |
| 12/27/2011 | US8083890 Gas modulation to control edge exclusion in a bevel edge etching plasma chamber |
| 12/27/2011 | US8083889 Apparatus and method for plasma etching |
| 12/27/2011 | US8083853 Plasma uniformity control by gas diffuser hole design |
| 12/27/2011 | US8082878 Thermal evaporation apparatus, use and method of depositing a material |
| 12/22/2011 | WO2011158634A1 Etching liquid for film of multilayer structure containing copper layer and molybdenum layer |
| 12/22/2011 | WO2011157883A1 Method for manufacturing an autocompensating antenna structure by etching |
| 12/22/2011 | US20110311779 Method for marking a coated substrate |
| 12/22/2011 | US20110310711 Silicon overcoil balance spring |
| 12/22/2011 | US20110310600 Expandable LED Board Architecture |
| 12/22/2011 | US20110310281 Image capture unit and methods |
| 12/22/2011 | US20110309237 Light absorption and filtering properties of vertically oriented semiconductor nano wires |
| 12/22/2011 | US20110309051 Apparatus and method for wet treatment of an object and fluid diffusion plate and barrel used therein |
| 12/22/2011 | US20110309050 Plasma processing device, plasma processing method and method of manufacturing element including substrate to be processed |
| 12/22/2011 | US20110309049 Techniques for plasma processing a substrate |
| 12/22/2011 | US20110308735 Vacuum processing apparatus |
| 12/22/2011 | US20110308734 Apparatus for large area plasma processing |
| 12/22/2011 | US20110308733 Plasma processing apparatus and gas supply member support device |
| 12/22/2011 | US20110308544 Cleaning method of processing chamber of magnetic film, manufacturing method of magnetic device, and substrate treatment apparatus |
| 12/21/2011 | EP2398304A2 Copper clad laminate with copper-plated circuit layer, and method for manufacturing printed wiring board using the copper clad laminate with copper-plated circuit layer |
| 12/21/2011 | CN202081167U 一种化学蚀刻工艺专用治具 A chemical etching process dedicated fixture |
| 12/21/2011 | CN102286785A 一种用于制备单晶硅太阳电池绒面的腐蚀液 An etching solution used for the preparation of silicon solar cells suede |
| 12/21/2011 | CN102286747A 微蚀液的循环再生及金属铜的回收系统 Micro-etching solution of copper recycling and recovery system |
| 12/21/2011 | CN102286746A 酸性蚀刻液循环再生与铜回收装置 Acid etching solution recycling and recovery of copper |
| 12/21/2011 | CN102286745A 铜面粗化微蚀刻剂 Copper surface roughening micro etchant |
| 12/20/2011 | US8080289 Method for making an aligned carbon nanotube |
| 12/20/2011 | US8080125 Gas-permeable plasma electrode, method for production of the gas-permeable plasma electrode, and a parallel-plate reactor |
| 12/20/2011 | US8080107 Showerhead electrode assembly for plasma processing apparatuses |
| 12/15/2011 | WO2011154875A1 Aqueous alkaline etching and cleaning composition and method for treating the surface of silicon substrates |
| 12/15/2011 | US20110306212 Substrate processing apparatus, semiconductor device manufacturing method and substrate manufacturing method |