Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
11/1989
11/08/1989EP0340935A2 High speed process for coating substrates
11/08/1989EP0340345A2 Device for loading and unloading substrates from a vacuum chamber
11/08/1989EP0340275A1 Vapour phase process and apparatus
11/08/1989CN1005733B Plane magnetically controlled sputtering source for precipitating large area film
11/07/1989US4879158 Masking member
11/07/1989US4879017 Uniformity
11/07/1989US4878960 Process for preparing alloyed-zinc-plated titanium-killed steel sheet having excellent deep-drawability
11/07/1989US4878755 Process and device for measuring the optical properties of thin layers
11/07/1989US4878570 Surface hardened sprags and rollers
11/02/1989WO1989010430A1 Vacuum coating system
11/02/1989WO1989010429A1 Target source for ion beam sputter deposition
11/02/1989WO1989010428A1 Method and apparatus for magnetron sputtering
11/02/1989WO1989010427A1 Method and apparatus for producing a layer of material from a laser ion source
11/02/1989WO1989010426A1 Steel sheet having dense ceramic coating with excellent adhesion,smoothness and corrosion resistance and process for its production
11/02/1989WO1989010425A1 Method for the surface protection against corrosion and abrasion of metal objects or composite objects with metal core by deposition of silicon carbide
11/02/1989WO1989010252A1 Polyphenylene sulfide film, process for its production, and process for subjecting the film to vacuum deposition
11/02/1989WO1989007341A3 High mobility transistor with opposed gates
11/02/1989EP0339844A2 Multi layer structure and process for making same
11/02/1989EP0339608A2 An alloy material for data storage of magneto-optical disk and its manufacture process
11/02/1989EP0339279A2 Method for making a wafer holder for use in rapid thermal processing equipment
11/02/1989EP0339274A1 Neutral sputtered films of metal alloy oxides
11/02/1989EP0339132A2 Apparatus for the storage of objects in a vacuum chamber
10/1989
10/31/1989US4877962 Ion implantation method
10/31/1989US4877677 Wear-protected device
10/31/1989US4877505 Method and apparatus for application of coatings on substrates
10/31/1989US4876984 Apparatus for forming a thin film
10/26/1989DE3812020A1 Arrangement for non-contact temperature measurement
10/25/1989EP0338556A2 Target of superconductive oxide having low resistivity
10/24/1989US4876178 Electroconductive film system for aircraft windows
10/24/1989US4876114 Evaporation, sublimation; for semiconductor chips
10/24/1989US4875963 Subjecting polypropylene to electric corona discharge
10/19/1989WO1989009293A3 Device and process for producing a thin layer on a substrate
10/18/1989EP0337725A2 Preparation of superconducting oxide films using a pre-oxygen nitrogen anneal
10/18/1989EP0337683A2 Control of selenium alloy fractionation
10/18/1989EP0337391A2 Boron nitride containing vessel having a surface coating of titanium-iron-silicon thereon
10/18/1989EP0337369A1 Continuous vacuum vapor deposition apparatus
10/18/1989EP0337329A2 Process for the production of thin metal films by evaporation
10/18/1989EP0337012A2 Sputtering cathode following the magnetron principle
10/18/1989EP0337007A1 Hard material protection layer with a homogeneous element distribution
10/17/1989US4874930 Electroconductive film system for aircraft windows
10/17/1989US4874741 Non-enhanced laser evaporation of oxide superconductors
10/17/1989US4874664 Evaporated dielectric film on transparent substrate
10/17/1989US4874497 Thin film forming apparatus
10/17/1989US4874494 Bias sputtering thin film
10/17/1989US4874493 Method of deposition of metal into cavities on a substrate
10/12/1989DE3809836A1 Modification of mould materials for pressing glass
10/12/1989DE3808252C1 Method for producing superconducting conductor tracks
10/11/1989EP0336621A1 Metal oxide material
10/11/1989EP0336618A2 Quick change sputter target assembly
10/11/1989EP0336257A2 Low emissivity film for automotive head load reduction
10/11/1989CN2045741U Aluminium plating polyester film light-reflecting material
10/11/1989CN1036287A Superconductive material and method mfg. thereof
10/11/1989CN1036152A Assembled masking member
10/10/1989US4873138 Metallic thin film type magnetic recording medium
10/10/1989US4872964 Planar magnetron sputtering apparatus and its magnetic source
10/10/1989US4872922 Exposure to ion beam radiation while contained in clean rotating cages; uniform depth and dosage
10/05/1989WO1989009293A2 Device and process for producing a thin layer on a substrate
10/04/1989EP0335526A2 Magnetron with flux switching cathode and method of operation
10/04/1989EP0335309A1 Low emissivity film for high temperature processing
10/04/1989EP0335267A2 Molecular beam epitaxy apparatus
10/04/1989EP0334991A1 Process for making inorganic glass panes with a high power of transmission in the visible spectrum and a low transmission of solar energy, and panes made by this process
10/04/1989EP0315678A4 High volume crystal plating apparatus and method.
10/03/1989US4871580 Method of treating surfaces of substrates with the aid of a plasma
10/03/1989US4871434 Process for equipment to coat tools for machining and forming techniques with mechanically resistant layers
10/03/1989US4871433 Method and apparatus for improving the uniformity ion bombardment in a magnetron sputtering system
10/03/1989US4871419 Method of forming pattern of a two-layer metal film
09/1989
09/28/1989DE3810115C1 Process for producing dense and homogeneous sintered parts and sputtering targets of oxides of yttrium, barium and copper
09/28/1989DE3809139A1 Verwendung einer palladium/nickel-legierungsschicht als zwischenschicht zwischen einem nichtkorrosionsbestaendigen oder wenig korrosionsbestaendigen metallischen grundmaterial und einer nach dem pvd-verfahren aufgebrachten beschichtung Using a palladium / nickel-alloy layer as intermediate layer between a nichtkorrosionsbestaendigen or little korrosionsbestaendigen metallic base material and an applied after the pvd coating process
09/27/1989EP0334564A2 Penning type cathode for sputter coating
09/27/1989EP0334453A2 A process for preparing non-porous, selective membrane layers
09/27/1989EP0334360A2 A masking member
09/27/1989EP0334347A1 Cathode sputtering device
09/27/1989EP0334204A2 Process and apparatus for coating articles
09/26/1989US4870388 Amorphous halogen, carbon matrix
09/26/1989US4869802 Apparatus for the production of coatings of uniform thickness profile on substrates, especially by cathode sputtering
09/26/1989US4869801 Apparatus for mounting workpieces
09/26/1989US4869797 Method for preparing a magnetic recording medium
09/26/1989US4869203 Apparatus for coating a metal gas-pressure bottle or tank
09/26/1989CA1261779A1 In-line disk sputtering system
09/26/1989CA1261465A1 Thin-film storage disk and method
09/21/1989WO1989008605A1 Process for producing thin-film oxide superconductor
09/20/1989EP0333513A1 Oxide superconductor
09/19/1989US4868004 Method for creating a corrosion-resistant, largely absorption-free coating on the surface of a workpiece
09/19/1989US4868003 Plasms plating
09/19/1989US4867859 Apparatus for forming a thin film
09/19/1989US4867101 Apparatus for producing magnetic recording medium
09/19/1989CA1259529A1 Process for treating the metal edge of a ski
09/14/1989DE3901401A1 Method for controlling a vacuum arc discharge
09/13/1989EP0332218A2 Process of forming superconducting film
09/12/1989US4866746 Multilayer; absorber, permeable support
09/12/1989US4866239 Vapor source assembly with crucible
09/12/1989US4866032 Method and apparatus for producing thin film of high to superconductor compound having large area
09/12/1989US4865713 Apparatus for applying thin layers onto a substrate
09/12/1989US4865712 Apparatus for manufacturing planarized aluminum films
09/12/1989US4865711 Surface treatment of polymers
09/12/1989US4865710 Magnetron with flux switching cathode and method of operation
09/12/1989US4865709 Magnetron sputter apparatus and method for forming films by using the same apparatus
09/12/1989US4865708 Magnetron sputtering cathode
09/12/1989US4865658 Oxygen-containing ferromagnetic amorphous alloy and method of preparing the same
09/12/1989US4864967 Band coating apparatus