Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
06/2013
06/20/2013WO2013089254A1 Multilayer hard coating film and method for producing same
06/20/2013WO2013089138A1 Deposition mask and manufacturing method for deposition mask
06/20/2013WO2013089115A1 Semiconductor device and method for manufacturing the same
06/20/2013WO2013088998A1 Film forming device and manufacturing method for glass with film
06/20/2013WO2013088785A1 Indium sputtering target member and method for producing same
06/20/2013WO2013088706A1 Surface treatment apparatus, surface treatment method, substrate supporting mechanism, and recording medium
06/20/2013WO2013088631A1 Processing device
06/20/2013WO2013088624A1 Processing device and shield
06/20/2013WO2013088623A1 Processing device and shield
06/20/2013WO2013088615A1 Sputtering device
06/20/2013WO2013088603A1 Power introduction device and vacuum processing device using power introduction device
06/20/2013WO2013088600A1 Sputtering device, target and shield
06/20/2013WO2013088598A1 Substrate holder device and vacuum processing device
06/20/2013WO2013088597A1 Substrate holder device and vacuum processing device
06/20/2013WO2013088451A1 An improved solar selective coating having high thermal stability and a process for the preparation thereof
06/20/2013WO2013087561A2 ELECTRICALLY CONDUCTIVE SINx CERAMIC METAL COMPOSITE; ITS SPUTTERING TARGETS AND METHODS THEREOF
06/20/2013WO2013087338A1 Arrangement for coating a substrate
06/20/2013WO2013087060A1 Device for evaporating a material to be evaporated
06/20/2013WO2013087058A1 Method for producing coating systems containing metal layers for finishing plastic surfaces
06/20/2013WO2013086552A1 Carbon-based coating
06/20/2013WO2013021149A3 Methods for forming an organic layer on a substrate
06/20/2013US20130157407 APPARATUS FOR INLINE PROCESSING OF Cu(In,Ga)(Se,S)2 EMPLOYING A CHALCOGEN SOLUTION COATING MECHANISM
06/20/2013US20130157400 Fabrication System and Manufacturing Method of Light Emitting Device
06/20/2013US20130157046 Plastic article and method for manufacturing the same
06/20/2013US20130157044 Coated article and method for making same
06/20/2013US20130157043 Coated article and method for manufacturing same
06/20/2013US20130157023 Multilayer nitride hard coatings
06/20/2013US20130156995 Partially Metalized Plastic Product And Manufacturing Process
06/20/2013US20130156967 Spray rejuvenation of sputtering targets
06/20/2013US20130156939 Method and apparatus for analyzing and/or repairing of an euv mask defect
06/20/2013US20130156936 Sputter gun having variable magnetic strength
06/20/2013US20130153414 Indium Target And Method For Manufacturing Same
06/20/2013US20130153413 Sputter gun shutter
06/20/2013US20130153412 Apparatus for enabling concentricity of plasma dark space
06/20/2013US20130153408 Method for producing cubic zirconia layers
06/20/2013US20130153407 Method of preparing sandwich composite coating on engineering plastic surface
06/20/2013DE112011102310T5 Gleitlager Plain bearings
06/20/2013DE102012222673A1 Gerät zur Abscheidung organischer Schichten, Verfahren zum Fertigen von Geräten mit organischer lichtemittierender Anzeige unter Verwendung desselben und Gerät mit organischer lichtemittierender Anzeige Apparatus for deposition of organic layers, methods of fabricating devices with organic light-emitting display using the same, and organic light-emitting display device with
06/20/2013DE102012209293B3 Coating a substrate, comprises arranging substrate to be coated over cutting surface of target, atomizing coating material by sputtering under e.g. inert gas, and modifying distribution of target components by high energy pulsed magnetron
06/20/2013DE102011121148A1 Vorrichtung zum Verdampfen eines Verdampfungsguts An apparatus for vaporizing a material to be evaporated
06/20/2013DE102011120940A1 Beschichtungssystem enthaltend Metallschichten zur Veredelung von Oberflächen und Verfahren zur Herstellung der Beschichtung A coating system comprising metal layers for surface finishing and method for preparing the coating
06/20/2013DE102011088525A1 Anordnung zum Beschichten eines Substrats An arrangement for coating a substrate
06/19/2013EP2604719A1 Tantalum spattering target
06/19/2013EP2604718A1 Tantalum spattering target
06/19/2013EP2604717A1 Conductive member, manufacturing method therefor, separator for fuel cell, and solid polymer fuel cell
06/19/2013EP2604587A1 Electrically conductive SiNx ceramic composite, its sputtering targets and manufacturing methods thereof
06/19/2013EP2603558A1 Thermoplastic moulding compositions with improved adhesion of electroplated metal layer
06/19/2013CN203007407U Chemical vapor deposition equipment
06/19/2013CN203007401U Horizontal type thin film deposition cooling plate device
06/19/2013CN203007400U Device for fixing transmission coupling of sputtering device
06/19/2013CN203007399U Thermal-insulating device for heating long-strip-shaped substrate
06/19/2013CN203007398U Tungsten boat with cover
06/19/2013CN203007397U Automatic loading and unloading device for jig
06/19/2013CN203007396U Heterojunction solar battery sputtering manufacture procedure gas mixing device
06/19/2013CN203007395U Self-circulating cooling device for sputtering targets
06/19/2013CN203007394U Cathode corrugated tube interface
06/19/2013CN203007393U Cathode mounting transition interface
06/19/2013CN203007392U Anti-dropping plate as well as anti-dropping plate-target assembly and plasma sputtering equipment
06/19/2013CN203007391U Compound target material for depositing magnetic material coating through arc ion plating
06/19/2013CN203007390U Deposition device of titanium dioxide thin film with surface provided with protrusions
06/19/2013CN203007389U Tungsten boat with tungsten filaments
06/19/2013CN203007388U Double-slot heating device
06/19/2013CN203007387U Vacuum film plating machine
06/19/2013CN203007386U Linear evaporation source device
06/19/2013CN203007385U Device for even vacuum coating on side surfaces of large batch of cylinders
06/19/2013CN203007384U Insulation switching device for high voltage electricity in vacuum
06/19/2013CN203007383U Antibacterial stainless steel with copper-cerium thin film contained on surface
06/19/2013CN203007382U Control system of copper-indium-gallium-diselenide thin film battery
06/19/2013CN203007381U Device for forming SiN thin film on substrate
06/19/2013CN203007380U Mask plate
06/19/2013CN103168338A Sputtering sources for high-pressure sputtering with large targets and sputtering method
06/19/2013CN103168328A Sputtering target for magnetic recording film and method for producing same
06/19/2013CN103168114A Vapor deposition device, vapor deposition method, and method for producing organic electroluminescence display device
06/19/2013CN103168113A Hard film coated member and method for forming hard coating film
06/19/2013CN103167766A Shell body and manufacturing method of shell body
06/19/2013CN103165811A Silicon substrate niobium nitride film superconducting material and preparing method thereof
06/19/2013CN103165748A Method of preparing copper-zinc tin-sulphur solar cell absorbed layer thin film
06/19/2013CN103162452A Inoxidizability solar spectrum selective absorbing coating and preparation method thereof
06/19/2013CN103161733A Ti / TiCrN nanometer multilayer coating impeller and preparation method thereof
06/19/2013CN103160798A Device for detecting evaporation source and method
06/19/2013CN103160797A Nano ceramic coating, coating-deposited die-casting mold and preparation method thereof
06/19/2013CN103160796A Method of preparing diamond-like thin film on surface of steel
06/19/2013CN103160795A Target magnetron sputtering device and film coating method used for powder particle surface film coating
06/19/2013CN103160794A Method for preparing diamond-like carbon film on carbon steel surface or nodular cast iron surface
06/19/2013CN103160793A Preparation method for super thick tin-titanium carbonitride (TIN-TICN) multi-layer composite thin film materials
06/19/2013CN103160792A Coating device
06/19/2013CN103160791A Preparation method of sodium-doped molybdenum plane sputtering target material
06/19/2013CN103160790A Method of preparing biology activity composite thin film on surface of titanium alloy
06/19/2013CN103160789A Organic layer deposition apparatus, organic light emitting display device and manufacturing method thereof
06/19/2013CN103160788A Vacuum evaporation system
06/19/2013CN103160787A Double-faced film-coating method suitable for passive element
06/19/2013CN103160786A Nano coating preparation method and antibiosis nano coating prepared by nano coating
06/19/2013CN103160785A Manufacture method for nitrogen-magnesium co-doping p-type zinc oxide film
06/19/2013CN103160784A Granular evaporation material, film forming method of evaporation film, and evaporation film
06/19/2013CN103160783A TiCuN nano composite coating and preparation method thereof
06/19/2013CN103160782A Method of preparing diamond-like coating layer on the surface of automobile motor air valve tappet
06/19/2013CN103160781A Manufacture method of multilayer gradient nano-composite diamond film of surface of die steel
06/19/2013CN103160780A Preparation method of multilayer nano-composite-class diamond films on surface of camshaft
06/19/2013CN103160779A Ultralow-friction silicon-aluminum double-element mixed amorphous carbon film preparing method
06/19/2013CN103160778A Vacuum coating piece and manufacturing method thereof
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