| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 02/04/2015 | CN104328387A 一种气相沉淀设备用喷淋头清洁装置 A gas phase precipitation sprinkler equipment cleaning device |
| 02/04/2015 | CN104328386A 一种伺服阀芯气相沉积加工旋转机构 One kind of servo valve vapor deposition process rotating mechanism |
| 02/04/2015 | CN103031532B 一种安全性高的原子层沉积设备 Atomic layer deposition apparatus with high safety |
| 02/04/2015 | CN102922815B 水冷却平板层状CuCrZr/OFHC-Cu/CVD-W面向等离子体部件及其制作方法 Water-cooled flat-layered CuCrZr / OFHC-Cu / CVD-W plasma facing components and production methods |
| 02/04/2015 | CN102918179B 用于将电力供应给cvd反应器的设备和方法 The apparatus and method for supplying electric power to the reactor cvd |
| 02/04/2015 | CN102828165B 高密度等离子体化学气相淀积设备的腔体检漏方法 High-density cavity examination leakage method of plasma chemical vapor deposition equipment |
| 02/04/2015 | CN102644059B 连续沉积装置 Continuous deposition apparatus |
| 02/04/2015 | CN102597310B 固态前体输送组件以及相关方法 Solid precursor delivery assembly and related methods |
| 02/04/2015 | CN102517566B 用喷头装置实现选择性原子层沉积成膜的方法 The method implemented by the nozzle means of the selective atomic layer deposition film formation |
| 02/04/2015 | CN102383112B 热处理装置 Heat treatment device |
| 02/04/2015 | CN101760727B 材料气体浓度控制装置 Material gas concentration control means |
| 02/03/2015 | US8946772 Substrate for epitaxial growth, process for manufacturing GaN-based semiconductor film, GaN-based semiconductor film, process for manufacturing GaN-based semiconductor light emitting element and GaN-based semiconductor light emitting element |
| 02/03/2015 | US8946692 Graphene (multilayer) boron nitride heteroepitaxy for electronic device applications |
| 02/03/2015 | US8946096 Group IV-B organometallic compound, and method for preparing same |
| 02/03/2015 | US8946092 Method of manufacturing semiconductor device, method of processing substrate and substrate processing apparatus |
| 02/03/2015 | US8946065 Method of forming seed layer and method of forming silicon-containing thin film |
| 02/03/2015 | US8946062 Polycrystalline silicon thick films for photovoltaic devices or the like, and methods of making same |
| 02/03/2015 | US8946061 Engineering of porous coatings formed by ion-assisted direct deposition |
| 02/03/2015 | US8946036 Method of forming dielectric films using a plurality of oxidation gases |
| 02/03/2015 | US8945707 Surface-coated cutting tool |
| 02/03/2015 | US8945691 Nano-material and method of fabrication |
| 02/03/2015 | US8945690 Method and apparatus for mass-producing DLC films |
| 02/03/2015 | US8945676 Method and apparatus for coating |
| 02/03/2015 | US8945675 Methods for forming conductive titanium oxide thin films |
| 02/03/2015 | US8945673 Nanoparticles with grafted organic molecules |
| 02/03/2015 | US8945411 Plasma processing apparatus and plasma processing method |
| 02/03/2015 | US8945342 Surface wave plasma generating antenna and surface wave plasma processing apparatus |
| 02/03/2015 | US8945340 Plasma processing apparatus, and maintenance method and assembling method of the same |
| 02/03/2015 | US8945339 Film formation apparatus |
| 02/03/2015 | US8945313 Vacuum exhaust method and a substrate processing apparatus therefor |
| 02/03/2015 | US8945307 Apparatus and method for vapor deposition of dielectric wire coating |
| 02/03/2015 | US8945306 Gas supply device |
| 02/03/2015 | US8945305 Methods of selectively forming a material using parylene coating |
| 02/03/2015 | US8945297 Dielectric protective layer for a self-organizing monolayer (SAM) |
| 02/03/2015 | US8945296 Water-reactive Al-based composite material, water-reactive Al-based thermally sprayed film, process for production of such Al-based thermally sprayed film, and constituent member for film-forming chamber |
| 02/03/2015 | US8945250 Coated cutting tool insert for turning of steels |
| 02/03/2015 | US8944347 Deposition nozzle and apparatus for thin film deposition process |
| 02/03/2015 | US8944341 Diffuser structure and manufacturing method thereof |
| 02/03/2015 | US8944095 Gas supply apparatus for semiconductor manufacturing apparatus |
| 02/03/2015 | US8944077 Film deposition apparatus, cleaning method for the same, and computer storage medium storing program |
| 02/03/2015 | US8944003 Remote plasma system and method |
| 02/03/2015 | US8944002 High throughput physical vapor deposition system for material combinatorial studies |
| 02/03/2015 | US8943669 Assembly method for vacuum processing apparatus |
| 02/03/2015 | CA2740709C Method and apparatus for nitriding metal articles |
| 01/29/2015 | WO2015013266A1 Cobalt substrate processing systems, apparatus, and methods |
| 01/29/2015 | WO2015012403A1 Pretreatment method for base substrate, and method for manufacturing laminate using pretreated base substrate |
| 01/29/2015 | WO2015012359A1 Ferroelectric device and method for manufacturing same |
| 01/29/2015 | WO2015011361A1 Mechanical part coated with a layer of amorphous carbon for sliding in relation to a less hard component |
| 01/29/2015 | US20150031908 Metallated metal-organic frameworks |
| 01/29/2015 | US20150031218 Film forming process and film forming apparatus |
| 01/29/2015 | US20150031216 Cleaning method, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium |
| 01/29/2015 | US20150031192 Substrate carrier arrangement, coating system having a substrate carrier arrangement and method for performing a coating process |
| 01/29/2015 | US20150031157 Method and system for continuous atomic layer deposition |
| 01/29/2015 | US20150030885 Coated article and chemical vapor deposition process |
| 01/29/2015 | US20150030875 Zn-mg alloy-coated steel sheet with excellent blackening resistance and excellent adhesion and method for manufacturing same |
| 01/29/2015 | US20150030792 Polylactic acid formed body having a vapor-deposited film and method of producing the same |
| 01/29/2015 | US20150030786 Microwave plasma reactor for manufacturing synthetic diamond material |
| 01/29/2015 | US20150030782 Volatile dihydropyrazinly and dihydropyrazine metal complexes |
| 01/29/2015 | US20150030772 Chemical vapor deposition raw material comprising organoplatinum compound, and chemical vapor deposition method using the chemical vapor deposition raw material |
| 01/29/2015 | US20150030771 Cobalt substrate processing systems, apparatus, and methods |
| 01/29/2015 | US20150030766 Pedestal bottom clean for improved fluorine utilization and integrated symmetric foreline |
| 01/29/2015 | US20150029681 Flexible composite, production thereof and use thereof |
| 01/29/2015 | US20150027376 Deposition film forming apparatus including rotating members |
| 01/29/2015 | US20150027374 Vapor deposition apparatus |
| 01/29/2015 | US20150027373 Apparatus for treating a gas stream |
| 01/29/2015 | US20150027371 Vapor deposition apparatus |
| 01/29/2015 | US20150027369 Apparatus for Treating a Gas Stream |
| 01/29/2015 | DE102013214800A1 Vorrichtung zur Isolierung und Abdichtung von Elektrodenhalterungen in CVD Reaktoren Apparatus for insulation and sealing of electrode holders in CVD reactors |
| 01/28/2015 | EP2829631A1 Colored rigid decorative member |
| 01/28/2015 | EP2829629A1 Method for dry-cleaning metal film in film-formation apparatus |
| 01/28/2015 | EP2829398A1 Polylactic acid molding provided with deposited film and method for producing same |
| 01/28/2015 | EP2828886A1 Keyed wafer carrier |
| 01/28/2015 | EP2828416A1 Vapor deposition system and method |
| 01/28/2015 | CN204125530U 一种热壁金属有机物化学气相沉积设备 A thermal wall metal organic chemical vapor deposition equipment |
| 01/28/2015 | CN1912178B 双频率偏压化学气相沉积室和用其制造光掩模的方法 Dual frequency chemical vapor deposition chamber and the bias method of manufacturing a photomask |
| 01/28/2015 | CN104321859A 键控晶片载体 Keying wafer carrier |
| 01/28/2015 | CN104321857A 基板移载装置以及基板移载方法 A substrate transfer apparatus and a substrate transfer method |
| 01/28/2015 | CN104321462A 在应用多区气体供给装置的等离子体处理室中的共用气体面板 In the application of a multi-zone plasma processing chamber gas supply means in the common gas panel |
| 01/28/2015 | CN104321461A 微波等离子体化学气相沉积装置 Microwave plasma chemical vapor deposition apparatus |
| 01/28/2015 | CN104319098A 叉指电容的制备方法及形成相邻的蒸镀图案的方法 Preparation interdigital capacitor and method for forming a pattern of adjacent deposition |
| 01/28/2015 | CN104313548A 一种氮化镓纳米线的制备方法 A process for producing a gallium nitride nanowires |
| 01/28/2015 | CN104313530A 一种硬质合金表面纳米涂层及其制备方法 One kind of carbide nano surface coating and its preparation method |
| 01/28/2015 | CN103114275B 一种微纳米金刚石复合涂层管材用游动芯头的制备方法 A micro nano-diamond composite coating pipe with a floating plug preparation |
| 01/28/2015 | CN103114274B 一种微小孔径金刚石涂层拉丝模的制备方法 Preparation of a tiny diamond-coated drawing die aperture |
| 01/28/2015 | CN102883841B 表面被覆切削工具 Surface-coated cutting tool |
| 01/28/2015 | CN102817012B 一种薄膜沉积装置 A thin film deposition apparatus |
| 01/28/2015 | CN102796995B 制备热解氮化硼制品的气相沉积炉及方法 Pyrolytic boron nitride article and method for producing a vapor deposition furnace |
| 01/28/2015 | CN102656665B 气相生长装置、气相生长方法、及半导体元件的制造方法 The method of producing vapor phase growth apparatus, vapor phase growth method, and a semiconductor element |
| 01/28/2015 | CN102575346B 将原子层沉积涂层涂覆到多孔非陶瓷基底上的方法 The coating is applied to the atomic layer deposition method on a porous non-ceramic substrate |
| 01/28/2015 | CN102560430B 原料供给装置及成膜装置 Raw material supply device and film forming apparatus |
| 01/28/2015 | CN102349356B 等离子体处理装置 Plasma processing apparatus |
| 01/28/2015 | CN102232125B 使用含氧前体的介电阻挡层沉积 Oxygen-containing precursor using a dielectric barrier layer is deposited |
| 01/27/2015 | US8940648 Process for producing silicon and oxide films from organoaminosilane precursors |
| 01/27/2015 | US8940646 Sequential precursor dosing in an ALD multi-station/batch reactor |
| 01/27/2015 | US8940638 Substrate wiring method and semiconductor manufacturing device |
| 01/27/2015 | US8940625 Low temperature polysilicon thin film and manufacturing method thereof |
| 01/27/2015 | US8940374 Nanolayer deposition process |
| 01/27/2015 | US8940368 Vapor deposition apparatus and vapor deposition method |
| 01/27/2015 | US8940367 Coating device and coating method |
| 01/27/2015 | US8940366 Apparatus and method for treating materials with compositions |