Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
12/1983
12/06/1983US4419561 Metal wire cathode for electron beam apparatus
12/06/1983US4419385 Low temperature process for depositing an oxide dielectric layer on a conductive surface and multilayer structures formed thereby
12/06/1983US4419203 Apparatus and method for neutralizing ion beams
12/06/1983US4419201 Apparatus and method for plasma-assisted etching of wafers
12/06/1983US4419182 Integrated circuits
12/06/1983US4419179 Method of vapor phase growth
12/06/1983US4419150 Method of forming lateral bipolar transistors
12/06/1983US4419142 Method of forming dielectric isolation of device regions
12/06/1983US4418858 Deep bonding methods and apparatus
12/06/1983US4418857 High melting point process for Au:Sn:80:20 brazing alloy for chip carriers
12/06/1983US4418646 Load lock valve
12/06/1983US4418639 Apparatus for treating semiconductor wafers
12/06/1983US4418470 Method for fabricating silicon-on-sapphire monolithic microwave integrated circuits
12/06/1983US4418469 Method of simultaneously forming buried resistors and bipolar transistors by ion implantation
12/06/1983US4418468 Process for fabricating a logic structure utilizing polycrystalline silicon Schottky diodes
12/06/1983US4418467 Semiconductor wafer with alignment marks and method for manufacturing semiconductor device
12/06/1983CA1158366A1 Semiconductor device of the high frequency field effect transistor type and charge coupled device using such a semiconductor
12/06/1983CA1158109A1 Coating of semiconductor wafers and apparatus therefor
11/1983
11/30/1983EP0095411A2 Bipolar memory cell
11/30/1983EP0095388A2 Positive-type photoresist compositions
11/30/1983EP0095372A2 Optimum surface contour for conductive heat transfer with a thin flexible workpiece
11/30/1983EP0095371A2 Missing or broken wafer sensor
11/30/1983EP0095370A2 Wafer orientation system
11/30/1983EP0095369A2 Air lock vacuum pumping methods and apparatus
11/30/1983EP0095368A2 Wafer transfer system
11/30/1983EP0095367A2 Rapid pumpdown for high vacuum processing
11/30/1983EP0095366A2 Compact plug connectable ion source
11/30/1983EP0095328A2 Method for manufacturing semiconductor device by controlling thickness of insulating film at peripheral portion of element formation region
11/30/1983EP0095223A2 A lead frame
11/30/1983EP0095212A2 Method of forming a resist mask resistant to plasma etching
11/30/1983EP0095200A2 Plasma reactor removeable insert
11/30/1983EP0095172A2 Chemical etching method
11/30/1983EP0095094A2 Photomask with corrected white defects
11/30/1983EP0095048A2 Oligomer coated electronic circuit component and method of coating
11/29/1983US4418096 Process for preparing layers of Hg1-x Cdx Te
11/29/1983US4418094 Vertical-etch direct moat isolation process
11/29/1983US4417948 Self developing, photoetching of polyesters by far UV radiation
11/29/1983US4417947 Edge profile control during patterning of silicon by dry etching with CCl4 -O2 mixtures
11/29/1983US4417946 Method of making mask for structuring surface areas
11/29/1983US4417945 Apparatus for chemical etching of a wafer material
11/29/1983US4417943 Crucible rotation speed
11/29/1983US4417770 High vacuum compatible air bearing stage
11/29/1983US4417387 Gold metallization in semiconductor devices
11/29/1983US4417386 Method for mounting a semiconductor device in a housing
11/29/1983US4417385 Processes for manufacturing insulated-gate semiconductor devices with integral shorts
11/29/1983CA1157964A1 Self-aligned mos fabrication
11/29/1983CA1157963A1 Silicon-based semiconductor devices
11/29/1983CA1157962A1 Method of growing a doped iii-v alloy layer by molecular beam epitaxy
11/29/1983CA1157952A1 Chip topography for integrated circuit communication controller
11/29/1983CA1157951A1 Monolithic static memory cell
11/29/1983CA1157914A1 Methods and apparatus for improving an rf excited reactive gas plasma
11/23/1983EP0094891A2 Method of fabricating a vertical power MOSFET structure
11/23/1983EP0094869A1 Encapsulating housing for a microelectronic circuit with high heat dissipation, and its manufacturing method
11/23/1983EP0094716A1 Process for connecting a semiconductor to elements of a support, particularly of a portable card
11/23/1983EP0094711A1 Method of manufacturing finely structured metal patterns on metal or semiconductor surfaces
11/23/1983EP0094559A1 Method of manufacturing integrated MOS field effect transistors with an additional interconnection level consisting of metal silicides
11/23/1983EP0094528A2 Process for producing double-layer structures consisting of metal silicide and polysilicium on substrates containing integrated circuits by reactive ion etching
11/23/1983EP0094501A2 Methods of inspecting pattern masks
11/23/1983EP0094482A2 Fabrication process for a shallow emitter, narrow intrinsic base transistor
11/23/1983EP0094426A1 Bandgap control in amorphous semiconductors.
11/23/1983EP0019003B1 Method of manufacturing semiconductor laser devices
11/22/1983US4417347 Semiconductor processor incorporating blackbody radiation source with constant planar energy flux
11/22/1983US4417323 Bubble memory conductor pattern with heat sink
11/22/1983US4417266 Power and ground plane structure for chip carrier
11/22/1983US4417264 Electrically alterable, nonvolatile floating gate memory device
11/22/1983US4417263 Semiconductor device
11/22/1983US4417203 System for contactless electrical property testing of multi-layer ceramics
11/22/1983US4417149 Apparatus for detecting and measuring defects
11/22/1983US4417145 Apparatus for controlling magnetic field intensity
11/22/1983US4416952 Passivation, dielectrics, optical absorbers
11/22/1983US4416760 Apparatus for asymmetrically contouring the thickness of sputter coated layers
11/22/1983US4416755 Apparatus and method for producing semiconducting films
11/22/1983US4416708 Controlling doping across emitter area with masking pattern
11/22/1983US4416055 Method of fabricating a monolithic integrated circuit structure
11/22/1983US4416054 Method of batch-fabricating flip-chip bonded dual integrated circuit arrays
11/22/1983US4416051 Restoration of high infrared sensitivity in extrinsic silicon detectors
11/22/1983US4416050 Method of fabrication of dielectrically isolated CMOS devices
11/22/1983US4416049 Semiconductor integrated circuit with vertical implanted polycrystalline silicon resistor
11/22/1983CA1157576A1 Open tube aluminum oxide disc diffusion
11/22/1983CA1157575A1 Reducing charging effects in charged-particle-beam lithography
11/22/1983CA1157574A1 Cmos p-well selective implant method
11/22/1983CA1157573A1 Bipolar transistors
11/16/1983EP0094302A2 A method of removing impurities from semiconductor wafers
11/16/1983EP0094247A1 A method of hardening resist material
11/16/1983EP0094213A1 A balanced rotary saw blade assembly and a method for balancing the same
11/16/1983EP0094145A2 High gain thyristor switching circuit
11/16/1983EP0094143A1 High voltage circuits in low voltage CMOS process
11/16/1983EP0094129A2 Semiconductor devices comprising unipolar hot-carrier transistors and methods of manufacturing the same
11/16/1983EP0094041A1 Reduction projection aligner system
11/16/1983EP0093981A1 Method of producing a single-crystal silicon film
11/16/1983EP0093971A2 Semiconductor device having an interstitial transition element layer and method of manufacturing the same
11/16/1983EP0093868A2 Electron beam apparatus
11/16/1983EP0093848A2 Semiconductor device fabrication process utilizing an added annealing step
11/16/1983EP0093831A2 Neutralised low energy ion beam generator, method of producing a neutralised low energy ion beam and method of producing a neutralised high energy ion beam
11/16/1983EP0093818A1 Integrated monolithic circuit with integrated capacitors
11/16/1983EP0093786A1 Method of making a monolithic integrated circuit with at least one isolated gate field effect transistor and one bipolar transistor
11/15/1983US4415955 Irradiation apparatus utilizing linear radiation sources
11/15/1983US4415916 For charged particle spectroscopy; overvoltage protection; durability
11/15/1983US4415851 System for contactless testing of multi-layer ceramics
11/15/1983US4415816 Monolithically integrated circuit for the production of long pulses