| Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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| 01/29/2014 | EP2096188B1 Sputtering target |
| 01/29/2014 | CN203416433U Positive temperature coefficient thermistor heater |
| 01/29/2014 | CN203415065U Fault warning device for film-plating machine |
| 01/29/2014 | CN203411605U Vacuum chamber observation window device |
| 01/29/2014 | CN203411604U Quality inspection table for vacuum aluminized film |
| 01/29/2014 | CN203411603U Magnetic control cathode sputtering coating process chamber |
| 01/29/2014 | CN203411602U Bell jar-shaped device for coating cylindrical inner walls |
| 01/29/2014 | CN203411601U Partitioned multi-target magnetron sputtering equipment |
| 01/29/2014 | CN203411600U Linear evaporation source |
| 01/29/2014 | CN103548421A Conductive film and method for producing same, and sputtering target used for same |
| 01/29/2014 | CN103548153A Method of manufacturing CIGS thin film with uniform Ga distribution |
| 01/29/2014 | CN103548097A Material for conductive film, conductive film laminate, electronic apparatus, and method for producing material for conductive film, conductive film laminate and electronic apparatus |
| 01/29/2014 | CN103547707A Part having a dlc coating and method for applying the dlc coating |
| 01/29/2014 | CN103547701A High-purity copper-manganese-alloy sputtering target |
| 01/29/2014 | CN103547700A Method for producing a thin film made of lead zirconate titanate |
| 01/29/2014 | CN103547445A Method for producing fiber composite resin layer-containing multilayered sheet, and optical device |
| 01/29/2014 | CN103545462A Organic layer deposition apparatus, organic light emitting display device and manufacturing method thereof |
| 01/29/2014 | CN103544968A Magnetic recording film structure and production method thereof |
| 01/29/2014 | CN103540942A Metal matrix surface treatment method and product thereof |
| 01/29/2014 | CN103540936A High temperature resistant antioxidative metal ceramic composite coating and preparation method thereof |
| 01/29/2014 | CN103540906A Optical/crystal comprehensive film thickness monitoring method |
| 01/29/2014 | CN103540905A Rack and pinion mechanism, vacuum processing apparatus, method of driving and controlling rack and pinion mechanism, drive control program, and recording medium |
| 01/29/2014 | CN103540904A Method used for preparation of T-phase BiFeO3 thin film |
| 01/29/2014 | CN103540903A Low-temperature high-resistance temperature coefficient non-heat stagnation thin-film material and preparation method thereof |
| 01/29/2014 | CN103540902A Method for improving quality of physical-sputtering film forming |
| 01/29/2014 | CN103540901A Catalytic electrode composite thin film and preparation method thereof |
| 01/29/2014 | CN103540900A Magnetic control arc ion plating composite depositing process and magnetic control arc ion plating composite depositing device |
| 01/29/2014 | CN103540899A Method for preparing nanosilver/silicon dioxide composite structure coating through pulsed laser deposition |
| 01/29/2014 | CN103540898A Vacuum evaporation device |
| 01/29/2014 | CN103540897A Plastic product surface metallization method |
| 01/29/2014 | CN103540896A Organic layer deposition apparatus, method of manufacturing organic light-emitting display apparatus by using the same, and organic light-emitting display apparatus manufactured by the method |
| 01/29/2014 | CN103540895A Sputtering target and metal oxide film |
| 01/29/2014 | CN103540894A Titanium nitride film preparation method and system |
| 01/29/2014 | CN103540893A Method for preparing TiN through utilizing physical vapor deposition (PVD) |
| 01/29/2014 | CN102747328B Coating method capable of improving laser induced damage threshold of high-reflectivity film |
| 01/29/2014 | CN102703872B Magnetron sputtering target of magnetron sputtering film plating machine |
| 01/29/2014 | CN102650711B Waveguide optical coupler based on surface plasmas and manufacturing process thereof |
| 01/29/2014 | CN102576583B Underlying layer of alignment film for oxide superconductor, method of forming same, and device for forming same |
| 01/29/2014 | CN102560375B Thin film deposition equipment |
| 01/29/2014 | CN102498525B Transparent conductive film and device comprising same |
| 01/29/2014 | CN102439488B Modified oblique incident angle deposition apparatus, method for manufacturing non-reflective optical thin film using the same, and non-reflective optical thin film |
| 01/29/2014 | CN102127745B Modular system and process for continuous deposition of a thin film layer on a substrate |
| 01/29/2014 | CN101664830B Hob cutter with a coating and method for coating hob cutter |
| 01/29/2014 | CN101254515B Pressing mold and method for producing the same |
| 01/28/2014 | US8637349 Method and apparatus for integrated-circuit battery devices |
| 01/28/2014 | US8636876 Deposition of LiCoO2 |
| 01/28/2014 | CA2628586C Method and installation for the vacuum colouring of a metal strip by means of magnetron sputtering |
| 01/23/2014 | WO2014014822A1 Two piece shutter disk assembly for a substrate process chamber |
| 01/23/2014 | WO2014014091A1 Target assembly |
| 01/23/2014 | WO2014013927A1 Vapor deposition device and vapor deposition method |
| 01/23/2014 | WO2014013925A1 Cylindrical sputtering target and manufacturing method therefor |
| 01/23/2014 | WO2014013920A1 Sputtering target for forming magnetic recording film and process for producing same |
| 01/23/2014 | WO2014013789A1 Deposition device and deposition method |
| 01/23/2014 | WO2014013728A1 Sputtering target, oxide semiconductor thin film, and method for producing oxide semiconductor thin film |
| 01/23/2014 | WO2014012383A1 Method for preparing copper indium gallium selenide film solar cell |
| 01/23/2014 | WO2013178563A3 Multilayer structure as reflector |
| 01/23/2014 | WO2013178363A3 Pvd coatings embedded in coats of paint |
| 01/23/2014 | WO2013160749A3 Hydrophilic polymer surface, process for production of the same, uses of the process and items comprising said surface |
| 01/23/2014 | US20140023796 Plasma cvd apparatus, plasma cvd method, reactive sputtering apparatus, and reactive sputtering method |
| 01/23/2014 | US20140021044 Elastomer Bonded Rotary Sputtering Target |
| 01/23/2014 | US20140021043 Fept-c-based sputtering target and process for producing the same |
| 01/23/2014 | US20140021037 Thin film forming apparatus and thin film forming method |
| 01/23/2014 | US20140021036 Sputtering target, method for using the same, and method for forming oxide film |
| 01/23/2014 | US20140020835 Symmetrical inductively coupled plasma source with symmetrical flow chamber |
| 01/23/2014 | DE102012107630B3 Magnetron sputtering device, useful in plant for treating strip-like substrate, comprises anode housing as etching surface of first surface of substrate to be treated, and magnet arrangement as second etching surface of substrate |
| 01/23/2014 | DE102012106546A1 Pivot shaft, useful for vacuum chamber, comprises part that is arranged on shaft, movable first and second bearings, fixed third bearing, and fixed cooling head arranged after second and third bearing for supplying coolant to shaft |
| 01/23/2014 | DE102012106403A1 Reactive magnetron sputtering for coating substrates by target of magnetron, comprises arranging substrate opposite to magnetron, atomizing target material by sputtering and depositing sputtered target material to substrate |
| 01/22/2014 | EP2688121A2 Organic layer deposition apparatus, method of manufacturing organic light-emitting display apparatus by using the same, and organic light-emitting display apparatus manufactured by the method |
| 01/22/2014 | EP2688116A1 Ferroelectric thin film and method for producing same |
| 01/22/2014 | EP2686481A1 Blade shaped tool and method for its manufacturing |
| 01/22/2014 | EP1724364B1 Method of forming an HP Ruthenium powder and a sputtering target therefrom |
| 01/22/2014 | CN203403149U Magnetron sputtering anti-short-circuiting pressing block for rectangular plane target |
| 01/22/2014 | CN203403148U Auxiliary processing device for magnetron sputtering target |
| 01/22/2014 | CN203401767U Anti-corrosion 430 stainless steel plate material |
| 01/22/2014 | CN1900819B Photomask blank, photomask and fabrication method thereof |
| 01/22/2014 | CN103534795A Component manufacturing method and component |
| 01/22/2014 | CN103534789A Al alloy film for semiconductor devices |
| 01/22/2014 | CN103534385A Structure and method for coating a nozzle for a fuel injection valve |
| 01/22/2014 | CN103534382A In2o3-sno2-zno sputtering target |
| 01/22/2014 | CN103534381A Sputtering target and method for producing same |
| 01/22/2014 | CN103534380A Sputtering process for sputtering a target of carbon |
| 01/22/2014 | CN103531661A Preparation method of (220) orientated copper indium gallium selenium film |
| 01/22/2014 | CN103531659A Method for preparing flexible base material and film for vacuum roll to roll coating film |
| 01/22/2014 | CN103531638A Thin-film transistor and zinc oxide-based sputtering target for the same |
| 01/22/2014 | CN103531451A Substrate support member for ion implantation and method of ion implantation |
| 01/22/2014 | CN103528251A High-temperature resistance metal ceramic solar energy selective absorbing coating and preparing method |
| 01/22/2014 | CN103526291A Surface enhanced Raman scattering substrate, preparation method therefor and application thereof |
| 01/22/2014 | CN103526175A Antibacterial hard stainless steel tool and preparation method thereof |
| 01/22/2014 | CN103526174A Surface modification method for delaying degradation rate of biomedical magnesium alloy |
| 01/22/2014 | CN103526173A Method for preparing low-indium-content indium tin oxide film through co-doping tin and zinc |
| 01/22/2014 | CN103526172A Preparation methods of controlled hexagonal In2Se3 in sheet nanometer morphology and striped nanometer morphology |
| 01/22/2014 | CN103526171A Preparation method of aluminum-doped zinc oxide film with tunable preferred orientations |
| 01/22/2014 | CN103526170A Black decorative thin-film material and preparation method thereof |
| 01/22/2014 | CN103526169A Preparation method of aluminum-doped zinc oxide (AZO) transparent conducting film |
| 01/22/2014 | CN103526168A Magnetic assembly having epicyclic gearing system and method of use |
| 01/22/2014 | CN103526167A Coating equipment for plates |
| 01/22/2014 | CN103526166A Rectangular plane cathode arc source and cathode target material ablation device |
| 01/22/2014 | CN103526165A Transparent conducting thin film as well as preparation method thereof, display base plate and display device |
| 01/22/2014 | CN103526164A Evaporation equipment |
| 01/22/2014 | CN103526163A Evaporation device for a vacuum-deposition apparatus and vacuum-deposition apparatus including such an evaporation device |