Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
05/2013
05/07/2013US8435704 Mask blank, transfer mask, and methods of manufacturing the same
05/07/2013US8435695 Gas diffusion electrode, fuel cell, and manufacturing method for the gas diffusion electrode
05/07/2013US8435638 Coated glass and method for making the same
05/07/2013US8435637 Scratch resistant coated glass article including carbide layer(s) resistant to fluoride-based etchant(s)
05/07/2013US8435633 Laminate and process for its production
05/07/2013US8435604 Sealing technique for decreasing the time it takes to hermetically seal a device and the resulting hermetically sealed device
05/07/2013US8435594 Evaporation apparatus, method of manufacturing anode using same, and method of manufacturing battery using same
05/07/2013US8435392 Encapsulated sputtering target
05/07/2013US8435390 Method for making coated article
05/07/2013US8435389 RF substrate bias with high power impulse magnetron sputtering (HIPIMS)
05/07/2013US8435388 Reactive sputter deposition processes and equipment
05/02/2013WO2013063616A1 High metal ionization sputter gun
05/02/2013WO2013062288A1 Method for manufacturing accessory for clothing
05/02/2013WO2013062221A1 Titanium-nickel alloy thin film, and preparation method of titanium-nickel alloy thin film using multiple sputtering method
05/02/2013WO2013061895A1 Semiconductor device and manufacturing method thereof
05/02/2013WO2013061845A1 Organic electroluminescence device manufacturing method and manufacturing apparatus
05/02/2013WO2013061635A1 Film-forming device
05/02/2013WO2013061572A1 Film formation method, vacuum treatment device, method for producing semiconductor light-emitting element, semiconductor light-emitting element, and illumination device
05/02/2013WO2013061506A1 Vacuum processing apparatus
05/02/2013WO2013061398A1 Cxnyhz film, film forming method, magnetic recording medium, and method for producing same
05/02/2013WO2013060422A1 Electrode material for lithium ion batteries and method for the production thereof
05/02/2013WO2013060415A1 Method for providing sequential power pulses
05/02/2013WO2013060355A1 Multidirectional racetrack rotary cathode for pvd array applications
05/02/2013WO2013060256A1 Carbon layer material having protective layer structure and preparation process thereof
05/02/2013WO2013035993A3 Thermal deposition apparatus
05/02/2013WO2012158708A3 Methods of affecting material properties and applications therefor
05/02/2013US20130108890 Target, An Underlayer Material For Co-Based Or Fe-Based Magnetic Recording Media, And Magnetic Recording Media
05/02/2013US20130108888 Application of metallic glass and metallic glass thin film coating on the sharpness enhancement of cutting tools
05/02/2013US20130108886 Metal component, method for producing a metal component, and fitting, piece of furniture and household appliance
05/02/2013US20130108863 Coated Graphite Article And Reactive Ion Etch Manufacturing And Refurbishment Of Graphite Article
05/02/2013US20130108805 Method of preparation of multifunctional technical textile by plasma-treatment
05/02/2013US20130108799 High-throughput ion implanter
05/02/2013US20130108789 Method for deposition
05/02/2013US20130106868 Encapsulation of ems devices on glass
05/02/2013US20130106266 Method for making device housing and device housing made by same
05/02/2013US20130105311 Indium Target And Method For Producing The Same
05/02/2013US20130105310 Film formation apparatus and film formation method
05/02/2013US20130105309 Magnetron sputtering apparatus
05/02/2013US20130105301 Transparent conductive film and manufacturing method therefor
05/02/2013US20130105300 Application of Metallic Glass Coating for Improving Fatigue Resistance of Aluminum Alloys
05/02/2013US20130105299 Vacuum deposition method for forming gradient patterns using vacuum device
05/02/2013US20130105298 Sputtering apparatus, film deposition method, and control device
05/02/2013DE102012203055A1 Sputtering target useful for coating substrates with a transparent conductive layer, comprises a gallium-doped zinc-containing material, which is metallic and has a further doping of a further material made of elements of a third main group
05/02/2013DE102012203052A1 Transparent metallic oxide layer used for electrode for solar cell, touch screen and display apparatus, is obtained by depositing gallium-doped zinc oxide material on substrate, and coating element of specific group on layer
05/02/2013DE102011117177A1 Verfahren zur Bereitstellung sequenzieller Leistungspulse A method for providing sequential power pulses
05/02/2013DE102011117023A1 Coating apparatus useful for producing organic layers on substrates, comprises container with region partially provided with openings that are permeable to coating gas and impermeable to non-gaseous coating material, and device for heating
05/02/2013CA2853699A1 Method for providing sequential power pulses
05/01/2013EP2587575A1 Separator plate for a fuel cell and a production method therefor
05/01/2013EP2587518A1 Apparatus and Method for depositing Hydrogen-free ta C Layers on Workpieces and Workpiece
05/01/2013EP2587516A1 Ion sources and methods of operating an electromagnet of an ion source
05/01/2013EP2587491A1 Transparent conductive film, method for manufacturing a transparent conductive film, dye-sensitized solar cell, and solid-electrolyte cell
05/01/2013EP2586889A1 Sputtering device, deposition method and control device
05/01/2013EP2586888A1 Arc evaporation source having fast film-forming speed, film formation device and manufacturing method for coating film using the arc evaporation source
05/01/2013EP2585622A1 Arc deposition source having a defined electric field
05/01/2013EP2585548A1 Fluorinated composition, method of coating the composition, and article thereby
05/01/2013CN202918581U Ceramic substrate based on DLC thin film coating
05/01/2013CN202913055U Discrete type crystal-controlled film thickness control device
05/01/2013CN202913054U Carrier for vacuum cavity
05/01/2013CN202913053U Magnetic positioning system with substrate frames
05/01/2013CN202913052U Double-side coating magnetron sputtering production line for capacitive touch screens
05/01/2013CN202913051U Rotary cathode mechanism
05/01/2013CN202913050U Expansion water cooled roll for vacuum coating machine
05/01/2013CN202913049U Gas distributing system for vacuum coating
05/01/2013CN202913048U Composted mask plate component
05/01/2013CN202913047U Mask frame and corresponding evaporation mask component
05/01/2013CN202913046U Composited mask plate
05/01/2013CN202913045U Mask frame and corresponding mask component
05/01/2013CN202913044U Mask plate assembly for evaporation of large-size OLED
05/01/2013CN103081064A Production method for a semiconductor element
05/01/2013CN103081028A Multilayer transparent electroconductive film and method for manufacturing same, as well as thin-film solar cell and method for manufacturing same
05/01/2013CN103081009A Fe-Pt-type ferromagnetic material sputtering target
05/01/2013CN103080369A Magnetic material sputtering target provided with groove in rear face of target
05/01/2013CN103080368A Ferromagnetic material sputtering target
05/01/2013CN103080367A Sputtering device, deposition method and control device
05/01/2013CN103080366A Heating apparatus, vacuum-heating method and method for manufacturing thin film
05/01/2013CN103080365A Vapor deposition processing device and vapor deposition processing method
05/01/2013CN103080003A Carbon thin film, mold for molding optical element and method for producing optical element
05/01/2013CN103079369A Light-permeable shell and manufacturing method and application thereof
05/01/2013CN103078121A Preparation method of chromium-nitrogen composite pole plate material for fuel cell
05/01/2013CN103076644A Silicon-aluminum alloy/silicon/zirconium/silicon extreme ultraviolet multilayer film reflecting mirror and preparation method thereof
05/01/2013CN103074680A Hafnium two-dimensional atomic crystal material and preparation method thereof
05/01/2013CN103074654A Surface treatment method for binary pseudo-alloy electronic packaging material
05/01/2013CN103074593A Method for improving flexible AZO (aluminum doped zinc oxide) film photoelectric property by excimer laser
05/01/2013CN103074592A Metal foil continuous film-coating device
05/01/2013CN103074591A Conveying device and treating device with the same
05/01/2013CN103074590A Preparation method of fog-resistant self-cleaning glass
05/01/2013CN103074589A Preparation method of nanocrystal composite coating
05/01/2013CN103074588A Method for preparing boron-nitrogen-doped titanium dioxide thin film
05/01/2013CN103074587A Adjusting device and adjusting method for large-area continuous magnetron sputtering coating uniformity
05/01/2013CN103074586A Low-temperature and low-damage multifunctional composite coating device and method
05/01/2013CN103074585A Design and application of composite target material used in arc ion plating magnetic material coating deposition
05/01/2013CN103074584A Film coating apparatus
05/01/2013CN103074583A Laser deposition preparation technology of CIGS film cell
05/01/2013CN103074582A PVD equipment adopting laser heating
05/01/2013CN103074581A PVD equipment adopting light heating
05/01/2013CN103074580A PVD equipment adopting electromagnetic heating
05/01/2013CN103074579A Thin film deposition apparatus
05/01/2013CN103074578A Rotary deposition apparatus
05/01/2013CN103074577A Cadmium magnesium oxide alloy transparent conductive thin film and preparation method thereof
05/01/2013CN103074576A ZnO-based diluted magnetic semiconductor thin film and preparation method thereof
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