Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
10/2013
10/30/2013CN102239275B Organic compound steam generator and apparatus for producing organic thin film
10/30/2013CN102077377B System and method to fabricate magnetic random access memory
10/29/2013US8568899 Metal covered polyimide composite, process for producing the composite, and process for producing electronic circuit board
10/29/2013US8568890 Watch cover glass
10/29/2013US8568621 Transparent conductive film
10/29/2013US8568577 Magnetron sputtering apparatus
10/29/2013US8568576 Sputtering target of nonmagnetic-particle-dispersed ferromagnetic material
10/29/2013US8568572 Very low pressure high power impulse triggered magnetron sputtering
10/29/2013US8568571 Thin film batteries and methods for manufacturing same
10/24/2013WO2013159050A1 Dual-mask arrangement for solar cell fabrication
10/24/2013WO2013158067A1 Method and table assembly for applying coatings to spherical components
10/24/2013WO2013157847A1 Thin film cluster and thin film particle, and manufacturing methods therefor
10/24/2013WO2013157723A1 High efficiency container for thermal evaporation
10/24/2013WO2013157635A1 Gas flow deposition device and gas flow deposition method
10/24/2013WO2013157619A1 Semiconductor device and method for manufacturing the same
10/24/2013WO2013157468A1 CrTi-BASED ALLOY FOR ADHESION FILM LAYER FOR USE IN MAGNETIC RECORDING MEDIUM, TARGET MATERIAL FOR SPUTTERING, AND PERPENDICULAR MAGNETIC RECORDING MEDIUM OBTAINED USING SAME
10/24/2013WO2013157286A1 Substrate for superconducting film, superconducting wire, and superconducting wire fabrication method
10/24/2013WO2013156721A1 Method for producing a coated substrate
10/24/2013WO2013156296A1 Turbomachine component with a functional coating
10/24/2013WO2013156131A1 High performance tools exhibiting reduced crater wear in particular by dry machining operations
10/24/2013WO2013156107A1 Coating containing si-dlc, dlc, and me-dlc, and a method for producing coatings
10/24/2013WO2013104925A3 In-vacuum rotational device
10/24/2013US20130280522 Surface treatment method for diamond-like carbon layer and coated article manufactured by the method
10/24/2013US20130280441 Deposition source
10/24/2013US20130277214 Method of Storing Metal Lanthanum Target, Vacuum-sealed Metal Lanthanum Target, and Thin Film Formed by Sputtering the Metal Lanthanum Target
10/24/2013US20130277213 Sputtering apparatus
10/24/2013US20130277207 Manufacturing apparatus
10/24/2013US20130277205 Magnetron source, magnetron sputtering apparatus and magnetron sputtering method
10/24/2013US20130277204 Vapour deposition
10/24/2013US20130277203 Process kit shield and physical vapor deposition chamber having same
10/24/2013US20130276879 Sintered oxide material, method for manufacturing same, sputtering target, oxide transparent electrically conductive film, method for manufacturing same, and solar cell
10/24/2013US20130276699 Sputtering device
10/24/2013DE102012206553A1 Controlling thickness distribution in vacuum coating of substrate, comprises placing cathode and anode in vacuum chamber, where plasma discharge is generated during treating the substrate in plasma area defined between cathode and substrate
10/24/2013DE102012206502A1 Device for front contact-free transport of e.g. flexible organic LED material, has deflection unit provided on carrier strip in such way that carrier tape to be coated band-shaped material touches on rear side
10/24/2013DE102012206464A1 Magnet, useful in ultra high vacuum applications, comprise magnetic body e.g. rare earth permanent magnet, chromium nitride layer as a covering layer disposed on a surface of magnetic body, and titanium nitride layer as interfacial layer
10/24/2013DE102012103578A1 Method of manufacturing thin film solar cell, involves depositing transparent conductive oxide layer as front contact on protective layer by pulsed magnetron sputtering with specific pulse frequency and power density during a pulse
10/24/2013DE102012007796A1 Workpiece, useful as e.g. component of internal combustion engine, comprises base body and covering layer that comprises three-fold layers including layer of silicon-diamond-like carbon, layer of diamond-like carbon and hydrogen
10/24/2013DE102011015097B4 Kühleinheit mit hydrophiler Verbindungsschicht Cooling unit with a hydrophilic compound layer
10/23/2013EP2653896A1 Method of producing a reflector which can withstand thermal loads
10/23/2013EP2653587A1 Flow engine component with a functional coating
10/23/2013EP2653585A1 Laminated structure body and fabrication method for same
10/23/2013EP2653584A1 Vapor deposition shadow mask system for backplane and display screen with any size and method thereof
10/23/2013EP2653583A1 Coating method for depositing a coating system on a substrate and substrate with a coating system
10/23/2013EP2653306A1 Coated article with niobium zirconium inclusive layer(s) and method of making same
10/23/2013EP2652167A1 Continuous coating apparatus
10/23/2013EP2652166A1 Steel sheet including a multilayer coating
10/23/2013EP2651639A1 Energy-shielding plastics film
10/23/2013CN203249419U Solar energy selective absorption film system suitable for being utilized by intermediate and high temperature heat
10/23/2013CN203247304U Workpiece rest limiting mechanism for cylindrical film coating chamber
10/23/2013CN203247303U Magnetron sputtering apparatus
10/23/2013CN203247302U Overturning mechanism used for replacement of cathode target material of vacuum coating equipment
10/23/2013CN103370439A Substrate conveying roller, thin film manufacturing device, and thin film manufacturing method
10/23/2013CN103370438A Hot metal sheet forming or stamping tools with Cr-Si-N coatings
10/23/2013CN103370437A Light-transmitting rigid thin film
10/23/2013CN103370430A Antimicrobial substance, method for producing same, and antimicrobial material
10/23/2013CN103367913A Preparation method for radar protective cover
10/23/2013CN103367763A Method for preparing solid oxide fuel cell nanometer thin film cathode by magnetron sputtering method
10/23/2013CN103366497A Coating machine failure warning device
10/23/2013CN103365017A Inorganic all-solid electrochromic device and preparation method thereof
10/23/2013CN103362954A Bearing bush with magnetron-sputtering self-lubricating composite coating layer and production method for the bearing bush
10/23/2013CN103361623A Winding evaporation type vacuum coating machine
10/23/2013CN103361622A Positioning device for reel-to-reel coating equipment
10/23/2013CN103361621A Method for depositing thick aluminum-copper film layer
10/23/2013CN103361620A LED (light-emitting diode) chip ITO (indium tin oxide) evaporator visible window
10/23/2013CN103361619A LED (light-emitting diode) chip ITO (indium tin oxide) evaporator wide-angle visible window
10/23/2013CN103361618A LED (light-emitting diode) chip ITO (indium tin oxide) evaporator explosion-proof visible window
10/23/2013CN103361617A Special glass carrier for substrate rack
10/23/2013CN103361616A Vacuum ion plating triaxial constant speed successive rotating coating film device
10/23/2013CN103361615A Equipment for depositing nano coating of double-cathode plasma on surface of diamond and process
10/23/2013CN103361614A Method for preparing Terahertz modulator film material based on flexible substrate
10/23/2013CN103361613A Method for preparing column-shaped nano-tungsten
10/23/2013CN103361612A 圆柱磁控溅射靶 Cylindrical Magnetron sputtering target
10/23/2013CN103361611A Production process of video camera protective cover with multiple protection functions
10/23/2013CN103361610A Evaporating source and vacuum evaporation device employing the same
10/23/2013CN103361609A LED (light-emitting diode) chip ITO (indium tin oxide) evaporator rotary table device
10/23/2013CN103361608A Evaporation device
10/23/2013CN103361607A Vacuum evaporation apparatus and method for replacing crucibles in vacuum evaporation apparatus
10/23/2013CN103361606A Organic EL device manufacturing device and organic EL device manufacturing method
10/23/2013CN103361605A Vacuum evaporation method and device thereof
10/23/2013CN103361604A 有机材料沉积系统 The organic material deposition system
10/23/2013CN103361603A Vacuum evaporation equipment of semiconductor film material and preparation method of OLED (Organic Light Emitting Diode) conductive layer
10/23/2013CN103361602A Method for chemical passivation of polymer surface
10/23/2013CN103361601A Method for manufacturing surface enhancement Raman scatting substrate
10/23/2013CN103361600A Preparation method of solar cell light absorption layer
10/23/2013CN103361599A Metal mask installing method
10/23/2013CN103361506A Planar or tubular sputter targets and a method for producing the same
10/23/2013CN102703858B Metallic DLC (diamond-like carbon) film preparation method
10/23/2013CN102653858B Method for preparing MnCo spinel protecting film by magnetron sputtering and subsequent oxidation
10/23/2013CN102650042B Preparation method for indium tin oxide target for vapor deposition of blue LED
10/23/2013CN102560383B Molybdenum niobium alloy plate target material processing technology
10/23/2013CN102378825B Lanthanum target for sputtering
10/23/2013CN102312207B Film forming device
10/23/2013CN102294671B Support device and method for assembling coil and shield of film physical titanium chamber
10/23/2013CN102282693B Method for deposition of at least one electrically conducting film on substrate
10/23/2013CN102220130B Luminescent film, preparation method and application thereof
10/22/2013US8563414 Methods for forming conductive carbon films by PECVD
10/22/2013US8563333 Film formation apparatus and film formation method
10/22/2013US8563091 Film formation method, film formation device, piezoelectric film, piezoelectric device and liquid discharge device
10/22/2013US8563084 Method and device for producing stoichiometry gradients and layer systems
10/22/2013US8562800 Plasma generating apparatus and plasma processing apparatus
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