Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
01/1990
01/03/1990EP0349068A2 Method for guiding a process during the physical/chemical treatment of semiconductors in an oven
01/03/1990EP0349058A1 Method of manufacturing a semiconductor device, in which during the deposition of a metal a metal silicide is formed
01/03/1990EP0349052A2 Charge coupled device
01/03/1990EP0349042A2 System for the automated testing of integrated circuits
01/03/1990EP0349038A1 Semiconductor device comprising an integrated light guide having at least a straight part and a bent part
01/03/1990EP0349033A2 Shift register assembly
01/03/1990EP0349022A2 Semiconductor device
01/03/1990EP0349021A2 Semiconductor device and method of manufacturing the same
01/03/1990EP0349010A1 Polyimide copolymers
01/03/1990EP0349001A2 Semiconductor device having a stress relief film protected against cracking
01/03/1990EP0349000A2 A TAB film tape carrier
01/03/1990EP0348998A1 Semiconductor integrated circuit including differential transistor circuit having a pair of FETs
01/03/1990EP0348992A2 Apparatus and method of pattern detection based on a scanning transmission electron microscope
01/03/1990EP0348972A2 A semiconductor device and a process for manufacturing thereof
01/03/1990EP0348962A2 Fine pattern forming method
01/03/1990EP0348944A2 Semiconductor device having compound semiconductor fet of E/D structure with high noise margin and method for manufacturing the same
01/03/1990EP0348933A2 Standard cell
01/03/1990EP0348894A2 Output buffer circuit used for stable voltage source
01/03/1990EP0348860A2 Punch press for piercing green sheet with liner
01/03/1990EP0348815A2 Method and apparatus for coating semiconductor components on a dielectric film
01/03/1990EP0348783A2 Process of making discrete type substrates
01/03/1990EP0348757A2 Method for polishing a silicon wafer
01/03/1990EP0348738A2 Method for the non-destructive determination of electronic inhomogeneities in semi-conductor layers
01/03/1990EP0348640A2 Semiconductor device including a protective film
01/03/1990EP0348626A2 Process for fabricating isolated vertical bipolar and jfet transistors
01/03/1990EP0348540A1 Process for the selective growth of GaAs
01/03/1990EP0348477A1 Vacuum deposition process.
01/03/1990CN1038469A Process for formation of functional deposited film containing groups ii and vi atoms as main constituent atoms by microwave plasma chemical vapor deposition process
01/03/1990CN1006356B Millite ceramic multi-layered substrate and process for producing same
01/02/1990US4891685 Rectifying P-N junction having improved breakdown voltage characteristics and method for fabricating same
01/02/1990US4891684 Capacitor dielectric film
01/02/1990US4891585 Multiple lead probe for integrated circuits in wafer form
01/02/1990US4891583 Inspection mechanism for chip type circuit element
01/02/1990US4891582 Optical apparatus and method for photocarrier diffusion length measurement
01/02/1990US4891580 Electro-optic measurements of voltage waveforms on electrical conductors
01/02/1990US4891560 Magnetron plasma apparatus with concentric magnetic means
01/02/1990US4891547 Particle or radiation beam mask and process for making same
01/02/1990US4891533 MOS-cascoded bipolar current sources in non-epitaxial structure
01/02/1990US4891526 X-Y-θ-Z positioning stage
01/02/1990US4891525 SKM ion source
01/02/1990US4891524 Charged particle beam exposure system and method of compensating for eddy current effect on charged particle beam
01/02/1990US4891499 Method and apparatus for real-time wafer temperature uniformity control and slip-free heating in lamp heated single-wafer rapid thermal processing systems
01/02/1990US4891488 Processing apparatus and method
01/02/1990US4891335 Semiconductor substrate heater and reactor process and apparatus
01/02/1990US4891334 Covering with protective film; finishing backing; removal of film
01/02/1990US4891333 Semiconductor device and manufacturing method thereof
01/02/1990US4891332 Method of manufacturing a semiconductor device comprising a circuit element formed of carbon doped polycrystalline silicon
01/02/1990US4891331 Method for doping silicon wafers using Al2 O3 /P2 O5 composition
01/02/1990US4891329 Forming multilayer dielectric; bonding
01/02/1990US4891328 Method of manufacturing field effect transistors and lateral bipolar transistors on the same substrate
01/02/1990US4891327 Method for manufacturing field effect transistor
01/02/1990US4891326 Semiconductor device and a process for manufacturing the same
01/02/1990US4891303 Trilayer microlithographic process using a silicon-based resist as the middle layer
01/02/1990US4891259 Multilayer systems and their method of production
01/02/1990US4891255 Etching; frame and cantilever beam
01/02/1990US4891246 Controlled atmosphere firing process
01/02/1990US4891242 Integrated circuits
01/02/1990US4891112 Stress relieving by concurrent resputtering from deposited layer
01/02/1990US4891095 Method and apparatus for plasma treatment
01/02/1990US4891094 Nonlinear relationship with thickness
01/02/1990US4891092 Method for making a silicon-on-insulator substrate
01/02/1990US4891091 Sodium ions at interface
01/02/1990US4891066 Highly pure titanium
01/02/1990US4891014 Method of forming contact bumps in contact pads
01/02/1990US4890933 Transmission method to determine and control the temperature of wafers or thin layers with special application to semiconductors
01/02/1990US4890780 Manufacturing apparatus
01/02/1990US4890575 Thin film forming device
12/1989
12/28/1989WO1989012912A1 Stress conversion device and its production method
12/28/1989WO1989012911A1 Protected lead frame and method for fabricating lead frames
12/28/1989WO1989012910A1 Enclosed buried channel transistor
12/28/1989WO1989012909A1 Method of fabricating semiconductor devices
12/28/1989WO1989012907A1 Wafer handling system with bernoulli pick-up
12/28/1989WO1989012846A1 Photodefinable interlevel dielectrics
12/28/1989WO1989012702A1 Modular sputtering apparatus
12/28/1989EP0331718A4 Multiple electrode plasma reactor power distribution system.
12/27/1989EP0348239A1 Scanning tunneling microscope
12/27/1989EP0348209A2 Image display device
12/27/1989EP0348119A2 Method of processing metal connectors on semi-conductor devices
12/27/1989EP0348099A2 Floating gate memories
12/27/1989EP0348085A1 Vacuum deposition apparatus
12/27/1989EP0348046A2 Method of producing a semiconductor device
12/27/1989EP0348018A2 Resin encapsulated semiconductor device and method of manufacture thereof
12/27/1989EP0347992A1 Process for producing semiconductor devices comprising at least a step of reactive ion etching
12/27/1989EP0347991A2 Use of venting slots to improve hermetic seal for semiconductor dice housed in ceramic packages
12/27/1989EP0347953A2 Impurity band conduction semiconductor devices
12/27/1989EP0347792A2 Multi-layer wirings on a semiconductor device and fabrication method
12/27/1989EP0347718A2 Apparatus for transporting wafer to and from polishing head
12/27/1989EP0347660A2 Light-sensitive composition and light-sensitive registration material prepared therefrom
12/27/1989EP0347613A2 Semiconductor device with pressure connection means
12/27/1989EP0347550A2 Process for fabricating isolated vertical and super beta bipolar transistors
12/27/1989EP0347518A1 Passivation of a semiconductor device
12/27/1989EP0347470A1 Method of forming superconducting wires
12/27/1989CN1006261B Process for forming isolated silicon regions and field-effect devices on a silicon substrate
12/26/1989US4890307 Input circuit of charge transfer device
12/26/1989US4890270 Method and apparatus for measuring the speed of an integrated circuit device
12/26/1989US4890239 Lithographic process analysis and control system
12/26/1989US4890238 Method for physical VLSI-chip design
12/26/1989US4890191 Integrated circuits
12/26/1989US4890187 Integrated circuit protected against electrostatic discharges, with variable protection threshold
12/26/1989US4890164 Image sensor having charge storage regions