| Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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| 05/31/1988 | CA1237279A1 Information medium adapted to be written by thermo- optical means and method of manufacturing same |
| 05/24/1988 | US4746548 Thin-film display panels |
| 05/24/1988 | US4746542 Coating method for use in the production of magnetic recording medium |
| 05/24/1988 | US4746417 Circular target plate of material to be sputtered |
| 05/24/1988 | US4745878 Vapor masking device |
| 05/18/1988 | EP0267679A1 Coated article and method of manufacturing the article |
| 05/18/1988 | EP0267233A1 Modular semiconductor wafer transport and processing system. |
| 05/18/1988 | CN87106947A Planar magnet-controlled sputtering source with separated magnets |
| 05/17/1988 | US4745287 Ion implantation with variable implant angle |
| 05/17/1988 | US4745035 Article having a wear resisting precious metal coating |
| 05/17/1988 | US4745005 Multilayer, titanium, cobaltchromium thin film formed by vacuum deposition |
| 05/11/1988 | EP0266818A1 Feed-through element for vacuum apparatus and apparatus provided with such feed-through elements |
| 05/11/1988 | DE3735385A1 Process for producing a magneto-optic recording medium |
| 05/11/1988 | DE3638286A1 Electrical component, made of ceramic and having multilayer metallisation, and a method for its production |
| 05/11/1988 | CN87107161A Composition film forming device |
| 05/10/1988 | US4743806 Process and arrangement to irradiate solid state materials with ions |
| 05/10/1988 | US4743570 Facilitating heat exchange between wafer and heat sink by gas |
| 05/10/1988 | US4743514 Nickel base alloy |
| 05/10/1988 | US4743467 Method for preparing magnetic recording medium |
| 05/10/1988 | US4743463 Method for forming patterns on a substrate or support |
| 05/10/1988 | US4743308 Corrosion inhibition of metal alloys |
| 05/10/1988 | EP0216919A4 Method and target for sputter depositing thin films. |
| 05/10/1988 | CA1236537A1 Wire and cable |
| 05/04/1988 | EP0266315A1 Method and equipment for the control and the regulation of the evaporation of a metal such as aluminum or other, in plants for metalization under vacuum |
| 05/04/1988 | EP0266225A1 Method of producing plastic-moulded articles with hard coated surface layers |
| 05/04/1988 | EP0266214A2 Interference film filters, optical waveguides and methods for producing them |
| 05/04/1988 | EP0266178A2 Method and apparatus for forming a thin film |
| 05/04/1988 | EP0265992A1 Feed-through element for application in a vacuum apparatus; apparatus provided with such feed-through elements as well as wire material formed in such an apparatus |
| 05/04/1988 | EP0265937A2 Slide bearing |
| 05/04/1988 | EP0265886A2 Process for forming an ultrafine-particle film |
| 05/04/1988 | EP0265512A1 Sputter-coated thin glass sheeting in roll form and method for continuous production thereof |
| 04/28/1988 | DE3735162A1 Vapour deposition apparatus |
| 04/28/1988 | DE3636524A1 Apparatus for applying coatings in a vacuum by magnetron atomisation |
| 04/27/1988 | EP0265320A1 Apparatus for vacuum deposition by reactive cathodic sputtering onto a glass sheet |
| 04/27/1988 | EP0264654A1 Zircomium nitride coated article and method for making same |
| 04/27/1988 | EP0264371A1 Device for making metallized plastic films with clearly defined non-metallized areas. |
| 04/27/1988 | EP0213191A4 Thin-film storage disk and method. |
| 04/27/1988 | CN87206452U Evaporation source with multiple layer structure |
| 04/26/1988 | US4740429 Metal-ceramic joined articles |
| 04/26/1988 | US4740386 Method for depositing a ternary compound having a compositional profile |
| 04/26/1988 | US4740385 Apparatus for producing coils from films of insulating material, conductively coated in a vacuum |
| 04/26/1988 | US4740267 Energy intensive surface reactions using a cluster beam |
| 04/26/1988 | US4739818 Solidification while in contact with backing |
| 04/26/1988 | CA1235632A1 Modifications of the properties of metals |
| 04/21/1988 | WO1988002791A1 Thin film formation apparatus |
| 04/21/1988 | WO1988002790A1 Process and apparatus for film deposition utilizing volatile clusters |
| 04/20/1988 | EP0263880A1 Continuous ion plating device for rapidly moving film |
| 04/20/1988 | EP0263846A1 Method and apparatus for sputtering a dielectric target or for reactive sputtering |
| 04/19/1988 | CA1235385A1 Hard layer formed by incorporating nitrogen into mo or w metal and method for obtaining this layer |
| 04/19/1988 | CA1235384A1 Dual ion beam deposition of amorphous semiconductor films |
| 04/14/1988 | DE3633386A1 Method and device for treating substrates in a vacuum |
| 04/13/1988 | EP0263747A1 Surface coated tungsten carbide-base sintered hard alloy material for inserts of cutting tools |
| 04/13/1988 | EP0082189B1 Masking portions of a substrate |
| 04/12/1988 | US4737416 Electroless plating, heat treatment in weakly oxidizing atmosphere |
| 04/12/1988 | US4737252 Sputtered protective coating |
| 04/12/1988 | US4737232 Laser passes through transparent substrate to polymerize monomer onto surface of substrate |
| 04/12/1988 | CA1235087A1 Diamond-like thin film and method for making the same |
| 04/12/1988 | CA1235086A1 Method and apparatus for evaporation arc stabilization for non-permeable targets utilizing permeable stop ring |
| 04/07/1988 | WO1988002548A1 Ion implantation |
| 04/06/1988 | EP0262939A2 A static pressure gas bearing assembly |
| 04/06/1988 | EP0262861A2 Apparatus for coating substrate devices |
| 04/06/1988 | EP0262323A2 Process for the interior coating of electrically non-conducting hollow bodies |
| 04/05/1988 | US4735699 Methods of depositing germanium carbide |
| 04/05/1988 | US4735698 Method of making magneto-optical recording medium |
| 04/05/1988 | CA1234776A1 Disordered coating and method |
| 03/30/1988 | EP0261973A1 Device and process for treating fine particles |
| 03/30/1988 | EP0261347A1 Sputtering apparatus |
| 03/30/1988 | EP0261245A1 Process for producing transparent conductive film |
| 03/30/1988 | CN87105700A Aerator for sputtering sources |
| 03/30/1988 | CN87104730A Iionic coating device of the plasma accelerator process |
| 03/29/1988 | US4734183 Sputtering cathode on the magnetron principle |
| 03/29/1988 | US4734178 Multistep crystallization, carbidization and nitriding; titanium nitride coating |
| 03/29/1988 | US4733631 Apparatus for coating substrate devices |
| 03/24/1988 | WO1988002034A1 Process and device for metallizing foil surfaces |
| 03/24/1988 | WO1988002033A1 Method for making an amorphous aluminum-nitrogen alloy layer |
| 03/23/1988 | EP0260410A2 Process for selective physical vapour deposition |
| 03/23/1988 | CN87212023U Magnetic control sputtering source for s-gun |
| 03/22/1988 | US4733137 For powering a gaseous discharge device |
| 03/22/1988 | US4732792 Method for treating surface of construction material for vacuum apparatus, and the material treated thereby and vacuum treatment apparatus having the treated material |
| 03/22/1988 | US4732761 Applying high frequency bias voltage to gas mixture-perpendicular impingement onto substrate |
| 03/22/1988 | US4732659 Sputtering method for making thin film field effect transistor utilizing a polypnictide semiconductor |
| 03/16/1988 | EP0260150A2 Vacuum processing apparatus wherein temperature can be controlled |
| 03/16/1988 | EP0259961A2 Ion beam dosimetry |
| 03/16/1988 | EP0259934A1 Sputtering apparatus with a device for the measurement of a critical target depletion |
| 03/15/1988 | US4731540 Ion beam materials processing system with neutralization means and method |
| 03/15/1988 | US4731539 Glow discharging; alloying |
| 03/15/1988 | US4731302 Hard coatings for mechanically and corrosively stressed elements |
| 03/15/1988 | US4731293 Fabrication of devices using phosphorus glasses |
| 03/15/1988 | US4731288 Heat stability, tear strength |
| 03/15/1988 | US4731172 Method for sputtering multi-component thin-film |
| 03/15/1988 | US4731116 Sputter target and process for producing sputter target |
| 03/09/1988 | EP0258966A2 Multi-chamber deposition system |
| 03/09/1988 | EP0258752A2 Article having surface layer of uniformly oriented, crystalline, organic microstructures |
| 03/09/1988 | EP0258283A1 Method for depositing on a substrate a wear-resistant decorative coating layer, and object produced according to this method. |
| 03/08/1988 | US4729906 Method for producing glow polymerisate layers |
| 03/08/1988 | US4729905 Iron alloy, wear-resistant coating, arc discharging, titanium cathode, redox, annealing |
| 03/08/1988 | CA1233782A1 Method for producing glow polymerisate layers |
| 03/03/1988 | DE3728836A1 Goldfarbene beschichtung fuer artikel Gold-colored coating for articles |
| 03/02/1988 | EP0257872A2 A masking member |
| 03/02/1988 | EP0257783A1 Control system and method for controlling the reactive sputtering of a metallic compound |