Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
06/1990
06/13/1990EP0372179A1 Method of procuring high-frequency energy, and its use
06/13/1990EP0372168A2 Defect detection using intermodulation signals
06/13/1990EP0372126A1 Method for encapsulating electronic parts and encapsulated parts
06/13/1990EP0372092A1 Stress conversion device and its production method
06/13/1990EP0202254B1 Semiconductor device provided with a metal layer
06/13/1990EP0202252B1 Method for fabricating semiconductor devices and devices formed thereby
06/13/1990DE3940405A1 Object support for X=ray appts. - having movable support, pressure storage means, chamber, outlet, pressurising means, cleaning device etc.
06/13/1990CN1043039A Method for axial rake setting carrier lifetime
06/13/1990CN1042954A Apparatus for manufacturing silicon single crystals
06/12/1990US4933905 Semiconductor memory device for reducing power dissipation during a write operation
06/12/1990US4933898 Secure integrated circuit chip with conductive shield
06/12/1990US4933827 Regulation of the output voltage of a voltage multiplier
06/12/1990US4933810 Integrated circuit interconnector
06/12/1990US4933742 Metallization contact system for large scale integrated circuits
06/12/1990US4933739 Trench resistor structures for compact semiconductor memory and logic devices
06/12/1990US4933737 Polysilon contacts to IC mesas
06/12/1990US4933736 Programmable read-only memory
06/12/1990US4933734 Semiconductor device having field effect transistors and manufacturing method therefor
06/12/1990US4933732 Heterojunction bipolar transistor
06/12/1990US4933730 Semiconductor device having a high breakdown voltage characteristic
06/12/1990US4933715 Method of detecting position of a mark
06/12/1990US4933635 In-line process monitors for thin film wiring
06/12/1990US4933628 Voltage detecting device
06/12/1990US4933579 Output circuit for a semiconductor device for reducing rise time of an output signal
06/12/1990US4933573 Semiconductor integrated circuit
06/12/1990US4933565 Method and apparatus for correcting defects of X-ray mask
06/12/1990US4933318 Plasma etch of masked superconductor film
06/12/1990US4933305 Forming dielectric, bonding pad, passivation film
06/12/1990US4933304 Method for reducing the surface reflectance of a metal layer during semiconductor processing
06/12/1990US4933303 Filling contact holes in dielectric with tungsten
06/12/1990US4933300 Process for forming multilayer thin film
06/12/1990US4933299 Prevent pattern diffusion by overcoating with thin oxide film
06/12/1990US4933298 Method of making high speed semiconductor device having a silicon-on-insulator structure
06/12/1990US4933297 Method for etching windows having different depths
06/12/1990US4933296 N+ amorphous silicon thin film transistors for matrix addressed liquid crystal displays
06/12/1990US4933295 Method of forming a bipolar transistor having closely spaced device regions
06/12/1990US4933294 Method of detecting truncated epidermal growth factor receptors
06/12/1990US4933263 Forming method of resist pattern
06/12/1990US4933257 Positive quinone diazide photo-resist composition with antistatic agent
06/12/1990US4933219 Filler and binder of epoxy resin and polyester
06/12/1990US4933206 UV-vis characteristic writing in silicon nitride and oxynitride films
06/12/1990US4933204 Method of producing a gold film
06/12/1990US4933203 Process for depositing amorphous hydrogenated silicon in a plasma chamber
06/12/1990US4933063 Sputtering device
06/12/1990US4933045 Thin film multilayer laminate interconnection board assembly method
06/12/1990US4933042 Method for packaging integrated circuit chips employing a polymer film overlay layer
06/12/1990US4933030 Thallium oxide, vanadium oxide and phosphorus oxide
06/12/1990US4932883 Elastomeric connectors for electronic packaging and testing
06/12/1990US4932584 Method of wire bonding
06/12/1990US4932582 Method for the preparation of a bonding tool
06/12/1990US4932358 Perimeter wafer seal
06/12/1990US4932357 Vacuum apparatus
06/12/1990US4932168 Processing apparatus for semiconductor wafers
06/12/1990CA1270328A1 Semiconductor memory device having stacked-capacitor type memory cells
06/09/1990CA2004909A1 Semiconductor integrated-circuit device metallization
06/09/1990CA2004281A1 Etching of integrated-circuit device metallization and resulting device
06/07/1990DE3939635A1 Mfg. self-aligned gallium arsenide MESFET - involves forming T=shaped tungsten gate electrode
06/07/1990DE3939314A1 Multi-zone semiconductor DRAM - has connection areas with connecting lines on layers, crossing over memory layers
06/06/1990EP0371901A2 Thick epitaxial films with abrupt junctions
06/06/1990EP0371879A1 Extendable storing device for flat objects
06/06/1990EP0371862A2 Method of forming a nonsilicon semiconductor on insulator structure
06/06/1990EP0371861A2 High density semiconductor structure and method of making the same
06/06/1990EP0371855A1 Method of manufacturing an electronic module, and electronic module made by this method
06/06/1990EP0371854A2 Method for selectively depositing refractory metal on semiconductor substrates
06/06/1990EP0371849A1 Method of forming a thin silicon layer on an insulator
06/06/1990EP0371796A2 Apparatus and process for chemical vapor deposition
06/06/1990EP0371720A2 Method of making a double hetero type epitaxial wafer
06/06/1990EP0371686A1 Semiconductor device and method for producing same
06/06/1990EP0371684A2 Interstitial doping in III-V semiconductors to avoid or suppress DX centre formation
06/06/1990EP0371663A1 Integrated circuit output buffer having improved ESD protection
06/06/1990EP0371557A2 PNP Darlington device structurally improved with regard to the integrated speed-up diode, and its manufacturing method
06/06/1990EP0371512A2 Conducting material and method of fabrication thereof
06/06/1990EP0371287A1 Planarizing ladder-type silsesquioxane polymer insulation layer
06/06/1990EP0371205A2 Transfer Device
06/06/1990EP0371147A1 Abrasive composition for silicon wafer
06/06/1990EP0371110A1 Compliant motion servo
06/06/1990EP0371087A1 Apparatus for inspecting wafers
06/06/1990EP0371069A1 Process for manufacturing microsensors with integrated signal processing
06/06/1990EP0371065A1 Surface deposition or surface treatment reactor.
06/06/1990EP0221103B1 Process for making semiconductor devices which involve gaseous etching
06/05/1990US4932064 Semiconductor device
06/05/1990US4932000 Semiconductor memory device having pseudo row decoder
06/05/1990US4931962 Fixture and nonrepeatable error compensation system
06/05/1990US4931946 Integrated circuit
06/05/1990US4931945 Method of controlling floating zone
06/05/1990US4931897 Method of manufacturing semiconductor capacitive element
06/05/1990US4931853 IC card and method of manufacturing the same
06/05/1990US4931849 Semiconductor memory device with improved capacitor structure
06/05/1990US4931847 Floating gate memory with sidewall tunnelling area
06/05/1990US4931845 Semiconductor memory device having an ohmic contact between an aluminum-silicon alloy metallization film and a silicon substrate
06/05/1990US4931830 Projection exposure apparatus
06/05/1990US4931756 High power microwave transmissive window assembly
06/05/1990US4931666 Darlington-connected semiconductor device
06/05/1990US4931411 Integrated circuit process with TiN-gate transistor
06/05/1990US4931410 Process for producing semiconductor integrated circuit device having copper interconnections and/or wirings, and device produced
06/05/1990US4931409 Method of manufacturing semiconductor device having trench isolation
06/05/1990US4931408 Method of fabricating a short-channel low voltage DMOS transistor
06/05/1990US4931407 Method for manufacturing integrated bipolar and MOS transistors
06/05/1990US4931406 Method for manufacturing semiconductor devices having twin wells
06/05/1990US4931405 Method for manufacturing a semiconductor device and suppressing the generation of bulk microdefects near the substrate surface layer
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