| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 08/02/2011 | US7988876 Method for reducing and homogenizing the thickness of a semiconductor layer which lies on the surface of an electrically insulating material |
| 08/02/2011 | US7988874 Method of fabricating semiconductor device and synchronous pulse plasma etching equipment for the same |
| 08/02/2011 | US7988835 Silicon dot forming method and silicon dot forming apparatus |
| 08/02/2011 | US7988818 Device for liquid treatment of wafer-shaped articles |
| 08/02/2011 | US7988817 Lift pin driving device and a flat panel display manufacturing apparatus having same |
| 08/02/2011 | US7988816 Plasma processing apparatus and method |
| 08/02/2011 | US7988815 Plasma reactor with reduced electrical skew using electrical bypass elements |
| 08/02/2011 | US7988814 Plasma processing apparatus, plasma processing method, focus ring, and focus ring component |
| 08/02/2011 | US7988813 Dynamic control of process chemistry for improved within-substrate process uniformity |
| 08/02/2011 | US7988812 Substrate treatment apparatus |
| 08/02/2011 | US7988808 Bonding structure with buffer layer and method of forming the same |
| 08/02/2011 | US7988807 Laminate body, method, and apparatus for manufacturing ultrathin substrate using the laminate body |
| 08/02/2011 | US7988803 Device and method for joining substrates |
| 08/02/2011 | US7988787 Workpiece support system and method |
| 08/02/2011 | US7988786 Carbon film coated member |
| 08/02/2011 | US7988685 Hydrogel compositions, devices, and microscale components |
| 08/02/2011 | US7988530 Slicing method |
| 08/02/2011 | US7988514 Method of varying transmittance of transparent conductive layer, flat panel display device and manufacturing method thereof |
| 08/02/2011 | US7988470 Methods of fabricating metal oxide or metal oxynitride TFTs using wet process for source-drain metal etch |
| 08/02/2011 | US7988398 Linear substrate transport apparatus |
| 08/02/2011 | US7988130 Valve for vacuum exhaustion system |
| 08/02/2011 | US7988062 Temperature control device for target substrate, temperature control method and plasma processing apparatus including same |
| 08/02/2011 | US7987888 Releasing method and releasing apparatus of work having adhesive tape |
| 08/02/2011 | US7987814 Lower liner with integrated flow equalizer and improved conductance |
| 08/02/2011 | CA2464083C Substrate for epitaxy |
| 07/28/2011 | WO2011091409A1 Methods of forming a multi-doped junction with silicon-containing particles |
| 07/28/2011 | WO2011091386A1 Support structures for various apparatuses including opto-electrical apparatuses |
| 07/28/2011 | WO2011091385A1 Support structures for various electronic devices including opto-electronic devices and method of making the same |
| 07/28/2011 | WO2011090959A2 Control of composition profiles in annealed cigs absorbers |
| 07/28/2011 | WO2011090912A2 Integrated void fill for through silicon via |
| 07/28/2011 | WO2011090907A2 Field-effect transistor device having a metal gate stack with an oxygen barrier layer |
| 07/28/2011 | WO2011090905A2 Transfer robot with substrate cooling |
| 07/28/2011 | WO2011090878A2 Charge storage nodes with conductive nanodots |
| 07/28/2011 | WO2011090863A1 Ii-vi core-shell semiconductor nanowires |
| 07/28/2011 | WO2011090852A2 Through silicon via lithographic alignment and registration |
| 07/28/2011 | WO2011090850A2 Process condition sensing device for plasma chamber |
| 07/28/2011 | WO2011090842A2 Electrode array and method of fabrication |
| 07/28/2011 | WO2011090827A2 Esd protection device and method |
| 07/28/2011 | WO2011090737A2 Oxygen radical generation for radical-enhanced thin film deposition |
| 07/28/2011 | WO2011090723A2 Integrated thin film solar cell interconnection |
| 07/28/2011 | WO2011090650A2 Electrostatic chucks and methods for refurbishing same |
| 07/28/2011 | WO2011090641A2 Method of using a mask to provide a patterned substrate |
| 07/28/2011 | WO2011090626A2 Dielectric film growth with radicals produced using flexible nitrogen/hydrogen ratio |
| 07/28/2011 | WO2011090592A2 Chemical vapor deposition improvements through radical-component modification |
| 07/28/2011 | WO2011090583A2 Germanium-based quantum well devices |
| 07/28/2011 | WO2011090579A2 Phase-shift photomask and patterning method |
| 07/28/2011 | WO2011090577A2 Multi-gate iii-v quantum well structures |
| 07/28/2011 | WO2011090572A2 A method to form lateral pad on edge of wafer |
| 07/28/2011 | WO2011090571A2 Self-aligned contacts |
| 07/28/2011 | WO2011090440A1 Capacitor arrangement and a method of forming the same |
| 07/28/2011 | WO2011090262A2 Lithography method using tilted evaporation |
| 07/28/2011 | WO2011090242A1 Cassette jig for wafer cleaning apparatus and cassette assembly having the same |
| 07/28/2011 | WO2011090226A1 Method for fabricating a three-dimensional ultrafine polymer conducting wire, omnidirectional wiring, and ultrafine polymer conducting wire fabricated using the method |
| 07/28/2011 | WO2011090216A1 n-TYPE DIFFUSION LAYER FORMING COMPOSITION, METHOD FOR MANUFACTURING n-TYPE DIFFUSION LAYER, AND METHOD FOR MANUFACTURING SOLAR CELL |
| 07/28/2011 | WO2011090164A1 Semiconductor module manufacturing method |
| 07/28/2011 | WO2011090152A1 Semiconductor device and method of manufacturing same |
| 07/28/2011 | WO2011090146A1 Probe card, semiconductor wafer, inspection device and inspection method |
| 07/28/2011 | WO2011090141A1 Substrate treatment device and substrate treatment method |
| 07/28/2011 | WO2011090140A1 Electrically conductive element, photosensitive material for formation of electrically conductive element, and electrode |
| 07/28/2011 | WO2011090114A1 Developing solution for photoresist on substrate including conductive polymer, and method for forming pattern |
| 07/28/2011 | WO2011090111A1 Method of extracting contour lines of image data obtained by means of charged particle beam device, and contour line extraction device |
| 07/28/2011 | WO2011090109A1 Etching method, etching apparatus, and ring member |
| 07/28/2011 | WO2011090076A1 Plasma processing apparatus and method for processing substrate using the apparatus |
| 07/28/2011 | WO2011090049A1 Flip-chip mounting structure and flip-chip mounting method |
| 07/28/2011 | WO2011090040A1 Method for manufacturing epitaxial crystal substrate |
| 07/28/2011 | WO2011090038A1 Thermosetting resin composition, flip-chip mounting adhesive, semiconductor device fabrication method, and semiconductor device |
| 07/28/2011 | WO2011090037A1 Semiconductor device |
| 07/28/2011 | WO2011090029A1 Carbon nano-tube dispersion, and process for production of semiconductor device |
| 07/28/2011 | WO2011090024A1 Functional element and manufacturing method of same |
| 07/28/2011 | WO2011089984A1 Oxide deposition material, vapor deposited thin film, and solar cell |
| 07/28/2011 | WO2011089979A1 Method for producing semiconductor wafer |
| 07/28/2011 | WO2011089971A1 Method for processing of semiconductor crystal body, and device for processing of semiconductor crystal body |
| 07/28/2011 | WO2011089967A1 Photosensitive resin composition, cured film, method for forming cured film, organic el display device, and liquid crystal display device |
| 07/28/2011 | WO2011089895A1 Light-sensitive polymer composition, method for producing pattern, and electronic component |
| 07/28/2011 | WO2011089894A1 Light-sensitive polymer composition, method for producing pattern, and electronic component |
| 07/28/2011 | WO2011089877A1 Positive photosensitive resin composition, method for producing patterned cured film and electronic component |
| 07/28/2011 | WO2011089870A1 Method for manufacturing electronic component provided with adhesive film and method for manufacturing mounting body |
| 07/28/2011 | WO2011089867A1 Rendering device and rendering method |
| 07/28/2011 | WO2011089863A1 Heating device and production method for mounted body |
| 07/28/2011 | WO2011089862A1 Mounted body production method and mounting device |
| 07/28/2011 | WO2011089861A1 Semiconductor device and method for manufacturing same |
| 07/28/2011 | WO2011089853A1 Display device |
| 07/28/2011 | WO2011089852A1 Semiconductor memory device and driving method thereof |
| 07/28/2011 | WO2011089849A1 Portable electronic device |
| 07/28/2011 | WO2011089847A1 Signal processing circuit and method for driving the same |
| 07/28/2011 | WO2011089846A1 Semiconductor device |
| 07/28/2011 | WO2011089844A1 Display device and manufacturing method thereof |
| 07/28/2011 | WO2011089841A1 Semiconductor device |
| 07/28/2011 | WO2011089837A1 Composite semiconductor device |
| 07/28/2011 | WO2011089836A1 Pattern transfer apparatus and pattern transfer method |
| 07/28/2011 | WO2011089828A1 Light irradiation device, light irradiation method and liquid crystal panel manufacturing method |
| 07/28/2011 | WO2011089827A1 Bonding apparatus, bonding method, and computer storage medium |
| 07/28/2011 | WO2011089826A1 Bonding apparatus, bonding method, and computer storage medium |
| 07/28/2011 | WO2011089808A1 Semiconductor device |
| 07/28/2011 | WO2011089770A1 Processing method and processing device for semiconductor element |
| 07/28/2011 | WO2011089767A1 Circuit board, display device, and process for production of circuit board |
| 07/28/2011 | WO2011089748A1 Pbnzt ferroelectric film, sol-gel solution, film forming method, and method for producing ferroelectric film |
| 07/28/2011 | WO2011089687A1 Silicon carbide semiconductor device and method of manufacturing same |
| 07/28/2011 | WO2011089677A1 Manufacturing method for semiconductor device |
| 07/28/2011 | WO2011089673A1 Ultrasonic cleaning method |