| Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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| 08/17/1988 | EP0278629A1 Amorphous materials |
| 08/17/1988 | EP0278494A2 Hollow cathode gun and deposition device for ion plating process |
| 08/17/1988 | CN87107819A Yttria composition for vapor deposition and preparation of antireflection coating |
| 08/16/1988 | US4764434 Diamond tools for rock drilling and machining |
| 08/16/1988 | US4764421 Masking member |
| 08/16/1988 | US4764394 Method and apparatus for plasma source ion implantation |
| 08/16/1988 | US4764076 Valve incorporating wafer handling arm |
| 08/16/1988 | US4763601 Continuous composite coating apparatus for coating strip |
| 08/16/1988 | CA1240568A1 Process of forming alloy layer |
| 08/16/1988 | CA1240482A1 Silicon melting and evaporation method and apparatus for high purity applications |
| 08/11/1988 | WO1988005963A1 Yttrium oxide composition for use in evaporation and process for preparing anti-reflection film thereof |
| 08/11/1988 | DE3803189A1 Vacuum evaporation process employing a sublimable source material |
| 08/10/1988 | EP0277885A2 Process for preparing a superconducting thin film |
| 08/10/1988 | EP0277536A1 Device for the quasi-continuous treatment of substrates |
| 08/10/1988 | EP0277341A2 Device for the application of an arc |
| 08/10/1988 | EP0197110B1 Vapour deposition of tin |
| 08/10/1988 | CN87214299U Separating-magnetic type magnetically-controlled planar sputtering source |
| 08/09/1988 | US4762975 Method and apparatus for making submicrom powders |
| 08/09/1988 | US4762756 Thermochemical surface treatments of materials in a reactive gas plasma |
| 08/09/1988 | CA1240285A1 Method for generating glow-polymerisate layers |
| 08/09/1988 | CA1240283A1 Dual ion beam deposition of amorphous semiconductor alloy films |
| 08/09/1988 | CA1240282A1 Pretreatment for electroplating mineral-filled nylon |
| 08/09/1988 | CA1240281A1 Surface treatment process |
| 08/04/1988 | EP0222884A4 Combined integrated circuit/ferroelectric memory device and ion beam methods of constructing same. |
| 08/03/1988 | EP0276962A1 Cooling device for a sputter target and source |
| 08/03/1988 | EP0276914A2 Anti-flaking measures in molecular-beam-epitaxy apparatus, and method of manufacture |
| 08/03/1988 | CN88100549A Technology and apparatus for permeating metals with ions by using a cathod arc source |
| 08/02/1988 | US4761300 Method of vacuum depostion of pnictide films on a substrate using a pnictide bubbler and a sputterer |
| 08/02/1988 | CA1239902A1 Electron beam curing of organic polymer coated substrate with rough surface |
| 07/27/1988 | EP0275474A1 Low emissivity film for high temperature processing |
| 07/27/1988 | EP0275334A1 System for monitoring material dispensed onto a subtrate |
| 07/27/1988 | EP0267233A4 Modular semiconductor wafer transport and processing system. |
| 07/26/1988 | US4759958 Method for forming polyimide film by chemical vapor deposition |
| 07/26/1988 | US4759948 Film formation through co-deposition with high and low energy beams |
| 07/26/1988 | US4759836 Forming thin film resistor of chromium silicide or silicon carbide over insulating surface, forming an insulating film, doping thin film through insulating film |
| 07/26/1988 | CA1239614A1 Stainless steel overcoat for sputtered films |
| 07/20/1988 | EP0275021A2 Sputtering process and an apparatus for carrying out the same |
| 07/20/1988 | EP0275018A2 Process and device for coating conducting objects by means of glow discharge |
| 07/19/1988 | US4758814 Structure and method for wire lead attachment to a high temperature ceramic sensor |
| 07/19/1988 | US4758464 Transparent electroconductive material and process for preparation thereof |
| 07/19/1988 | US4758280 Decorative black wear protection coating |
| 07/13/1988 | CN87106938A Multiple source plane magnetic controlled sputter source |
| 07/12/1988 | US4756928 Method of forming electrodes of an electronic component of chip type for connecting to the external |
| 07/12/1988 | US4756815 Vacuum chamber, rotating plate with apertures for wafers, sputtering source for emitting coating material |
| 07/12/1988 | US4756811 Arranging substrate and indium target in chamber, plasma spattering in methane series, hydrogen oxygen atmosphere |
| 07/12/1988 | US4756810 Depositing substance on surface from gas phase, exposing to plasma, applying radiofrequency excitation |
| 07/12/1988 | CA1239060A1 Method and apparatus for vacuum deposition plating |
| 07/06/1988 | EP0273715A2 Method for forming metal layer for a semiconductor device |
| 07/06/1988 | EP0273685A1 Method of producing a thin film by sputtering and an opposed target type sputtering apparatus |
| 07/06/1988 | EP0273550A1 Deposition of planarizing methods and apparatus |
| 07/06/1988 | EP0273195A2 A method of making a thin magnetic pole piece |
| 07/05/1988 | US4755438 Copper base coated with aluminum film by ion beam deposition |
| 07/05/1988 | CA1238988A1 X-ray dispersive and reflective structures and method of making the structures |
| 07/05/1988 | CA1238819A1 Metal vapour deposition |
| 06/29/1988 | EP0272710A1 Feed-through element for application in a vacuum apparatus and vacuum apparatus provided with one or more of such feed-through elements |
| 06/29/1988 | EP0272447A2 Composite material with a sliding coating applied by cathodic sputtering |
| 06/29/1988 | CN85104006B Dieletric/alloy/dieletric trarsparent conducting film |
| 06/28/1988 | US4753854 Wear-resistant coating of cutting tool and method of applying same |
| 06/28/1988 | US4753852 Nonmagnetic support; chromium undercoating |
| 06/28/1988 | US4753504 Highly reflective surface layer of titanium nitride and carbide; near infra red |
| 06/27/1988 | EP0173715A4 Method and apparatus for the gas jet deposition of conducting and dielectric thin solid films and products produced thereby. |
| 06/22/1988 | EP0271901A2 Process for consolidating discontinuous-structured materials |
| 06/22/1988 | EP0271682A1 Vacuum vapour deposition assembly with a rectangular vaporizer crucible and several elektron beam guns |
| 06/21/1988 | US4752455 Pulsed laser microfabrication |
| 06/21/1988 | US4752344 Codepositing of a nickel-iron intermetallic with a salt |
| 06/21/1988 | US4752335 Process for the manufacture of a target for cathodic sputtering |
| 06/21/1988 | CA1238295A1 Method of coating ceramics and quartz crucibles with material electrically transformed into a vapor phase |
| 06/21/1988 | CA1238292A1 Producing aircraft windows with electroplated masked strike coat |
| 06/20/1988 | EP0168437A4 Wafer processing machine. |
| 06/20/1988 | EP0168436A4 Wafer processing machine. |
| 06/16/1988 | WO1988004332A1 Multilayered structures |
| 06/15/1988 | EP0271351A2 Vacuum evaporating apparatus |
| 06/15/1988 | EP0270667A1 Dual plasma microwave apparatus and method for treating a surface. |
| 06/15/1988 | EP0270656A1 Vapour deposition of monomer fluids. |
| 06/15/1988 | CN87105701A Gun-type magnetic control sputtering resource |
| 06/14/1988 | US4751372 Vacuum chamber heater apparatus |
| 06/14/1988 | US4751099 Method of producing a functionally gradient material |
| 06/14/1988 | US4750932 Refractory metal silicide sputtering target |
| 06/08/1988 | EP0270144A1 Process and apparatus for continuously cleaning elongated substrates, and objects thus cleaned |
| 06/08/1988 | EP0270024A1 Hard material composite coatings on siliceous substrates and method of producing them |
| 06/08/1988 | CN86107670A Technique of making citrine coloured glass with common glass by copper alloy vacuum deposition |
| 06/07/1988 | US4749591 Perfluoropolyether mist coated nonmetallized areas |
| 06/07/1988 | US4749465 In-line disk sputtering system |
| 06/07/1988 | US4749459 Doping with nitrogen or oxygen to decrease coercive of platinum-cobalt alloy; sputtering |
| 06/07/1988 | US4749255 Coating for optical devices |
| 06/07/1988 | US4748935 Vapor source for vacuum coating installation |
| 06/01/1988 | EP0269525A2 Surface coated carbo-nitride titanium-base cermet material for inserts of high-speed cutting tools |
| 06/01/1988 | EP0269446A2 Apparatus and method for vacuum deposition of thin films |
| 06/01/1988 | EP0269144A1 Process and apparatus for the treatment of coated, elongated substrate, as well as substrates thus treated and articles of polymeric material reinforced with these substrates |
| 06/01/1988 | EP0269112A2 Method of forming a thin crystalline metal film |
| 06/01/1988 | EP0269111A2 Method of forming a thin aluminium film |
| 06/01/1988 | CN85100569B Single source vacuum deposit method to make vario-refraction-index film |
| 05/31/1988 | US4748315 Molecular beam source |
| 05/31/1988 | US4748313 Shaped, vaporizable body and heat source movable relative to each other |
| 05/31/1988 | US4748050 Process for preparing thin film having high light transmittance |
| 05/31/1988 | US4747930 Air/fuel ratio sensor |
| 05/31/1988 | US4747928 Substrate processing apparatus including wafer transporting and substrate cooling mechanisms |
| 05/31/1988 | US4747927 Two plates oriented adjacent at one joint; back surface for support |
| 05/31/1988 | US4747926 Film-forming on planar substrate, such as silicon wafer |
| 05/31/1988 | US4747922 Confined ion beam sputtering device and method |