Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
11/1988
11/02/1988EP0289173A1 Wear-resistant coated object
11/02/1988EP0288677A1 Structural unit, in particular machine element
11/02/1988EP0288608A1 Apparatus for forming a thin film
11/02/1988CN88101654A Sputtered titanium oxynitride films
11/01/1988US4781989 Surface-coated cutting member
11/01/1988US4781767 Photoelectric conversion device
10/1988
10/26/1988EP0288316A2 Compositionally modulated, nitrided alloy films and method for making the same
10/26/1988EP0288010A2 Rare earth metal-iron group metal target, alloy powder therefor and method of producing same
10/26/1988EP0187791B1 Process for production of highly wear-resistant titanium coatings
10/25/1988US4780190 Sputtering cathode
10/20/1988WO1988008044A1 Double buffer vacuum system
10/20/1988WO1988008043A1 Surface treatment of polymers
10/20/1988DE3712205A1 Process for producing layers having very hard diamond-like and/or low-friction properties
10/19/1988EP0287384A2 Dial deposition and processing apparatus
10/19/1988EP0287208A2 Process for manufacturing a corrosion-resistant vacuum-metallized article by etching the metal layer and applying a clear resinous coating
10/19/1988EP0286656A1 Ion implantation
10/18/1988US4778582 Process for making a thin film metal alloy magnetic recording disk with a hydrogenated carbon overcoat
10/18/1988US4778580 Lattice disorder formation by cathode sputtering in inert gas plasma
10/18/1988US4778561 Electron cyclotron resonance plasma source
10/18/1988US4777909 Carriage apparatus for indexing and accurately registering a selected stabilized mask of a plurality of stabilizing masks between a substrate and a source
10/18/1988US4777908 System and method for vacuum deposition of thin films
10/18/1988CA1243275A2 Apparatus for coating film
10/18/1988CA1243273A1 Method of bonding silver to glass and mirrors produced according to this method
10/12/1988EP0286472A1 Device for vacuum evaporation of materials
10/12/1988EP0286274A1 Reagent source for molecular beam epitaxy
10/12/1988EP0285999A1 A production method of superconductive thin film and a device thereof
10/12/1988EP0285870A2 A method for forming abrasion-resistant polycarbonate articles
10/12/1988EP0285846A1 Vacuum chamber for the treatment of surfaces, especially of substrates or the like, with ionized gases
10/12/1988EP0285745A1 Process and apparatus for vacuum coating by means of an electric arc discharge
10/12/1988EP0285668A1 Thin film formation apparatus
10/12/1988EP0285625A1 Process and apparatus for film deposition utilizing volatile clusters.
10/12/1988CN87107654A Process for transparent conductive film of in-sn oxide
10/12/1988CN87102489A Optical film of monolayer zns for germanium substrate
10/11/1988US4777094 Coated with hydrolyzed unsaturated ester-acid copolymer
10/11/1988US4777090 Abrasion resistant protective coating of carbon and-or silicon dioxide
10/11/1988US4777081 Transfer metallizing film
10/11/1988US4777062 Evaporation from elongated cruicible by electron beam, with reaction gas; stable, repeatable
10/11/1988US4776938 Method of producing magnetic disc
10/11/1988US4776868 Lenses and lens arrays
10/11/1988US4776299 Source replenishment device for vacuum deposition
10/11/1988CA1242991A1 Magnetron sputter coating source for both magnetic and nonmagnetic target materials
10/11/1988CA1242989A1 Apparatus for and method of controlling sputter coating
10/06/1988DE3810312A1 Ionised cluster beam deposition monitoring - by scanning the beam with luminescence exciting light for intensity measurement
10/05/1988EP0285167A2 N-silyl substituted 1-sila-2-azacyclopentanes
10/05/1988EP0285130A1 Sputtering target
10/05/1988EP0285030A2 Process for producing superconducting thin films
10/05/1988EP0284909A2 Sensor for measuring the current or the voltage of electric conductive layers on a reference chip
10/05/1988EP0284854A1 Mixed nitride layers with at least two metals and method for their manufacture
10/04/1988US4775602 Metallic coating of improved life
10/04/1988US4775556 Injection a stored charge into polymer surface, masking, reducing metal with stored change
10/04/1988US4775549 Method of producing a substrate structure for a large size display panel and an apparatus for producing the substrate structure
09/1988
09/28/1988EP0284489A1 Process for depositing a superconducting thin film
09/28/1988EP0284145A1 Cathode arc discharge evaporating device
09/28/1988EP0283923A1 Sputtered titanium oxynitride films
09/28/1988EP0283881A1 Sputtered films of bismuth/tin oxide
09/28/1988EP0283477A1 Method of transporting products in a manufacturing process
09/28/1988EP0270667A4 Dual plasma microwave apparatus and method for treating a surface.
09/28/1988EP0211938A4 System and method for depositing plural thin film layers on a substrate.
09/28/1988CN88100832A Plane magnetically controlled sputtering source for precipitating large area film
09/27/1988US4774151 Titanium, zirconium hafnium metal mixtures
09/27/1988US4774129 Gas-sensitive composite material comprising metal and dielectric
09/27/1988CA1242316A1 Combined continuous plating apparatus for hot-dip plating and vacuum deposition plating
09/21/1988EP0283374A1 Apparatus for the continuous vacuum evaporation of a metal
09/21/1988EP0283095A1 Method and arrangement for mechanically moving of a magnetic field generating device in a cathode arc discharge evaporating device
09/21/1988EP0282836A2 Process and apparatus for depositing of high ohmic resistance layers by cathodic sputtering
09/21/1988EP0282835A2 Process and device for controlling the reactive coating of substrates with layers, using magnetron cathodes
09/21/1988EP0282667A1 System for gas turbine components, and process for preparation of coated components
09/21/1988EP0282540A1 Process and device for metallizing foil surfaces.
09/21/1988EP0282527A1 Method for making an amorphous aluminum-nitrogen alloy layer.
09/21/1988CN88101032A Superconductive device
09/21/1988CN87214297U Multiple source plane magnetic control sputtering source
09/20/1988US4772520 Thermal head and method of manufacturing the same
09/20/1988US4772513 Method for forming a hard carbon thin film on article and applications thereof
09/20/1988US4772304 Transparent BN-type ceramic material and method of producing the same
09/20/1988US4771730 Vacuum processing apparatus wherein temperature can be controlled
09/20/1988CA1242165A1 Method and apparatus for plasma-assisted deposition of thin films
09/14/1988EP0282094A2 Plasma treatment with organic vapos to promote a metal adhesion of polypropylene film
09/13/1988US4770946 Surface-treated magnesium or magnesium alloy, and surface treatment process therefor
09/13/1988US4770895 Control of uniformity of growing alloy film
09/13/1988US4770196 Chemical cleaning system
09/07/1988WO1988006637A1 Carrier gas cluster source for thermally conditioned clusters
09/07/1988EP0281141A1 Sputtering target
09/06/1988US4769291 Transparent coatings by reactive sputtering
08/1988
08/31/1988EP0280315A2 Method of forming a diamond film
08/31/1988EP0280308A2 Superconducting device
08/31/1988EP0280273A2 Manufacturing method of conductive or superconductive thin film
08/31/1988EP0280198A1 Method of forming diamond film
08/31/1988EP0280184A2 Process for coating fibres with a silicium layer
08/31/1988EP0280089A1 Process for the manufacture of a titanium/titanium nitride double layer for use as a contact and barrier layer in very large scale integrated circuits
08/31/1988CN87215927U Equipment for vacuum-coating polyethylene film with aluminium
08/31/1988CN87215838U Polyester film plated with nickel-iron alloy
08/31/1988CN87105971A Low radiation film produced at high temp
08/30/1988US4767517 Process of depositing diamond-like thin film by cathode sputtering
08/30/1988CA1241171A1 Molding tool and method
08/25/1988WO1988006194A1 Energy intensive surface reactions using a cluster beam
08/24/1988EP0279550A1 Transparent coatings by reactive sputtering
08/24/1988CN87105801A Cleaning technique for steel product before film-plating
08/23/1988US4765273 Transporting device with roller systems for vacuum-coating installations
08/23/1988US4765055 Method of fabricating a superconducting cavity
08/23/1988CA1240952A1 High rate sputtering of exhaust oxygen sensor electrode