| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 02/28/1984 | US4434036 Method and apparatus for doping semiconductor material |
| 02/28/1984 | US4434013 Method of making a self-aligned Schottky metal semi-conductor field effect transistor with buried source and drain |
| 02/28/1984 | US4433951 Modular loadlock |
| 02/28/1984 | US4433911 Method of evaluating measure precision of patterns and photomask therefor |
| 02/28/1984 | US4433835 Wafer chuck with wafer cleaning feature |
| 02/28/1984 | US4433471 Method for the formation of high density memory cells using ion implantation techniques |
| 02/28/1984 | US4433470 Method for manufacturing semiconductor device utilizing selective etching and diffusion |
| 02/28/1984 | US4433469 Method of forming a self aligned aluminum polycrystalline silicon line |
| 02/28/1984 | US4433468 Method for making semiconductor device having improved thermal stress characteristics |
| 02/28/1984 | CA1163020A1 High voltage semiconductor device having improvements to the dv/dt capability and plasma spreading |
| 02/28/1984 | CA1162797A1 Semiconductor device and method for producing same |
| 02/22/1984 | EP0101374A2 Semiconductor laser substrate and process for its production |
| 02/22/1984 | EP0101299A1 Corrosion resistant aluminum electronic material |
| 02/22/1984 | EP0101165A2 Developer for use in forming a polyimide pattern |
| 02/22/1984 | EP0101107A2 Method of testing a semiconductor memory array |
| 02/22/1984 | EP0101049A1 Device for monitoring the thickness of thin, hardly absorbing films |
| 02/22/1984 | EP0101000A2 Integrated semiconductor circuit, comprising bipolar and MOS transistors on the same chip, and method of making the same |
| 02/22/1984 | EP0100999A2 Integrated semiconductor circuit comprising bipolar elements, and schottkydiodes so as method of producing the same |
| 02/22/1984 | EP0100897A2 Method for contacting a pn junction region |
| 02/22/1984 | EP0100837A2 Method of producing encapsulated semiconductor components |
| 02/22/1984 | EP0100817A2 A hermetically sealed casing of an electrical device and process of manufacturing |
| 02/21/1984 | US4433384 Pattern data handling system for an electron beam exposure system |
| 02/21/1984 | US4433283 Band gap regulator circuit |
| 02/21/1984 | US4433246 Blackbody radiation source for producing constant planar energy flux |
| 02/21/1984 | US4433243 Chrysene, triphenylene, p-terphenyl, heating, dissolving, 1,2,4-trichlorobenzene, precipitation, heptane |
| 02/21/1984 | US4433228 Microwave plasma source |
| 02/21/1984 | US4433008 Doped-oxide diffusion of phosphorus using borophosphosilicate glass |
| 02/21/1984 | US4433006 Process for oxidizing semiconducting compounds, especially gallium arsenide |
| 02/21/1984 | US4433004 Semiconductor device and a method for manufacturing the same |
| 02/21/1984 | US4432809 Method for reducing oxygen precipitation in silicon wafers |
| 02/21/1984 | US4432635 Temperature-controlled support for semiconductor wafer |
| 02/21/1984 | US4432133 Method of producing a field effect transistor |
| 02/21/1984 | US4432132 Formation of sidewall oxide layers by reactive oxygen ion etching to define submicron features |
| 02/21/1984 | US4432131 Method for manufacturing display device |
| 02/21/1984 | CA1162657A1 Method of fabricating a diode bridge rectifier in monolithic integrated circuit structure |
| 02/21/1984 | CA1162392A1 I.c. chip mounting assembly and a method of manufacturing such assembly |
| 02/15/1984 | EP0100736A2 Structure and process for lift-off wafer processing |
| 02/15/1984 | EP0100735A2 Lift-off process for fabricating self-aligned contacts |
| 02/15/1984 | EP0100677A2 Semiconductor devices including lateral-type transistors |
| 02/15/1984 | EP0100676A2 Resistors in semiconductor devices |
| 02/15/1984 | EP0100634A2 Method and apparatus for handling a charged particle beam |
| 02/15/1984 | EP0100611A1 Reduced capacitance electrode assembly |
| 02/15/1984 | EP0100574A1 Slot transfer molding means and methods |
| 02/15/1984 | EP0100572A2 Electrically erasable PROM-cell |
| 02/15/1984 | EP0100571A2 Low resistance buried power bus for integrated circuits |
| 02/15/1984 | EP0100529A1 High speed field-effect transistor employing heterojunction |
| 02/15/1984 | EP0100526A2 Apparatus for effecting alignment and spacing control of a mask and wafer for use in X-ray lithography |
| 02/15/1984 | EP0100454A1 Semiconductor device having a conductive layer consisting of a high-melting point metal silicide and a method for manufacturing such a semiconductor device |
| 02/15/1984 | EP0100453A1 Method for growing a GaAs single crystal by pulling from GaAs melt |
| 02/15/1984 | EP0100396A1 Determination of true electrical channel length of surface FET |
| 02/15/1984 | EP0100318A1 Decontamination method and apparatus for semiconductor wafer handling equipment |
| 02/14/1984 | US4432091 Semiconductor laser device |
| 02/14/1984 | US4432075 Electrically programmable non-volatile memory |
| 02/14/1984 | US4432074 Process for the operation of a CID arrangement |
| 02/14/1984 | US4432073 Semiconductor memory device |
| 02/14/1984 | US4432072 Non-volatile dynamic RAM cell |
| 02/14/1984 | US4432035 Oxidation of transition metal-silicon alloy |
| 02/14/1984 | US4432008 Gold-doped IC resistor region |
| 02/14/1984 | US4432006 Semiconductor memory device |
| 02/14/1984 | US4431967 Method of mounting a semiconductor element for analyzing failures thereon |
| 02/14/1984 | US4431928 Symmetrical programmable logic array |
| 02/14/1984 | US4431900 Selectively heating |
| 02/14/1984 | US4431898 Of semiconductor devices |
| 02/14/1984 | US4431685 Decreasing plated metal defects |
| 02/14/1984 | US4431478 Etching agent for polyimide type resins and process for etching polyimide type resins with the same |
| 02/14/1984 | US4431477 Multilayer integrated circuits |
| 02/14/1984 | US4431473 RIE Apparatus utilizing a shielded magnetron to enhance etching |
| 02/14/1984 | US4431460 Two-step annealing |
| 02/14/1984 | US4431459 Fabrication of MOSFETs by laser annealing through anti-reflective coating |
| 02/14/1984 | US4431361 Methods of and apparatus for transferring articles between carrier members |
| 02/14/1984 | US4431305 High density DC stable memory cell |
| 02/14/1984 | US4431304 Apparatus for the projection copying of mask patterns on a workpiece |
| 02/14/1984 | US4430959 Semiconductor vapor phase growing apparatus |
| 02/14/1984 | US4430793 Method of manufacturing a semiconductor device utilizing selective introduction of a dopant thru a deposited semiconductor contact layer |
| 02/14/1984 | US4430792 Minimal mask process for manufacturing insulated-gate semiconductor devices with integral shorts |
| 02/14/1984 | US4430791 Sub-micrometer channel length field effect transistor process |
| 02/14/1984 | CA1162327A2 Diode and eeprom device using same |
| 02/14/1984 | CA1162326A1 Forming impurity regions in semiconductor bodies by high energy ion irradiation, and semiconductor devices made thereby |
| 02/14/1984 | CA1162283A1 Semiconductor devices having improved low-resistance contacts to p-type cdte, and method of preparation |
| 02/09/1984 | EP0077813A4 Low resistivity composite metallization for semiconductor devices and method therefor. |
| 02/08/1984 | EP0100251A1 Process for reducing a layer compound on a substrate and application of the process to the manufacture of a field-effect semiconductor structure |
| 02/08/1984 | EP0100232A2 Substrate for semiconductor apparatus |
| 02/08/1984 | EP0100213A1 Gallium arsenide VLSI chip |
| 02/08/1984 | EP0100206A1 Apparatus for treating an article in a vacuum chamber |
| 02/08/1984 | EP0100166A2 Semiconductor device including a connection structure |
| 02/08/1984 | EP0100136A1 Thyristor with a self-protection function for breakover turn-on-failure |
| 02/08/1984 | EP0100100A2 Semiconductor device with an improved bonding section |
| 02/08/1984 | EP0099984A1 Electrically conductive pyrrole copolymers and process for their preparation |
| 02/08/1984 | EP0099983A2 Semiconductor memory device |
| 02/08/1984 | EP0099931A1 Shift register |
| 02/08/1984 | EP0099897A1 Darlington transistor circuit. |
| 02/08/1984 | EP0099878A1 Method for reducing oxygen precipitation in silicon wafers. |
| 02/07/1984 | US4430672 Photosensitive device read by charge transfer |
| 02/07/1984 | US4430663 Prevention of surface channels in silicon semiconductor devices |
| 02/07/1984 | US4430623 Monolithic amplifier comprising a power division and recombination system grouping a plurality of transistors |
| 02/07/1984 | US4430581 Semiconductor substrate bias circuit |
| 02/07/1984 | US4430571 Method and apparatus for exposing multi-level registered patterns interchangeably between stations of a multi-station electron-beam array lithography (EBAL) system |
| 02/07/1984 | US4430547 Cleaning device for a plasma etching system |
| 02/07/1984 | US4430365 Ceramics, integrated circuits, semiconductors, masking, etching, dielectrics |
| 02/07/1984 | US4430364 Monovalent aluminum halide |