Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
08/1984
08/29/1984EP0116800A1 Excitable piezoelectric epitaxial structure and electronic device for the generation of surface acoustic waves therein
08/29/1984EP0116789A1 Method of producing a semiconductor device having isolation regions between elements
08/29/1984EP0116762A1 Reforming digital signals in integrated circuits
08/29/1984EP0116702A2 Method for forming polycrystalline silicon resistors having reproducible and controllable resistivities
08/29/1984EP0116654A1 Method of making bipolar planar transistors
08/29/1984EP0116643A1 Process for forming an integrated circuit capacitor.
08/29/1984EP0116612A1 Apparatus for processing of substrates
08/28/1984USRE31652 Method of producing a semiconductor device
08/28/1984US4468799 Radiation lithography mask and method of manufacturing same
08/28/1984US4468684 High-density charge-coupled devices with complementary adjacent channels
08/28/1984US4468683 High power field effect transistor
08/28/1984US4468682 Self-aligned high-frequency static induction transistor
08/28/1984US4468565 Automatic focus and deflection correction in E-beam system using optical target height measurements
08/28/1984US4468447 Photosensitive bisazide composition for dry development
08/28/1984US4468414 Dielectric isolation fabrication for laser trimming
08/28/1984US4468411 Method for providing alpha particle protection for an integrated circuit die
08/28/1984US4468308 Pulse heating of metal and silicon-for semiconductors
08/28/1984US4468285 Plasma etch process for single-crystal silicon with improved selectivity to silicon dioxide
08/28/1984US4468284 Process for etching an aluminum-copper alloy
08/28/1984US4468260 Method for diffusing dopant atoms
08/28/1984US4468259 Uniform wafer heating by controlling light source and circumferential heating of wafer
08/28/1984US4468195 Thermal treatment apparatus
08/28/1984US4467522 Process for manufacturing plastic containers incorporating a heat disperser for integrated circuits
08/28/1984US4467521 Selective epitaxial growth of gallium arsenide with selective orientation
08/28/1984US4467520 Method of manufacturing mask type read only memory
08/28/1984US4467519 Process for fabricating polycrystalline silicon film resistors
08/28/1984US4467518 Process for fabrication of stacked, complementary MOS field effect transistor circuits
08/28/1984CA1173568A1 Semiconductor device
08/28/1984CA1173520A1 Circuit arrangement for discharging a capacity
08/28/1984CA1173502A1 Integrated circuit for generating a reference voltage
08/28/1984CA1173416A1 Precision lamp positioner
08/22/1984EP0116333A2 Dynamic random access semiconductor memory (DRAM) and method of manufacturing the same
08/22/1984EP0116332A2 Integrated semiconductor having bipolar transistor structures, and method of making the same
08/22/1984EP0116317A2 Method for producing a semiconductor device comprising an oxidation step
08/22/1984EP0116119A2 Substrate wiring patterns for mounting integrated-circuit chips
08/22/1984EP0116117A2 A method of establishing electrical connections at a semiconductor device
08/21/1984US4467450 Random access MOS memory cell using double level polysilicon
08/21/1984US4467449 Semiconductor integrated circuit
08/21/1984US4467439 OR Product term function in the search array of a PLA
08/21/1984US4467400 Wafer scale integrated circuit
08/21/1984US4467345 Semiconductor integrated circuit device
08/21/1984US4467344 Bidirectional switch using two gated diode switches in a single dielectrically isolated tub
08/21/1984US4467343 Thyristor with a multi-layer semiconductor body with a pnpn layer sequence and a method for its manufacture with a {111} lateral edge bevelling
08/21/1984US4467227 Channel charge compensation switch with first order process independence
08/21/1984US4467210 Electron-beam image transfer device
08/21/1984US4467026 Process for drawing patterns with extremely fine features in the production of VLSI, LSI and IC systems
08/21/1984US4467025 O-naphthoquinone diazide and triarylmethane dye
08/21/1984US4466992 Healing pinhole defects in amorphous silicon films
08/21/1984US4466864 Methods of and apparatus for electroplating preselected surface regions of electrical articles
08/21/1984US4466839 Implantation of an insulative layer
08/21/1984US4466766 Transfer apparatus
08/21/1984US4466565 Wire bonding apparatus for semiconductor device
08/21/1984US4466381 Coating of semiconductor wafers and apparatus therefor
08/21/1984US4466380 Plasma deposition apparatus for photoconductive drums
08/21/1984US4466183 Integrated circuit packaging process
08/21/1984US4466181 Method for mounting conjoined devices
08/21/1984US4466180 Method of manufacturing punch through voltage regulator diodes utilizing shaping and selective doping
08/21/1984US4466179 Method for providing polysilicon thin films of improved uniformity
08/21/1984US4466178 Method of making extremely small area PNP lateral transistor by angled implant of deep trenches followed by refilling the same with dielectrics
08/21/1984US4466177 Storage capacitor optimization for one device FET dynamic RAM cell
08/21/1984US4466176 Process for manufacturing insulated-gate semiconductor devices with integral shorts
08/21/1984US4466175 Manufacture of vertical insulated gate field effect transistors
08/21/1984US4466174 Method for fabricating MESFET device using a double LOCOS process
08/21/1984US4466173 Methods for fabricating vertical channel buried grid field controlled devices including field effect transistors and field controlled thyristors utilizing etch and refill techniques
08/21/1984US4466172 Method for fabricating MOS device with self-aligned contacts
08/21/1984US4466171 Method of manufacturing a semiconductor device utilizing outdiffusion to convert an epitaxial layer
08/21/1984CA1173175A1 Charge transfer device
08/21/1984CA1172993A1 Microwave plasma etching
08/16/1984WO1984003196A1 Articulated arm transfer device
08/16/1984WO1984003195A1 Module for high vacuum processing
08/16/1984WO1984003185A1 Substrate bias control circuit and method
08/16/1984WO1984003176A1 Self-compensating hydrostatic flattening of semiconductor substrates
08/15/1984EP0116010A2 Arrangement for protecting a capillar part serving to weld wires in a semiconductor element against sparking
08/15/1984EP0115998A2 Controlled bonding wire ball formation
08/15/1984EP0115952A1 Electron beam exposure method and apparatus
08/15/1984EP0115946A2 Composite scanning array and method of assembly
08/15/1984EP0115668A1 Heterojunction semiconductor device
08/15/1984EP0115652A1 Insulated gate field effect transistor and method of manufacturing the same
08/15/1984EP0115645A2 Process for forming passivation film on photoelectric conversion device and the device produced thereby
08/15/1984EP0115550A1 Method of producing ohmic and/or Schottky barrier contacts on semiconductor substrates
08/14/1984US4466073 Wafer prealigner using pulsed vacuum spinners
08/14/1984US4466013 Tapped integrated resistor
08/14/1984US4466012 Semiconductor device with deep oxide isolation
08/14/1984US4466011 Device for protection against leakage currents in integrated circuits
08/14/1984US4465759 Method of fabricating a pellicle cover for projection printing system
08/14/1984US4465742 Undercoating with nickel-cobalt alloy
08/14/1984US4465716 Thermal conductive materials, silicon, sputtering, irradiating
08/14/1984US4465706 Bandgap control in amorphous semiconductors
08/14/1984US4465705 Method of making semiconductor devices
08/14/1984US4465565 Cadmium, tellurium, mercury intermetallics
08/14/1984US4465553 Method for dry etching of a substrate surface
08/14/1984US4465552 Method of selectively etching silicon dioxide with SF6 /nitriding component gas
08/14/1984US4465549 Method of removing a glass backing plate from one major surface of a semiconductor wafer
08/14/1984US4465543 Apparatus and method for arranging semiconductor pellets
08/14/1984US4465532 Method for forming an isolation region for electrically isolating elements
08/14/1984US4465529 Irradiation with electron beam
08/14/1984US4465528 Multilayer, bipolar-forming dielectric, semiconductor, masking doping, removal mask and forming apertures
08/14/1984US4465527 Method for producing a group IIB-VIB compound semiconductor crystal
08/14/1984US4465416 Wafer handling mechanism
08/14/1984US4465368 Exposure apparatus for production of integrated circuit
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