| Patents for C23F 1 - Etching metallic material by chemical means (16,062) |
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| 04/19/2012 | US20120090782 Microwave plasma source and plasma processing apparatus |
| 04/18/2012 | EP1950799B1 Method for production of nano-porous substrate |
| 04/18/2012 | CN102421703A 用于从废液中回收磷酸盐有价值物质的方法 Method for recovering valuable materials from the waste for phosphate |
| 04/18/2012 | CN102418150A 一种大腐蚀纹单晶硅碱腐蚀片加工工艺 One kind of large single-crystal silicon etching pattern piece alkaline etching process |
| 04/18/2012 | CN102418099A 旋流电解处理酸性氯化铜蚀刻液回收铜工艺 Swirl electrolytic treatment of acidic copper chloride etchant recycling copper process |
| 04/18/2012 | CN102418098A 一种工业铝箔超疏水表面的低损伤制备方法 An industrial method for preparing a low damage the aluminum foil of the super-hydrophobic surface |
| 04/18/2012 | CN101886262B 湿法刻蚀机台及消除硅片刻蚀差异的方法 Wet etching machine and method for etching silicon wafers to eliminate differences |
| 04/17/2012 | US8158075 Etching solution reproducing apparatus and etching solution reproduction method |
| 04/17/2012 | US8157953 Plasma processing apparatus |
| 04/17/2012 | US8157915 CVD reactor having a process-chamber ceiling which can be lowered |
| 04/12/2012 | WO2012048079A2 Composition and process for selectively etching metal nitrides |
| 04/12/2012 | US20120086998 Diffusion barrier layer for mems devices |
| 04/12/2012 | US20120086929 Lithographic apparatus and device manufacturing method |
| 04/12/2012 | US20120086887 Wire Grid Polarizer, Liquid Crystal Device Including The Wire Grid Polarizer, 3-D Stereoscopic Image Display Device Including The Wire Grid Polarizer, and Method of Manufacturing The Wire Grid Polarizer |
| 04/12/2012 | US20120085734 Extendible Stent Apparatus |
| 04/12/2012 | US20120085733 Self aligned triple patterning |
| 04/12/2012 | US20120085731 METHOD OF FABRICATING MEMS DEVICES (SUCH AS IMod) COMPRISING USING A GAS PHASE ETCHANT TO REMOVE A LAYER |
| 04/12/2012 | US20120085495 Etching, cleaning and drying methods using supercritical fluid and chamber systems using these methods |
| 04/12/2012 | US20120085494 Plasma Etching Apparatus |
| 04/12/2012 | US20120085493 Liquid Processing Apparatus |
| 04/12/2012 | US20120085168 Vibrating micromechanical sensor of angular velocity |
| 04/12/2012 | US20120085167 vibrating micromechanical sensor of angular velocity |
| 04/11/2012 | EP2438210A1 Method for regenerating a solution used for pickling or chemically milling titanium |
| 04/11/2012 | EP1586007B1 Electron beam processing for mask repair |
| 04/11/2012 | CN202187093U 太阳能硅片制绒转运架 Texturing solar wafers transport aircraft |
| 04/11/2012 | CN102409343A 一种多晶硅制绒工艺中废酸的再生方法及废酸再生系统 Regeneration method for texturing process polysilicon waste acid and spent acid regeneration system |
| 04/11/2012 | CN102409342A 用于蚀刻导电多层膜的蚀刻剂组合物和使用其的蚀刻方法 Etchant compositions and the use thereof in the etching method for etching a conductive film, a multilayer |
| 04/11/2012 | CN101705488B 具有粗糙表面的超疏水防覆冰铝和钢的表面处理方法 Surface treatment with a rough surface anti-icing methods superhydrophobic aluminum and steel |
| 04/10/2012 | US8153017 Substrate treating method |
| 04/10/2012 | US8152954 Showerhead electrode assemblies and plasma processing chambers incorporating the same |
| 04/10/2012 | US8152925 Baffle plate and substrate processing apparatus |
| 04/10/2012 | US8152922 Gas mixer and manifold assembly for ALD reactor |
| 04/05/2012 | WO2011150118A3 Ultra-low fractional area coverage flow diverter for treating aneurysms and vascular diseases |
| 04/05/2012 | US20120083131 Method and apparatus for treating silicon substrate |
| 04/05/2012 | US20120082822 Crosslinkable Graft Polymer Non-Preferentially Wetted by Polystyrene and Polyethylene Oxide |
| 04/05/2012 | US20120081784 Patterned retarder |
| 04/05/2012 | US20120081703 Highly Efficient Plamonic Devices, Molecule Detection Systems, and Methods of Making the Same |
| 04/05/2012 | US20120081228 Copper Tracking Method |
| 04/05/2012 | US20120080407 Multi-Source Plasma Focused Ion Beam System |
| 04/05/2012 | US20120080405 Manufacturing method of a nano filter structure for breathing |
| 04/05/2012 | US20120080404 Block copolymer and method of forming patterns by using the same |
| 04/05/2012 | US20120080148 Compact RF Antenna for an Inductively Coupled Plasma Ion Source |
| 04/04/2012 | CN102400146A 一种快速显示超细奥氏体晶粒的侵蚀剂及热侵蚀方法 A quick display of ultra-fine austenite grain size and heat eroded erosion method |
| 04/04/2012 | CN101604615B Method for etching an ultra thin film and etching liquid |
| 04/04/2012 | CN101356303B Method of forming a recessed structure employing a reverse tone process |
| 04/04/2012 | CN101144181B 半导体处理用的成膜装置及其使用方法 Forming a semiconductor processing apparatus and method of use |
| 04/03/2012 | US8147705 Method of operating ion source and ion implanting apparatus |
| 04/03/2012 | US8147648 Composite showerhead electrode assembly for a plasma processing apparatus |
| 04/03/2012 | US8147647 Method and arrangement for cleaning optical surfaces in plasma-based radiation sources |
| 03/29/2012 | US20120075699 Segmented film deposition |
| 03/29/2012 | US20120074102 Substrate processing apparatus and substrate processing method |
| 03/29/2012 | US20120074101 Substrate treatment method and substrate treatment apparatus |
| 03/29/2012 | US20120074100 Plasma processing apparatus and plasma processing method |
| 03/29/2012 | US20120074099 Methods for Controlling Bevel Edge Etching in a Plasma Chamber |
| 03/29/2012 | US20120074098 Process for Treatment of the Surface of a Dental Implant |
| 03/29/2012 | US20120074097 Method for fabricating submicron patterned sapphire substrate |
| 03/29/2012 | US20120074096 Methods for discretized processing and process sequence integration of regions of a substrate |
| 03/29/2012 | US20120074095 Method of evaluating center segregation of continuous cast slab |
| 03/29/2012 | US20120073757 Plasma processing apparatus |
| 03/29/2012 | US20120073756 Plasma processing apparatus |
| 03/29/2012 | US20120073753 Electrode plate for plasma etching and plasma etching apparatus |
| 03/29/2012 | US20120073752 Adapter Ring For Silicon Electrode |
| 03/28/2012 | EP2433297A1 Method for etching a material in the presence of solid particles |
| 03/28/2012 | EP2432586A1 Method for etching a material in the presence of a gas |
| 03/28/2012 | CN202175712U 蚀刻装置 Etching apparatus |
| 03/28/2012 | CN102395708A Etchant composition and method |
| 03/28/2012 | CN102392249A Method for removing coatings on surfaces of hard alloys |
| 03/28/2012 | CN102392248A Etchant of molybdenum and/ or aluminum containing metal film for OLED (Organic Light Emitting Diode) and preparation method thereof |
| 03/28/2012 | CN102392247A Electroplating method for middle local area of part for diffusion welding |
| 03/28/2012 | CN102392117A Method for solving chemical milling deformation of domestic un-prestretched sheets |
| 03/27/2012 | US8142840 Adhesion promotion in printed circuit boards |
| 03/27/2012 | US8142609 Plasma processing apparatus |
| 03/27/2012 | US8142606 Apparatus for depositing a uniform silicon film and methods for manufacturing the same |
| 03/27/2012 | US8142567 Vacuum processing apparatus |
| 03/27/2012 | US8141514 Plasma processing apparatus, plasma processing method, and storage medium |
| 03/22/2012 | US20120071003 Vacuum Processing Apparatus, Vacuum Processing Method, and Micro-Machining Apparatus |
| 03/22/2012 | US20120070752 Method for forming channels on diffusion media for a membrane humidifier |
| 03/22/2012 | US20120070604 Methods for preparing modified release liners and modified adhesive articles |
| 03/22/2012 | US20120067848 Apparatus and method for wet processing substrate |
| 03/22/2012 | US20120067847 Apparatus and method of processing substrate |
| 03/22/2012 | US20120067846 Liquid Processing Method, Recording Medium Having Recorded Program for Executing Liquid Processing Method Therein and Liquid Processing Apparatus |
| 03/22/2012 | US20120067843 Method of forming fine pattern |
| 03/22/2012 | US20120067718 Method and apparatus for producing three dimensional nano and micro scale structures |
| 03/22/2012 | US20120067523 Tuner and microwave plasma source |
| 03/22/2012 | US20120067522 Vacuum processing apparatus |
| 03/22/2012 | US20120067103 Method of Forming a Drug-Eluting Medical Device |
| 03/22/2012 | DE102010040869A1 Vorrichtung zum Ätzen von Halbleiter-Wafern mit einer Inline-Prozesskontrolle Apparatus for etching semiconductor wafers with an in-line process control |
| 03/21/2012 | CN102388165A Mems device with integrated via and spacer |
| 03/21/2012 | CN102386055A Chemical de-packaging method of plastic-packaged electronic component by using copper wire as connecting wire and preparation method of corrosive liquid used in chemical de-packaging method |
| 03/21/2012 | CN102383178A Stripping solution for vehicle connector electroplated terminal plating |
| 03/21/2012 | CN102383131A Formula for corrosive medicinal liquid used for high hardness die steel and preparation method for same |
| 03/21/2012 | CN102383130A Metallographic corrosive agent for amorphous alloys and observation method for metallographic structures of amorphous alloys |
| 03/21/2012 | CN101754583B Method and device for eliminating pool effect |
| 03/20/2012 | US8138091 Polishing composition and method for high silicon nitride to silicon oxide removal rate ratios |
| 03/20/2012 | US8137576 Substrate developing method and developing apparatus |
| 03/20/2012 | US8137501 Bevel clean device |
| 03/20/2012 | US8137473 Method for cleaning elements in vacuum chamber and apparatus for processing substrates |
| 03/20/2012 | US8137467 Temperature controlled showerhead |
| 03/20/2012 | US8137466 Thin film deposition apparatus and method of manufacturing organic light-emitting display device by using the same |
| 03/20/2012 | US8137465 Single-chamber sequential curing of semiconductor wafers |