Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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05/24/1984 | WO1984002036A1 Semiconductor device |
05/24/1984 | WO1984002035A1 Method of forming amorphous silicon film |
05/24/1984 | WO1984002034A1 Solid phase epitaxy and regrowth process with controlled defect density profiling for heteroepitaxial semiconductor on insulator composite substrates |
05/23/1984 | EP0109321A1 Process for passivating the surface of a semiconductor material, and use of the process in the manufacture of semiconductor devices |
05/23/1984 | EP0109193A2 X-ray lithographic system |
05/23/1984 | EP0109148A2 Substrate shield for preventing the deposition of nonhomogeneous films |
05/23/1984 | EP0109147A2 Charged particle beam lithography machine incorporating localized vacuum envelope |
05/23/1984 | EP0109082A2 Method of manufacturing a semiconductor device comprising a diffusion step |
05/23/1984 | EP0109080A1 Pick-up head for moving a sheet of material |
05/23/1984 | EP0109070A1 MOS type semiconductor device |
05/23/1984 | EP0108945A1 High voltage semiconductor devices with reduced on-resistance |
05/23/1984 | EP0108910A2 Method of forming a passivated compound semiconductor substrate |
05/23/1984 | EP0108897A1 Method for removing extraneous metal from ceramic substrates |
05/23/1984 | EP0108893A2 A method for recognizing a pellet pattern |
05/23/1984 | EP0108807A1 Wafer transfer apparatus. |
05/22/1984 | US4450579 Recognition method and apparatus |
05/22/1984 | US4450515 Bias-voltage generator |
05/22/1984 | US4450471 Semi-conductor power device assembly and method of manufacture thereof |
05/22/1984 | US4450470 Semiconductor integrated circuit device |
05/22/1984 | US4450469 Mesa type semiconductor device with guard ring |
05/22/1984 | US4450468 Gallium arsenide ISL gate with punched-through bipolar driver transistor |
05/22/1984 | US4450467 Gate turn-off thyristor with selective anode penetrating shorts |
05/22/1984 | US4450466 Semiconductor image sensor |
05/22/1984 | US4450462 GaAs Field effect transistor with a non-volatile memory |
05/22/1984 | US4450048 Method of manufacturing capacitors integrated in microelectronic structure |
05/22/1984 | US4450042 Using a mixture of bromine and a chlorine-containing compound to eliminate undercutting |
05/22/1984 | US4450041 Preferential etching of metal area treated with silicon ionizing radiation |
05/22/1984 | US4450021 Mask diffusion process for forming Zener diode or complementary field effect transistors |
05/22/1984 | US4449885 Wafer transfer system |
05/22/1984 | US4449690 Apparatus for encapsulation casting |
05/22/1984 | US4449287 Method of providing a narrow groove or slot in a substrate region, in particular a semiconductor substrate region |
05/22/1984 | US4449285 Method for producing a vertical channel transistor |
05/22/1984 | US4449284 Method of manufacturing an integrated circuit device having vertical field effect transistors |
05/22/1984 | US4449282 Assembling components such as lids to chip enclosures |
05/22/1984 | CA1167982A1 Semiconductor processing involving ion implantation |
05/22/1984 | CA1167981A1 Low capacitance self-aligned semiconductor electrode structure and method of fabrication |
05/22/1984 | CA1167979A1 Process for manufacturing multilayer ceramic chip carrier modules |
05/22/1984 | CA1167746A1 Masking portions of a substrate |
05/16/1984 | EP0108681A2 Bit erasable electrically erasable programmable read only memory |
05/16/1984 | EP0108650A2 Programmable MOS transistor |
05/16/1984 | EP0108646A2 Plastic encapsulated semiconductor power device means and method |
05/16/1984 | EP0108502A2 A plastics moulded semiconductor device and a method of producing it |
05/16/1984 | EP0108475A2 Fabrication of cleaved semiconductor lasers |
05/16/1984 | EP0108458A1 Method of etching cavities and apertures in substrates |
05/16/1984 | EP0108446A2 Polysilicon - diode - loaded memory cell |
05/16/1984 | EP0108390A1 Semiconductor memory |
05/16/1984 | EP0108314A2 Method for manufacturing multi-layered, thick film circuits |
05/16/1984 | EP0108255A1 Self-testing circuitry for a combinatorial and sequential logic circuit |
05/16/1984 | EP0108251A2 A semiconductor device comprising an electrode and/or an interconnection |
05/16/1984 | EP0108206A2 Vacuum Chamber |
05/16/1984 | EP0108204A1 Method for diffusing impurities and semiconductor devices fabricated by said method |
05/16/1984 | EP0108189A2 A method for etching polyimides |
05/16/1984 | EP0108065A1 Method for manufacturing semi-conducting devices and semi-conducting devices thus obtained. |
05/15/1984 | US4449205 Dynamic RAM with non-volatile back-up storage and method of operation thereof |
05/15/1984 | US4449037 Method and apparatus for heating semiconductor wafers |
05/15/1984 | US4448865 Shadow projection mask for ion implantation and ion beam lithography |
05/15/1984 | US4448805 Resistive links between regions to prevent arcing |
05/15/1984 | US4448801 Process for forming deposition film |
05/15/1984 | US4448800 Method for the manufacture of semiconductor device using refractory metal in a lift-off step |
05/15/1984 | US4448797 Masking techniques in chemical vapor deposition |
05/15/1984 | US4448636 Selective demetallization in integrated circuits |
05/15/1984 | US4448635 Etching in artificial gravitational field |
05/15/1984 | US4448634 Using alkali metal hypochlorite and complex-forming component |
05/15/1984 | US4448633 Passivation of III-V semiconductor surfaces by plasma nitridation |
05/15/1984 | US4448632 Method of fabricating semiconductor devices |
05/15/1984 | US4448594 Canister for volatile fuel controlling device |
05/15/1984 | US4448403 Position drive |
05/15/1984 | US4448149 Apparatus for removably mounting and supplying mechanical and electrical energy to a vacuum chamber substrate holder |
05/15/1984 | CA1167573A1 Device for epitaxial depositing layers from a liquid phase |
05/15/1984 | CA1167572A1 Semiconductor laser device |
05/15/1984 | CA1167571A1 Integrated circuit package |
05/09/1984 | EP0107931A2 Selective plating |
05/09/1984 | EP0107902A2 A method for fabricating isolation regions in semiconductor devices |
05/09/1984 | EP0107851A1 Manufacture of semiconductor devices by the planar method |
05/09/1984 | EP0107772A1 Method of measuring the electric potential on a buried solid-state substance |
05/08/1984 | US4447894 Semiconductor memory device |
05/08/1984 | US4447857 Substrate with multiple type connections |
05/08/1984 | US4447824 Planar multi-level metal process with built-in etch stop |
05/08/1984 | US4447823 SOS p--n Junction device with a thick oxide wiring insulation layer |
05/08/1984 | US4447704 Semiconductor device for driving thermal print heads |
05/08/1984 | US4447596 Method of preparing polyamide acid for processing of semiconductors |
05/08/1984 | US4447470 Forming mercury-cadmium-tellurium by closed spaced vapor phase epitaxial process upon cadmium-tellurium substrate using mercury-tellurium |
05/08/1984 | US4447469 Process for forming sulfide layers by photochemical vapor deposition |
05/08/1984 | US4447335 Thermal decomposition of cadmium ammonia thiocyanate, used in photoelectric or solar cells |
05/08/1984 | US4447291 Ion milling a hole, then wet etching |
05/08/1984 | US4447290 Using fluoro, acyclic hydrocarbon to provide better end-point detection |
05/08/1984 | US4447289 Process for the manufacture of coarsely crystalline to monocrystalline sheets of semiconductor material |
05/08/1984 | US4447276 Using controlled energy levels where dopant material is sulfur, selenium, or tellurium |
05/08/1984 | US4447272 Method for fabricating MNOS structures utilizing hydrogen ion implantation |
05/08/1984 | US4446817 Apparatus for vapor deposition of a film on a substrate |
05/08/1984 | US4446815 Apparatus for continuously depositing a layer of a solid material on the surface of a substrate brought to a high temperature |
05/08/1984 | US4446613 Integrated circuit resistor and method of fabrication |
05/08/1984 | US4446611 Layering silicon dioxide and silicon nitride on substrate, forming opening, and doping |
05/08/1984 | CA1167150A1 Semiconductor light emitting device |
05/08/1984 | CA1166937A1 Method and apparatus for performing growth of compound thin films |
05/08/1984 | CA1166885A1 Fabrication based on radiation sensitive resists including a polymer containing chloro- or bromo- alkyl aromatic groups |
05/08/1984 | CA1166879A1 Lithographic process using a processing layer containing a chalcogenide glass and a surface amount of source-metal containing material |
05/02/1984 | EP0107556A1 Process for manufacturing an electrical resistor having a polycrystalline semiconductor material, and integrated circuit device comprising this resistor |
05/02/1984 | EP0107510A2 Process gas introduction, confinement and evacuation system for glow discharge deposition apparatus |
05/02/1984 | EP0107437A1 Method of producing a semiconductor device comprising a bipolar transistor and a Schottky barrier diode |