Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
12/1990
12/12/1990CN2067281U Multifunction magnetic control sputter ion coating equipment
12/12/1990CN2067280U Plasma coating equipment
12/11/1990US4976995 Rolling during deposition process
12/11/1990US4976988 Vacuum deposition of unsintered crystals of zinc sulfide prevents scattering and gives phosphor with smooth surface
12/11/1990US4976987 Using implantable element and substrate which have limited mutual solubility in one another, and do not form intermediate phases
12/11/1990US4976856 Process for preparing non-porous, selective membrane layers
12/05/1990EP0401035A2 Film forming apparatus and film forming method
12/05/1990EP0400806A2 Method of making molybdenum-platinum oxide electrodes for thermoelectric generators
12/05/1990EP0400669A2 A masking tool and a masking method
12/05/1990EP0400667A2 A masking tool and a masking method
12/05/1990EP0386247A4 Device for vacuum deposition of films
12/04/1990US4975336 Transparent substrate coated with an alloy of manganese, bismuth, aluminum and silicon; large signal/noise ratio
12/04/1990US4975327 Polyimide substrate having a textured surface and metallizing such a substrate
12/04/1990US4975230 Method of making an open pore structure
12/04/1990US4975168 Method of forming transparent conductive film and apparatus for forming the same
12/04/1990US4975147 Method of pretreating metallic works
12/02/1990CA2017915A1 Masking tool and a masking method
12/02/1990CA2017891A1 Masking tool and a masking method
11/1990
11/29/1990WO1990014682A1 Magnetic structure for electron-beam heated evaporation source
11/29/1990WO1990012485A3 Multiple source evaporation for alloy production
11/29/1990DE3925283A1 Pinhole free coating of capacitor foil with vaporisable metal - uses aluminium with tungsten, tantalum, molybdenum, zirconium or rare earth elements to stabilise vaporising pool and prevent spraying
11/28/1990EP0399710A1 Sputtering apparatus with a rotating magnet array having a geometry for specified target erosion profile
11/28/1990EP0399470A2 Method for growing thin film by beam deposition
11/28/1990EP0398985A1 Infra-red transparent materials.
11/28/1990EP0224563A4 High speed digital frequency counter
11/27/1990US4973525 Metal-insulator composites having improved properties and method for their preparation
11/27/1990US4973388 Method of depositing a decorative wear-resistant coating layer on a substrate
11/27/1990CA1276969C Titanium nitride electrodes for thermoelectric generators
11/27/1990CA1276861C Wear-resistant coating of cutting tool and method of applying same
11/22/1990EP0398375A2 Method of fabricating oxide superconducting film
11/22/1990EP0398374A2 Method of and apparatus for fabricating oxide superconducting wire
11/22/1990EP0398370A2 Flat configuration color CRT display apparatus with scanning correction for component positioning error
11/22/1990EP0398365A2 Multiple chamber staged-vacuum semiconductor wafer processing system
11/22/1990EP0398164A2 Method of fabricating oxide superconducting film
11/22/1990EP0397743A1 New composite material comprising a perowskite-type phase and a nitride phase, process for producing it and electrical assemblies containing it
11/21/1990CN2066030U Plasma body evaporating device in multi sphere ion plating technology
11/20/1990US4971863 Metallized films having an adherent copolyester coating
11/20/1990US4971676 Support device for a thin substrate of a semiconductor material
11/20/1990US4971674 Targets, currents, magnets, solenoid coils
11/20/1990US4971673 Coating fibers with a layer of silicon
11/20/1990US4971100 System for supplying ultrahigh purity gas
11/15/1990WO1990013920A1 IN-SITU LASER DEPOSITION OF HOMOLOGOUS FILM INTERLAYER FOR HIGH Tc SUPERCONDUCTIVE THIN FILM
11/15/1990WO1990013687A2 Apparatus and method for treating flat substrates under reduced pressure
11/15/1990WO1990013685A1 Electric contact material, method of producing said material, and electric contact produced therefrom
11/15/1990WO1990013683A1 Method of obtaining carbon-containing materials
11/15/1990WO1990013422A1 High hardness/high compressive stress multilayer coated tool
11/15/1990DE3943482A1 Workpiece table for handling semiconductor wafers
11/15/1990DE3943478A1 Workpiece table for handling semiconductor wafers
11/14/1990EP0397441A2 Method of forming a pattern on a surface
11/14/1990EP0397029A2 Carrier for disc shaped workpieces, and vacuum process chamber
11/14/1990EP0396923A1 Elevating platform and conveyance method
11/14/1990EP0396603A1 Procedure and apparatus for the coating of materials by means of a pulsating plasma beam.
11/14/1990EP0396583A1 Deposition of materials in a desired pattern on to substrates
11/14/1990EP0396539A1 Method and apparatus for the treatment of surfaces of machine components
11/14/1990CN1010418B Automated flexible installation for rapid thermochemical treatment
11/13/1990US4970626 Electrolytic capacitor and method of preparing it
11/13/1990US4970196 Method and apparatus for the thin film deposition of materials with a high power pulsed laser
11/13/1990US4970092 Wear resistant coating of cutting tool and methods of applying same
11/13/1990US4969790 Apparatus on the carousel principle for the coating of substrates
11/13/1990CA1276088C Enhanced adhesion between metals and polymers
11/08/1990DE4013188A1 Edelmetall-polymer-verbundmaterialien und daraus hergestellte flexible duennfilmleiter Precious metal-polymer-composite materials made therefrom and flexible duennfilmleiter
11/07/1990EP0396114A2 Liquid transfer articles and method for producing them
11/07/1990EP0396099A1 Arrangement for removal of material from a target
11/06/1990US4968665 Target used for formation of superconductive oxide film, process of producing thereof, and process of forming superconductive oxide film on substrate using the same
11/06/1990US4968664 Single-crystal wafer having a superconductive ceramic thin film formed thereon
11/06/1990US4968006 Ion implantation of spherical surfaces
11/06/1990CA1275871C Diffusion oriented repair process
11/02/1990CA2014261A1 Noble metal-polymer composites and flexible thin-film conductors prepared therefrom
11/01/1990WO1990012485A2 Multiple source evaporation for alloy production
10/1990
10/31/1990EP0395412A2 Transparent barrier film and method
10/31/1990EP0395198A2 Hydrogenated carbon compositions
10/31/1990EP0394692A2 Process and apparatus for coating a substrate in a plasma
10/31/1990EP0394661A1 Process for at least partially coating workpieces by means of a sputter-CVD method
10/31/1990EP0394658A1 Process for manufacturing thin, resistant coatings
10/31/1990EP0394475A1 Aluminium vacuum evaporation film and its production method
10/31/1990EP0394286A1 Steered arc coating with thick targets
10/31/1990EP0211057B1 Sputtering installation for reactive coating of a substrate with hard materials
10/31/1990DE3914005A1 Metallising semiconductor - by metal sublimation e.g. to form recombination centres within semiconductor
10/31/1990CN1046566A Process for colouring surface of metallic materials and products obtained by its use
10/30/1990US4966789 Process of manufacturing seal members having a low friction coefficient
10/30/1990US4966677 Cathode sputtering apparatus on the magnetron principle with a hollow cathode and a cylindrical target
10/30/1990US4966676 Sputtering target
10/30/1990US4966669 For metallization of semiconductors
10/30/1990US4966668 Method for the treatment of metal objects
10/30/1990US4966663 Method for forming a silicon membrane with controlled stress
10/30/1990US4966095 Apparatus for forming a thin film
10/28/1990CA2013282A1 Hydrogenated carbon compositions
10/24/1990EP0394159A1 Coloration process for a metallic material surface and products obtained from the process
10/24/1990EP0393958A2 Method and apparatus for sputter coating stepped wafers - case a
10/24/1990EP0393957A2 Method and apparatus for sputter coating stepped wafers - case B
10/24/1990EP0393764A1 Method of forming on a surface of a moving substrate a layer, and vacuum evaporation apparatus for forming vapor deposited layers
10/24/1990EP0393344A1 Targets supporting device for sputtering sources and procedure for maintaining a target in a support
10/24/1990CN1046356A Process for preparing film of multicomponent metal oxide
10/24/1990CA2015008A1 Method for manufacturing thin-film resistor layers
10/23/1990US4965862 Disk scanning apparatus for batch ion implanters
10/23/1990US4965248 Method of fabricating thin layers from high-temperature oxide superconductors
10/23/1990US4965247 Metal oxide solenoid
10/23/1990US4965244 CaF2 passivation layers for high temperature superconductors
10/23/1990US4965164 Method for producing electrophotographic photoreceptor
10/23/1990US4965142 Molybdenum-platinum-oxide electrodes for thermoelectric generators