Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
06/2013
06/27/2013WO2013091889A1 Substrate with a double layered coating
06/27/2013WO2013091802A1 Low temperature arc ion plating coating
06/27/2013WO2013091761A1 Homogeneous hipims coating method
06/27/2013WO2013091694A1 System and methods for processing a substrate
06/27/2013US20130164554 Method for manufacturing a porous device with restrictive layer and structure thereof
06/27/2013US20130164464 Coated article with low-e coating having barrier layer system(s) including multiple dielectric layers, and/or methods of making the same
06/27/2013US20130164459 Sputtering lithium-containing material with multiple targets
06/27/2013US20130164455 Demagnetization of magnetic media by c doping for hdd patterned media application
06/27/2013US20130164454 Methods of forming layers
06/27/2013US20130164453 Methods of forming layers
06/27/2013US20130164435 Method for treating an elastomeric surface of a device for dispensing a fluid product
06/27/2013US20130163967 Device and method of evaporating a material from a metal melt
06/27/2013US20130163117 Surface Treatment Method to Develope a Durable Wear Resistant Overcoat for Magnetic Recording Systems
06/27/2013US20130161194 Nanopore device, method of fabricating the same, and dna detection apparatus including the same
06/27/2013US20130161188 Method for Bonding Components of a Sputtering Target, a Bonded Assembly of Sputtering Target Components and the Use Thereof
06/27/2013US20130161187 Substrate processing apparatus
06/27/2013US20130161184 Apparatus for forming gas blocking layer and method thereof
06/27/2013US20130161183 System architecture for combined static and pass-by processing
06/27/2013US20130161182 Sputter apparatus, control device for sputter apparatus and film formation method
06/27/2013US20130161181 Method for manufacturing a magnetic recording disk with improved yield
06/27/2013US20130160708 Combinatorial High Power Coaxial Switching Matrix
06/27/2013DE102012111728A1 Hartmetallkörper und Anwendungen davon Cemented carbide body and uses thereof
06/27/2013DE102011121770A1 Homogenes HIPIMS-Beschichtungsverfahren HIPIMS homogeneous coating method
06/27/2013DE102011111629B4 Verfahren zur Herstellung periodischer kristalliner Silizium-Nanostrukturen A process for preparing crystalline silicon-periodic nanostructures
06/27/2013DE102011089501A1 Vorrichtung und Verfahren zum Verdampfen von Material aus einer Metallschmelze Apparatus and method for evaporating material from a metal melt
06/27/2013DE102011056811A1 Verfahren zum Schutz der Oberfläche eines optischen Bauteils sowie Vorrichtung zur Bearbeitung von Werkstücken A method for protecting the surface of an optical component and device for machining of workpieces
06/26/2013EP2607519A2 Scratch resistant coated glass article including layer(s) resistant to fluoride-based etchant(s), and method of making article using combustion CVD
06/26/2013EP2607517A1 Low temperature arc ion plating coating
06/26/2013EP2607516A2 Apparatus for forming gas blocking layer and method thereof
06/26/2013EP2607412A1 Molding, production method therefor, part for electronic devices and electronic device
06/26/2013CN203021647U Film-plating fixture for fixing optical fibers
06/26/2013CN203021646U Dumbbell-style flexible material magnetron sputtering film-coating device
06/26/2013CN203021645U Movable planar magnetron sputtering target
06/26/2013CN203021644U Cathode magnetic bar device for coating
06/26/2013CN203021643U Magnetron sputtering coating device
06/26/2013CN203021642U OLED (Organic Light Emitting Diode) evaporating hood
06/26/2013CN203021641U OLED (Organic Light Emitting Diode) glass substrate evaporator
06/26/2013CN203021640U Mask plate
06/26/2013CN203021639U Anti-scratch mask plate
06/26/2013CN203021638U Mask plate for evaporation
06/26/2013CN103180484A Vacuum processing apparatus
06/26/2013CN103180483A Methods for depositing metal in high aspect ratio features
06/26/2013CN103180482A Titanium target for sputtering
06/26/2013CN103180481A Ferromagnetic sputtering target
06/26/2013CN103178440A Method and device for passivating cavity surface of semiconductor laser
06/26/2013CN103178162A Method for producing copper indium gallium selenium thin film by using rotary copper indium gallium selenium alloy sputtering target material
06/26/2013CN103178158A Manufacturing method of four-junction solar cell with antireflection film
06/26/2013CN103177917A Magnetron and magnetron sputtering device where magnetron is applied
06/26/2013CN103177916A Magnetron and magnetron sputtering device
06/26/2013CN103177800A High transmittance transparent conductive film and production method thereof
06/26/2013CN103174394A Ram bop shear blade process to enhance the toughness
06/26/2013CN103173996A Tough nanofiber structure of surface oriented growth nanorod and preparation method thereof
06/26/2013CN103173736A Multifunctional throttling vacuum pipeline structure for vacuum coating equipment and control system thereof
06/26/2013CN103173735A Method for preventing target from being punctured in PVD (Physical Vapor Deposition) sputtering technology
06/26/2013CN103173734A PVD (physical vapor deposition) equipment and process control method and device
06/26/2013CN103173733A High-conductivity Ag doped Cu2O based p-type transparent conductive film and its making method
06/26/2013CN103173732A Preparation method of (doped amorphous) p-type transparent conductive oxide films
06/26/2013CN103173731A Method for improving property of TiN/TiCN multi-layer composite film material
06/26/2013CN103173730A Magnetron sputtering apparatus and process
06/26/2013CN103173729A Copper target material used for sputtering and manufacturing method thereof
06/26/2013CN103173728A Manufacturing method of Mo alloy sputtering target materials and sputtering target materials
06/26/2013CN103173727A Preparation method of high-heat-conduction aluminum nitride thick film
06/26/2013CN103173726A Preparation method of titanium-doped zinc oxide transparent conducting thin film
06/26/2013CN103173725A Microstructure processing method
06/26/2013CN103173724A Microstructure processing method
06/26/2013CN103173723A Macro film and fiber consisting of nanocapsules and nanotubes and preparation method thereof
06/26/2013CN103173722A Hard coat film and process of making hard coat film
06/26/2013CN103173721A Coating method for discontinuous mirror surface white film
06/26/2013CN103173720A Preparation method for waterproof laser film
06/26/2013CN103173719A Indium tin oxide (ito) layer formingx
06/26/2013CN103173718A Alumina film containing Ta
06/26/2013CN103173717A Evaporation material used for formation of steam barrier film, film forming method, and steam barrier film
06/26/2013CN103173716A High-entropy alloy coating preparation technology of tool die
06/26/2013CN103173715A Preparation method of GaP film material
06/26/2013CN103173671A Cemented carbide body and applications thereof
06/26/2013CN103173056A Preparation method of Fe/SiO2 nano-multilayer film electromagnetic-wave absorbing material
06/26/2013CN103171187A Sandwich type transparent conductive film and preparation method thereof
06/26/2013CN103171180A Thermochromic substrate and method of manufacturing the same
06/26/2013CN103170765A Preparation method for gold-tin eutectic solder
06/26/2013CN103170447A Boron ion implantation using alternative fluorinated boron precursors, and formation of large boron hydrides for implantation
06/26/2013CN102517557B Electron multiplier dynode surface coating base plate frame
06/26/2013CN102443776B Coating fixture of focusing mirror
06/26/2013CN102356177B Covering member for preventing erosion
06/26/2013CN102345105B Preparation method of high-residual internal stress Ni-Mn-Ga magnetically-driven memory alloy film
06/26/2013CN102286725B Novel adjustable substrate delivery roll device
06/26/2013CN102277554B Gradient multiple coating tool and preparation method thereof
06/26/2013CN102257175B Industrial vapour generator for depositing an alloy coating on a metal strip
06/26/2013CN102245795B Circular groove pressing mechanism and method for sputtering target manufacturing
06/26/2013CN102206808B High-hardness high-elastic-modulus TiAlN/AlON nano multilayer coating and preparation method thereof
06/26/2013CN102157425B Ring assembly for substrate processing chamber
06/26/2013CN101597748B Apparatus for evaporation, a crucible for evaporation and a method of growing a film on a substrate
06/25/2013US8470450 Method of producing two-layered copper-clad laminate, and two-layered copper-clad laminate
06/25/2013US8470390 Oxidation-free copper metallization process using in-situ baking
06/25/2013US8470145 Cathode unit and sputtering apparatus provided with the same
06/25/2013US8470142 Sputtering apparatus and driving method thereof
06/25/2013US8470141 High power cathode
06/25/2013US8470140 Method for the production of an ultra barrier layer system
06/25/2013US8470128 Tray, tray support member, and vacuum processing apparatus
06/20/2013WO2013090532A1 Apparatus for enabling concentricity of plasma dark space
06/20/2013WO2013090516A1 Spray rejuvenation of sputtering targets
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