C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material

Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
11/2013
11/06/2013	CN103382547A Reactive sputter deposition of dielectric films
11/06/2013	CN103382546A A method for depositing crystalline titania nanoparticles and films
11/06/2013	CN103382545A Method for manufacturing light-emitting element and deposition apparatus
11/06/2013	CN102677005B Method for manufacturing large-sized high-density chromium target
11/06/2013	CN102656291B Indium target and method for manufacturing same
11/06/2013	CN102560404B Preparation method for spiral line low-resistance composite coating for traveling wave tube
11/06/2013	CN102560390B Preparation method of transparent conductive film
11/06/2013	CN102534505B Method for preparing black silicon material surface metal electrode
11/06/2013	CN102465270B Conducting film, preparation device thereof and preparation method thereof
11/06/2013	CN102459689B 靶冷却装置 Target cooling device
11/06/2013	CN102456725B Monocrystal high K gate dielectric material and preparation method thereof
11/06/2013	CN102360709B Lithium niobate thin film with room temperature ferromagnetism and preparation method for lithium niobate thin film
11/06/2013	CN102356180B Lanthanum target for sputtering
11/06/2013	CN102347233B Method and tray for improving thickness evenness of silicon wafer in process of backlining the silicon wafer
11/06/2013	CN102317494B Method for producing a heat barrier covering a metal substrate made of a superalloy, and thermomechanical part resulting from said production method
11/06/2013	CN102245533B Indium oxide sintered compact and sputtering target
11/06/2013	CN102086505B Correction mask for coating film
11/06/2013	CN102081408B Ion concentration monitoring system
11/06/2013	CN102077325B Film forming method and processing system
11/06/2013	CN101979706B Vaporizer
11/06/2013	CN101801664B Method for lamination of decorative metal film on resin base material, and resin base material having decorative metal film thereon
11/05/2013	US8575076 Sliding member and production process thereof
11/05/2013	US8574718 Coated glass surfaces and method for coating a glass substrate
11/05/2013	US8574412 Magnet mounting system and magnetron sputtering device having same
11/05/2013	US8574411 Reactive sputtering chamber with gas distribution tubes
11/05/2013	US8574410 Method and apparatus for improved high power impulse magnetron sputtering
11/05/2013	US8574409 Method of magnetron sputtering and a method for determining a power modulation compensation function for a power supply applied to a magnetron sputtering source
11/05/2013	US8574365 Apparatus for applying a primer coating with the aid of vacuum
10/2013
10/31/2013	WO2013163623A1 Narrow source for physical vapor deposition processing
10/31/2013	WO2013162992A1 Process kit shield and physical vapor deposition chamber having same
10/31/2013	WO2013162174A1 Method for forming nano-pattern
10/31/2013	WO2013161507A1 Two-layered flexible wiring substrate, flexible wiring board, and methods for producing same
10/31/2013	WO2013160749A2 Hydrophilic polymer surface, process for production of the same, uses of the process and items comprising said surface
10/31/2013	WO2013160587A1 Multilayer material resistant to oxidation in a nuclear environment
10/31/2013	WO2013159893A1 Arc-deposited al-cr-o coatings having enhanced coating properties
10/31/2013	WO2013159870A1 Arc-deposited al-cr-o coatings having enhanced coating properties
10/31/2013	WO2013120097A9 Compact, filtered ion source
10/31/2013	WO2013109333A4 Linear scanning sputtering system and method
10/31/2013	WO2013085625A9 Impact and erosion resistant thermal and environmental barrier coatings
10/31/2013	WO2013041336A9 Transfer masks for the local vapour deposition of substrates and a process for the production thereof
10/31/2013	US20130288400 System and Method for Aligning Substrates for Multiple Implants
10/31/2013	US20130288071 Gold or silver metallized plastic product free of any gold and silver element and method for manufacturing it
10/31/2013	US20130287964 Plasma Potential Modulated ION Implantation System
10/31/2013	US20130287963 Plasma Potential Modulated ION Implantation Apparatus
10/31/2013	US20130287931 Methods of making devices
10/31/2013	US20130287507 Coated cutting tool insert
10/31/2013	US20130284594 Narrow source for physical vapor deposition processing
10/31/2013	US20130284593 Ion source, ion beam processing/observation apparatus, charged particle beam apparatus, and method for observing cross section of sample
10/31/2013	US20130284590 Systems and methods for forming a layer of sputtered material
10/31/2013	US20130284589 Radio frequency tuned substrate biased physical vapor deposition apparatus and method of operation
10/31/2013	DE112011104820T5 Hartlaminarbeschichtung Hartlaminarbeschichtung
10/31/2013	DE112011104818T5 Hartlaminarbeschichtung Hartlaminarbeschichtung
10/31/2013	DE112011104813T5 Hartlaminarbeschichtung Hartlaminarbeschichtung
10/31/2013	DE102013104219A1 Verfahren zum Herstellen eines Vogelschutzglases A method for manufacturing a bird protective glass
10/31/2013	DE102013104214A1 Verfahren zum Herstellen eines Vogelschutzglases A method for manufacturing a bird protective glass
10/31/2013	DE102013104212A1 Bird protection glass used for exterior glazing, has bird-resistant coating comprising nitride(s) of titanium, zinc, tin, strontium-titanium, tungsten-bismuth, iron, silver, iron-silver, niobium, zirconium, tantalum or their alloy
10/31/2013	DE102012207159A1 Apparatus for coating substrates in coating chamber with crucible system, has crucible system with unit to transmit power from drive unit to crucible outside drive chamber which is in air-tight state against coating chamber interior
10/31/2013	DE102012107966A1 Vaporizer device, used in coating plant for coating plate-like/band-shaped substrates e.g. glass panes, comprises vapor sources that is adapted for evaporation of coating material and connected vapor outlet and comprises vapor outlet tube
10/31/2013	DE102012103710A1 System, useful for plasma processing planar substrate, includes modules for processing substrate and plasma source, substrate transportation system, and gas supply and extraction device separated from each other and connected with modules
10/30/2013	EP2657989A1 Light emission apparatus and manufacturing method thereof
10/30/2013	EP2657208A1 Gallium nitride sintered body or gallium nitride molded article, and method for producing same
10/30/2013	EP2655687A1 Retaining device for substrates and method for coating a substrate
10/30/2013	EP2655686A1 Vaporization source, vaporization chamber, coating method and nozzle plate
10/30/2013	EP2655685A1 Method and device for depositing silicon on a substrate
10/30/2013	CN203260585U Pixel structure for OLED display screen, metal masking plate of pixel structure, and OLED display screen
10/30/2013	CN203256328U Metal ion electric physical cleaning system
10/30/2013	CN103380494A Ion-assisted plasma treatment of a three-dimensional structure
10/30/2013	CN103380458A Soft magnetic alloy for magnetic recording, sputtering target material and magnetic recoding medium
10/30/2013	CN103380231A Substrate conveyance roller, thin film manufacturing device and thin film manufacturing method
10/30/2013	CN103380230A Sputtering target for solar cell
10/30/2013	CN103380229A Transparent oxide film and process for producing same
10/30/2013	CN103380228A 溅射靶组装体 Sputter target assembly
10/30/2013	CN103380227A Vapor deposition particle projection device and vapor deposition device
10/30/2013	CN103380099A 氧化物烧结体以及溅射标靶 The oxide sintered body and the sputtering target
10/30/2013	CN103379753A Electronic device housing and method of manufacturing same
10/30/2013	CN103377954A Forming method for grid bonding pad and source bonding pad
10/30/2013	CN103374707A Radio frequency tuned substrate biased physical vapor deposition apparatus and method of operation
10/30/2013	CN103374706A Method for preparing polycrystalline silicon film
10/30/2013	CN103374705A Magnetron sputtering device
10/30/2013	CN103374704A Method for manufacturing remote tempered double-silver low-radiation coated glass
10/30/2013	CN103374703A Single-tube direct-current sputtering coating equipment and use method for same
10/30/2013	CN103374702A Sputtering baffle
10/30/2013	CN103374701A 反应气体溅镀装置 Reactive gas sputtering apparatus
10/30/2013	CN103374700A Vacuum evaporation apparatus
10/30/2013	CN103374699A Glass coating equipment
10/30/2013	CN103374698A 加热腔室以及等离子体加工设备 Heating chamber and a plasma processing equipment
10/30/2013	CN103374697A Surface treatment method and product of diamond-like carbon film layer
10/30/2013	CN102749148B Manufacture method for membrane resistance thermometer
10/30/2013	CN102634758B High-transmittivity vanadium-based multi-layer superlattice film and preparation method thereof
10/30/2013	CN102586752B 基板固定装置 Board fixtures
10/30/2013	CN102560406B Physical vapor deposition (PVD) device and method for processing wafers by adopting same
10/30/2013	CN102549191B Target for Zno-based transparent conductive film and method for producing same
10/30/2013	CN102517551B Preparation method for three-dimensional photonic crystal
10/30/2013	CN102509768B Fe3O4 (ferroferric oxide)/p-Si (p-type silicon) structure capable of regulating and controlling magneto-resistance effect with current and preparation method for same
10/30/2013	CN102428207B Anti-wear layer arrangement and structural element having anti-wear layer arrangement
10/30/2013	CN102421931B Silver alloy target for forming reflection electrode film for organic EL element, and method for manufacturing silver alloy target
10/30/2013	CN102360666B Magnetically sensitive composite wire and preparation method thereof
10/30/2013	CN102356179B 钽溅射靶 Tantalum sputtering target
10/30/2013	CN102348828B Arc evaporation source and method for manufacturing film using same
10/30/2013	CN102337671B Preparation method of intelligent anti-ultraviolet fabric

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