| Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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| 07/04/2013 | US20130168233 Apparatus and methods for heteroepitaxial growth using pulsed laser and sputtering deposition with real-time, in situ rheed imaging |
| 07/04/2013 | US20130168232 Coils for generating a plasma and for sputtering |
| 07/04/2013 | US20130168231 Method For Sputter Deposition And RF Plasma Sputter Etch Combinatorial Processing |
| 07/04/2013 | US20130167920 Conductive substrate and fabricating method thereof, and solar cell |
| 07/04/2013 | US20130167773 Combinatorial Processing Using High Deposition Rate Sputtering |
| 07/04/2013 | DE112011102927T5 Verfahren zum Ausbilden eines Schutzfilms und Verfahren zur Oberflächenabflachung A method for forming a protective film and method for surface flattening |
| 07/04/2013 | DE102012113145A1 Device, used for loading and unloading substrates to be treated in batch process, includes processing chamber, and a lock chamber, where processing and lock chambers are bounded via chamber walls and comprise substrate transporting device |
| 07/04/2013 | DE102011122591A1 Vorrichtung zum Verdampfen eines Verdampfungsguts An apparatus for vaporizing a material to be evaporated |
| 07/04/2013 | DE102011122329A1 Reflektierendes optisches Bauteil Reflecting optical component |
| 07/04/2013 | DE102011075851B4 Verfahren zur stabilen reaktiven Abscheidung von Oxiden von einer Rohrmagnetronanordnung in Vakuumbeschichtungsanlagen und Anordnung zur Durchführung des Verfahrens Method for the stable reactive deposition of oxides from a Rohrmagnetronanordnung in vacuum coating systems and apparatus for carrying out the method |
| 07/04/2013 | DE102005024010B4 Beschichtungsanlage mit Einrichtungen für Prüf- und Serviceroutinen und Verfahren zum Durchführen von Prüf- und Serviceroutinen bei Beschichtungsanlagen Coating system with facilities for testing and service routines and procedures for performing the test and service routines in coating systems |
| 07/04/2013 | DE10196150B4 Magnetron-Sputtervorrichtung und Verfahren zum Steuern einer solchen Vorrichtung A magnetron sputtering apparatus and method for controlling such a device |
| 07/03/2013 | EP2610895A1 Radical source and molecular beam epitaxy apparatus |
| 07/03/2013 | EP2610364A1 Hard coating layer and method for forming the same |
| 07/03/2013 | EP2610363A1 Method for modifying light absorption layer |
| 07/03/2013 | EP2610231A2 Target for transparent electroconductive film, transparent electroconductive material, transparent electroconductive glass, and transparent electroconductive film |
| 07/03/2013 | EP2610230A2 Target for transparent electroconductive film, transparent electroconductive material, transparent electroconductive glass, and transparent electroconductive film |
| 07/03/2013 | EP2610229A2 Transparent electroconductive glass coated with transparent electroconductive film containing IZTO |
| 07/03/2013 | CN203034088U Isolation device for winding film coating system |
| 07/03/2013 | CN203034087U Long strip substrate insulation cover |
| 07/03/2013 | CN203034086U Laser beam automatic shifting control device |
| 07/03/2013 | CN203034085U Improved evaporation coating machine |
| 07/03/2013 | CN203034084U Movable evaporation device for active matrix/organic light emitting diode (AMOLED) |
| 07/03/2013 | CN203034083U Vacuum coating device with three-flap housing attached with alternate coating piece rotating stands |
| 07/03/2013 | CN203034082U Segmentation photomask for vapor plating of organic light emitting display |
| 07/03/2013 | CN203034081U Adjusting instrument for mask loading and separating machine |
| 07/03/2013 | CN203034080U Lens vacuum coating clamp |
| 07/03/2013 | CN203034079U Vacuum film coating type automatic varnishing machine |
| 07/03/2013 | CN203032019U Metallized graphite |
| 07/03/2013 | CN103189968A Method for producing dielectric thin film |
| 07/03/2013 | CN103189956A Method for extending lifetime of an ion source |
| 07/03/2013 | CN103189545A Alloy, protective coating, and component |
| 07/03/2013 | CN103189542A Vapor deposition method, vapor deposition apparatus, and organic el display device |
| 07/03/2013 | CN103189541A Coating based on NiAl2O4 in spinel structure |
| 07/03/2013 | CN103189333A Method for producing a connection between two ceramic parts, in particular parts of a pressure sensor, and a ceramic product, in particular a ceramic pressure sensor |
| 07/03/2013 | CN103189202A Gas-barrier laminate film |
| 07/03/2013 | CN103188895A Shell body and manufacturing method thereof |
| 07/03/2013 | CN103187432A Mask plate, organic light-emitting diode (OLED) transparent display panel and manufacturing methods of display panel |
| 07/03/2013 | CN103187364A Method for preparing seed layer in deep hole with high depth-to-width ratio |
| 07/03/2013 | CN103187357A Method for preventing hooped metal residue being formed on metal interconnection line |
| 07/03/2013 | CN103184433A Gas diffusion homogenization device and plasma process equipment using same |
| 07/03/2013 | CN103184431A Thin film depositing apparatus and the thin film depositing method using the same |
| 07/03/2013 | CN103184424A Low temperature material optimization method and processing apparatus |
| 07/03/2013 | CN103184423A Fixture for vacuum coated glass |
| 07/03/2013 | CN103184422A Low-temperature deposition device and process for TCO film |
| 07/03/2013 | CN103184421A 真空溅射靶磁芯 Vacuum sputtering target core |
| 07/03/2013 | CN103184420A Scanning mechanism for driving magnetron, magnetron sputtering source and magnetron sputtering equipment |
| 07/03/2013 | CN103184419A Production method of aluminum-neodymium alloy target material |
| 07/03/2013 | CN103184418A Photovoltaic glass plated film process chamber gas introduction apparatus |
| 07/03/2013 | CN103184417A Photovoltaic glass sputtering target cathode self-circulation cooling device |
| 07/03/2013 | CN103184416A Rotation and revolution combined type vacuum sputtering apparatus |
| 07/03/2013 | CN103184415A Target material, resistive film, thin-film resistor member, circuit board and manufacturing methods |
| 07/03/2013 | CN103184414A Hard coating layer and method for forming the same |
| 07/03/2013 | CN103184413A Vacuum coater and vacuum coating method |
| 07/03/2013 | CN103184412A Cleaning equipment for vacuum coating machine |
| 07/03/2013 | CN103184411A Film-coating member and manufacturing method thereof |
| 07/03/2013 | CN103184410A Film-coating member and manufacturing method thereof |
| 07/03/2013 | CN103184409A A film forming apparatus and a particle capture board |
| 07/03/2013 | CN103183924A Microwave absorption composite material of hollow glass microspheres plated with Al and carbonyl iron powder, and preparation method thereof |
| 07/03/2013 | CN103182804A Film-coating member and manufacturing method thereof |
| 07/03/2013 | CN103182536A Surface-coated cutting tool with excellent chipping resistance, peeling resistance, and wear resistance |
| 07/03/2013 | CN103182507A Production method of chromium-aluminium alloy target material |
| 07/03/2013 | CN103182100A Medical degradable magnesium alloy material with iron ion membrane sputtered on surface and preparation process |
| 07/03/2013 | CN102586777B Preparation method for CBN (Cubic Boron Nitride) coated cutter based on micrometer/nanometer diamond transition layer |
| 07/03/2013 | CN102492922B Method for preparing graphene through thermal evaporation of GeC |
| 07/03/2013 | CN102486465B Multifunctional ion beam sputtering and etching and in-situ physical property analysis system |
| 07/03/2013 | CN102330058B Method for preparing multi-grade antimonytelluride nano wire harness array by adopting physical vapor deposition |
| 07/03/2013 | CN102317015B Surface-coated cutting tool |
| 07/03/2013 | CN102286717B Cylindrical large-area film coating target prepared through plasma spray coating and method |
| 07/03/2013 | CN102265355B Transparent electroconductive laminate and transparent touch panel |
| 07/03/2013 | CN102206807B Method and device for producing flat panel solar heat-absorption coated board |
| 07/03/2013 | CN102191472B Method for recycling separation blade |
| 07/03/2013 | CN102162084B High-temperature oxidation resistant nano-ZrOxN1-x film for mold and preparation process thereof |
| 07/03/2013 | CN102002675B Gas intake device of vacuum sputtering equipment |
| 07/03/2013 | CN101962750B Vacuum evaporation method and device |
| 07/03/2013 | CN101379218B Highly reflective layer system, method for producing the layer system and device for carrying out the method |
| 07/03/2013 | CN101268026B 氧化物材料及溅射靶 Oxide material and sputtering target |
| 07/03/2013 | CN101094931B System and method for treating substrates |
| 07/02/2013 | US8476587 Ion source with surface coating |
| 07/02/2013 | US8476105 Method of making a transparent conductive oxide layer and a photovoltaic device |
| 07/02/2013 | US8475929 Barrier film and laminated material, container for wrapping and image display medium using the same, and manufacturing method for barrier film |
| 07/02/2013 | US8475672 Plasma processing device, plasma processing method and method of manufacturing element including substrate to be processed |
| 07/02/2013 | US8475635 Processes and device for the deposition of films on substrates |
| 07/02/2013 | US8475634 Application of HIPIMS to through silicon via metallization in three-dimensional wafer packaging |
| 07/02/2013 | US8475633 Production method for a nanopatterned epoxy substrate |
| 07/02/2013 | US8475596 Apparatus to process coating material using flame nozzle and evaporation deposition device having same |
| 07/02/2013 | US8475595 Coating system |
| 07/02/2013 | CA2519651C Substrates coated with mixtures of titanium and aluminum materials, methods for making the substrates, and cathode targets of titanium and aluminum metal |
| 06/27/2013 | WO2013096329A1 Apparatus and method for hot coating electrodes of lithium-ion batteries |
| 06/27/2013 | WO2013095787A1 Sputtering lithium-containing material with multiple targets |
| 06/27/2013 | WO2013095070A1 Method for manufacturing sputtering target using cold spray and cold spray device |
| 06/27/2013 | WO2013094973A1 Method for manufacturing cylindrical sputtering target |
| 06/27/2013 | WO2013094707A1 Deposition apparatus |
| 06/27/2013 | WO2013094605A1 Fe-Pt-BASED SPUTTERING TARGET IN WHICH C PARTICLES ARE DISPERSED |
| 06/27/2013 | WO2013094403A1 Transparent conductive film laminate, method for producing same, thin-film solar cell, and method for producing same |
| 06/27/2013 | WO2013094346A1 Method for producing conductive mayenite compound and electrode for fluorescent lamps |
| 06/27/2013 | WO2013094200A1 Substrate treatment device |
| 06/27/2013 | WO2013094171A1 Method for forming srruo3 film |
| 06/27/2013 | WO2013093747A1 A method for the forced doping of a doped silicon ingot and system for exploiting the method |
| 06/27/2013 | WO2013092124A1 Apparatus and process for evaporation of material from a metal melt |