| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
|---|
| 01/17/1984 | US4426407 Process for producing thin-film transistors on an insulating substrate |
| 01/17/1984 | US4426341 Transfer molding method and transfer molding machine |
| 01/17/1984 | US4426274 Reactive ion etching apparatus with interlaced perforated anode |
| 01/17/1984 | US4426264 Method and means for controlling sputtering apparatus |
| 01/17/1984 | US4426253 High speed etching of polyimide film |
| 01/17/1984 | US4426249 Composition and thickness variation in dielectric layers |
| 01/17/1984 | US4426246 Plasma pretreatment with BCl3 to remove passivation formed by fluorine-etch |
| 01/17/1984 | US4426237 Volatile metal oxide suppression in molecular beam epitaxy systems |
| 01/17/1984 | US4426234 Method of forming reproducible impurity zone of gallium or aluminum in a wafer by implanting through composite layers and diffusion annealing |
| 01/17/1984 | US4425700 Patterning single crystal silicon layers, forming metal film, annealing to form silicides |
| 01/17/1984 | CA1160762A1 Liquid phase epitaxy method and apparatus |
| 01/17/1984 | CA1160761A1 Fabrication of microminiature devices using plasma etching of silicon and resultant products |
| 01/17/1984 | CA1160760A1 Field-effect capacitance |
| 01/17/1984 | CA1160759A1 High-selectivity plasma-assisted etching of resist- masked layer |
| 01/12/1984 | EP0086816A4 Plasma etching apparatus and method including end point detection. |
| 01/11/1984 | EP0098191A1 Photosensor with anti-blooming control |
| 01/11/1984 | EP0098177A2 Scanning electron-beam exposure system |
| 01/11/1984 | EP0098176A2 The packaging of semiconductor chips |
| 01/11/1984 | EP0098175A2 Pressure contact type semiconductor device |
| 01/11/1984 | EP0098167A2 A field-effect semiconductor device |
| 01/11/1984 | EP0098165A2 Semiconductor memory device |
| 01/11/1984 | EP0098163A2 Gate-array chip |
| 01/11/1984 | EP0098156A2 Dynamic semiconductor memory device |
| 01/11/1984 | EP0098111A2 Vertical IGFET device and method for fabricating same |
| 01/11/1984 | EP0098079A2 Semiconductor memory device with redundancy decoder circuit |
| 01/11/1984 | EP0098067A2 Method for producing multilayered glass-ceramic structure with copper-based conductors therein |
| 01/11/1984 | EP0097983A1 Series/parallel/series shift register memory comprising redundant parallel-connected storage registers, and display apparatus comprising a picture memory thus organized |
| 01/11/1984 | EP0097944A2 Method for directly bonding ceramic and metal members and laminated body of the same |
| 01/11/1984 | EP0097920A2 Dynamic reference potential generating circuit arrangement |
| 01/11/1984 | EP0097918A1 Semiconductor device and method of making the same |
| 01/11/1984 | EP0097903A2 Method of electron beam exposure |
| 01/11/1984 | EP0097889A2 Driver circuit with means for reducing self-induced switching noise |
| 01/11/1984 | EP0097866A2 Method of fabricating a semiconductor device with a base region having a deep portion |
| 01/11/1984 | EP0097848A1 Method for manufacturing semiconductor device |
| 01/11/1984 | EP0097837A2 Charge transfer device having improved electrodes |
| 01/11/1984 | EP0097831A2 Optical projection systems and methods of producing optical images |
| 01/11/1984 | EP0097830A2 One device field effect transistor random access memory |
| 01/11/1984 | EP0097819A1 Photo deposition of metals onto substrates |
| 01/11/1984 | EP0097796A2 Process and apparatus for unsoldering solder bonded semiconductor devices |
| 01/11/1984 | EP0097789A2 Method of filling trenches in semiconductor substrates with silicon |
| 01/11/1984 | EP0097772A2 Structure comprising a monocrystalline substrate supporting a device layer of semiconductor material |
| 01/11/1984 | EP0097764A1 X-ray lithographic mask |
| 01/11/1984 | EP0097703A1 Process for forming a cmos integrated circuit structure |
| 01/11/1984 | EP0097694A1 Process for making inorganic oxide fibers |
| 01/10/1984 | US4425632 Nonvolatile semiconductor memory device |
| 01/10/1984 | US4425631 Non-volatile programmable integrated semiconductor memory cell |
| 01/10/1984 | US4425575 Base for encapsulating components with coplanar electrodes |
| 01/10/1984 | US4425574 Buried injector memory cell formed from vertical complementary bipolar transistor circuits and method of fabrication therefor |
| 01/10/1984 | US4425573 Metal-semiconductor-field effect transistor (MESFET) with lightly doped drain contact region for higher voltage breakdown |
| 01/10/1984 | US4425508 Electron beam lithographic apparatus |
| 01/10/1984 | US4425379 Metal, silicide strips |
| 01/10/1984 | US4425315 Metal catalyst |
| 01/10/1984 | US4425196 In semiconductor apertures |
| 01/10/1984 | US4425195 Coating with metal layers |
| 01/10/1984 | US4425194 Photo-voltaic power generating means and methods |
| 01/10/1984 | US4425183 Etching at different rates |
| 01/10/1984 | US4425076 Process and apparatus for automatic positioning of a substrate on a worktable |
| 01/10/1984 | US4425075 Wafer aligners |
| 01/10/1984 | US4424621 Oxidation, semiconductors, dielectrics |
| 01/10/1984 | EP0079931A4 Focused ion beam microfabrication column. |
| 01/10/1984 | CA1160363A1 Method for achieving ideal impurity base profile in a transistor |
| 01/10/1984 | CA1160362A1 Self-aligned buried contact and method of making |
| 01/10/1984 | CA1160360A1 Gain-controlled amplifier using a controllable alternating-current resistance |
| 01/10/1984 | CA1160359A1 Reducing the reverse recovery charge of thyristors by nuclear irradiation |
| 01/10/1984 | CA1160343A1 Dummy cell arrangement for an mos memory |
| 01/10/1984 | CA1160179A1 Glow discharge deposition of films from disilane or digermane gas |
| 01/04/1984 | EP0097595A2 Static RAM cell |
| 01/04/1984 | EP0097535A2 Crossed-field velocity filter and ion-beam processing system |
| 01/04/1984 | EP0097533A2 A method of manufacturing a MIS type semiconductor device |
| 01/04/1984 | EP0097473A1 Evaluating the thickness of a layer or determining change in thermal characteristics with depth by thermal wave detection |
| 01/04/1984 | EP0097442A2 Lateral bi-directional notch fet |
| 01/04/1984 | EP0097417A2 Electron beam lithography |
| 01/04/1984 | EP0097380A2 A system for positioning a utilization device |
| 01/04/1984 | EP0097379A2 Method for manufacturing semiconductor devices |
| 01/04/1984 | EP0097375A1 Three-dimensional semiconductor device |
| 01/04/1984 | EP0097338A2 Reference voltage generating device |
| 01/04/1984 | EP0097326A1 Semiconductor device having a well structure |
| 01/04/1984 | EP0097227A2 Screenable and strippable solder mask composition and process for the preparation of a strippable solder mask |
| 01/04/1984 | EP0097148A1 Improvements in or relating to wafer scale integrated circuits. |
| 01/04/1984 | EP0097147A1 Improvement in and relating to the manufacture of wafer scale integrated circuits. |
| 01/04/1984 | EP0097146A1 Improvements in or relating to wafer-scale integrated circuits. |
| 01/03/1984 | US4424579 Mask programmable read-only memory stacked above a semiconductor substrate |
| 01/03/1984 | US4424578 Bipolar prom |
| 01/03/1984 | US4424526 Structure for collection of ionization-induced excess minority carriers in a semiconductor substrate and method for the fabrication thereof |
| 01/03/1984 | US4424461 Semiconductor integrated circuit providing temperature compensation |
| 01/03/1984 | US4424450 Hybrid moving stage and rastered electron beam lithography system employing approximate correction circuit |
| 01/03/1984 | US4424193 Constituent members of a semiconductor element-manufacturing apparatus and a reaction furnace for making said constituent members |
| 01/03/1984 | US4424104 Single axis combined ion and vapor source |
| 01/03/1984 | US4424102 Reactor for reactive ion etching and etching method |
| 01/03/1984 | US4424101 Method of depositing doped refractory metal silicides using DC magnetron/RF diode mode co-sputtering techniques |
| 01/03/1984 | US4423959 Positioning apparatus |
| 01/03/1984 | US4423701 Glow discharge deposition apparatus including a non-horizontally disposed cathode |
| 01/03/1984 | US4423547 Method for forming dense multilevel interconnection metallurgy for semiconductor devices |
| 01/03/1984 | CA1159967A1 Method for manufacture of integrated semiconductor circuits, in particular ccd-circuits, with self-adjusting, nonoverlapping polysilicon electrodes |
| 01/03/1984 | CA1159966A1 Process of forming recessed dielectric regions in a monocrystalline silicon substrate |
| 01/03/1984 | CA1159956A1 A-to-d converter of the successive-approximation type |
| 01/03/1984 | CA1159953A1 V-mos device with self-aligned multiple electrodes |
| 01/03/1984 | CA1159917A1 Capacitor structures with dual dielectrics |
| 01/03/1984 | CA1159790A1 Method for locally enhancing electroplating rates |
| 12/28/1983 | EP0097067A1 Mesa-type semiconductor structure having a vertical transistor in anti-parallel association with a diode |