Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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07/03/1984 | US4457798 Method of incorporating IC modules into identification cards |
07/03/1984 | US4457664 Wafer alignment station |
07/03/1984 | US4457661 Wafer loading apparatus |
07/03/1984 | US4457419 Conveying/positioning apparatus for sheet material |
07/03/1984 | US4457359 Apparatus for gas-assisted, solid-to-solid thermal transfer with a semiconductor wafer |
07/03/1984 | US4457066 Method of making a semiconductor device |
07/03/1984 | EP0110956A4 Method for manufacturing a semiconductor device. |
07/03/1984 | EP0110952A4 Semiconductor integrated circuit capacitor. |
07/03/1984 | CA1170345A1 Enhanced open circuit voltage in amorphous silicon photovoltaic devices |
06/27/1984 | EP0112239A1 Method of positioning an electric contact hole between two interconnection lines of an integrated circuit |
06/27/1984 | EP0112238A2 Process and apparatus for particle implantation in solids |
06/27/1984 | EP0112230A1 Method and apparatus for obtaining particle beams the density of which is spatially modulated, application to etching and to ion implantation |
06/27/1984 | EP0112168A2 Silicone-type coating resin solution and its preparation |
06/27/1984 | EP0112132A2 Method of depositing a highly conductive, highly transmissive film |
06/27/1984 | EP0112097A2 Polysilicon resistor with low thermal activation energy |
06/27/1984 | EP0112078A2 A semiconductor memory element and a method for manufacturing it |
06/27/1984 | EP0112034A2 A MIS integrated circuit device protected from static charge |
06/27/1984 | EP0111977A2 Integrated circuit and method |
06/27/1984 | EP0111957A2 Method of applying a metallic coating to a substrate |
06/27/1984 | EP0111932A2 Resin-molded semiconductor devices and a process for manufacturing the same |
06/27/1984 | EP0111868A2 A memory system for storing analog information |
06/27/1984 | EP0111823A2 Compressively stressed titanium metallurgy for contacting passivated semiconductor devices |
06/27/1984 | EP0111774A1 Method of manufacturing a minimum bird's beak recessed oxide isolation structure |
06/27/1984 | EP0111758A1 Liquid phase epitaxial growth method |
06/27/1984 | EP0111734A2 Method of manufacturing a liquid crystal display device |
06/27/1984 | EP0111707A2 Methods of forming exposure patterns |
06/27/1984 | EP0111706A1 Sidewall isolation for gate of field effect transistor and process for the formation thereof |
06/27/1984 | EP0111655A1 Processes for producing positive self-developed photo resist patterns |
06/27/1984 | EP0111651A2 Semiconductor device comprising dielectric isolation regions |
06/27/1984 | EP0111648A1 Alignment and focusing system for a scanning mask aligner |
06/27/1984 | EP0111644A2 Method of manufacturing semiconductor chip film carriers |
06/27/1984 | EP0111638A1 Process for adjusting charge carrier lifetime |
06/27/1984 | EP0111611A1 Method and apparatus for vacuum evaporation coating using an electron gun |
06/27/1984 | EP0111501A1 Process for forming sulfide layers. |
06/26/1984 | US4456977 Semiconductor memory device |
06/26/1984 | US4456920 Semiconductor device |
06/26/1984 | US4456901 Semiconductor pressure tranducer |
06/26/1984 | US4456860 X-Y Positioning subsystem electronics |
06/26/1984 | US4456675 Dry process for forming metal patterns wherein metal is deposited on a depolymerizable polymer and selectively removed |
06/26/1984 | US4456630 Etching thin film semiconductor, first with acid then basic solution, then electrodeposition of metal |
06/26/1984 | US4456522 Vapor deposition of coating layer; applying polyimide layer; etching |
06/26/1984 | US4456501 Multistep undercutting plasma ethcing a masked semiconductor wafer |
06/26/1984 | US4456490 Laser annealing of MIS devices by back surface laser treatment |
06/26/1984 | US4456489 Method of forming a shallow and high conductivity boron doped layer in silicon |
06/26/1984 | US4456488 Masked doping in oxidizing atmosphere, covering with protective insulative layer, then concurrent diffusion in base and emitter region |
06/26/1984 | US4456371 Optical projection printing threshold leveling arrangement |
06/26/1984 | US4455742 Method of making self-aligned memory MNOS-transistor |
06/26/1984 | US4455740 Method of manufacturing a self-aligned U-MOS semiconductor device |
06/26/1984 | US4455739 Process protection for individual device gates on large area MIS devices |
06/26/1984 | US4455738 Self-aligned gate method for making MESFET semiconductor |
06/26/1984 | US4455737 Process for and structure of high density VLSI circuits, having self-aligned gates and contacts for FET devices and conducting lines |
06/21/1984 | WO1984002427A1 Power transistor |
06/21/1984 | WO1984002426A1 Damped chemical vapor deposition of smooth doped films |
06/20/1984 | EP0111427A2 Cover gas control of bonding ball formation |
06/20/1984 | EP0111399A2 Microcomputer |
06/20/1984 | EP0111364A2 A semiconductor device comprising at least one Schottkytype rectifier having controllable barrier height |
06/20/1984 | EP0111347A1 MIS semiconductor device |
06/20/1984 | EP0111307A2 Semiconductor integrated circuit having a buried resistor |
06/20/1984 | EP0111227A2 Heat-insensitive support with little tension for the absorbent structure of an optical mask for X-ray lithography |
06/20/1984 | EP0111181A2 Semiconductor component with a contact hole |
06/20/1984 | EP0111152A2 Method of producing electronic devices and/or circuits on a substrate by the multilayer thick film technique, and devices and/or circuits made by this method |
06/20/1984 | EP0111129A2 Ion beam source |
06/20/1984 | EP0111128A2 UV patterning of resist materials |
06/20/1984 | EP0111099A1 A method of making complementary metal oxide semiconductor structures |
06/20/1984 | EP0111098A1 Method of making complementary metal oxide semiconductor structures |
06/20/1984 | EP0111097A1 Method for making semiconductor devices having a thick field dielectric and a self-aligned channel stopper |
06/20/1984 | EP0111086A2 Process for making sub-micrometric structures and use of this process in making deep dielectric isolation regions with a sub-micrometric width in a semiconductor body |
06/20/1984 | EP0111085A2 Ion implantation process for compound semiconductor |
06/20/1984 | EP0111056A1 Cascoded bistable circuit for level sensitive scan design |
06/20/1984 | EP0111053A2 On-chip monitor |
06/20/1984 | EP0110956A1 Method for manufacturing a semiconductor device |
06/20/1984 | EP0110952A1 Semiconductor integrated circuit capacitor. |
06/20/1984 | EP0110882A1 Maskless growth of patterned films |
06/19/1984 | US4455666 Compensation of 1st order transfer inefficiency effect in a C.T.D. |
06/19/1984 | US4455628 Substrate bias generating circuit |
06/19/1984 | US4455568 Capacitors, dielectrics |
06/19/1984 | US4455567 Polycrystalline semiconductor resistor having a noise reducing field plate |
06/19/1984 | US4455564 Field effect transistor with a high cut-off frequency |
06/19/1984 | US4455501 Precision rotation mechanism |
06/19/1984 | US4455495 Programmable semiconductor integrated circuitry including a programming semiconductor element |
06/19/1984 | US4455351 Preparation of photodiodes |
06/19/1984 | US4455325 Method of inducing flow or densification of phosphosilicate glass for integrated circuits |
06/19/1984 | US4455194 Fusion, etching, multilayer |
06/19/1984 | US4455193 Process for producing the field oxide of an integrated circuit |
06/19/1984 | US4454648 Method of making integrated MNOS and CMOS devices in a bulk silicon wafer |
06/19/1984 | US4454647 Isolation for high density integrated circuits |
06/19/1984 | US4454646 Isolation for high density integrated circuits |
06/19/1984 | EP0051632A4 Semiconductor integrated circuits. |
06/19/1984 | CA1169587A1 Gas etching method of manufacturing of semiconductor device |
06/19/1984 | CA1169586A1 Semi-conductor device with schottky barrier silicide contacts and method therefor |
06/19/1984 | CA1169585A1 Self-aligned metal process for field effect transistor integrated circuits |
06/19/1984 | CA1169584A1 Automatic circuit identifier |
06/19/1984 | CA1169582A1 Pinned substrate apparatus |
06/19/1984 | CA1169557A1 High density v-mos memory array |
06/19/1984 | CA1169556A1 Storage system having bilateral field effect transistor personalization |
06/13/1984 | EP0110773A2 Control of substrate injection in lateral bipolar transistors |
06/13/1984 | EP0110656A2 Semiconductor device and method of manufacturing the same |
06/13/1984 | EP0110643A2 Microcomputer |
06/13/1984 | EP0110642A2 Microcomputer |
06/13/1984 | EP0110635A1 Wire bonding |