| Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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| 12/11/2013 | CN203333742U Electrode assembly for evaporation coating machine |
| 12/11/2013 | CN203333741U Electroplating device capable of being coated with primer |
| 12/11/2013 | CN203333740U Novel door body structure of vacuum coating equipment |
| 12/11/2013 | CN203333739U Vacuum box body inflating buffer and vacuum film coating box |
| 12/11/2013 | CN203333738U Multifunctional throttling vacuum pipeline structure for vacuum coating equipment and control system thereof |
| 12/11/2013 | CN103443324A Film forming apparatus and film forming method |
| 12/11/2013 | CN103443323A Silver alloy sputtering target for forming electroconductive film, and method for manufacture same |
| 12/11/2013 | CN103439024A Nano-zinc-oxide temperature sensor and manufacturing process thereof |
| 12/11/2013 | CN103436892A Preparation method for abrasion-resistant gear with alloy steel on surface |
| 12/11/2013 | CN103436853A Fluorine-doped diamond-like film, preparation method thereof and impressing template comprising fluorine-doped diamond-like film |
| 12/11/2013 | CN103436852A Flexible substrate foil roll-to-roll conveyer and conveying method |
| 12/11/2013 | CN103436851A Electric arc extinguishing method for magnetron sputtering technology |
| 12/11/2013 | CN103436850A Ultraviolet ray assisted apparatus for reaction magnetron sputtering film plating |
| 12/11/2013 | CN103436849A Sputtering method for sull |
| 12/11/2013 | CN103436848A Vacuum atomization suspension uniform sputtering coating method for spherical powder material |
| 12/11/2013 | CN103436847A Reaction sputtering system based on oscillation-type reaction gas control |
| 12/11/2013 | CN103436846A Method for ion plating of aluminum film on surface of high-volume fraction SiC aluminum-based composite material by utilizing ion |
| 12/11/2013 | CN103436845A Method for coating TiC layer on surface of diamond particles |
| 12/11/2013 | CN103436844A Coating device and method for depositing flexible substrate ITO film at low temperature |
| 12/11/2013 | CN103436843A PVD (physical vapor deposition) composite membrane layer as well as preparation method thereof |
| 12/11/2013 | CN103436842A Deposition method of SiC-Al thin-film material with Al transition layer and low-frictional coefficient |
| 12/11/2013 | CN103436841A Yttrium modified chromium aluminium carbonitride/silicon nitride nano composite coating and deposition method thereof |
| 12/11/2013 | CN103434210A Preparation method of high molecular material-metal film composite conducting stably |
| 12/11/2013 | CN103434209A Novel low-thermal-conductivity and high-temperature-resistant thermal barrier coating and preparation method thereof |
| 12/11/2013 | CN103434208A Multi-layer composite heat-insulating film and preparation method thereof |
| 12/11/2013 | CN103434203A Anti-fingerprint film and preparation method thereof |
| 12/11/2013 | CN102719788B Plasma omnibearing ion deposition equipment |
| 12/11/2013 | CN102703871B Touch panel film coating process |
| 12/11/2013 | CN102605317B Preparation method of multi-luminous-region luminous Ag, Ga and N doping ZnO film |
| 12/11/2013 | CN102586742B Manufacture method of target material structure |
| 12/11/2013 | CN102560384B Method for depositing nano dot matrix on surface of substrate |
| 12/11/2013 | CN102534539B Double-plate or double-side film coating system |
| 12/11/2013 | CN102534523B Magnetron source, magnetron sputtering device and magnetron sputtering method |
| 12/11/2013 | CN102449194B Nanolaminated coated cutting tool |
| 12/11/2013 | CN102163698B Recovery device and film forming equipment equipped therewith |
| 12/11/2013 | CN102127740B Sputtering device |
| 12/11/2013 | CN102086508B Film coating device |
| 12/11/2013 | CN102005487B Light absorption layer material for flexible thin film solar cell and preparation method thereof |
| 12/11/2013 | CN101956170B 磁控溅射靶 Magnetron sputtering target |
| 12/11/2013 | CN101476107B Vacuum arc ion film coating technology for non-arc spot |
| 12/10/2013 | US8603648 Reflective film laminate |
| 12/10/2013 | US8603623 Nanoporous thin films and multi-functional layers via spatially organized polymers |
| 12/10/2013 | US8603592 Barrier coatings for polymeric substrates |
| 12/10/2013 | US8603400 Nanostructured platinum alloys for use as catalyst materials |
| 12/10/2013 | US8603364 Phosphor |
| 12/10/2013 | US8603304 Method for manufacturing nickel silicide nano-wires |
| 12/10/2013 | US8602289 Room temperature bonding using sputtering |
| 12/10/2013 | US8601973 Solution deposition assembly |
| 12/10/2013 | CA2584566C Sputtering target for producing metallic glass membrane and manufacturing method thereof |
| 12/10/2013 | CA2556824C Vapor phase growth method |
| 12/05/2013 | WO2013180040A1 Semiconductor device |
| 12/05/2013 | WO2013179922A1 Semiconductor device and method for manufacturing the same |
| 12/05/2013 | WO2013179676A1 Sputtering target |
| 12/05/2013 | WO2013179575A1 Vacuum-processing apparatus, vacuum-processing method, and storage medium |
| 12/05/2013 | WO2013179574A1 Method for manufacturing layered film and vacuum-processing apparatus |
| 12/05/2013 | WO2013179548A1 Magnetron sputtering device, magnetron sputtering method, and storage medium |
| 12/05/2013 | WO2013179544A1 Magnetron sputtering apparatus |
| 12/05/2013 | WO2013178613A1 Plastic film coated with zinc tin oxide and having improved optical absorption property |
| 12/05/2013 | WO2013178598A1 Method for depositing a coating and a coated cutting tool |
| 12/05/2013 | WO2013178563A2 Multilayer structure as reflector |
| 12/05/2013 | WO2013178288A1 Method for sputtering for processes with a pre-stabilized plasma |
| 12/05/2013 | WO2013178252A1 Method for coating a substrate and coater |
| 12/05/2013 | WO2013177811A1 Method for preparing target material for tft-lcd array substrate cu conductor, and target material |
| 12/05/2013 | WO2013135364A3 Coating with enhanced sliding properties |
| 12/05/2013 | US20130323477 Method for manufacturing a decorated glass sheet |
| 12/05/2013 | US20130320336 Oxide Semiconductor Sputtering Target, Method Of Manufacturing Thin-Film Transistors Using The Same, And Thin Film Transistor Manufactured Using The Same |
| 12/05/2013 | US20130319856 Method for Manufacturing Target Material for Copper Lead of TFT-LCD Array Substrate and Target Material |
| 12/05/2013 | US20130319855 Magnetron sputtering system |
| 12/05/2013 | US20130319854 Substrate support with radio frequency (rf) return path |
| 12/05/2013 | US20130319848 Sputtering process |
| 12/05/2013 | US20130319847 METHODS AND APPARATUSES FOR LOW RESISTIVITY Ag THIN FILM USING COLLIMATED SPUTTERING |
| 12/05/2013 | US20130319527 Cu-Ga Target, Method of Producing Same, Light-absorbing Layer Formed from Cu-Ga Based Alloy Film, and CIGS System Solar Cell Having the Light-absorbing Layer |
| 12/05/2013 | DE102013009203A1 Verfahren zur Beschichtung mit einem Verdampfungsmaterial A method of coating with an evaporation material |
| 12/05/2013 | DE102013009202A1 Vorrichtung zum Präparieren, insbesondere Beschichten, von Proben Device for preparing, in particular coating, of samples |
| 12/05/2013 | DE102012209278A1 Suszeptor Susceptor |
| 12/05/2013 | DE102012209051A1 Receiving a coating material in vacuum coating plants by a cover on a side of a planar substrate, comprises moving the cover such that it permanently receives a part of the coating material non-absorbed by the substrate |
| 12/05/2013 | DE102012108742A1 Transporting a band-shaped material in a vacuum treatment plant, comprises e.g. treating band-shaped material in many vacuum treatment sections, and transporting the band-shaped material in a transport path within vacuum treatment section |
| 12/05/2013 | DE102012104583A1 Pressure element, used in electric power steering system of motor vehicle, comprises hard material coating that is applied on pressure element by chemical or physical vapor deposition and contains carbon as alloying element and hydrogen |
| 12/05/2013 | DE102012017502A1 Method for nana-structuring surface of workpiece, involves modifying surface of workpiece chemically during or after scanning of pulsed laser beam with respect to surface of workpiece |
| 12/05/2013 | DE102010043799B4 Schnellkühlverfahren für Vakuumprozessanlagen Rapid cooling method for vacuum process equipment |
| 12/05/2013 | DE102010028777B4 Verfahren und Vorrichtung zur Entfernung einer Rückseitenbeschichtung auf einem Substrat Method and apparatus for removing a backside coating on a substrate |
| 12/05/2013 | DE102007058052B4 Vakuumbeschichtungsanlage Vacuum coating system |
| 12/04/2013 | EP2669718A1 Light absorbing layer structure |
| 12/04/2013 | EP2669403A1 Magnetic field generation device for magnetron sputtering |
| 12/04/2013 | EP2669402A1 Sputtering target and oxide semiconductor film |
| 12/04/2013 | EP2669401A1 Method for depositing a coating and a coated cutting tool |
| 12/04/2013 | EP2669031A1 Surface-coated cutting tool |
| 12/04/2013 | EP2668309A1 Sliding element, in particular piston ring, having a coating and process for producing a sliding element |
| 12/04/2013 | CN203320122U Flattening device and magnetron sputtering winding and coating device |
| 12/04/2013 | CN203320121U Magnetron-sputtering shielding cover |
| 12/04/2013 | CN203320120U Rotating cathode target for vacuum magnetron sputtering |
| 12/04/2013 | CN203320119U Three-target plasma sputtering instrument |
| 12/04/2013 | CN203320118U Vacuum coating machine for ultrahigh square resistance metallized film |
| 12/04/2013 | CN203320117U OLED (organic light emitting diode organic material evaporating device |
| 12/04/2013 | CN203320116U Mask plate for vapor deposition of organic light emitting display and assembly with mask plate |
| 12/04/2013 | CN203320115U Mask plate for manufacturing organic light emitting display |
| 12/04/2013 | CN103430625A Vapor deposition device, vapor deposition method, and method for producing organic EL display device |
| 12/04/2013 | CN103430624A Vapor-deposition device, vapor-deposition method, organic EL display, and lighting device |
| 12/04/2013 | CN103429788A Metal foil provided with electrically resistive film, and method for producing same |
| 12/04/2013 | CN103429784A Vapor deposition particle projection device and vapor deposition device |