Patents
Sitemap › C23 - Coating metallic material; Coating material with metallic material; Chemical surface treatment; Diffusion treatment of metallic material; Coating by vacuum evaporation, by sputtering, by ion implantation or by chemical vapour deposition, in general; Inhibiting corrosion of metallic material or incrustation in general › C23C - Coating metallic material; Coating material with metallic material; Surface treatment of metallic material by diffusion into the surface, by chemical conversion or substitution; Coating by vacuum evaporation, by sputtering, by ion implantation or by chemical vapour deposition, in general › C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes
Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892)
10/2014
10/09/2014US20140302256 High impedance rf filter for heater with impedance tuning device
10/09/2014US20140302239 Production method for polycrystalline silicon, and reactor for polycrystalline silicon production
10/09/2014US20140302232 Deposition on two sides of a web
10/09/2014US20140301861 Airfoil having an erosion-resistant coating thereon
10/09/2014US20140299577 Apparatus and method for surface processing of a substrate
10/09/2014US20140299060 Thin film deposition apparatus
10/09/2014US20140299059 Vapor delivery system
10/09/2014US20140299058 Deposition device, and collection device
10/09/2014US20140299056 Low temperature migration enhanced Si-Ge epitaxy with plasma assisted surface activation
10/09/2014DE112012005276T5 Abscheidungssysteme mit Reaktionskammern, die zur In-Situ Metrologie ausgebildet sind, und verwandte Verfahren Deposition systems with reaction chambers, which are designed for in-situ metrology, and related methods
10/09/2014DE102013220383A1 Metall-Trennelement für eine Brennstoffzelle und Herstellungsverfahren dafür Metal separator for a fuel cell and manufacturing method thereof
10/09/2014DE102013005868A1 Vorrichtung zur Vakuumbehandlung von Substraten Apparatus for vacuum processing of substrates
10/08/2014EP2787285A1 Component for a cooking appliance
10/08/2014EP2787099A2 In-situ dry clean chamber for front end of line fabrication
10/08/2014EP2785774A1 Coated polymer films
10/08/2014EP2785725A1 Process for preparing trialkyl compounds of metals of group iiia
10/08/2014EP2785724A1 Process for preparing trialkylgallium compounds
10/08/2014EP2785661A2 Optical coating method, apparatus and product
10/07/2014US8854449 Substrate position detection apparatus, film deposition apparatus equipped with the same, and substrate position detection method
10/07/2014US8853829 Epitaxial substrate for semiconductor device, method for manufacturing epitaxial substrate for semiconductor device, and semiconductor device
10/07/2014US8853670 III nitride semiconductor substrate, epitaxial substrate, and semiconductor device
10/07/2014US8853100 Film formation method, film formation apparatus and storage medium
10/07/2014US8853097 Particle reducing method
10/07/2014US8853078 Method of depositing material
10/07/2014US8852960 Method of fabricating semiconductor device and apparatus for fabricating the same
10/07/2014US8852746 Substrate coating and method of forming the same
10/07/2014US8852696 Method for vapor deposition
10/07/2014US8852693 Coated electronic devices and associated methods
10/07/2014US8852687 Organic layer deposition apparatus
10/07/2014US8852686 Method of forming phase change material layer using Ge(II) source, and method of fabricating phase change memory device
10/07/2014US8852682 Process for incremental coating of proppants for hydraulic fracturing and proppants produced therefrom
10/07/2014US8852460 Alkali earth metal precursors for depositing calcium and strontium containing films
10/07/2014US8852406 Method for synthesis of cubic boron nitride
10/07/2014US8852390 Substrate processing apparatus
10/07/2014US8852389 Plasma processing apparatus and plasma processing method
10/07/2014US8852388 Plasma processor
10/07/2014US8852387 Plasma processing apparatus and shower head
10/07/2014US8852349 Wafer processing hardware for epitaxial deposition with reduced auto-doping and backside defects
10/07/2014US8852348 Heat exchange pedestal with coating of diamond-like material
10/07/2014US8852347 Apparatus for chemical vapor deposition control
10/07/2014US8852346 Mask frame assembly for thin layer deposition and organic light emitting display device
10/07/2014US8852344 Large area deposition in high vacuum with high thickness uniformity
10/07/2014US8852343 Apparatus for crystal growth
10/07/2014US8851886 Substrate processing apparatus and method of manufacturing semiconductor device
10/07/2014US8851133 Method and apparatus of holding a device
10/07/2014US8851106 Gas supplying apparatus, cylinder cabinet provided with the same, valve box, and substrate process apparatus
10/07/2014US8851012 Vapor deposition reactor using plasma and method for forming thin film using the same
10/02/2014WO2014160910A1 Hydrofluoroolefin etching gas mixtures
10/02/2014WO2014160839A1 Multilayer structured coatings for cutting tools
10/02/2014WO2014160523A1 Article including polymer having surface with low coefficient of friction and manufacturing method of such
10/02/2014WO2014159530A1 Method of implementing low dose implant in a plasma system
10/02/2014WO2014158775A1 Gas sleeve for foreline plasma abatement system
10/02/2014WO2014157332A1 Method for manufacturing silicon carbide semiconductor substrate
10/02/2014WO2014157250A1 Deposition device and deposition method
10/02/2014WO2014157211A1 Substrate-processing apparatus, method for manufacturing semiconductor device, and recording medium
10/02/2014WO2014157071A1 Substrate processing device, method for manufacturing semiconductor device, and method for processing substrate
10/02/2014WO2014156932A1 Laminate body, barrier film, and manufacturing method of these
10/02/2014WO2014156888A1 Laminate and gas barrier film
10/02/2014WO2014156884A1 Decorative article having black rigid coating film
10/02/2014WO2014156853A1 Method for adjusting vapor-phase growth apparatus
10/02/2014WO2014156756A1 Film forming device, film forming method, and film forming program
10/02/2014WO2014156755A1 Film-forming device, film-forming method and film-forming program
10/02/2014WO2014156753A1 Film-forming device
10/02/2014WO2014156752A1 Film formation devce
10/02/2014WO2014156394A1 Silicon carbide epitaxial wafer, method for manufacturing silicon carbide epitaxial wafer, device for manufacturing silicon carbide epitaxial wafer, and silicon carbide semiconductor element
10/02/2014WO2014156123A1 Compound semiconductor stack and semiconductor device
10/02/2014WO2014155632A1 Hard film for tools, production method therefor, and hard film-coated metal machining tool
10/02/2014WO2014155109A1 Superabrasive material with protective adhesive coating and method for producing said coating
10/02/2014WO2014154692A1 Deposition platform for flexible substrates and method of operation thereof
10/02/2014WO2014154424A2 Method for a diamond vapor deposition
10/02/2014WO2014100453A9 Dual-detection residual gas analyzer
10/02/2014US20140295196 Composite film and manufacturing method of the same
10/02/2014US20140295106 High throughput multi-wafer epitaxial reactor
10/02/2014US20140295105 Method and device for depositing silicon on a substrate
10/02/2014US20140295084 Tris(dialkylamide)aluminum compound, and method for producing aluminum-containing thin film using same
10/02/2014US20140295083 Film forming apparatus, gas supply device and film forming method
10/02/2014US20140295082 Driving method of vertical heat treatment apparatus, storage medium and vertical heat treatment apparatus
10/02/2014US20140295081 Treatment of steel surfaces
10/02/2014US20140295080 Board and Method for Growing High-Quality Graphene Layer
10/02/2014US20140295071 Precursor compositions for atomic layer deposition and chemical vapor deposition of titanate, lanthanate, and tantalate dielectric films
10/02/2014US20140291306 Method of manufacturing mask
10/02/2014US20140291036 Multilayer structured coatings for cutting tools
10/02/2014US20140290861 Deposition platform for flexible substrates and method of operation thereof
10/02/2014US20140290860 Plasma process apparatus
10/02/2014US20140290579 Single point linear evaporation source system
10/02/2014US20140290578 Film deposition apparatus
10/02/2014US20140290577 Method of controlling gas supply apparatus and substrate processing system
10/02/2014US20140290575 Source gas supply unit, film forming apparatus and source gas supply method
10/02/2014US20140290569 Method for manufacturing semiconductor element and deposition apparatus
10/01/2014EP2785152A1 Plasma generation source and vacuum plasma processing apparatus provided with same
10/01/2014EP2784176A1 Deposition platform for flexible substrates and method of operation thereof
10/01/2014EP2784175A1 Device for depositing diamond in vapour phase
10/01/2014EP2784024A2 Fuel cell separator and process for its production
10/01/2014EP2783078A1 Turbomachine component with a parting joint, and a steam turbine comprising said turbomachine component
10/01/2014EP2783023A1 An atomic layer deposition reactor for processing a batch of substrates and method thereof
10/01/2014EP2782886A1 Method for coating, using a chemical vapor deposition technique, a part with a coating for protecting against oxidation, and coating and part
09/2014
09/30/2014US8847343 Method of manufacturing semiconductor device, semiconductor device and substrate processing apparatus
09/30/2014US8847334 Method of forming lutetium and lanthanum dielectric structures
09/30/2014US8847128 Heat treatment oven with inductive heating
09/30/2014US8846546 Method of manufacturing semiconductor device, substrate processing method, substrate processing apparatus and recording medium
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