Patents
Sitemap › C23 - Coating metallic material; Coating material with metallic material; Chemical surface treatment; Diffusion treatment of metallic material; Coating by vacuum evaporation, by sputtering, by ion implantation or by chemical vapour deposition, in general; Inhibiting corrosion of metallic material or incrustation in general › C23C - Coating metallic material; Coating material with metallic material; Surface treatment of metallic material by diffusion into the surface, by chemical conversion or substitution; Coating by vacuum evaporation, by sputtering, by ion implantation or by chemical vapour deposition, in general › C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes
Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892)
12/2014
12/17/2014CN104213101A 形成铂薄膜的方法 Platinum thin film forming method
12/17/2014CN104213100A 加热汽化系统和加热汽化方法 Heating evaporation system and the heating evaporation method
12/17/2014CN104213099A 一种碳化硅纤维表面氧化物陶瓷涂层的制备方法 A process for producing fiber surface oxide ceramic coating of silicon carbide
12/17/2014CN104213098A 一种由片状氧化锡组成的纳米墙结构及其制备方法 Nano-wall structure and preparation method composed by a sheet of tin oxide
12/17/2014CN104213097A 铝合金的表面合金化工艺 Surface alloying aluminum
12/17/2014CN104213096A 一种含钨涂层坩埚的制备方法 A method for preparing a tungsten crucible containing coating
12/17/2014CN103060770B 一种铁包铝型复合粉体的制备方法及其产品 Preparation of an iron-clad composite powder and its products
12/17/2014CN103031543B 一种上电极及应用该上电极的等离子体加工设备 An electrode of a plasma processing apparatus and the application of the upper electrode on the
12/17/2014CN103014654B 一种AlN/ZnO/InGaN/金刚石/Si多层结构声表面波滤波器件的制备方法 Preparation method of AlN / ZnO / InGaN / diamond / Si multilayer structure SAW filter device
12/17/2014CN103014653B A1n/gaz0/自支撑金刚石膜结构的声表面波滤波器件的制备方法 A1n / gaz0 / self-supporting preparation of pieces of diamond SAW filter membrane structure
12/17/2014CN102939405B 流化床热解碳涂覆 Fluidized bed pyrolytic carbon-coated
12/17/2014CN102918180B 大面积电极上的紧密安装的陶瓷绝缘体 Ceramic insulator tightly installed on the large-area electrode
12/17/2014CN102881631B 一种半导体器件的制造方法 A method of manufacturing a semiconductor device
12/17/2014CN102751399B 采用金属基片制备垂直GaN基LED芯片的设备 Metal substrate preparing vertical GaN-based LED chip device
12/17/2014CN102738325B 金属基片垂直GaN基LED芯片及其制备方法 Metal substrate vertical GaN-based LED chip and its preparation method
12/17/2014CN102732861B 托盘及具有其的化学气相沉积设备 Tray and chemical vapor deposition apparatus having the same
12/17/2014CN102732853B 腔室装置和具有它的基片处理设备 Chamber means and having its substrate processing apparatus
12/17/2014CN102625737B 表面被覆切削工具 Surface-coated cutting tool
12/17/2014CN102612570B 涂覆的切削镶片及其制造方法 Cutting insert and method of manufacturing the coated
12/17/2014CN102597307B Cvd方法和cvd反应器 Cvd method and cvd reactor
12/17/2014CN102534568B 等离子体增强化学气相沉积设备 Plasma enhanced chemical vapor deposition equipment
12/17/2014CN102428515B 碳膜的形成方法、磁记录介质的制造方法和碳膜的形成装置 The method of forming the carbon film, a magnetic recording medium manufacturing method and the carbon film forming apparatus
12/16/2014US8912353 Organoaminosilane precursors and methods for depositing films comprising same
12/16/2014US8912238 Compositions comprising supercritical carbon dioxide and metallic compounds
12/16/2014US8912101 Method for forming Si-containing film using two precursors by ALD
12/16/2014US8912079 Compound semiconductor deposition method and apparatus
12/16/2014US8911867 Protective coating, a coated member having a protective coating as well as method for producing a protective coating
12/16/2014US8911834 Oxide compounds as a coating composition
12/16/2014US8911827 Chemical vapor deposition method using an organoplatinum compound
12/16/2014US8911826 Method of parallel shift operation of multiple reactors
12/16/2014US8911637 Plasma-enhanced substrate processing method and apparatus
12/16/2014US8911601 Deposition ring and electrostatic chuck for physical vapor deposition chamber
12/16/2014US8911590 Integrated capacitive and inductive power sources for a plasma etching chamber
12/16/2014US8911588 Methods and apparatus for selectively modifying RF current paths in a plasma processing system
12/16/2014US8911555 Method and device for coating substrates from the vapor phase
12/16/2014US8911554 System for batch processing of magnetic media
12/16/2014US8911553 Quartz showerhead for nanocure UV chamber
12/16/2014US8911151 Substrate support bushing
12/16/2014US8911060 Passivation of printhead assemblies and components therefor
12/16/2014US8910644 Method and apparatus for inducing turbulent flow of a processing chamber cleaning gas
12/16/2014US8910591 Apparatus and methods for capacitively coupled plasma vapor processing of semiconductor wafers
12/16/2014US8910590 Plasma deposition
12/16/2014US8910355 Method of manufacturing a film bulk acoustic resonator with a loading element
12/11/2014US20140363596 Rare-earth oxide based erosion resistant coatings for semiconductor application
12/11/2014US20140363575 Methods for the Deposition Of Manganese-Containing Films Using Diazabutadiene-Based Precursors
12/11/2014US20140363574 Rapid ceramic matrix composite production method
12/11/2014US20140363573 Evaporation device and evaporation method thereof
12/11/2014US20140360429 Gas barrier element for pecvd reactors
12/11/2014DE212012000256U1 Beschichteter Körper Coated body
12/10/2014CN203999906U 应用于Crius机型的石墨盘，石墨盘结构，反应腔室 Applied Crius models graphite plate, graphite plate structure, the reaction chamber
12/10/2014CN203999811U 石墨舟 Graphite boat
12/10/2014CN203999810U 基板支撑装置、高温成膜工艺腔室及基板支撑杆 The substrate support devices, heat film and substrate processing chamber strut
12/10/2014CN203999809U 等离子体薄膜沉积装置 Plasma thin film deposition apparatus
12/10/2014CN203999808U 氮气吹扫装置 Nitrogen gas purge
12/10/2014CN203999807U 一种双开门立式制备金刚石膜的设备 A two door upright diamond film preparation equipment
12/10/2014CN203999806U 一种垂直布局制备金刚石膜的多阵列热丝装置 The vertical arrangement of diamond films prepared by hot wire multi-array device
12/10/2014CN203999805U 整合物理气相沉积与化学气相沉积的连续式沉积设备 Integration of physical vapor deposition and chemical vapor deposition of continuous deposition equipment
12/10/2014CN104205320A 强化基板加热控制的有无基座式基板支座的基板处理系统 Strengthen the presence or absence of the substrate heating control board pedestal bearing substrate processing system
12/10/2014CN104205296A 半导体装置或结晶 Or crystalline semiconductor device
12/10/2014CN104204291A 用于控制基板涂布装置的基座表面温度的方法及装置 Method and apparatus for controlling a substrate coating apparatus base surface temperature
12/10/2014CN104204290A 原子层沉积方法和装置 Atomic layer deposition method and apparatus
12/10/2014CN104204289A 形成含准金属材料的沉积系统和方法 System and method for forming a deposited material containing metalloid
12/10/2014CN104204288A 用于纠正等离子体处理系统中的不对称性的方法和装置 Corrective plasma processing system asymmetry method and apparatus for
12/10/2014CN104203562A 阻气膜及阻气膜的制造方法 The gas barrier film and method for producing the gas barrier film
12/10/2014CN104202847A 一种高热阻碳晶粉及其制备方法 A high-resistance carbon crystal powder and its preparation method
12/10/2014CN104201317A 一种隔热绝缘碳泡沫铅酸电池隔板的制备方法 A method of preparing an insulating carbon foam insulation lead-acid battery separator
12/10/2014CN104201133A 回收和再利用六氟化钨的系统和方法 Recycling and reuse of tungsten hexafluoride, a system and method of
12/10/2014CN104195552A 一种在硅基底上制备高电阻变化率二氧化钒薄膜的方法 One method of vanadium dioxide film on the rate of change of high resistivity silicon substrate preparation
12/10/2014CN104195529A Lpcvd炉管及其主阀联锁装置电路 Lpcvd tube and main valve interlock circuit
12/10/2014CN104195528A 一种耦合高频振动的微型等离子增强化学气相沉积装置 One kind of high-frequency vibration of the micro-coupled plasma-enhanced chemical vapor deposition apparatus
12/10/2014CN104195527A 毛细玻璃管表面镀碳膜装置与工艺 Capillary tube plated carbon device and process
12/10/2014CN104195526A 一种能够控制碳源气流向的沉积炉 A way to control the air flow to the carbon deposition furnace
12/10/2014CN104195525A 两种气体独立均匀喷气喷淋装置 The two gases independent uniform jet sprinklers
12/10/2014CN104195524A 一种气相沉积清理行星盘的系统及其清洗方法 A gas phase deposition system and cleaning up planetary disk cleaning method
12/10/2014CN104195523A 一种等离子体增强原子层沉积铝掺杂氧化锌薄膜方法 A plasma enhanced atomic layer deposition method of aluminum-doped zinc oxide thin films
12/10/2014CN104195522A 一种高导热的玻璃纤维棉毡的制备方法 Method for preparing a high thermal conductivity of glass fiber cotton mat
12/10/2014CN104190180A 气体过滤方法 Gas filtration method
12/10/2014CN103132042B 一种可调式夹具 An adjustable clamp
12/10/2014CN103060776B 一种加热台恒温系统 A heating system thermostat sets
12/10/2014CN102985591B 真空处理装置 Vacuum processing apparatus
12/10/2014CN102912319B 液体材料气化装置 Liquid material vaporizer
12/10/2014CN102867775B 深沟槽的填充方法 The method of filling the deep trench
12/10/2014CN102719887B 一种基于氮化镓衬底的高质量氮化镓外延薄膜的生长方法 Based on high-quality gallium nitride substrate of GaN epitaxial films grown
12/10/2014CN102719804B 气体内循环型热丝cvd金刚石膜生长装置 Gas circulating hot-wire cvd diamond film growth apparatus
12/10/2014CN102628165B 一种监控薄膜沉积过程异常的方法及系统 A method of monitoring the thin film deposition process method and system anomalies
12/10/2014CN102625861B 利用受激氮-氧类进行的金属氧化物薄膜沉积的系统和方法 Utilizing stimulated nitrogen - oxygen system and method of the class of metal oxide thin film deposition
12/10/2014CN102596456B 耐崩刀性优异的表面包覆切削工具 Excellent resistance to chipping surface-coated cutting tool
12/10/2014CN102560421B 用于薄膜沉积的方法和系统 Methods and systems for thin film deposition of
12/10/2014CN102498235B 保护膜和制作该保护膜的方法 Protective film and method of making the protective film
12/10/2014CN102477547B 等离子体处理装置 Plasma processing apparatus
12/10/2014CN102439712B 热电偶及温度测量系统 Thermocouples and temperature measurement system
12/10/2014CN102420109B 一种提高mim器件电容均匀性的方法 A method for uniformly mim capacitive device to improve
12/10/2014CN102296280B 成膜方法及成膜装置 Film-forming method and film forming apparatus
12/10/2014CN102191476B 硫掺杂石墨烯薄膜的制备方法 Preparation of doped graphene films
12/10/2014CN102134707B 沉积源、具有该沉积源的沉积装置和形成薄膜的方法 The method of deposition source, the deposition apparatus having the deposition source and the film-forming
12/10/2014CN102031497B 用于薄膜光伏材料的硒化的大规模方法和熔炉系统 Selenide large-scale method and furnace systems for thin-film photovoltaic materials
12/10/2014CN101827782B 使用纳米结构连接和粘接相邻层 Use nanostructures connection and bonding of adjacent layers
12/09/2014US8907352 Photoelectric conversion element and manufacturing method thereof
12/09/2014US8907254 Heating control system, deposition device provided therewith, and temperature control method
12/09/2014US8907204 Thin film photoelectric conversion device and method for manufacturing the same
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