| Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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| 03/21/2013 | WO2013039877A1 Vapor transport deposition system and method employing removable shields |
| 03/21/2013 | WO2013039251A1 Sputtering target and method for producing same |
| 03/21/2013 | WO2013039196A1 Vapor-deposition mask, vapor-deposition mask manufacturing method, and thin-film pattern forming method |
| 03/21/2013 | WO2013039132A1 Composite plastic member, and method for producing same |
| 03/21/2013 | WO2013038983A1 High-purity copper-manganese-alloy sputtering target |
| 03/21/2013 | WO2013038962A1 High-purity copper-manganese-alloy sputtering target |
| 03/21/2013 | WO2013038668A1 Mo-w target and method for manufacturing same |
| 03/21/2013 | WO2013038067A1 Coating material |
| 03/21/2013 | WO2013037951A1 Catalyst deposition for the preparation of carbon nanotubes |
| 03/21/2013 | WO2013037423A1 Vacuum substrate treatment system having an emergency cooling device |
| 03/21/2013 | WO2013037087A1 Preparation method for catalyst on surface of work piece in combustion chamber of internal combustion engine |
| 03/21/2013 | WO2012167076A3 Nanochannel-guided patterning for polymeric substrates |
| 03/21/2013 | WO2012150804A3 Method for preparing nano powder using supporter |
| 03/21/2013 | US20130073050 Coated implants and related methods |
| 03/21/2013 | US20130071736 Phase separated silicon-tin composite as negative electrode material for lithium-ion batteries |
| 03/21/2013 | US20130071694 Interlayers for magnetic recording media |
| 03/21/2013 | US20130070366 Magnetic recording head with low-wear protective film having hydrogen and/or water vapor therein |
| 03/21/2013 | US20130068614 Sputter deposition apparatus |
| 03/21/2013 | US20130068611 Localized, In-Vacuum Modification of Small Structures |
| 03/21/2013 | US20130068162 System and Method of Dosage Profile Control |
| 03/21/2013 | US20130068157 Method of manufacturing silicon carbide crystal |
| 03/21/2013 | US20130068136 Formed article, method for producing same, electronic device member, and electronic device |
| 03/21/2013 | DE202007019519U1 Halogenhaltige Schichten Halogen-containing layers |
| 03/21/2013 | DE112011100501T5 Elektronenstrahlüberwachungssystem zur verhinderung von goldspritzern und fotolackvernetzung während der verdampfung Electron beam monitoring system for the prevention of gold splatter paint and photo-crosslinking during the evaporation |
| 03/21/2013 | DE102011113563A1 Karussellschlitten für Vakuumbehandlungsanlage Carousel slide for vacuum treatment plant |
| 03/21/2013 | DE102011083139A1 Substrate processing system such as vacuum coating equipment, has substrate carriers that mesh with each other in substrate transfer position such that they are pivoted back and forth between two tilt positions, in inclined manner |
| 03/21/2013 | DE102011082956A1 Transfermasken zur lokalen Bedampfung von Substraten und Verfahren zu deren Herstellung Transfer masks for local vapor deposition of substrates and processes for their preparation |
| 03/21/2013 | DE102011082900A1 Vacuum coating apparatus useful for coating disc-shaped substrates, comprises a plant chamber limited by chamber walls, having opening that is closable by a vacuum-tight chamber lid, a transport device and coating device with tubular target |
| 03/21/2013 | DE102011082775A1 Method for simultaneous optimization of different layer properties by controlling vacuum separation process, involves forming mathematical links from spectral lines and generating intensity linkage by multiplying mathematical links |
| 03/20/2013 | EP2571032A1 Zinc oxide-based conductive multilayer structure, process for producing same, and electronic device |
| 03/20/2013 | EP2570518A1 Method of manufacturing aluminum structure, and aluminum structure |
| 03/20/2013 | CN202808934U Coating equipment |
| 03/20/2013 | CN202808933U Heating plate for substrate of heterojunction solar battery |
| 03/20/2013 | CN202808932U End connecting structure of vacuum heater |
| 03/20/2013 | CN202808931U Novel target material basket tool |
| 03/20/2013 | CN202808930U Nano film evaporation external member for solar cell |
| 03/20/2013 | CN1813078B Workpiece comprising an alcr-containing hard material layer and production method |
| 03/20/2013 | CN102985898A Transparent conductive film and method for producing same |
| 03/20/2013 | CN102985857A Process for producing metamaterial, and metamaterial |
| 03/20/2013 | CN102985590A Method for treating a surface of a polymeric part by multi-energy ions |
| 03/20/2013 | CN102985589A Method and system for manufacturing a transparent body for use in a touch panel |
| 03/20/2013 | CN102985588A Process kit shield for improved particle reduction |
| 03/20/2013 | CN102985587A Plasma assisted deposition of Mo/Si multilayers |
| 03/20/2013 | CN102985586A Process and apparatus for the application of solid layers |
| 03/20/2013 | CN102985585A Transparent conductive film and manufacturing method therefor |
| 03/20/2013 | CN102985584A PVD coating for metal machining |
| 03/20/2013 | CN102985583A 涂层切削工具 Coated cutting tool |
| 03/20/2013 | CN102985358A Powder, sintered body and sputtering target, each containing elements Cu, In, Ga and Se, and method for producing the powder |
| 03/20/2013 | CN102984946A Method of making coated article having anti-bacterial and/or anti-fungal coating and resulting product |
| 03/20/2013 | CN102983787A Antenna solar cell and preparation method thereof |
| 03/20/2013 | CN102980162A Heat radiator containing vacuum-evaporated coating for LED (Light Emitting Diode) lamp and manufacture preparation method thereof |
| 03/20/2013 | CN102978629A Preparation method and application of SERS (surface enhanced Raman scattering) substrate of Mo/Ag laminated metal-matrix composite material |
| 03/20/2013 | CN102978581A Thermal expansion aluminum guide roller and production process thereof |
| 03/20/2013 | CN102978580A Control mechanism for main roller of vacuum aluminizing machine |
| 03/20/2013 | CN102978579A Preparation method of Ta (Tantalum) film on bearing steel surface |
| 03/20/2013 | CN102978578A Copper oxide doped tin dioxide base ammonia gas sensitive sensor manufacturing method |
| 03/20/2013 | CN102978577A Intermediate-frequency magnetron sputtering coating device |
| 03/20/2013 | CN102978576A Production method for high-compactness chromium alloy target |
| 03/20/2013 | CN102978575A Plasma coating device |
| 03/20/2013 | CN102978574A Evaporation boat for depositing metal alumium film through vacuum thermal evaporation |
| 03/20/2013 | CN102978573A Evaporation source for cadmium telluride (CdTe) thin film deposition and preparation method thereof |
| 03/20/2013 | CN102978572A Method for preparing CdTe film and thermal evaporation device |
| 03/20/2013 | CN102978571A Fully dry wire drawing method for plastic base material |
| 03/20/2013 | CN102978570A Metal evaporation film and intermediate for preparing metal evaporation film and related preparation method of metal evaporation film |
| 03/20/2013 | CN102978569A Method for preparing alloy thin plate with Fe, 5.5-6.5% by weight of Si and 0.3-1.0% by weight of Al by adopting continuous multi-arc ion plating physical vapor deposition |
| 03/20/2013 | CN102978568A OLED (organic light-emitting diode) evaporation cover and processing method thereof |
| 03/20/2013 | CN102978567A Method for preparing photoetching-free high-precision mask for evaporated electrodes |
| 03/20/2013 | CN102978566A Method for preparing vacuum physical vapor deposition plating pattern |
| 03/20/2013 | CN102978426A Preparation method of tungsten carbide composite powder |
| 03/20/2013 | CN102975418A Super-hard wear-resisting chromium-based compound coating micro drill bit for PCB (Printed Circuit Board) and preparation method thereof |
| 03/20/2013 | CN102418072B Preparation method of light absorption layer of Cu-In-Ga-Se (CIGS) film solar cell |
| 03/20/2013 | CN102409297B Simplified CeO2/LaZrO3 composite separating layer used for second generation high temperature superconductive tapes and its preparation method |
| 03/20/2013 | CN102382648B Method for enhancing photosynthesis spectral intensity of LED phosphor by using plasma |
| 03/20/2013 | CN102321871B Method for producing molybdenum alloy sputtering target for flat-panel display by using hot isostatic press |
| 03/20/2013 | CN102286720B High-temperature solar selective absorbing coating with SiO2 and Cr2O3 double-ceramic structure and preparation method thereof |
| 03/20/2013 | CN102254998B Cadmium-free CuInGaSe thin film solar cell assembly and preparing method of zinc sulfide buffer layer thin film thereof |
| 03/20/2013 | CN102148192B Method for growing blocking layer and seed layer on surface of silicon through hole |
| 03/20/2013 | CN102084022B Thin film manufacturing method and silicon material that can be used with said method |
| 03/20/2013 | CN102039421B Preparation method of organic film monodisperse silver quantum dots |
| 03/20/2013 | CN101994096B Vacuum film coater |
| 03/20/2013 | CN101994095B Coated umbrella stand |
| 03/20/2013 | CN101962754B Film coating device |
| 03/20/2013 | CN101921992B Carrying device |
| 03/20/2013 | CN101906611B Coating machine |
| 03/20/2013 | CN101899642B Film-coating device |
| 03/20/2013 | CN101784692B Process for manufacturing multi-layered thin film by dry vacuum vapor deposition |
| 03/20/2013 | CN101591764B Material filming method and organic electroluminescence component prepared by same |
| 03/20/2013 | CN101589469B Method for forming chalcogenide film and method for manufacturing recording element |
| 03/20/2013 | CN101533876B Method for passivating amorphous InGaAs thin-film material |
| 03/20/2013 | CN101473059B Cu-Mn alloy sputtering target and semiconductor wiring |
| 03/20/2013 | CN101379213B Water vapor passivation of a wall facing a plasma |
| 03/19/2013 | US8399861 Lithography apparatus using extreme UV radiation and having a volatile organic compounds sorbing member comprising a getter material |
| 03/19/2013 | US8399362 Apparatus for forming a film and an electroluminescence device |
| 03/19/2013 | US8399110 Adhesive, hermetic oxide films for metal fluoride optics and method of making same |
| 03/19/2013 | US8399107 Composition for making metal matrix composites |
| 03/19/2013 | US8399071 Process for producing polycrystalline silicon |
| 03/19/2013 | US8398834 Target utilization improvement for rotatable magnetrons |
| 03/19/2013 | US8398833 Use of DC magnetron sputtering systems |
| 03/19/2013 | US8398832 Coils for generating a plasma and for sputtering |
| 03/19/2013 | US8398826 Thin film semiconductor material produced through reactive sputtering of zinc target using nitrogen gases |