| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
|---|
| 04/24/1984 | US4443931 Method of fabricating a semiconductor device with a base region having a deep portion |
| 04/24/1984 | US4443930 Manufacturing method of silicide gates and interconnects for integrated circuits |
| 04/24/1984 | CA1166363A1 Wafer tilt compensation in zone plate alignment system |
| 04/24/1984 | CA1166362A1 Method and apparatus for exposing multi-level registered patterns interchangeably between stations of a multi-station electron-beam array lithography (ebal) system |
| 04/24/1984 | CA1166361A1 Method for fabricating improved complementary metal oxide semiconductor devices |
| 04/24/1984 | CA1166360A1 Titanium dioxide rectifier |
| 04/24/1984 | CA1166359A1 Gated diode switch |
| 04/24/1984 | CA1166353A1 Electrically erasable mosfet storage device |
| 04/24/1984 | CA1166319A1 Equipment and method for annealing semiconductors using light wave energy |
| 04/24/1984 | CA1166130A1 Etchant composition and use thereof |
| 04/24/1984 | CA1166129A1 Prevention of low pressure chemical vapor deposition silicon dioxide undercutting and flaking |
| 04/24/1984 | CA1166128A1 Low pressure chemical vapor deposition of silicon dioxide with oxygen enhancement of the chlorosilane- nitrous oxide reaction |
| 04/24/1984 | CA1166061A1 Method of forming a negative resist pattern by exposing to crosslink a copolymer containing halomethyl or acrylymethyl substituted styrene units |
| 04/24/1984 | CA1166057A1 Method of forming photoresist patterns |
| 04/24/1984 | CA1165995A1 Solar cell metallizations comprising a nickel- antimony alloy |
| 04/18/1984 | EP0105802A2 Programmable read only memory |
| 04/18/1984 | EP0105711A2 Determining the position of a wafer by means of electron beams |
| 04/18/1984 | EP0105695A2 MOS/bipolar integrated circuit device and manufacturing method thereof |
| 04/18/1984 | EP0105694A2 Charged particle beam exposure apparatus |
| 04/18/1984 | EP0105685A2 Electronic circuit device |
| 04/18/1984 | EP0105661A1 Apparatus for inspecting a circuit pattern drawn on a photomask used in manufacturing large scale integrated circuits |
| 04/18/1984 | EP0105618A2 X-Ray imaging system having radiation scatter compensation and method |
| 04/18/1984 | EP0105347A1 Temperature gradient zone melting process and apparatus. |
| 04/18/1984 | EP0105324A1 OHMIC CONTACT FOR N-TYPE GaAs |
| 04/17/1984 | US4443886 Charge transfer device imager with bias charge |
| 04/17/1984 | US4443885 Charge transfer method and device for carrying out the method |
| 04/17/1984 | US4443812 High-breakdown-voltage semiconductor device |
| 04/17/1984 | US4443811 CMOS Integrated circuit device |
| 04/17/1984 | US4443808 Semiconductor device |
| 04/17/1984 | US4443718 Nonvolatile semiconductor memory with stabilized level shift circuit |
| 04/17/1984 | US4443704 Method of electron beam exposure |
| 04/17/1984 | US4443703 Method and apparatus of deflection calibration for a charged particle beam exposure apparatus |
| 04/17/1984 | US4443685 Fixture for laser scribing (of dendrite silicon cells) |
| 04/17/1984 | US4443493 Laser induced flow glass materials |
| 04/17/1984 | US4443489 Method for the formation of phosphorous-nitrogen based glasses useful for the passivation of III-V semiconductor materials |
| 04/17/1984 | US4443488 Semiconductors, multistage, thin films, extraction, coalescing |
| 04/17/1984 | US4443411 Melts, crucibles, pulling, capillaries, dies, shields, gases, supplying |
| 04/17/1984 | US4443410 Integrated circuits, thin films, cassettes |
| 04/17/1984 | US4443295 Hydrogen peroxide, lewis bases, oxidizers |
| 04/17/1984 | US4443278 Inspection of multilayer ceramic circuit modules by electrical inspection of green specimens |
| 04/17/1984 | US4443096 On machine reticle inspection device |
| 04/17/1984 | US4442967 Method of providing raised electrical contacts on electronic microcircuits |
| 04/17/1984 | US4442966 Semiconductors, metals, contactors, pads, pastes, compression, polymerization |
| 04/17/1984 | US4442591 Silicon, masking, semiconductors, channels, boron, stripping |
| 04/17/1984 | US4442589 Method for manufacturing field effect transistors |
| 04/17/1984 | CA1165932A1 Polymeric amide-ester resin heat-resistant photopolymerizable semiconductor and capacitor relief coatings |
| 04/17/1984 | CA1165903A1 Method of manufacturing a semiconductor device |
| 04/17/1984 | CA1165902A1 Method of manufacturing a semiconductor device |
| 04/17/1984 | CA1165901A1 Method of manufacturing integrated circuits by means of a multilayer mask |
| 04/17/1984 | CA1165875A1 Bipolar type static memory cell |
| 04/17/1984 | CA1165851A1 Epitaxial devices having reduced dislocation count |
| 04/17/1984 | CA1165848A1 Semiconductor laser |
| 04/17/1984 | CA1165845A1 Display device |
| 04/17/1984 | CA1165724A1 Method of producing polysilicon structures in the 1 um range on substrates containing integrated semiconductor circuits by plasma etching |
| 04/17/1984 | CA1165723A1 Selectively etched bodies |
| 04/17/1984 | CA1165669A1 Method of making monocrystalline ternary semiconductor compounds |
| 04/12/1984 | WO1984001471A1 An aluminum-metal silicide interconnect structure for integrated circuits and method of manufacture thereof |
| 04/12/1984 | WO1984001454A1 Automatically adjustable chip design method |
| 04/11/1984 | EP0105189A1 Method of producing metal electrodes of diversing thiekness for semiconductor devices, especially for power semiconductor devices such as thyristors |
| 04/11/1984 | EP0105185A1 Target body position measuring method for charged particle beam fine pattern exposure system |
| 04/10/1984 | US4442529 Power supply rejection characteristics of CMOS circuits |
| 04/10/1984 | US4442449 Binary germanium-silicon interconnect and electrode structure for integrated circuits |
| 04/10/1984 | US4442448 Logic integrated circuit device |
| 04/10/1984 | US4442447 Electrically alterable nonvolatile floating gate memory device |
| 04/10/1984 | US4442402 Photoluminescence method of testing double heterostructure wafers |
| 04/10/1984 | US4442398 Integrated circuit generator in CMOS technology |
| 04/10/1984 | US4442338 Plasma etching apparatus |
| 04/10/1984 | US4442196 Photosensitive composition |
| 04/10/1984 | US4442178 Silicon on sapphire |
| 04/10/1984 | US4442137 Maskless coating of metallurgical features of a dielectric substrate |
| 04/10/1984 | US4442067 Material for semiconductor holder in electron beam writing apparatus |
| 04/10/1984 | US4442056 Encapsulation mold with gate plate and method of using same |
| 04/10/1984 | US4441973 Containing fluorine |
| 04/10/1984 | US4441967 Square wave direct current |
| 04/10/1984 | US4441941 Method for manufacturing a semiconductor device employing element isolation using insulating materials |
| 04/10/1984 | US4441932 Process for preparing semiconductor device having active base region implanted therein using walled emitter opening and the edge of dielectric isolation zone |
| 04/10/1984 | US4441931 Method of making self-aligned guard regions for semiconductor device elements |
| 04/10/1984 | US4441853 Disc orienting device |
| 04/10/1984 | US4441250 Apparatus for registering a mask pattern in a photo-etching apparatus for semiconductor devices |
| 04/10/1984 | US4441249 Doping of polycrystalline silicon layer as it is formed |
| 04/10/1984 | US4441248 On-line inspection method and system for bonds made to electronic components |
| 04/10/1984 | US4441247 Metal-oxide-semiconductor integrated corcuits |
| 04/10/1984 | US4441246 Method of making memory cell by selective oxidation of polysilicon |
| 04/10/1984 | CA1165468A1 Solder mound formation on substrates |
| 04/10/1984 | CA1165467A1 Electron irradiation of high level transistors |
| 04/10/1984 | CA1165466A1 Method of producing relief structures for integrated semiconductor circuits |
| 04/10/1984 | CA1165464A1 Tunnel emitter upper valley transition |
| 04/10/1984 | CA1165434A2 Signal pick-up circuit |
| 04/10/1984 | CA1165072A1 Encapsulation of electronic components with a thermosetting moldable prepolymer |
| 04/04/1984 | EP0105003A1 Method of screening resin-sealed semiconductor devices |
| 04/04/1984 | EP0104922A2 Electron beam exposure system |
| 04/04/1984 | EP0104917A2 Deflection system in an electron beam exposure device |
| 04/04/1984 | EP0104916A2 Depositing a film onto a substrate including electron-beam evaporation |
| 04/04/1984 | EP0104907A2 Method of making amorphous semiconductor alloys and devices using microwave energy |
| 04/04/1984 | EP0104889A2 System for measuring carrier lifetime in a semiconductor wafer |
| 04/04/1984 | EP0104818A2 Ion implantation device |
| 04/04/1984 | EP0104765A2 Substrate structure of semiconductor device and method of manufacturing the same |
| 04/04/1984 | EP0104754A1 Metal insulator semiconductor device with source region connected to a reference voltage |
| 04/04/1984 | EP0104741A1 Process for growing crystalline material |
| 04/04/1984 | EP0104686A1 Process for making holes with small dimensions, use of this process in making field-effect transistors with a self-aligned sub-micron gate, and transistors made by that process |