Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
03/2013
03/28/2013DE112010005432T5 Piezoelektrisches dünnes Filmelement, und Herstellungsverfahren desselben und piezoelektrische Dünnfilmvorrichtung A piezoelectric thin film element, and production method thereof, and thin film piezoelectric device
03/28/2013DE102012108901A1 Verfahren und System zum Herstellen von Chalcogenid-Halbleitermaterialien unter Verwendung von Sputter- und Verdampfungsfunktionen A method and system for making chalcogenide semiconductor materials using sputtering and evaporation functions
03/28/2013DE102012018360A1 Beschichtete Pelletiermatrizen Coated Pelletiermatrizen
03/28/2013DE102012017830A1 Mehrlagig verschleissfest beschichtetes Element und Verfahren zum Herstellen desselben Multi-layered wear-resistant coated member and method for manufacturing the same
03/28/2013DE102011115145A1 Verfahren zum Magnetronsputtern mit Ausgleich der Targeterosion A method of magnetron sputtering with clearing of target erosion
03/28/2013DE102011083461A1 Verfahren zum Erzeugen einer Deckschicht aus Siliziumoxid an einem EUV-Spiegel A method of producing a top layer of silicon oxide on an EUV mirror
03/28/2013DE102011005753A1 Method for producing doped, conductive and transparent metal oxide layer on substrates, involves coating a cooled substrate with ceramic/metallic target in inert atmosphere at predetermined room temperature and heating the coated layer
03/28/2013CA2849410A1 Metal material for electronic component and method for manufacturing the same
03/28/2013CA2849042A1 Method for the photocatalytically active coating of surfaces
03/28/2013CA2849024A1 Carousel carrier for a vacuum treatment installation
03/27/2013EP2573597A1 Reflection member
03/27/2013EP2573205A2 Sputter target assembly having a low-temperature high-strength bond
03/27/2013EP2573204A1 Method for manufacturing a domestic appliance panel
03/27/2013EP2573203A1 Method for manufacturing a domestic appliance panel
03/27/2013EP2573202A1 Thin film forming apparatus
03/27/2013EP2573059A1 Sintered zinc oxide tablet and process for producing same
03/27/2013EP2572014A1 Spotless arc directed vapor deposition (sa-dvd) and related method thereof
03/27/2013EP2572013A1 Non-continuous bonding of sputtering target to backing material
03/27/2013EP2572012A1 Chalcogenide-based materials and methods of making such materials under vacuum using post-chalcogenization techniques
03/27/2013CN202839530U Magnetic lens focusing device of e type electronic gun
03/27/2013CN202830162U Wafer loading platform structure
03/27/2013CN202830161U Glass substrate holder
03/27/2013CN202830160U Plane of rotation magnetron sputtering target for increasing uniformity of target sputtering
03/27/2013CN202830159U Vacuum coating arc light and glow light collaborative discharge physical vapor deposition device
03/27/2013CN202830158U Magnetic steel assembling jig
03/27/2013CN202830157U Target poisoning releasing device for magnetic control film plating machine
03/27/2013CN202830156U Target-material back plate
03/27/2013CN202830155U Furnace-tube automatic recovery system
03/27/2013CN202830154U Vacuum silver membrane evaporation equipment
03/27/2013CN103003998A Separator plate for a fuel cell and a production method therefor
03/27/2013CN103003914A Method and system for modifying substrate patterned features using ion implantation
03/27/2013CN103003469A Target utilization improvement for rotatable magnetrons
03/27/2013CN103003468A Ferromagnetic material sputtering target with little particle generation
03/27/2013CN103003467A Spotless arc directed vapor deposition (SA-DVD) and related method thereof
03/27/2013CN103003466A Process for coating a substrate by means of an arc
03/27/2013CN103003465A Conductive member, manufacturing method therefor, separator for fuel cell, and solid polymer fuel cell
03/27/2013CN103003464A Organic vapor jet printing
03/27/2013CN103003340A Method for grafting into a layer located deep inside an organic material by means of an ion beam
03/27/2013CN103003062A Transparent, weather-resistant barrier film having an improved barrier effect and scratch resistance properties
03/27/2013CN103002655A Ultrahigh-thermal-conductivity metal substrate and manufacturing process thereof
03/27/2013CN103000637A Coated thin film transistor (TFT) substrate, preparation method thereof and TFT
03/27/2013CN103000576A Preparation process for Cu (Ge, Zr) alloy for controllable self-formed barrier layer
03/27/2013CN102994976A Multi-element substrate, graphene capable of continuously adjusting layer number based on multi-element substrate and preparation method
03/27/2013CN102994972A Main roll structure of vacuum aluminizing machine
03/27/2013CN102994971A Film coating jig for lamp cup
03/27/2013CN102994970A Target usage detection system and method
03/27/2013CN102994969A Controllable heating device for vacuum aluminizing machine
03/27/2013CN102994968A Anti-corrosive treatment method for aluminum alloy
03/27/2013CN102994967A Ultra high speed preparation method for ultra thick diamond-like coating
03/27/2013CN102994966A Scanning mechanism, magnetic control source and magnetron sputtering device
03/27/2013CN102994965A Magnetron sputtering reeling coater for large-area flexible substrate
03/27/2013CN102994964A Preparation method of metal-sulfide-doped diamond-like carbon composite film
03/27/2013CN102994963A Continuous winding sputter coating machine
03/27/2013CN102994962A Cylindrical sputtering target material, wiring board and thin film transistor using the same
03/27/2013CN102994961A Preparation method of low-temperature multi-component composite coating based on plasma enhancement and rare earth modification technology
03/27/2013CN102994960A Arc ion coating device
03/27/2013CN102994959A Heating device for winding type vacuum aluminizing machine
03/27/2013CN102994958A Heat evaporation source of heat evaporation coating equipment
03/27/2013CN102994957A No-diffusion-pump type coating machine for composite films
03/27/2013CN102994956A Oil supply control system for vacuum aluminizing machine
03/27/2013CN102994955A Method of deposition
03/27/2013CN102994954A Plated film member and preparation method
03/27/2013CN102994953A Method for generating dendritic crystal pattern on surface of Cu/Ti film
03/27/2013CN102994952A Cu-Mn alloy sputtering target material, thin-film transistor layout using the same and thin-film transistor
03/27/2013CN102994951A Method for improving thermochromatic characteristic of vanadium dioxide film
03/27/2013CN102994950A Lead-free [(Na0.57K0.43)0.94Li0.06][(Nb0.94Sb0.06)0.95Ta0.05]O3 nano tube and preparation method thereof
03/27/2013CN102994949A Golden ornament and process for producing the same
03/27/2013CN102994948A Multilayer coated wear-resistant member and method for making the same
03/27/2013CN102994947A Diamond-like carbon composite molybdenum disulfide nano multilayer film and method for preparing same
03/27/2013CN102994946A Method for enhancing bonding strength of dental titanium porcelain through depositing nanometer niobium nitride
03/27/2013CN102994945A ZrVN nano composite membrane and preparation method thereof
03/27/2013CN102994937A Corrosion protection method of artificial limb alloy in simulated human body fluid
03/27/2013CN102991021A Ultrahigh-temperature anti-oxidation composite coating and preparation method thereof
03/27/2013CN102345101B Method for plating inner surface of long tube through arc ion plating with magnetic field and electric field enhancement
03/27/2013CN102321867B Carbon layer material with protective layer structure and preparation method thereof
03/27/2013CN102300383B Inductance coupling apparatus and plasma processing equipment applying same
03/27/2013CN102226264B Method for producing ZnSO alloy film with adjustable sulfur-doped growth band gap
03/27/2013CN102167950B Vacuum plating paint, and preparation and construction methods thereof
03/27/2013CN102127764B Method for implementing semi-dry plating on surface of plastic substrate
03/27/2013CN102046833B Arrangement and method for removing alkali- or alkaline earth-metals from a vacuum coating chamber
03/27/2013CN102037154B Magnet unit, and magnetron sputtering device
03/27/2013CN102011089B Method for preparing nanocrystalline resistance conversion material
03/27/2013CN101949003B High-reflectivity nano film layer for high-power LED lamps and film coating method thereof
03/27/2013CN101880859B 溅射标靶 Sputtering targets
03/27/2013CN101855035B Member covered with hard coating film and process for the production of the member
03/27/2013CN101645336B Indium tin oxide (ito) layer forming
03/27/2013CN101627145B Material for transparent conductive film and transparent conductive film
03/27/2013CN101618615B VC/Si3N4 nano laminated coating and preparation method thereof
03/27/2013CN101618614B TiC/Si3N4 nano laminated coating and preparation method thereof
03/27/2013CN101509127B Method for manufacturing sputtering target, method for cleaning sputtering target, sputtering target and sputtering device
03/27/2013CN101381857B Evaporation apparatus, method of manufacturing anode using same, and method of manufacturing battery using same
03/27/2013CN101151701B A method for operating a pulsed arc evaporation source and a vacuum processing equipment with the pulsed arc evaporation source
03/27/2013CN101089220B Process kit and target for substrate processing chamber
03/27/2013CN101010445B Layered composite including cubic boron nitride
03/26/2013US8404177 System for recovery of cadmium telluride (CdTe) from system components used in the manufacture of photovoltaic (PV) modules
03/26/2013US8404089 Sputtering method
03/26/2013US8404058 Process for surface treating aluminum or aluminum alloy and housing made by same
03/26/2013US8402916 Deposition mask
03/21/2013WO2013040461A2 Coated implants and related methods
03/21/2013WO2013040369A1 Technique for ion implanting a target
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