Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
09/1984
09/19/1984EP0118709A2 Process for manufacturing MOS transistors having planar source and drain regions, short channel length and a self-aligned contact level comprising a metallic silicide
09/19/1984EP0118644A1 Cathode assembly for glow discharge deposition apparatus
09/19/1984EP0118643A1 Cathode assembly for glow discharge deposition apparatus
09/19/1984EP0118623A1 Pellicle cover for photomask
09/19/1984EP0118579A1 Thin film heterojunction photovoltaic cells and methods of making the same
09/19/1984EP0118553A1 Feedthrough structure for three dimensional microelectronic devices
09/19/1984EP0118513A1 Process for forming a cmos structure.
09/19/1984EP0118511A1 Integrated circuit contact fabrication process.
09/18/1984US4472824 Apparatus for effecting alignment and spacing control of a mask and wafer for use in X-ray lithography
09/18/1984US4472792 Semiconductor memory
09/18/1984US4472762 Electronic circuit interconnection system
09/18/1984US4472730 Semiconductor device having an improved moisture resistance
09/18/1984US4472729 Recrystallized three dimensional integrated circuit
09/18/1984US4472727 Carrier freezeout field-effect device
09/18/1984US4472633 Method and apparatus of measuring carrier distribution
09/18/1984US4472622 Apparatus for thermal treatment of semiconductors
09/18/1984US4472459 Local oxidation of silicon substrate using LPCVD silicon nitride
09/18/1984US4472458 Reduction of organometallic compounds, then electroless deposition
09/18/1984US4472456 Selective heating of insulating layer on semiconductor
09/18/1984US4472240 Method for manufacturing semiconductor device
09/18/1984US4472237 Patterns, integrated circuits
09/18/1984US4472218 Such as miniature laser chips
09/18/1984US4472212 Transferring of dopant to silicon-silicon dioxide interface
09/18/1984US4472210 Deposition of polycrystalline silicon on substrate and doping
09/18/1984US4472206 Volatility, coatings, uniformity
09/18/1984US4471716 Wafer carrier
09/18/1984US4471525 Method for manufacturing semiconductor device utilizing two-step etch and selective oxidation to form isolation regions
09/18/1984US4471524 Method for manufacturing an insulated gate field effect transistor device
09/18/1984US4471523 Self-aligned field implant for oxide-isolated CMOS FET
09/18/1984US4471522 Self-aligned metal process for field effect transistor integrated circuits using polycrystalline silicon gate electrodes
09/18/1984CA1174772A1 Polycrystalline silicon schottky diode array
09/13/1984WO1984003587A1 Inverted polycide sandwich structure and method
09/13/1984WO1984003586A1 Method for bonding electrical conductors to an insulating substrate
09/13/1984WO1984003571A1 Optical structure filter and production method thereof
09/13/1984WO1984003524A1 Method for forming a stream of atoms and utilization thereof in an atomic jet epitaxy process and device (e.j.a.)
09/12/1984EP0118336A1 High voltage MOS/bipolar power transistor apparatus
09/12/1984EP0118199A1 An apparatus for measuring carrier lifetimes in a semiconductor
09/12/1984EP0118158A2 Programmable read-only memory structure and method of fabricating such structure
09/12/1984EP0118102A2 Method for manufacturing a semiconductor device
09/12/1984EP0117980A1 Process for forming passivation film on photoelectric conversion device and the device produced thereby
09/12/1984EP0117921A2 Method of manufacturing an apparatus for reading a two-dimensional charge image with an array
09/12/1984EP0117867A1 Semiconductor device
09/11/1984US4471471 Non-volatile RAM device
09/11/1984US4471374 Single polycrystalline silicon memory cell
09/11/1984US4471373 Semiconductor integrated circuit device with memory MISFETS and thin and thick gate insulator MISFETS
09/11/1984US4471367 MESFET Using a shallow junction gate structure on GaInAs
09/11/1984US4471366 Gallium arsenide, aluminum gallium arsenide, n-junctions
09/11/1984US4471290 Substrate bias generating circuit
09/11/1984US4471005 Phosphides, multilayer, group 2 metals
09/11/1984US4471004 Method of forming refractory metal conductors of low resistivity
09/11/1984US4470875 Semiconductors
09/11/1984US4470874 Photoresists, etching, embedding
09/11/1984US4470872 Preventing side-etching by adhering an overhang mask to the sidewall with adhesive
09/11/1984US4470871 Preparation of organic layers for oxygen etching
09/11/1984US4470856 Self-compensating hydrostatic flattening of semiconductor substrates
09/11/1984US4470852 Dielectrics, wafers, multilayer
09/11/1984US4470786 Molding apparatus with retractable preform support pins
09/11/1984US4470507 Assembly tape for hermetic tape packaging semiconductor devices
09/11/1984US4470369 Apparatus for uniformly heating a substrate
09/11/1984US4470192 Method of selected area doping of compound semiconductors
09/11/1984US4470191 Process for making complementary transistors by sequential implantations using oxidation barrier masking layer
09/11/1984US4470189 Process for making polycide structures
09/11/1984CA1174285A1 Laser induced flow of integrated circuit structure materials
09/05/1984EP0117810A1 Device for checking mobile electric charges in an integrated circuit in MOS technology
09/05/1984EP0117566A2 Semiconductor device having a coupling capacitor
09/05/1984EP0117365A1 Electron beam exposure apparatus
09/05/1984EP0117348A1 Bonding leads to semiconductor devices
09/05/1984EP0117339A1 Stacked MOS transistor
09/05/1984EP0117310A1 Transistor array arrangement
09/04/1984US4470063 Copper matrix electrode having carbon fibers therein
09/04/1984US4470062 Semiconductor device having isolation regions
09/04/1984US4470061 Integrated injection logic
09/04/1984US4469963 Monolithically integrated semiconductor circuit including I2 L cells and other circuit parts
09/04/1984US4469950 Charged particle beam exposure system utilizing variable line scan
09/04/1984US4469949 Electron beam pattern transfer device and method for aligning mask and semiconductor wafer
09/04/1984US4469948 Composite concentric-gap magnetic lens
09/04/1984US4469713 Method of and photometric arrangement for measuring and controlling the thickness of optically effective coatings
09/04/1984US4469568 Anodizing, selective etching
09/04/1984US4469551 Laser beams guided by optical fibers, semiconductors
09/04/1984US4469535 Method of fabricating semiconductor integrated circuit devices
09/04/1984US4469529 Method for heating semiconductor wafer by means of application of radiated light with supplemental circumferential heating
09/04/1984US4469528 Method of manufacturing a semiconductor device of GaAs by two species ion implantation
09/04/1984US4469527 Method of making semiconductor MOSFET device by bombarding with radiation followed by beam-annealing
09/04/1984US4469414 Restrictive off-axis field optical system
09/04/1984US4468857 Method of manufacturing an integrated circuit device
09/04/1984US4468856 Method for forming an ohmic contact to a semiconductor substrate
09/04/1984US4468855 Method of making aluminum gate self-aligned FET by selective beam annealing through reflective and antireflective coatings
09/04/1984US4468853 Method of manufacturing a solar cell
09/04/1984US4468852 Process for making CMOS field-effect transistors with self-aligned guard rings utilizing special masking and ion implantation
09/04/1984CA1173930A1 Surface inspection scanning system
09/04/1984CA1173889A1 High resolution optical lithography method and apparatus having excimer laser light source and stimulated raman shifting
09/04/1984CA1173689A1 Electron beam exposed positive resist mask process
08/1984
08/30/1984WO1984003412A1 Track for floating transport of substrates
08/30/1984WO1984003391A1 Fabrication of mos integrated circuit devices
08/30/1984WO1984003389A1 Thick film resistor circuits
08/29/1984EP0117051A1 Growth of semiconductors
08/29/1984EP0117045A2 Liquid crystal flat panel display
08/29/1984EP0116940A2 Pattern transfer device and method
08/29/1984EP0116922A1 Linear vibratory conveyor
08/29/1984EP0116844A2 Copper alloys for suppressing growth of cu-al intermetallic compounds
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