Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
06/2013
06/05/2013CN202968673U Lens coating device
06/05/2013CN103140601A Apparatus for forming dielectric thin film and method for forming thin film
06/05/2013CN103140600A Method for producing molybdenum target
06/05/2013CN103140599A Distributor heater
06/05/2013CN103140598A Film forming method and film forming apparatus
06/05/2013CN103140454A Sintered composite oxide, manufacturing method therefor, sputtering target, transparent conductive oxide film, and manufacturing method therefor
06/05/2013CN103140124A Electromagnetic shielding method and products thereof
06/05/2013CN103140067A Housing and manufacturing method thereof
06/05/2013CN103137930A Lithium ion battery diaphragm, preparation method of the lithium ion battery diaphragm, and lithium ion battery containing the lithium ion battery diaphragm
06/05/2013CN103137905A Mask assembly and organic light emitting diode display
06/05/2013CN103137901A Film formation apparatus, film formation method, and mask unit to be used for them
06/05/2013CN103137717A Copper doped tin oxide transparent conductive membrane and preparation method thereof
06/05/2013CN103137709A Transparent oxide semiconductor thin film transistors
06/05/2013CN103134209A Machining technology of solar air flat collector with plate core formed through drawing
06/05/2013CN103132044A Screening cover for improving film-coating uniformity of flat target
06/05/2013CN103132043A Substrate carrying device
06/05/2013CN103132042A Adjustable fixture
06/05/2013CN103132041A Supporting device and vacuum coating machine using same
06/05/2013CN103132040A Preparation process method of BC4 conversion film for 4H-SiC-based neutron detector
06/05/2013CN103132039A Metal film preparation method
06/05/2013CN103132038A Cathode backside glow discharge elimination device
06/05/2013CN103132037A Preparation method of 6LiF conversion film used for 4H-SiC-based semiconductor neutron detector
06/05/2013CN103132036A Equipment for making IC shielding coating layer and metal shielding layer of IC
06/05/2013CN103132035A Target material tray for preparing thin-film material
06/05/2013CN103132034A Quaternary single target radio frequency magnetron sputtering preparation method for membrane of copper indium gallium diselenide light absorbing layer
06/05/2013CN103132033A Method for preparing molybdenum target
06/05/2013CN103132032A Sputtering equipment for reducing indium tin oxide (ITO) sputtering damage substrate and method thereof
06/05/2013CN103132031A Preparation method of silicon nitride membrane in light-trapping structure and preparation device
06/05/2013CN103132030A Method for manufacturing sputtering target and method for manufacturing semiconductor device
06/05/2013CN103132029A Method for producing coating layer with low-friction
06/05/2013CN103132028A PVD apparatus and method with deposition chamber having multiple targets and magnets
06/05/2013CN103132027A Vacuum coating device
06/05/2013CN103132026A Treatment of diabetes mellitus by taking insulin PEGylation derivative as active component
06/05/2013CN103132025A High-efficiency silver-saving square closed fine adjustment molybdenum boat
06/05/2013CN103132024A Surface metallization process for plastic products
06/05/2013CN103132023A Rapid thermal processing system and sulfidation method thereof
06/05/2013CN103132022A Device and method for depositing conductive membrane or semiconductor material on glass or metal substrate
06/05/2013CN103132021A Device and method for depositing conductive membrane or semiconductor material on substrate
06/05/2013CN103132020A Structurally-improved electric arc target and control system thereof
06/05/2013CN103132019A A1ZrCrN composite dual-gradient coating cutting tool and preparation method thereof
06/05/2013CN103132018A Method for improving electric conductivity of amorphous silicon membrane
06/05/2013CN103132017A Film-coating tool for coating outer edge totally-closed zone
06/05/2013CN103132016A Membrane edge adjusting device
06/05/2013CN103132015A Mask for deposition and manufacturing method of the same
06/05/2013CN103132014A Coated part and preparation method thereof
06/05/2013CN103132013A Ion bombardment apparatus and method for cleaning of surface of base material using the same
06/05/2013CN103132012A Preparation method of vacuum coating
06/05/2013CN103129041A Hybrid porous materials and manufacturing methods and uses thereof
06/05/2013CN103129034A Thermochromic decorative layer doped with flexible iodide
06/05/2013CN103129023A Corrosion and wear resistant Si/Si-DLC/DLC self-lubricating coat on inner wall of pipeline, and its preparation method
06/05/2013CN103128345A Pcd bore bit
06/05/2013CN103128303A Method for preparing nanogold by vapor deposition process
06/05/2013CN102560399B Preparation method for erbium-ytterbium-doped polycrystalline oxide film
06/05/2013CN102350553B Welding method of high-volume-content ceramic reinforced Al-base composite material
06/05/2013CN102296273B Rotating cathode drive system for vacuum magnetron sputtering coating film
06/05/2013CN102113145B Piezoelectric thin film, process for producing same, ink-jet head, method of forming image with ink-jet head, angular-velocity sensor, method of measuring angular velocity with angular-velocity sensor, piezoelectric power-generating element, and method of generating electric power with the piezoelectric generating element
06/05/2013CN102099138B Coated member and manufacture method thereof, coating cutting tool including the coated memeber
06/05/2013CN102080214B Coating device
06/05/2013CN102061449B Vacuum coater
06/05/2013CN102047406B Vacuum processing apparatus, vacuum processing method, and manufacturing method of an electronic device
06/05/2013CN102021522B Sputtering-type film coating device
06/05/2013CN101994090B Sputtering carrier and sputtering device comprising sputtering carrier
06/05/2013CN101981718B Piezoelectric thin film, method for manufacturing the same, angular velocity sensor, method for measuring angular velocity by the angular velocity sensor, piezoelectric element, and method for generating electricity
06/05/2013CN101970710B Plasma generating apparatus and plasma processing apparatus
06/05/2013CN101956173B Coating device utilizing bearing assembly
06/05/2013CN101899647B Tray
06/05/2013CN101892457B Sputtering turntable and sputtering device used by same
06/05/2013CN101871091B Target seat structure
06/05/2013CN101785088B Plasma processing method and plasma processing apparatus
06/05/2013CN101742842B Shell and manufacture method thereof
06/05/2013CN101736308B Film-coating workpiece carrying device and film-coating method
06/05/2013CN101730417B Housing and method for making same
06/05/2013CN101602272B TiAlN-TiBN multilayer thick film preparation method
06/05/2013CN101341275B Apparatus and method for deposition organic compounds, and substrate treating facility with the apparatus
06/04/2013USRE44255 Support for microelectronic, microoptoelectronic or micromechanical devices
06/04/2013US8455371 Sputtering target, method for forming amorphous oxide thin film using the same, and method for manufacturing thin film transistor
06/04/2013US8455137 Apparatus and method for fracture absorption layer
06/04/2013US8455095 Article and method for manufacturing same
06/04/2013US8455060 Method for depositing hydrogenated diamond-like carbon films using a gas cluster ion beam
06/04/2013US8454933 Polycrystalline magnesium oxide (MgO) sintered body and MgO sputtering target
06/04/2013US8454810 Dual hexagonal shaped plasma source
06/04/2013US8454805 Method of depositing amorphus aluminium oxynitride layer by reactive sputtering of an aluminium target in a nitrogen/oxygen atmosphere
06/04/2013US8454804 Protective offset sputtering
06/04/2013US8453593 Emission attenuated lining apparatus and methods for structures
06/04/2013CA2556782C Carbon-based thin film, process for producing the same and member using the thin film
05/2013
05/30/2013WO2013077505A1 Preparation method of thermoelectric nanowires having core/shell structure
05/30/2013WO2013077445A1 Composite body, collector member, fuel battery cell device, and fuel battery device
05/30/2013WO2013077098A1 Cadmium telluride powder for solar cells, cadmium telluride film for solar cells, and solar cell
05/30/2013WO2013076966A1 Plasma generation source and vacuum plasma processing apparatus provided with same
05/30/2013WO2013076922A1 Substrate conveying roller, thin film manufacturing device, and thin film manufacturing method
05/30/2013WO2013076046A1 Stain-resistant cooking surface and cookware item or electrical household appliance comprising such a cooking surface
05/30/2013WO2013075317A1 Sputtering target material construction of transparent conductive layer
05/30/2013WO2013034920A3 Surface polymer coatings
05/30/2013US20130138213 Medical device for bone implant and method for producing such a device
05/30/2013US20130136949 Aluminum alloy film, wiring structure having aluminum alloy film, and sputtering target used in producing aluminum alloy film
05/30/2013US20130136921 Method of generating high purity bismuth oxide
05/30/2013US20130136919 Method of generating high purity bismuth oxide
05/30/2013US20130136896 Method for producing coating layer with low-friction
05/30/2013US20130136873 Apparatus and method with deposition chamber having multiple targets and magnets
05/30/2013US20130136862 Multi-cell mocvd apparatus
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