C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material

Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
10/2013
10/09/2013	EP2646595A1 Apparatus for coating a substrate
10/09/2013	EP2646594A1 Evaporation unit and vacuum coating apparatus
10/09/2013	EP2646593A1 Refurbishing copper and indium containing alloy sputter targets
10/09/2013	CN203229570U Alignment type multi-sheet transmission system and thin film deposition equipment using alignment type multi-sheet transmission system
10/09/2013	CN203229569U Broken line repairing machine
10/09/2013	CN103348043A Method for producing substrate for group iii nitride semiconductor element fabrication, method for producing group iii nitride semiconductor free-standing substrate or group iii nitride semiconductor element, and group iii nitride growth substrate
10/09/2013	CN103348038A Magnetron sputtering device, method for controlling magnetron sputtering device, and film forming method
10/09/2013	CN103348037A Pvd sputtering target with a protected backing plate
10/09/2013	CN103348036A Al-based alloy sputtering target and Cu-based alloy sputtering target
10/09/2013	CN103348035A 溅射靶 Sputtering target
10/09/2013	CN103348034A Steel sheet including a multilayer coating
10/09/2013	CN103348033A Direct liquid vaporization for oleophobic coatings
10/09/2013	CN103347836A Oxide sintered body and tablet obtained by processing same
10/09/2013	CN103346248A Method for preparing full-transparent heat-conduction and electric-conduction composite substrate
10/09/2013	CN103346069A Method for preparing low-boron-doped high-conductivity hydrogenated amorphous silicon film
10/09/2013	CN103345337A Flexible touch screen and preparation method thereof
10/09/2013	CN103343327A Method for preparing amorphous transparent zinc oxide film
10/09/2013	CN103343326A Nanocrystalline ultrahard composite coating and preparation method thereof
10/09/2013	CN103343325A Anti-sagging device for magnetron sputtering door
10/09/2013	CN103343324A 磁控溅射设备 Magnetron sputtering equipment
10/09/2013	CN103343323A Preparation method of copper-indium-gallium-selenium film
10/09/2013	CN103343322A Magnetron sputtering target material shield and magnetron sputtering winding coating equipment
10/09/2013	CN103343321A Method of manufacturing sputtering target
10/09/2013	CN103343320A Multi-station source baffle system for vacuum coating equipment
10/09/2013	CN103343319A Method for preparing nanocrystalline metal coating on surface of diamond particles
10/09/2013	CN103343318A Preparation method of light absorption layer of solar battery
10/09/2013	CN103343317A Preparation method of TiO2 nanoparticle antireflective film based on nanocluster beam deposition system
10/09/2013	CN103343316A Method for preparing MgxZn1-xO alloy film
10/09/2013	CN103343315A Bismuth-ferrite-doped semiconductor film material and preparation method thereof
10/09/2013	CN103342551A Preparation methods of room-temperature ferromagnetic Sr3FeCrMoO9 ceramic and film
10/09/2013	CN103341694A Method for preparing composite flying plate in laser indirect impact micro-forming
10/09/2013	CN103341624A Method for preparing Cu-Cu2O core-shell ferromagnetic nano-particles
10/09/2013	CN103341210A Preparation method of anti-osteoporotic micro/nano biomimetic coating of bone implant
10/09/2013	CN102620456B Medium-and-low-temperature solar selective absorption thin film and preparation method thereof
10/09/2013	CN102465272B Multielement composite transparent conductive film and preparation method and application thereof
10/09/2013	CN102345100B Aluminum cerium metal target material and method for manufacturing aluminum cerium film by using same
10/09/2013	CN102304692B Hard coating film and method for forming the same
10/09/2013	CN102282288B Radio wave-transmitting decorative member and method for producing same
10/09/2013	CN102131949B Mask and method for forming film using mask
10/09/2013	CN102129889B B and Gd-containing overall composite combustible toxic fuel and preparation method
10/09/2013	CN102102183B Al-based alloy sputtering target
10/09/2013	CN102102181B Coating device
10/09/2013	CN101942645B Film plating machine
10/09/2013	CN101818331B Functional film and method for manufacturing the functional film
10/08/2013	US8551613 Coated article and method for manufacturing same
10/08/2013	US8551578 Patterning of magnetic thin film using energized ions and thermal excitation
10/08/2013	US8551307 Sputtering target apparatus
10/08/2013	US8551300 Coated article with improved barrier layer structure and method of making the same
10/08/2013	US8551267 Monolithic aluminum alloy target and method of manufacturing
10/08/2013	US8550031 Cluster tool architecture for processing a substrate
10/03/2013	WO2013148564A1 Substrate support with radio frequency (rf) return path
10/03/2013	WO2013148469A1 Process kit with plasma-limiting gap
10/03/2013	WO2013148462A1 Technique for processing a substrate
10/03/2013	WO2013147189A1 Curable resin composition for vapor deposition, resin protective film, oragnic optical device, and method for manufacturing organic optical device
10/03/2013	WO2013147119A1 Gas-barrier film and process for producing same, and gas-barrier laminate
10/03/2013	WO2013146661A1 Method for forming thin film pattern
10/03/2013	WO2013146601A1 Vacuum-deposition apparatus
10/03/2013	WO2013146496A1 Vapor-deposition material for forming thin-film
10/03/2013	WO2013146483A1 Transparent electroconductive laminate
10/03/2013	WO2013146448A1 Sintered object for forming low-refractive-index film and process for producing same
10/03/2013	WO2013146382A1 Method for manufacturing eyeglass lens
10/03/2013	WO2013146185A1 Annular member and film-forming device in which same is used
10/03/2013	WO2013146182A1 Vacuum film deposition device and vacuum film deposition method
10/03/2013	WO2013146137A1 Deposition prevention plate for vacuum film forming device, vacuum film forming device, and vacuum film forming method
10/03/2013	WO2013146095A1 Oxide film and process for producing same
10/03/2013	WO2013145847A1 Particulate film laminating apparatus and particulate film laminating method using same
10/03/2013	WO2013145818A1 Sputtering target and process for manufacturing same
10/03/2013	WO2013145813A1 Film-forming apparatus
10/03/2013	WO2013145640A1 Method for evacuating vacuum chamber, vacuum device, method for forming organic film, method for manufacturing organic el element, organic el display panel, organic el display device, organic el light emitting device, and method for detecting impurities
10/03/2013	WO2013145483A1 Deposition apparatus and deposition method
10/03/2013	WO2013145424A1 Silver-based cylindrical target and process for manufacturing same
10/03/2013	WO2013145215A1 Die for extrusion molding, production method for die for extrusion molding, and production method for honeycomb structure
10/03/2013	WO2013145209A1 Die for extrusion molding, production method for die for extrusion molding, extrusion molding device, and production method for honeycomb structure
10/03/2013	WO2013145050A1 Plasma processing apparatus and substrate processing system
10/03/2013	WO2013144398A1 Lens comprising a polymeric substrate, a hardening layer and a metallic layer
10/03/2013	WO2013143692A1 Method and apparatus for feeding liquid metal to an evaporator device
10/03/2013	WO2013143624A2 Target material with a boron compound for a thin film depostition technique, method for manufacturing a thin film on a substrate, heat receiver tube, parabolic trough collector with the heat receiver tube and use of the parabolic tough collector
10/03/2013	WO2013143384A1 Method for preparing carbon-metal embedded conductive film used in nonmetallic material
10/03/2013	WO2012168575A3 Plasma immersion ion implantation machine for low-pressure process
10/03/2013	US20130260049 Process for chemical passivation of polymer surfaces
10/03/2013	US20130256144 Apparatus and method for molecular separation, purification, and sensing
10/03/2013	US20130256130 Hard film, plastic working die, plastic working method, and target for hard film
10/03/2013	US20130256129 Plasma processing apparatus
10/03/2013	US20130256128 Process kit with plasma-limiting gap
10/03/2013	US20130256127 Substrate processing system having symmetric rf distribution and return paths
10/03/2013	US20130256126 Substrate support with radio frequency (rf) return path
10/03/2013	US20130256125 Substrate processing system with mechanically floating target assembly
10/03/2013	US20130256121 Manufacturing method of reflective layer for reflective type liquid crystal
10/03/2013	US20130256120 Production method for forming an antibacterial film on the surface of an object
10/03/2013	US20130256119 Method for applying power to target material, power supply for target material, and semiconductor processing apparatus
10/03/2013	US20130255535 CZTSe NANOINK COMPOSITION AND SPUTTERING TARGET THEREOF
10/02/2013	EP2645166A1 Photomask blank, process for production of photomask, and chromium-containing material film
10/02/2013	EP2644740A2 Method for producing a thin coating on a substrate
10/02/2013	EP2644300A1 Surface coated sintered body
10/02/2013	EP2643498A1 Coated cutting tool insert
10/02/2013	DE112011104627T5 Fertigungsvorrichtung Manufacturing device
10/02/2013	DE102012205254A1 Tempering band-shaped substrate, comprises guiding and transporting substrate band along transport path and is tempered by guide segment, with thermal band as heat exchangers, by which guide segment leads thermal band along transport path
10/02/2013	DE102012204853A1 Verfahren zum Herstellen einer Dünnschicht auf einem Substrat A method for forming a thin film on a substrate
10/02/2013	DE102007009583B4 Verfahren zur Herstellung eines Verbundformteils A process for producing a composite molding
10/02/2013	CN203222617U High-vacuum aluminized film trimming and collecting device

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