Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892)
02/2015
02/11/2015CN104350185A 用于沉积系统的气体注入部件及相关方法 Components and associated methods for depositing gas injection system
02/11/2015CN104350178A 表面处理方法和涂覆剂 Surface treatment method and coating agent
02/11/2015CN104350177A 树脂容器用涂敷装置 Resin container coating apparatus
02/11/2015CN104350176A 用于维持储存材料的稳定性的圆筒制备 Preparation of maintaining the stability of the cylindrical storage materials for
02/11/2015CN104350175A 含碱土金属的膜的沉积法 Alkaline earth metal-containing film deposition method of
02/11/2015CN104349893A 作为反射器的多层结构 The multilayer structure as a reflector
02/11/2015CN104347356A 一种在GaN衬底上同质外延生长的方法 A method of epitaxially grown on the GaN substrate homogeneity
02/11/2015CN104347353A 硅膜的成膜方法、薄膜的成膜方法以及截面形状控制方法 Silicon film deposition method, a thin film deposition method as well as cross-sectional shape of the control method
02/11/2015CN104342638A 等离子体气相沉积用半自动插片机 Plasma vapor deposition with a semi-automatic machine inserts
02/11/2015CN104342637A 一种原子层沉积设备 An atomic layer deposition apparatus
02/11/2015CN104342636A 一种用于容器内壁镀膜的cvd反应室装置 A cvd reaction chamber means for coating the inner wall of the container
02/11/2015CN104342635A 薄膜沉积装置及方法,以及有机发光显示装置的制造方法 Thin film deposition apparatus and method, and an organic light emitting display device manufacturing method
02/11/2015CN104342634A 形成具有钠杂质的硫属化合物半导体吸收材料的装置和方法 Forming a sodium sulfur impurities having genus apparatus and method for a compound semiconductor absorber material
02/11/2015CN104342633A 挥发性的二氢吡嗪基和二氢吡嗪金属配合物 Dihydro pyrazinyl and volatile metal complexes dihydro pyrazine
02/11/2015CN104342632A 预清洗腔室及等离子体加工设备 Pre-wash chamber and a plasma processing apparatus
02/11/2015CN104342631A 化学气相沉积炉 Chemical vapor deposition furnace
02/11/2015CN104342630A 转轴装置、托盘旋转机构及托盘传输方法 Shaft equipment, trays and tray rotation mechanism transmission method
02/11/2015CN104342616A 用于沉积的掩模、掩模组件和形成掩模组件的方法 The method for the deposition of a mask, the mask assembly and forming a mask assembly
02/11/2015CN104342157A 碱金属和钛离子共掺杂硒化锶发光薄膜、制备方法及其应用 Alkali metal and titanium ions total selenium, strontium luminescent film, preparation method and application doping
02/11/2015CN104342138A 一种硫代钒酸盐发光薄膜及其制备方法和应用 One thio vanadate luminescent film and its preparation method and application
02/11/2015CN104341447A 一种含n脒基硅化合物及其应用 A compound n Amidino containing silicon and its applications
02/11/2015CN104341355A 用于相变存储材料的氨基嘧啶Ge(Ⅱ)前质体及其制备方法 For phase-change memory material aminopyrimidines Ge (Ⅱ) proplastid its preparation method
02/11/2015CN104339749A 具有抗菌涂层的多层光学涂覆结构 Multilayer optical coating structure with antibacterial coating
02/11/2015CN103108985B 用于处理柔性基底的表面的装置 Means for processing the surface of the flexible substrate
02/11/2015CN102918178B 金属氧化膜的成膜装置、金属氧化膜的制造方法及金属氧化膜 A metal oxide film deposition apparatus, a metal oxide film manufacturing method and a metal oxide film
02/11/2015CN102597345B Cnt-特制复合材料海基结构 Cnt- special composite structure sea
02/11/2015CN102597304B Cnt特制复合材料空间基结构 Cnt special composite structure of space-based
02/11/2015CN102586869B 三维石墨烯管及其制备方法 Dimensional graphene tube and its preparation method
02/11/2015CN102134710B 成膜装置 Film forming apparatus
02/11/2015CN101826475B 掩模检查装置和方法以及虚拟图产生装置和方法 Mask inspection apparatus and method, and a virtual map generation apparatus and method
02/10/2015US8952355 Electropositive metal containing layers for semiconductor applications
02/10/2015US8952188 Group 4 metal precursors for metal-containing films
02/10/2015US8951921 Method of forming thin film poly silicon layer and method of forming thin film transistor
02/10/2015US8951919 Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
02/10/2015US8951912 Method of manufacturing semiconductor device, method of processing substrate, substrate processing apparatus and computer-readable recording medium
02/10/2015US8951903 Graded dielectric structures
02/10/2015US8951640 Covered member and process for production thereof
02/10/2015US8951615 Doping control by ALD surface functionalization
02/10/2015US8951610 Organic layer deposition apparatus
02/10/2015US8951478 Ampoule with a thermally conductive coating
02/10/2015US8951444 Gas-phase functionalization of carbon nanotubes
02/10/2015US8951385 Plasma processing apparatus and plasma processing method
02/10/2015US8951353 Manufacturing method and apparatus for semiconductor device
02/10/2015US8951352 Manufacturing apparatus for depositing a material and an electrode for use therein
02/10/2015US8951351 Wafer processing hardware for epitaxial deposition with reduced backside deposition and defects
02/10/2015US8951350 Coating methods and apparatus
02/10/2015US8951348 Single-chamber sequential curing of semiconductor wafers
02/10/2015US8951347 Film deposition apparatus
02/10/2015US8951342 Methods for using porogens for low k porous organosilica glass films
02/10/2015US8950614 Biodegradable resin container with a vacuum-evaporated film and method of forming a vacuum-evaporated film
02/10/2015US8950470 Thermal diffusion chamber control device and method
02/10/2015US8950356 Barrier-film forming apparatus, barrier-film forming method, and barrier-film coated container
02/05/2015WO2015016980A1 Gas diffuser hole design for improving edge uniformity
02/05/2015WO2015016412A1 Mos2 thin film and method for manufacturing same
02/05/2015WO2015015973A1 Method for manufacturing semiconductor device, and semiconductor device
02/05/2015WO2015015800A1 Semiconductor substrate and method for manufacturing semiconductor substrate
02/05/2015WO2015014747A1 Support for deposition of polycrystalline silicon
02/05/2015WO2015014589A1 Device for insulating and sealing electrode holders in cvd reactors
02/05/2015WO2015014562A1 Diamond coating and method for depositing such a coating
02/05/2015WO2015014411A1 Holding arrangement for substrates
02/05/2015WO2015014410A1 Holding arrangement for substrates
02/05/2015US20150039065 Pacing leads with ultrathin isolation layer by atomic layer deposition
02/05/2015US20150037975 Method and apparatus for forming silicon film
02/05/2015US20150037929 Apparatus and method for treating a substrate
02/05/2015US20150037802 Fabrication of hierarchical silica nanomembranes and uses thereof for solid phase extraction of nucleic acids
02/05/2015US20150037660 Lithium microbattery protected by a cover
02/05/2015US20150037612 Surface-coated cutting tool and method of manufacturing the same
02/05/2015US20150037516 Polycrystalline silicon rod manufacturing method
02/05/2015US20150037515 Rapid synthesis of graphene and formation of graphene structures
02/05/2015US20150037514 Method And A Device For Depositing A Film Of Material Or Otherwise Processing Or Inspecting, A Substrate As It Passes Through A Vacuum Environment Guided By A Plurality Of Opposing And Balanced Air Bearing Lands And Sealed By Differentially Pumped Grooves And Sealing Lands In A Non-Contact Manner
02/05/2015US20150037513 High rate deposition for the formation of high quality optical coatings
02/05/2015US20150037500 Device And Method For Continuous Chemical Vapour Deposition Under Atmospheric Pressure And Use Thereof
02/05/2015US20150036969 Dispersion plate for chemical vapor deposition processes to form doped films
02/05/2015US20150036132 Metal-dielectric-cnt nanowires for surface-enhanced raman spectroscopy
02/05/2015US20150034237 Roll-to-roll manufacturing processes for producing self-healing electroactive polymer devices
02/05/2015US20150034011 Chemical vapor deposition apparatus
02/05/2015US20150034008 Vapor deposition apparatus
02/05/2015DE19848025B4 Verfahren zur Oberflächenbehandlung von Werkzeugen und Werkzeuge mit behandelter Oberfläche A method of surface treatment of tools and tools with a treated surface
02/05/2015DE112013002299T5 Verfahren zum Verbessern von Korrosionsbeständigkeit und Anwendungen in elektrischen Verbindern A method for improving corrosion resistance and applications in electrical connectors
02/05/2015DE102013108411A1 Durchlauf-Substratbehandlungsanlage Pass substrate treatment plant
02/05/2015DE102013108403A1 Durchlauf-Substratbehandlungsanlage Pass substrate treatment plant
02/05/2015DE102013012717A1 Beschichtungsanlage für mindestens ein Bauteil und Verfahren zum Beschichten eines Verzahnungsteils Coating plant for at least one component and method for coating a spline
02/05/2015DE102011086399B4 Nanoskalige Oberflächenstruktur zur Verbesserung der Adhäsion sowie Verfahren zu deren Herstellung Nanoscale surface structure for improving the adhesion, as well as processes for their preparation
02/04/2015EP2832900A1 Laminated substate of silicon single crystal and group iii nitride single crystal with off angle
02/04/2015EP2832899A1 Diamond coating and method for depositing such a coating
02/04/2015EP2832896A1 Source container and vapour-deposition reactor
02/04/2015EP2832537A1 Gas-barrier film and process for producing same, and gas-barrier laminate
02/04/2015EP2831315A1 Process for producing two-dimensional nanomaterials
02/04/2015CN204138764U 改进衬底气流方向的hvpe反应器 Improved air flow direction of the substrate hvpe reactor
02/04/2015CN204138763U 三种气体隔离式单匀气室喷淋装置 Three gas-isolated single uniform chamber sprinklers
02/04/2015CN204138762U 一种hvpe的气体混合装置 One kind of gas mixing apparatus hvpe
02/04/2015CN204138761U 一种用于炉门的自动控制机构 A control mechanism for an automatic door
02/04/2015CN104335332A 半导体装置及其制造方法 Semiconductor device and manufacturing method thereof
02/04/2015CN104334775A 沉积系统的气体注入组件、包括这种组件的沉积系统和相关方法 Gas injection assembly deposition system, deposition system comprising such an assembly and related methods
02/04/2015CN104334286A 喷嘴单元以及具有该喷嘴单元的基板处理设备 Nozzle unit and the substrate processing apparatus having a nozzle unit
02/04/2015CN104332505A 一种晶体硅太阳能电池氮化硅减反射膜及其制备方法 A crystalline silicon solar cell silicon nitride anti-reflection film and method
02/04/2015CN104328391A 汽相沉积系统 Vapor deposition system
02/04/2015CN104328390A 一种GaN/金刚石膜复合片的制备方法 Preparation method of GaN / diamond film composite sheet
02/04/2015CN104328389A 石墨烯纳米网的制备方法 Preparation of nano graphene network
02/04/2015CN104328388A 一种难熔金属零件的3d打印方法及系统 A refractory metal parts of 3d printing method and system
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