| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 12/09/2014 | US8907115 Synthesis and characterization of first row transition metal complexes containing α-keto hydrazonate ligands as potential precursors for use in metal film deposition |
| 12/09/2014 | US8906813 SiOx process chemistry development using microwave plasma CVD |
| 12/09/2014 | US8906791 Method of improving film non-uniformity and throughput |
| 12/09/2014 | US8906790 Combinatorial approach for screening of ALD film stacks |
| 12/09/2014 | US8906718 Method for forming vapor deposition film, and method for producing display device |
| 12/09/2014 | US8906515 Metal-clad polymer article |
| 12/09/2014 | US8906471 Method of depositing metallic film by plasma CVD and storage medium |
| 12/09/2014 | US8906457 Method of atomic layer deposition using metal precursors |
| 12/09/2014 | US8906456 Apparatus and method for high-throughput chemical vapor deposition |
| 12/09/2014 | US8906455 Low temperature deposition of silicon-containing films |
| 12/09/2014 | US8906454 Methods for depositing metal-polymer composite materials atop a substrate |
| 12/09/2014 | US8906453 Tool for harvesting polycrystalline silicon-coated rods from a chemical vapor deposition reactor |
| 12/09/2014 | US8906249 Plasma processing apparatus and plasma processing method |
| 12/09/2014 | US8906246 Film deposition apparatus and film deposition method |
| 12/09/2014 | US8906206 Vertical-offset coater and methods of use |
| 12/09/2014 | US8906197 Plasma processing chamber having electrodes for cleaning chamber |
| 12/09/2014 | US8906196 Plasma processing apparatus and method for controlling the same |
| 12/09/2014 | US8906195 Tuning hardware for plasma ashing apparatus and methods of use thereof |
| 12/09/2014 | US8906193 Gas supply unit, substrate processing apparatus and supply gas setting method |
| 12/09/2014 | US8906162 Metal organic chemical vapor deposition equipment |
| 12/09/2014 | US8906161 Semiconductor producing device and semiconductor device producing method |
| 12/09/2014 | US8906160 Vapor based processing system with purge mode |
| 12/09/2014 | US8904957 Plasma processor and plasma processing method |
| 12/09/2014 | US8904956 Plasma stamp, plasma treatment device, method for plasma treatment and method for producing a plasma stamp |
| 12/09/2014 | US8904955 Substrate processing apparatus |
| 12/09/2014 | US8904819 Evaporator with internal restriction |
| 12/04/2014 | US20140357068 Plasma doping apparatus, plasma doping method, semiconductor device manufacturing method and semiconductor device |
| 12/04/2014 | US20140356985 Temperature controlled substrate support assembly |
| 12/04/2014 | US20140356764 Amorphous carbon film, process for forming amorphous carbon film, electrically conductive member and fuel cell bipolar plate having amorphous carbon film |
| 12/04/2014 | US20140356552 Heating evaporation deposition apparatus and evaporation deposition method using the same |
| 12/04/2014 | US20140356550 Film forming apparatus, film forming method and non-transitory storage medium |
| 12/04/2014 | US20140356549 METHOD TO OBTAIN SiC CLASS OF FILMS OF DESIRED COMPOSITION AND FILM PROPERTIES |
| 12/04/2014 | US20140356534 Method for the chemical vapor infiltration of refractive substances |
| 12/04/2014 | US20140356527 Method of fabricating light-scattering substrate |
| 12/04/2014 | US20140353680 Gallium Nitride Semiconductor Structures With Compositionally-Graded Transition Layer |
| 12/04/2014 | US20140352869 Method of fabricating bulk carbon nanotube and metallic composites |
| 12/04/2014 | US20140352620 Guiding assembly and coating device using same |
| 12/04/2014 | US20140352619 Chemical vapor deposition with elevated temperature gas injection |
| 12/04/2014 | US20140352618 System for forming graphene on substrate |
| 12/02/2014 | US8901708 Yttrium and titanium high-k dielectric films |
| 12/02/2014 | US8901015 Method for depositing an inorganic encapsulating film |
| 12/02/2014 | US8901014 Method of manufacturing semiconductor device, substrate processing method, substrate processing apparatus and non-transitory computer readable recording medium |
| 12/02/2014 | US8901012 Semiconductor manufacturing apparatus and method for manufacturing semiconductor device |
| 12/02/2014 | US8901011 Substrate processing apparatus and semiconductor device producing method |
| 12/02/2014 | US8900991 Film forming method and storage medium |
| 12/02/2014 | US8900761 Zinc anode battery with boron nitride coated zinc particles |
| 12/02/2014 | US8900723 Organic light emitting diode display |
| 12/02/2014 | US8900695 Durable conformal wear-resistant carbon-doped metal oxide-comprising coating |
| 12/02/2014 | US8900674 Method of coating a substrate |
| 12/02/2014 | US8900665 Method of forming hardmask layer with alternating nanolayers |
| 12/02/2014 | US8900664 Method of fabricating high efficiency CIGS solar cells |
| 12/02/2014 | US8900663 Methods for coating articles |
| 12/02/2014 | US8900662 Thin film depositing apparatus and thin film depositing method used by the same |
| 12/02/2014 | US8900422 Yttrium and titanium high-K dielectric film |
| 12/02/2014 | US8900418 Yttrium and titanium high-k dielectric films |
| 12/02/2014 | US8900405 Plasma immersion ion implantation reactor with extended cathode process ring |
| 12/02/2014 | US8900404 Plasma processing systems with mechanisms for controlling temperatures of components |
| 12/02/2014 | US8900368 Device and method for continuous chemical vapour deposition under atmospheric pressure and use thereof |
| 12/02/2014 | US8900367 Apparatus and method for manufacturing large-area carbon nanotube films |
| 12/02/2014 | US8900366 Apparatus for depositing a multilayer coating on discrete sheets |
| 12/02/2014 | US8900365 Apparatus for depositing material on elongate substrate |
| 12/02/2014 | US8900364 High productivity vapor processing system |
| 12/02/2014 | US8900363 Inline vacuum processing apparatus, method of controlling the same, and information recording medium manufacturing method |
| 12/02/2014 | US8900344 Hydrogen selective protective coating, coated article and method |
| 12/02/2014 | US8900291 Medical instrument and metal product |
| 12/02/2014 | US8899174 Device and method for fabricating display device |
| 11/27/2014 | US20140349889 Formation of a supra-monolayer nanopattern and its uses |
| 11/27/2014 | US20140349469 Processing for electromechanical systems and equipment for same |
| 11/27/2014 | US20140349107 Barrier layer to sioc alkali metals |
| 11/27/2014 | US20140349097 Enhanced, protected silver coatings on aluminum for optical mirror and method of making same |
| 11/27/2014 | US20140349095 Break resistant and shock resistant sapphire plate |
| 11/27/2014 | US20140349092 Surface-tensioned sapphire plate |
| 11/27/2014 | US20140349033 Method For Forming Film By Plasma-Assisted Deposition Using Two-Frequency Combined Pulsed RF Power |
| 11/27/2014 | US20140349032 Film deposition method |
| 11/27/2014 | US20140349011 Processing chamber |
| 11/27/2014 | US20140349005 Biosensor systems and related methods for detecting analytes in aqueous and biological environments |
| 11/27/2014 | US20140346650 Systems and methods for thin-film deposition of metal oxides using excited nitrogen-oxygen species |
| 11/27/2014 | US20140345529 Method for Producing Semiconductor Layers and Coated Substrates Treated with Elemental Selenium and/or Sulphur, in Particular, Flat Substrates |
| 11/27/2014 | US20140345528 Substrate processing apparatus including processing unit |
| 11/27/2014 | US20140345527 Vapor deposition device, vapor deposition method, and method of manufacturing organic electroluminescent display device |
| 11/27/2014 | US20140345523 Substrate ejection detection device, method of detecting substrate ejection and substrate processing apparatus |
| 11/25/2014 | US8897627 Carburetor, carburetor for MOCVD using same, center rod for use in the carburetor or carburetor for MOCVD, method for dispersing carrier gas, and method for vaporizing carrier gas |
| 11/25/2014 | US8896097 Method of manufacturing capacitor, capacitor and method of forming dielectric film for use in capacitor |
| 11/25/2014 | US8895942 Dielectric treatment module using scanning IR radiation source |
| 11/25/2014 | US8895842 High quality TCO-silicon interface contact structure for high efficiency thin film silicon solar cells |
| 11/25/2014 | US8895457 Method of manufacturing semiconductor device and substrate processing apparatus |
| 11/25/2014 | US8895456 Method of depositing a film |
| 11/25/2014 | US8895442 Cobalt titanium oxide dielectric films |
| 11/25/2014 | US8895356 Chemical vapor deposition apparatus and method of forming semiconductor epitaxial thin film using the same |
| 11/25/2014 | US8895160 Product and method for its manufacture within material processing |
| 11/25/2014 | US8895116 Manufacturing method of crystalline semiconductor film and manufacturing method of semiconductor device |
| 11/25/2014 | US8895108 Method for forming thin film using radicals generated by plasma |
| 11/25/2014 | US8895107 Chemical vapor deposition with elevated temperature gas injection |
| 11/25/2014 | US8895106 Process for coating discrete articles with a zinc-based alloyed layer |
| 11/25/2014 | US8895105 Receptor-catalyst growth process for carbon nanotubes |
| 11/25/2014 | US8894870 Multi-step method and apparatus for etching compounds containing a metal |
| 11/25/2014 | US8894806 Plasma processing apparatus and plasma processing method |
| 11/25/2014 | US8894770 Process and apparatus to treat metal surfaces |
| 11/25/2014 | US8894769 Material evaporation chamber with differential vacuum pumping |
| 11/25/2014 | US8894767 Flow control features of CVD chambers |