Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
12/1989
12/19/1989US4887804 Stage mechanism
12/19/1989US4887760 Bonding sheet for electronic component and method of bonding electronic component using the same
12/19/1989US4887758 Apparatus for connecting external leads
12/19/1989US4887548 Thin film manufacturing system
12/19/1989US4887352 Method for making matrix lead frame
12/19/1989CA1263932A1 Method of diffusion of impurities
12/14/1989WO1989012318A1 Optically flat surfaces on processed silicon wafers
12/14/1989WO1989012317A1 Process and device for crystallization of thin semiconductor layers on a substrate material
12/14/1989WO1989012082A1 Abrasive composition for silicon wafer
12/14/1989WO1989011915A1 Plasma enhanced chemical vapor deposition wafer holding fixture
12/14/1989WO1989011897A1 Silicon dioxide films on diamond
12/14/1989DE3819684A1 Method for determining the end point in a planarising plasma etch-back process
12/13/1989EP0346224A1 Adaptable channel for the transport of work pieces in an ultra-clean environment
12/13/1989EP0346168A1 Plasma reactor
12/13/1989EP0346166A1 Apparatus for the regulation of the temperature of a component by blowing a gas at the appropriate temperature
12/13/1989EP0346131A2 Dry etching apparatus
12/13/1989EP0346035A2 Terminal structure and process of fabricating the same
12/13/1989EP0346018A2 Venting vacuum processing equipment
12/13/1989EP0345924A2 Testing IC devices
12/13/1989EP0345875A2 A method of manufacturing a semiconductor device
12/13/1989EP0345859A1 Process for forming epitaxial layers
12/13/1989EP0345809A1 Ceramic laminated circuit substrate, method for making same and use of the substrate
12/13/1989EP0345757A2 An ashing method for removing an organic film on a substance of a semiconductor device under fabrication
12/13/1989EP0345741A2 Method for manufacturing a semiconductive resistor
12/13/1989EP0345714A2 Dyed photoresist compositions and process
12/13/1989EP0345702A2 Process for investigating the latch-up extension in CMOS circuits
12/13/1989EP0345701A2 Process for investigating the latch-up extension in CMOS circuits
12/13/1989EP0345487A1 A sputtering method for fabricating thin film
12/13/1989EP0345443A2 Process for the rapid thermal annealing of a semiconductor wafer using irradiation
12/13/1989EP0345435A2 Semiconductor device with a high breakdown voltage and method for its manufacture
12/13/1989EP0345432A1 Diode for ESD protection of integrated circuits
12/13/1989EP0345400A1 Selective CVD for maufacturing semiconductor devices
12/13/1989EP0345390A1 Improvement in or Relating to Jitter Circuits
12/13/1989EP0345380A2 Manufacture of a semiconductor device
12/13/1989EP0311627A4 Planarized process for forming vias in silicon wafers.
12/13/1989EP0219512B1 Installation for the handling of fragile objects in controlled dusting atmosphere
12/13/1989CN1037970A Illumination system
12/12/1989US4887282 Method and apparatus for changing the imaging scale in X-ray lithograph
12/12/1989US4887238 Non-volatile memory with floating grid and without thick oxide
12/12/1989US4887236 Non-volatile, radiation-hard, random-access memory
12/12/1989US4887146 Semiconductor device
12/12/1989US4887145 Semiconductor device in which electrodes are formed in a self-aligned manner
12/12/1989US4887144 Topside substrate contact in a trenched semiconductor structure and method of fabrication
12/12/1989US4887143 Semiconductor device
12/12/1989US4887142 Monolithically integrated semiconductor device containing bipolar junction transistors, CMOS and DMOS transistors and low leakage diodes and a method for its fabrication
12/12/1989US4887141 Saturation limiting system for a vertical, isolated collector PNP transistor and monolithically integrated structure thereof
12/12/1989US4887136 Semiconductor memory device and the method for manufacturing the same
12/12/1989US4887134 Semiconductor device having a semiconductor region in which either the conduction or valence band remains flat while bandgap is continuously graded
12/12/1989US4887031 Method and apparatus for detecting and imaging measuring points that have a defined signal progression
12/12/1989US4887026 Voltage detector for detecting a voltage developing in a selected area of an object
12/12/1989US4887005 Multiple electrode plasma reactor power distribution system
12/12/1989US4886985 Transistor arrangement with an output transistor
12/12/1989US4886984 Prohibition circuit upon power-on event
12/12/1989US4886982 Power transistor with improved resistance to direct secondary breakdown
12/12/1989US4886974 Mark detecting device for detecting the center of a mark by detecting its edges
12/12/1989US4886765 Method of making silicides by heating in oxygen to remove contamination
12/12/1989US4886764 Process for making refractory metal silicide cap for protecting multi-layer polycide structure
12/12/1989US4886763 Device isolation by etching trench in dielectric on substrate and epitaxially filling the trench
12/12/1989US4886728 Use of particular mixtures of ethyl lactate and methyl ethyl ketone to remove undesirable peripheral material (e.g. edge beads) from photoresist-coated substrates
12/12/1989US4886683 Low temperature metalorganic chemical vapor depostion growth of group II-VI semiconductor materials
12/12/1989US4886592 Apparatus on the carousel principle for coating substrates
12/12/1989US4886573 Process for forming wiring on substrate
12/12/1989US4886571 For semiconductors; efficient use of activated gas particles for deposition,etching, doping, oxidation, nitriding
12/12/1989US4886569 Plasma etching process
12/12/1989US4886565 Negative electrode, cooler; high speed, nondeforming; semiconductors
12/12/1989US4886444 Process for treating gaseous effluents coming from the manufacture of electronic components and incineration apparatus for carrying out said process
12/12/1989US4886412 Method and system for loading wafers
12/12/1989US4886200 Capillary tip for bonding a wire
12/12/1989US4886169 Bellows clamp actuator
12/12/1989US4886162 Container for vacuum storing and/or shipping silicon wafers
12/12/1989US4885837 Apparatus for forming leads of semiconductor devices
12/12/1989CA1263812A1 Mounting beam for preparing wafers
12/07/1989DE3917895A1 Processing system for semiconductor wafers
12/07/1989DE3916534A1 Struktur aus feldeffekt-transistor und pixelelektrode zur verwendung in fluessigkristallanzeigen und verfahren zur herstellung der struktur Structure from the field effect transistor and pixel electrode for use in fluessigkristallanzeigen and method for making the structure
12/07/1989DE3915642A1 Ausricht- und belichtungsvorrichtung Alignment and exposure apparatus
12/07/1989DE3915472A1 Antioxidationssystem eines kupferdraht verwendenden wire-bonders Antioxidant system of a copper wire used wire bonders
12/07/1989DE3836696C1 Lock for transporting material between clean rooms
12/07/1989DE3817882A1 Bipolar transistor structure having a reduced base resistance, and method for fabricating a base terminal zone for the bipolar transistor structure
12/07/1989DE3817850A1 Method for minimising the weight of spectacle lenses
12/06/1989EP0345162A1 Wafer scale integration device
12/06/1989EP0345058A2 Non-volatile static RAM circuit
12/06/1989EP0344970A2 Process for bonding integrated circuit components
12/06/1989EP0344969A1 Electron cyclotron resonance ion source
12/06/1989EP0344904A2 Growth of semi-insulating indium phosphide by liquid phase epitaxy
12/06/1989EP0344863A1 A method of producing a thin film transistor
12/06/1989EP0344823A2 Workpiece processing apparatus
12/06/1989EP0344764A2 Process for the wet-chemical surface treatment of semiconductor chips
12/06/1989EP0344720A2 Method of producing electrical connection members
12/06/1989EP0344715A2 Semiconductor integrated circuit device having temperature detecting means
12/06/1989EP0344702A2 Electric circuit apparatus
12/06/1989EP0344632A2 Semiconductor memory device having pseudo row decoder
12/06/1989EP0344515A2 Process for producing a beam-forming aperture for a lithography apparatus
12/06/1989EP0344513A2 Process for the manufacture of a steering plate for a lithography apparatus
12/06/1989EP0344504A2 Article comprising a polyimide and a metal layer and methods of making such articles
12/06/1989EP0344447A2 Pillar DRAM cell
12/06/1989EP0344292A1 A process of fabricating self-aligned semiconductor devices
12/06/1989EP0344290A1 Vacuum apparatus.
12/06/1989EP0344282A1 Semi-conductive devices fabricated on soi wafers.
12/06/1989EP0344277A1 Self-aligned interconnects for semiconductor devices
12/06/1989EP0344259A1 Method and means of fabricating a semiconductor device package
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