| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 01/14/2015 | EP2823082A1 Barrier materials for display devices |
| 01/14/2015 | EP2822745A1 Silane based coating of aluminium mold |
| 01/14/2015 | CN204097562U 毛细玻璃管表面镀碳膜装置 Capillary tube plated carbon unit |
| 01/14/2015 | CN204097561U 一种碳化硅化学气相沉积设备 A silicon carbide chemical vapor deposition apparatus |
| 01/14/2015 | CN204097560U 光学级类钻石薄膜间歇式圆筒镀膜装置 Optical grade class diamond film coating cylindrical device intermittently |
| 01/14/2015 | CN104284998A 使用原子层沉积盒的粉末颗粒涂布 Using atomic layer deposition of powder particles coated cartridge |
| 01/14/2015 | CN104284997A 在薄膜晶体管器件上制备含硅膜的方法 The method of preparing a silicon-containing film on a thin film transistor device |
| 01/14/2015 | CN104284776A 气体阻隔性膜、气体阻隔性膜的制造方法及电子设备 Gas barrier film, gas barrier film and a method of manufacturing an electronic device |
| 01/14/2015 | CN104284763A 铝模具的硅烷基涂层 Silane-based coating aluminum molds |
| 01/14/2015 | CN104282520A 等离子体处理装置和等离子体分布调整方法 Apparatus and plasma processing method to adjust the plasma distribution |
| 01/14/2015 | CN104278254A 多充气室的双温喷头 More than double the plenum temperature sprinklers |
| 01/14/2015 | CN104278253A 具有导通控制的化学沉积设备 Chemical deposition apparatus having the conduction control of |
| 01/14/2015 | CN104278252A 非晶体硅膜的成膜方法和成膜装置 Film forming method and film forming apparatus of the amorphous silicon film |
| 01/14/2015 | CN104278242A 一种新型的等离子体镀膜替代水电镀系统 A new plasma plating system plating film instead of water |
| 01/14/2015 | CN104278232A 真空沉积设备和用于真空沉积的方法 A vacuum deposition apparatus and a method for vacuum deposition |
| 01/14/2015 | CN103194735B 用于汽车刹车片铆钉孔加工的阶梯钻制作工艺 For car brakes rivet hole machining step drill production process |
| 01/14/2015 | CN103132055B 基片上料组件、基片装卸载装置和pecvd设备 Components on the substrate material, the substrate loading and unloading equipment and pecvd equipment |
| 01/14/2015 | CN103103495B 一种全自动下传输系统 Under a fully automatic transmission system |
| 01/14/2015 | CN103000549B 腔室装置和具有它的基片处理设备 Chamber means and having its substrate processing apparatus |
| 01/14/2015 | CN102994980B 高导电碳纳米管薄膜的制备方法及装置 Highly conductive carbon nanotube film preparation method and apparatus |
| 01/14/2015 | CN102994977B 腔室装置和具有该腔室装置的基片处理设备 Chamber means and the substrate processing apparatus having the chamber means |
| 01/14/2015 | CN102978583B 一种钨管的制造方法 A method of manufacturing a tungsten tube |
| 01/14/2015 | CN102971449B 成膜装置 Film forming apparatus |
| 01/14/2015 | CN102891073B 一种低温等离子体辅助铝诱导多晶碳化硅薄膜的制备方法 A low-temperature plasma-assisted preparation of aluminum-induced polycrystalline silicon carbide films |
| 01/14/2015 | CN102859032B 碳膜叠层体 Carbon laminate |
| 01/14/2015 | CN102822383B 抗弧零电场板 Anti-zero electric arc board |
| 01/14/2015 | CN102804339B 气相生长装置 Vapor phase growth apparatus |
| 01/14/2015 | CN102732860B 反应腔及具有其的化学气相沉积设备 The reaction chamber and having the same chemical vapor deposition apparatus |
| 01/14/2015 | CN102693893B 一种利用调频的方式改善高频放电等离子体均匀性的方法 Way to improve a use FM frequency discharge plasma uniformity methods |
| 01/14/2015 | CN102560441B 加热控制方法、装置和系统,加热腔及等离子体设备 Heating control method, apparatus and system, the heating chamber and the plasma equipment |
| 01/14/2015 | CN101928935B 等离子体处理装置、薄膜制造方法和薄膜晶体管制造方法 Device, a thin film manufacturing method and a thin film transistor manufacturing method plasma treatment |
| 01/14/2015 | CN101558186B 对基板表面做预先处理以进行金属沉积的工艺和集成系统 Do pretreated substrate surface for metal deposition processes and integrated systems |
| 01/13/2015 | US8933538 Oxygen-doped gallium nitride single crystal substrate |
| 01/13/2015 | US8933449 Apparatus having a dielectric containing scandium and gadolinium |
| 01/13/2015 | US8932995 Combinatorial process system |
| 01/13/2015 | US8932963 Film deposition method |
| 01/13/2015 | US8932682 Method for manufacturing a light emitting device |
| 01/13/2015 | US8932676 Method for producing gas barrier plastic molded body |
| 01/13/2015 | US8932675 Methods for depositing silicon carbo-nitride film |
| 01/13/2015 | US8932674 Vapor deposition methods of SiCOH low-k films |
| 01/13/2015 | US8932673 Methods of fabricating large-area graphene |
| 01/13/2015 | US8932663 Pyrocarbon coated bone implants |
| 01/13/2015 | US8932437 Multi-coated metallic products and methods of making the same |
| 01/13/2015 | US8932430 RF coupled plasma abatement system comprising an integrated power oscillator |
| 01/13/2015 | US8932429 Electronic knob for tuning radial etch non-uniformity at VHF frequencies |
| 01/13/2015 | US8932406 In-situ generation of the molecular etcher carbonyl fluoride or any of its variants and its use |
| 01/13/2015 | US8932405 Apparatus for low-temperature epitaxy on a plurality semiconductor substrates |
| 01/13/2015 | US8932389 Zinc oxide precursor and method of depositing zinc oxide-based thin film using the same |
| 01/13/2015 | US8931506 Gas supply apparatus equipped with vaporizer |
| 01/13/2015 | US8931433 Plasma processing apparatus |
| 01/13/2015 | US8931432 Vacuum processing apparatus |
| 01/13/2015 | US8931431 Nozzle geometry for organic vapor jet printing |
| 01/13/2015 | CA2706784C Coated article with nanolayered coating scheme |
| 01/08/2015 | WO2015002156A1 Gas-barrier film and method for producing same, and electronic device using same |
| 01/08/2015 | WO2015001975A1 Wafer-support mounts and chemical vapor deposition device using said wafer-support mounts |
| 01/08/2015 | WO2015001025A1 Method and system for modifying a substrate using a plasma |
| 01/08/2015 | US20150011096 Deposition apparatus including an isothermal processing zone |
| 01/08/2015 | US20150011088 Methods and apparatus for depositing and/or etching material on a substrate |
| 01/08/2015 | US20150010772 Metallization of fluoroelastomer films |
| 01/08/2015 | US20150010718 Heat transfer control in pecvd systems |
| 01/08/2015 | US20150010705 Methods for Forming Templated Materials |
| 01/08/2015 | US20150010702 Mechanically fluidized silicon deposition systems and methods |
| 01/08/2015 | US20150010701 Graphene roll-to-roll coating apparatus and graphene roll-to-roll coating method using the same |
| 01/08/2015 | US20150007940 Plasma processing device and high-frequency generator |
| 01/08/2015 | US20150007774 Film formation device |
| 01/08/2015 | US20150007773 Co2 recycling device and co2 recycling system |
| 01/08/2015 | US20150007772 Substrate processing apparatus |
| 01/08/2015 | US20150007771 Gas inlet member of a cvd reactor |
| 01/08/2015 | US20150007770 Multi-plenum, dual-temperature showerhead |
| 01/08/2015 | DE112013001928T5 Isolierschicht, Verfahren zum Herstellen einer Halbleitervorrichtung und Halbleitervorrichtung Insulating layer, A method of manufacturing a semiconductor device and semiconductor device |
| 01/08/2015 | DE102013213268A1 Gebautes Hohlventil Built hollow valve |
| 01/08/2015 | DE102013106863A1 Vorrichtung zum Bestimmen des Massenflusses eines in einem Trägergas transportierten Dampfs Apparatus for determining the mass flow of a carrier gas, transported in a vapor |
| 01/07/2015 | EP2820168A2 Method for producing a hard material layer on a substrate, hard material layer and cutting tool |
| 01/07/2015 | EP2820167A1 Dlc-coated gate valve in petroleum production or water injection |
| 01/07/2015 | EP2819930A1 Food container having improved oxygen barrier properties and manufacturing method thereof |
| 01/07/2015 | CN204080104U 原子层沉积设备 Atomic layer deposition apparatus |
| 01/07/2015 | CN204080103U 一种金属有机源加料装置 Metal organic source feeding device |
| 01/07/2015 | CN204080102U 原子层沉积设备 Atomic layer deposition apparatus |
| 01/07/2015 | CN204080101U 抽气环及沉积设备 Suction ring and deposition equipment |
| 01/07/2015 | CN204080094U 一种用于真空离子镀膜的送气系统 Aspirated system for vacuum ion coating |
| 01/07/2015 | CN104271929A 内燃机护套 Combustion engine jacket |
| 01/07/2015 | CN104271798A 用于对衬底进行表面处理的装置和方法和用于制造光电子构件的方法 Method of fabricating an optoelectronic component apparatus and method for the surface treatment of the substrate and a |
| 01/07/2015 | CN104271797A 显示器件的阻隔材料 Display device of barrier material |
| 01/07/2015 | CN104271501A 用于提高耐腐蚀性的方法和在电连接器中的应用 Method for improving the corrosion resistance and the application of the electrical connector |
| 01/07/2015 | CN104271351A 设置有沉积膜的聚乳酸成形体及其生产方法 Is provided with a deposited film of a polylactic acid molded article and production method thereof |
| 01/07/2015 | CN104271291A 表面被覆切削工具 Surface-coated cutting tool |
| 01/07/2015 | CN104269344A 一种电容介质沉淀方法 A capacitive medium precipitation method |
| 01/07/2015 | CN104264217A 一种制备半导体外延片的mocvd反应装置 Mocvd reaction apparatus for preparing a semiconductor wafer |
| 01/07/2015 | CN104264130A 一种石墨烯的制备方法及制备装置 One kind of graphene production method and apparatus for preparing |
| 01/07/2015 | CN104264129A 一种mocvd设备的进气装置及mocvd设备 Intake apparatus and equipment mocvd apparatus mocvd |
| 01/07/2015 | CN104264128A 一种用于mocvd反应器的格栅式气体分布装置 A gas grill mocvd reactor distribution means |
| 01/07/2015 | CN104264127A 光伏电池用透明导电膜的生产方法 Solar cell production method of the transparent conductive film |
| 01/07/2015 | CN104264126A 涂层化学气相沉积装置及涂覆方法 CVD coating apparatus and coating method |
| 01/07/2015 | CN104264125A 成膜装置 Film forming apparatus |
| 01/07/2015 | CN104264124A 成膜装置 Film forming apparatus |
| 01/07/2015 | CN104264123A 一种用于催化甲醇合成反应的CuNi合金薄膜的原子层沉积制备方法 Atomic layer deposition method for the preparation of the catalytic methanol synthesis reaction CuNi alloy films |
| 01/07/2015 | CN104264110A 一种制备二维组合材料芯片的掩模装置及芯片制备方法 A two-dimensional composite material chip mask device and chip preparation prepared |
| 01/07/2015 | CN103194731B 一种制备掺氮二氧化钛多孔膜的方法 A nitrogen-doped titania porous membrane prepared |
| 01/07/2015 | CN102994973B 一种金刚石厚膜的直流等离子体喷射制备方法 DC plasma jet one kind of diamond films prepared |
| 01/07/2015 | CN102884223B 等离子处理装置 The plasma processing apparatus |