Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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05/16/1989 | EP0313580A4 Radiation curable temporary solder mask. |
05/11/1989 | DE3737142A1 Erzeugung von (duennen) schichten aus hochschmelzender bzw. sublimierender materie (leitender, halbleitender und nichtleitender) und gemischen davon mit pseudofunkenelektronenstrahlen Production of (thin) layer of high-melting or sublimating matter (key, semi-conductive and non-conductive) and mixtures thereof pseudo radio with electron beams |
05/11/1989 | DE3716011A1 Protective layer on aluminium and aluminium alloys against corrosion in a maritime climate |
05/10/1989 | EP0314859A1 Magneto-optic memory device |
05/10/1989 | CN1032885A Sputtering device for mfg. superconducting oxide material and method therefor |
05/10/1989 | CN1032884A Method of growth of thin film layer for use in composite semiconductor |
05/09/1989 | US4828872 Method and apparatus for the reactive vapor depositing of metal compounds |
05/09/1989 | US4828870 Irradiating with ion beam, depositing vaporized aluminum |
05/09/1989 | US4828668 Sputtering system for deposition on parallel substrates |
05/09/1989 | US4828391 Test-glass changer |
05/03/1989 | EP0314230A1 Steel substrate with metal coatings for the reinforcement of vulcanisable elastomers |
05/03/1989 | EP0313996A2 Superconductive thin film, its production and use |
05/03/1989 | EP0313750A1 Magnetron sputter etching/deposition system |
05/03/1989 | EP0313580A1 Radiation curable temporary solder mask. |
05/03/1989 | CN2036956U Metallic products plated with metallic film |
05/03/1989 | CN1032681A Method for vacuum film-plating of porous non-metallic material surface |
05/03/1989 | CN1032640A Method for baking finish or vacuum deposition film on fiberglass articles |
05/02/1989 | US4826720 Polyetherimide or polyether ketone polymers |
05/02/1989 | US4826707 Method for coating webs of material having an open structure in depth |
05/02/1989 | US4826705 Radiation curable temporary solder mask |
05/02/1989 | US4825808 Substrate processing apparatus |
04/27/1989 | DE3832655A1 Magneto-optical recording medium |
04/26/1989 | EP0312694A1 Apparatus according to the principle of carousel for depositing substrates |
04/26/1989 | CN2036533U Multitarget plating chamber of vertical vacuum sputtering machine |
04/25/1989 | US4825087 System and methods for wafer charge reduction for ion implantation |
04/25/1989 | US4824735 Casting transition metal alloy containing rare earth metal |
04/25/1989 | US4824545 Apparatus for coating substrates |
04/25/1989 | US4824544 Large area cathode lift-off sputter deposition device |
04/25/1989 | US4824540 Method and apparatus for magnetron sputtering |
04/25/1989 | US4824481 Alloying rare earth and transition metal |
04/25/1989 | US4824309 Vacuum processing unit and apparatus |
04/19/1989 | EP0312447A1 Process and element for the production, using plasma, of thin films for electronic and/or optoelectronic applications |
04/19/1989 | EP0312170A2 Process for step and repeat vacuum-deposition of large-area thin-film transistor matrix-circuits on monolithic glass panels through perforated metal masks |
04/19/1989 | EP0311697A2 Magnetically enhanced sputter source |
04/19/1989 | EP0197990B1 Method for forming by low pressure deposition a layer of insulating material on a substrate, and product obtained thereby |
04/19/1989 | CN1032428A Automatical device for rapid heat chemical processing |
04/18/1989 | US4823291 Radiometric measurement of wafer temperatures during deposition |
04/18/1989 | US4823073 Sensor for measuring the current or voltage of electrically conductive layers present on a reference substrate |
04/18/1989 | US4822641 Method of manufacturing a contact construction material structure |
04/18/1989 | US4822466 Chemically bonded diamond films and method for producing same |
04/12/1989 | EP0311302A1 Apparatus and method for the production of a coating on a web |
04/12/1989 | EP0310656A1 Surface treatment of polymers. |
04/11/1989 | US4820651 Method of treating bodies of III-V compound semiconductor material |
04/11/1989 | US4820397 Quick change sputter target assembly |
04/11/1989 | US4820393 High density |
04/11/1989 | US4820392 Cleansing with ion beam; coating with titanium boride by sputtering |
04/11/1989 | US4820377 Method for cleanup processing chamber and vacuum process module |
04/11/1989 | US4820106 Apparatus for passing workpieces into and out of a coating chamber through locks |
04/11/1989 | CA1252417A1 Reactive planar magnetron sputtering of sio.sub.2 |
04/05/1989 | EP0310590A2 Ion treatment of the inner surfaces of objects connected as cathodes |
04/05/1989 | EP0310560A2 Process for low-temperature coating with a hard layer, and products obtained by this process |
04/05/1989 | EP0309733A1 Process for the production of layers with a high degree of hardness and/or low friction properties and containing at least two components |
04/05/1989 | CN1032123A Shield material and forming model of making it |
04/04/1989 | US4818636 Films of catenated phosphorus materials, their preparation and use, and semiconductor and other devices employing them |
04/04/1989 | US4818561 Thin film deposition apparatus and method |
04/04/1989 | US4818359 Low contamination RF sputter deposition apparatus |
04/04/1989 | US4818358 Magnetron cathode sputter coating apparatus |
04/04/1989 | US4818357 Using inert gas supplied at different partial pressures to control ratio of elements deposited |
04/04/1989 | US4817559 Vacuum vapor-deposition apparatus for coating an optical substrate |
03/29/1989 | EP0309354A1 Automatic apparatus for fast thermochemical treatment |
03/29/1989 | EP0309294A2 Method and apparatus for the manufacture of superconducting oxide materials |
03/29/1989 | EP0309273A2 Method of producing a superconductive oxide layer on a substrate |
03/29/1989 | EP0309022A1 Method of producing thin magnetic metallic layers having a low thermal coefficient of expansion |
03/29/1989 | EP0308680A1 Cathode sputtering apparatus |
03/29/1989 | EP0308658A1 Apparatus and method for evaporating metallic films |
03/29/1989 | EP0164383B1 Support for producing abrasion-proof catalysts |
03/29/1989 | CN1032037A Method of producing thin magnetic metallic layers having low thermal coefficient of expansion |
03/28/1989 | US4816341 Magnetic recording medium |
03/28/1989 | US4816293 Axially rotating and advancing rod, energy beam evaporation |
03/28/1989 | US4816291 Process for making diamond, doped diamond, diamond-cubic boron nitride composite films |
03/28/1989 | US4816133 Apparatus for preparing thin film optical coatings on substrates |
03/28/1989 | US4816128 Process for producing substrate member for magnetic recording disc |
03/28/1989 | US4816127 Magnetic recording medium, sputtering |
03/28/1989 | US4816125 Transducers, integrated circuits, zinc oxide films |
03/28/1989 | US4816124 Multilayer, resin, sputtering |
03/28/1989 | US4816046 Fine particle collector trap for vacuum evacuating system |
03/28/1989 | US4815962 Low temperature ion bombardment pretreatment using inert gas |
03/28/1989 | US4815415 Apparatus for producing coils from films of insulating material, conductively coated under vacuum |
03/23/1989 | DE3830963A1 Process for metallising non-metallic carriers |
03/22/1989 | EP0308275A2 Sputter module for modular wafer processing machine |
03/22/1989 | EP0308201A1 Method of forming a sputtering target for use in producing a magneto-optic recording medium |
03/22/1989 | EP0308166A2 Polycrystalline film formation |
03/22/1989 | EP0307929A1 Plated steel sheet for a can |
03/22/1989 | EP0307675A1 Process for the production of layers with high hardness and/or low friction properties |
03/22/1989 | EP0307539A2 Process and apparatus for coating substrates |
03/21/1989 | US4814232 Method for depositing laser mirror coatings |
03/21/1989 | US4814199 Process for preparing metallizable polyolefin films |
03/21/1989 | US4814056 Apparatus for producing graded-composition coatings |
03/21/1989 | US4814053 Sputtering target and method of preparing same |
03/21/1989 | EP0222877A4 IN-lINE DISK SPUTTERING SYSTEM. |
03/16/1989 | DE3816578C1 Process and device for the vapour deposition of graded-light filter layers on transparent plates |
03/15/1989 | EP0306612A1 Process for depositing layers on substrates |
03/15/1989 | EP0306491A1 Arc coating of refractory metal compounds. |
03/15/1989 | CN2034175U Magnetic controlled sputtering coating machine |
03/15/1989 | CN1031749A Heavy-duty sliding surface bearing |
03/14/1989 | US4812370 Surface coated tungsten carbide-base sintered hard alloy material for inserts of cutting tools |
03/14/1989 | US4812352 Article having surface layer of uniformly oriented, crystalline, organic microstructures |
03/14/1989 | US4812326 Nozzle with gradually opening cross-section, controlled atom cluster size |
03/14/1989 | US4812217 Continuous transporting, cleaning |
03/14/1989 | US4812101 Method and apparatus for continuous throughput in a vacuum environment |