Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
03/1990
03/28/1990EP0359852A1 Process for manufacturing shallow doped regions having a low layer resistivity in a silicon substrate
03/28/1990EP0359777A1 Process for etching with gaseous plasma.
03/28/1990EP0359775A1 Process for providing an improved electroplated tape automated bonding tape and the product produced thereby
03/28/1990EP0359748A1 Temperature-measurement device for semiconductors and process for its manufacture
03/28/1990EP0359743A1 Cmos-ram store on a gate array arrangement.
03/28/1990EP0232322B1 Selectively doping isolation trenches utilized in cmos devices
03/28/1990EP0231544B1 Reactor chamber for epitaxial growth in the gaseous phase of semiconductor materials
03/28/1990EP0223780B1 Method for producing mos transistors having metal silicide electrodes
03/28/1990CN1040889A Process for lengthening service life of power transistor
03/28/1990CN1007389B 半导体器件 Semiconductor devices
03/28/1990CN1007385B Electric insulation thin layer
03/27/1990US4912709 Flexible VLSI on-chip maintenance and test system with unit I/O cell design
03/27/1990US4912547 Tape bonded semiconductor device
03/27/1990US4912545 Bonding of aligned conductive bumps on adjacent surfaces
03/27/1990US4912544 Corrosion-resistant aluminum electronic material
03/27/1990US4912543 Integrated semiconductor circuit having an external contacting track level consisting of aluminum or of an aluminum alloy
03/27/1990US4912542 Semiconductor device and method of manufacturing the same
03/27/1990US4912540 Reduced area butting contact structure
03/27/1990US4912538 Structured semiconductor body
03/27/1990US4912534 Nonvolatile semiconductor memory device
03/27/1990US4912532 Electro-optical device with inverted transparent substrate and method for making same
03/27/1990US4912531 Three-terminal quantum device
03/27/1990US4912399 Multiple lead probe for integrated circuits in wafer form
03/27/1990US4912066 Make-link programming of semiconductor devices using laser-enhanced thermal breakdown of insulator
03/27/1990US4912065 Plasma doping method
03/27/1990US4912063 Growth of beta-sic thin films and semiconductor devices fabricated thereon
03/27/1990US4912062 Method of eliminating bird's beaks when forming field oxide without nitride mask
03/27/1990US4912061 Method of forming a salicided self-aligned metal oxide semiconductor device using a disposable silicon nitride spacer
03/27/1990US4912055 Doping; overcoating with oxide forming barriers; forming nitride; etching
03/27/1990US4912053 Ion implanted JFET with self-aligned source and drain
03/27/1990US4912052 Method of testing semiconductor elements
03/27/1990US4912022 Patterned lithography mask, optical scattering element and radiation source
03/27/1990US4911992 Mixture of hydrogen silsesquioxane and metal oxide; drying and heating
03/27/1990US4911812 Gas plasma under reduced pressure; cooling specimen to low temperature
03/27/1990US4911810 Modular sputtering apparatus
03/27/1990US4911809 Sputtering particles into heated substrate; particle plasma mixing at substrate surface
03/27/1990US4911786 Method of etching polyimides and resulting passivation structure
03/27/1990US4911783 Double trenches with a stepped depth profile; silicon dioxide masking on silicon substrate; hydrofluoride and nitric acid etching
03/27/1990US4911780 LEC method for growing a single crystal of compound semiconductors
03/27/1990US4911765 Forming mesa of different widths on substrates; forming photoactive material by liquid phase epitaxy
03/27/1990US4911761 Process and apparatus for drying surfaces
03/27/1990US4911648 IC connection/disconnection mechanism and method for carrying out the same
03/27/1990US4911597 Semiconductor processing system with robotic autoloader and load lock
03/27/1990US4911350 Semiconductor bonding means having an improved capillary and method of using the same
03/27/1990US4911103 Wafers
03/27/1990US4911102 Process of vapor growth of gallium nitride and its apparatus
03/27/1990US4910866 Method of manufacturing a series of leadframe strip carriers having fixed external dimensions and varied internal dimensions using a common mold
03/22/1990WO1990003046A1 Integrated circuit employing dummy conductors for planarity
03/22/1990WO1990003045A1 Method of forming holes in ceramic ic packages
03/22/1990WO1990002997A1 Method and apparatus for sensing defects in integrated circuit elements
03/22/1990WO1990002955A1 Process and device for measuring states and variations over time
03/22/1990WO1990002827A1 Photochemical deposition of high purity gold films
03/22/1990WO1990002767A1 Process for lowering the dielectric constant of polyimides using diamic acid additives
03/22/1990WO1990002718A1 Process for smoothing the surface of a ceramic substrate
03/22/1990DE3930657A1 Semiconductor structure with stacked capacitor electrodes - uses low stress oxide layer on poly:silicon during etching of recess transistor gate to avoid undercutting
03/22/1990DE3930655A1 Semiconductor module with laminated coupling layer - has coupling section, extending over insulating film on semiconductor substrate main surface
03/22/1990DE3916329A1 Verfahren zur bildung des kleinstkontaktes bei halbleiter-vorrichtungen A process for the formation of the smallest contact with semiconductor devices
03/22/1990DE3153475C2 Assembly head for electronic components
03/21/1990EP0359680A1 Integretable active diode
03/21/1990EP0359679A1 Method of producing a diode for control and protection
03/21/1990EP0359632A1 Integrated circuits encapsulation process, especially for chip cards
03/21/1990EP0359530A2 Capacitive reduction of junctions in a semiconductor device
03/21/1990EP0359528A2 High-voltage thin-film transistors
03/21/1990EP0359525A2 Continuous semiconductor substrate processing system
03/21/1990EP0359508A2 Sequential-quenching resonant-tunneling transistor
03/21/1990EP0359497A2 An exposure method
03/21/1990EP0359417A2 Fabrication of silicon structures by single side, multiple step etching process
03/21/1990EP0359416A2 Hybrid circuits
03/21/1990EP0359373A2 Adhesive tape and use thereof
03/21/1990EP0359342A2 Process for forming a layer of patterned photoresist
03/21/1990EP0359336A2 Device for microwave transmission
03/21/1990EP0359328A1 Device having an electronic circuit mounted on a flexible carrier, protected against electrostatic discharges, and flexible card comprising this device
03/21/1990EP0359228A2 Gold/tin eutectic bonding for tape automated process
03/21/1990EP0359221A2 High pressure photoresist silylating process and apparatus
03/21/1990EP0359204A2 Semicondutor memory device capable of relieving defective bits
03/21/1990EP0359202A1 Compound semiconductor device having phosphorus-containing surface protective film and method of fabricating same
03/21/1990EP0359170A2 Two-dimensional position detecting method and apparatus
03/21/1990EP0359153A2 Split-phase driver for plasma etch system
03/21/1990EP0359109A1 Method of manufacturing a semiconductor integrated circuit having an interconnection wire embedded in a protective layer covering the semiconductor integrated circuit
03/21/1990EP0359018A2 Lithography apparatus for structuring an object
03/21/1990EP0358879A2 Method of making high density interconnects
03/21/1990EP0358871A2 Radiation-sensitive positive resist composition
03/21/1990EP0358867A1 Flip-chip mounting with a solder barrier layer made from oxidisable metal
03/21/1990CN1040707A High-voltage verticle diffusion fet and its manufacture
03/21/1990CN1007305B Method of making monolithic integrated circuit comprising at least one bipolar planar transistor
03/20/1990US4910773 Method of dispatching secret keys to security modules and user cards in a data processing network
03/20/1990US4910735 Semiconductor integrated circuit with self-testing
03/20/1990US4910709 Complementary metal-oxide-semiconductor transistor and one-capacitor dynamic-random-access memory cell
03/20/1990US4910707 EEPROM with protective circuit
03/20/1990US4910680 Wiring method for semiconductor integrated circuit
03/20/1990US4910679 Step-and-repeat alignment and exposure method and apparatus
03/20/1990US4910584 Semiconductor device
03/20/1990US4910583 Semiconductor body with heat sink
03/20/1990US4910580 Method for manufacturing a low-impedance, planar metallization composed of aluminum or of an aluminum alloy
03/20/1990US4910578 Semiconductor device having a metal electrode interconnection film with two layers of silicide
03/20/1990US4910576 Memory cell
03/20/1990US4910575 Semiconductor integrated circuit and its manufacturing method
03/20/1990US4910572 Semiconductor device and method of fabricating the same
03/20/1990US4910569 Charge-coupled device having improved transfer efficiency
03/20/1990US4910567 Dram cell and method for fabricating