| Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) | 
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| 09/18/2013 | CN103305798A Evaporation device and evaporation process using same | 
| 09/18/2013 | CN103305797A Evaporation apparatus | 
| 09/18/2013 | CN103305796A Evaporation source apparatus, vacuum deposition apparatus, and method of manufacturing organic EL display device | 
| 09/18/2013 | CN103305795A Vacuum coating process of electronic device | 
| 09/18/2013 | CN103305794A Organic film coating device and method | 
| 09/18/2013 | CN103305793A Method for preparing novel buffer layer oxide target and oxide film thereof | 
| 09/18/2013 | CN103305792A Zinc-oxide-doped transparent film and preparation method thereof | 
| 09/18/2013 | CN103305791A Preparation process method for 6LiF/BC4 composite neutron conversion film for 4H-SiC-matrix neutron detector | 
| 09/18/2013 | CN103305790A Preparation method of CdS/SiO2 nanometer transparent composite film | 
| 09/18/2013 | CN103305789A CrAlN/ZrO2 nanometer coating and preparation method thereof | 
| 09/18/2013 | CN103304220A Target material and preparation method thereof as well as display device | 
| 09/18/2013 | CN103302917A Dual-absorption-layer TiON weather-resistant photothermal coating and preparation method thereof | 
| 09/18/2013 | CN103302916A Coated piece and production method thereof | 
| 09/18/2013 | CN103302325A WC-base hard alloy cutting tool cutter | 
| 09/18/2013 | CN103302295A Method for mill processing of high-purity and high-density molybdenum alloy target | 
| 09/18/2013 | CN102747341B Special tool for installing wafer bracket and method for installing special tool | 
| 09/18/2013 | CN102732835B Dual-gas-supply inflation system applied to vacuum coating equipment and inflation method of system | 
| 09/18/2013 | CN102703864B Method for performing arc-added glow discharge ion diffusion coating on magnesium alloy plate | 
| 09/18/2013 | CN102409289B Preparation method of B-C-N ternary film | 
| 09/18/2013 | CN102321865B Heat treated magnetron sputtering B-C-N ternary hard coat | 
| 09/18/2013 | CN102217055B Substrate processing method and substrate processing apparatus | 
| 09/18/2013 | CN102102170B Method for preparing color-changing film | 
| 09/17/2013 | US8536544 Apparatus and a method of determining the presence of an alumina layer on a surface of a component | 
| 09/17/2013 | US8535810 Transparent plastic film for shielding electromagnetic waves and method for producing a plastic film of this type | 
| 09/17/2013 | US8535766 Patterning of magnetic thin film using energized ions | 
| 09/17/2013 | US8535635 Method of manufacturing carbon cylindrical structures and biopolymer detection device | 
| 09/17/2013 | US8535496 Sputter-coating apparatus | 
| 09/17/2013 | US8535495 Coating device | 
| 09/17/2013 | US8535494 Rotary magnet sputtering apparatus | 
| 09/17/2013 | US8535490 Rotatable magnetron sputtering with axially movable target electrode tube | 
| 09/12/2013 | WO2013134127A1 Method and apparatus for forming a transparent conductive oxide using hydrogen | 
| 09/12/2013 | WO2013133460A1 Deposition device capable of forming patterns | 
| 09/12/2013 | WO2013133353A1 Sputtering target | 
| 09/12/2013 | WO2013133252A1 Deposition data processing apparatus, and apparatus and method for manufacturing organic el device | 
| 09/12/2013 | WO2013133163A1 Sputtering target for magnetic recording medium, and process for producing same | 
| 09/12/2013 | WO2013132903A1 Piezoelectric thin film, piezoelectric element, ink-jet head, and ink-jet printer | 
| 09/12/2013 | WO2013132794A1 Vapor deposition device | 
| 09/12/2013 | WO2013131961A1 Nanolaminated coated cutting tool | 
| 09/12/2013 | WO2013131943A1 A body with a metal based nitride layer and a method for coating the body | 
| 09/12/2013 | WO2013131804A1 Semiconductor element with an oriented layer and method for the production thereof | 
| 09/12/2013 | WO2013087561A3 Electrically conductive sinx ceramic composite, its sputtering targets and manufacturing methods thereof | 
| 09/12/2013 | US20130237677 Method of forming thin film | 
| 09/12/2013 | US20130235439 Holographic image reproduction mechanism using ultraviolet light | 
| 09/12/2013 | US20130234093 Composite target sputtering for forming doped phase change materials | 
| 09/12/2013 | US20130234081 Oxide sintered compact and sputtering target | 
| 09/12/2013 | US20130233706 Al-based alloy sputtering target and production method of same | 
| 09/12/2013 | US20130233705 Titanium diboride target | 
| 09/12/2013 | US20130233701 Dual Hexagonal Shaped Plasma Source | 
| 09/12/2013 | DE102012210068B4 Vakuumsubstratbehandlungs-Durchlaufprozessanlage Vacuum substrate treatment cycle process plant | 
| 09/12/2013 | DE102012203633A1 Spiegel für den EUV-Wellenlängenbereich, Herstellungsverfahren für einen solchen Spiegel und Projektionsbelichtungsanlage mit einem solchen Spiegel Mirror for the EUV wavelength range, manufacturing process for such a mirror and projection exposure system with such a mirror | 
| 09/12/2013 | DE102012101923A1 Substratträgeranordnung, Beschichtungsanlage mit Substratträgeranordnung und Verfahren zur Durchführung eines Beschichtungsverfahrens Substrate support assembly, coating machine with substrate support assembly and method for performing a coating process | 
| 09/11/2013 | EP2636765A1 Methods for vapor depositing high temperature coatings on gas turbine engine components utilizing pre-alloyed pucks | 
| 09/11/2013 | EP2636764A1 Nanolaminated coated cutting tool | 
| 09/11/2013 | EP2636521A1 Gas-barrier laminate film | 
| 09/11/2013 | EP2388354B1 Layered thermal barrier coating with blended transition and method of application | 
| 09/11/2013 | CN203187751U Unwinding device of high-vacuum winding and aluminizing machine | 
| 09/11/2013 | CN203187750U Automatic film plating machine of heat collection tube continuous film plating machine | 
| 09/11/2013 | CN203187749U Winding guide device of aluminium-plating film machine | 
| 09/11/2013 | CN203187748U Vacuum measurement device of vacuum coating equipment | 
| 09/11/2013 | CN203187747U Magnetron sputtering target hood | 
| 09/11/2013 | CN203187746U Drum-shaped film plating machine | 
| 09/11/2013 | CN203187745U Power device of drum-pasting-type coating machine evaporation drum | 
| 09/11/2013 | CN203187744U Gas release device for film coating process | 
| 09/11/2013 | CN203187743U Evaporation deposition equipment with self-cleaning observation window | 
| 09/11/2013 | CN203187742U Gas release device for film coating process | 
| 09/11/2013 | CN203187741U Winding guide device of vacuum suspension film-plating machine | 
| 09/11/2013 | CN203187740U Cutter Fixing device of slitting device of drum-pasting-type coating machine | 
| 09/11/2013 | CN203187739U Fixing device of the winding wheel of vacuum suspension film-plating machine | 
| 09/11/2013 | CN203187738U Tension device of high-vacuum winding and aluminizing machine | 
| 09/11/2013 | CN103299712A Substrate to which film is formed and organic EL display device | 
| 09/11/2013 | CN103298970A Silver-alloy sputtering target for conductive-film formation, and method for producing same | 
| 09/11/2013 | CN103298969A Method and device for transporting vacuum arc plasma | 
| 09/11/2013 | CN103298968A Apparatus for coating substrates using the EB/PVD method | 
| 09/11/2013 | CN103298967A Hard and low friction nitride coatings | 
| 09/11/2013 | CN103298767A Oxide sintered body, and sputtering target | 
| 09/11/2013 | CN103298607A Alloy, protective layer and component | 
| 09/11/2013 | CN103296139A Preparation method of CIGS (copper indium gallium selenide) thin-film solar cell absorbing layer | 
| 09/11/2013 | CN103296128A Flexible CIGS thin film solar cell window layer preparation technology | 
| 09/11/2013 | CN103295885A Method of manufacturing silicon carbide semiconductor device | 
| 09/11/2013 | CN103290417A Preparation method of titanium dioxide (TiO2) nanotube film on stainless steel surface | 
| 09/11/2013 | CN103290388A Plasma coating equipment and air extraction process thereof | 
| 09/11/2013 | CN103290385A Roll-to-roll vertical type magnetic control film plating device | 
| 09/11/2013 | CN103290384A Film coating correcting plate | 
| 09/11/2013 | CN103290383A Transmission control method of coated glass | 
| 09/11/2013 | CN103290382A Planetary workpiece frame of vacuum coating machine | 
| 09/11/2013 | CN103290381A A method for improving the magnetron sputtering deposition rate of SiO2 thin film | 
| 09/11/2013 | CN103290380A On-line ITO thin film characteristic feedback device | 
| 09/11/2013 | CN103290379A Multifunctional magnetron sputtering film coating device | 
| 09/11/2013 | CN103290378A Magnetron sputtering coating cathode mechanism | 
| 09/11/2013 | CN103290377A Magnetron sputtering method, magnetron sputtering electrode and device thereof | 
| 09/11/2013 | CN103290376A Diffusion impervious layer modification for flexible substrate | 
| 09/11/2013 | CN103290375A Electromagnetic magnetron sputtering method applied to photovoltaic transparent conductive glass | 
| 09/11/2013 | CN103290374A Coating process of crystalline silicon solar cell | 
| 09/11/2013 | CN103290373A Horizontal type multi-target vacuum sputtering or ion plating machine | 
| 09/11/2013 | CN103290372A Method for preparing copper indium gallium rotary target material for thin-film solar cells | 
| 09/11/2013 | CN103290371A Sputtering target, method for manufacturing sputtering target, and method for forming thin film | 
| 09/11/2013 | CN103290370A Composite target and method for manufacturing the same | 
| 09/11/2013 | CN103290369A Transmission coupling fixing device of photovoltaic glass sputtering equipment | 
| 09/11/2013 | CN103290368A Man-machine interface self-bleeding system for photovoltaic glass sputtering apparatus | 
| 09/11/2013 | CN103290367A Preparation method of film bulk acoustic resonator lower electrode |