Patents for C09K 13 - Etching, surface-brightening or pickling compositions (3,392)
09/2005
09/07/2005CN1665755A Compositions for removing etching residue and use thereof
09/07/2005CN1218222C Compsns. for cleaning organic and plasma etched residues for semiconductor devices
09/07/2005CN1218015C Liquid crystal polymers for flexible circuits
09/06/2005US6939805 Method of etching a layer in a trench and method of fabricating a trench capacitor
08/2005
08/31/2005CN1216953C Polishing composition for metal CMP and method of polishing susbstroote
08/31/2005CN1216800C Method for producing carbonyl fluoride
08/24/2005EP1566421A2 CMP abrasive, liquid additive for CMP abrasive and method for polishing substrate.
08/18/2005US20050181620 Fluorinated surfactants for aqueous acid etch solutions
08/17/2005CN1654713A Corrosion-inhibiting cleaning compositions for metal layers and patterns on semiconductor substrates
08/11/2005US20050176604 Corrosion-inhibiting cleaning compositions for metal layers and patterns on semiconductor substrates
08/10/2005CN1651608A Etching solution composition for metal films
08/04/2005US20050169096 PAA- based etchant, methods of using same, and resultant structures
08/04/2005US20050167634 comprising a solution of hydrofluoric acid and hydrogen peroxide, used to remove residues
08/03/2005EP1559762A2 Chemical mechanical polishing slurry useful for copper substrates
08/03/2005EP1558698A1 Fluorinated surfactants for aqueous acid etch solutions
08/03/2005EP1558697A1 Fluorinated surfactants for buffered acid etch solutions
08/03/2005CN1649084A Process for producing a movable structure and etchant for silicon oxide film
08/02/2005US6923919 Preethching liquid crystalline polymer; depositing metal
07/2005
07/27/2005CN1644545A Etching agent of motor-driven vehicle glass and applying method thereof
07/21/2005US20050156140 Tungsten metal removing solution and method for removing tungsten metal by use thereof
07/20/2005CN1640974A 抛光组合物和抛光方法 Polishing composition and polishing method
07/14/2005US20050153556 Methods for polishing copper features of semiconductor devices structures
07/13/2005EP1551936A1 Composition and process for wet stripping removal of sacrificial anti-reflective material
07/13/2005CN1640215A Liquid crystal polymers for flexible circuits
07/05/2005US6914039 Etching liquid composition
06/2005
06/30/2005US20050139803 polishes comprising alumina, colloidal silica, anoxidizing agents, water succinic acid and citric or malic acid, used for polishing magnetic disc heads
06/29/2005EP1547968A2 Process for producing a movable structure and etchant for silicon oxide film
06/29/2005CN1632925A Wafer bonding surface processing agent and wafer bonding method
06/23/2005US20050136807 Polishing composition for magnetic disk
06/23/2005US20050136672 Etching solution composition for metal films
06/23/2005US20050133758 Method for fabricating liquid crystal display device
06/23/2005US20050132660 Polishing composition
06/23/2005DE102004050358A1 Etching composition hydrogen fluoride useful for selectively etching oxide layer and for manufacturing semiconductor device comprises ammonium fluoride, non-ionic polymer surfactant and water
06/22/2005EP1544901A1 Polishing compound composition, method for producing same and polishing method
06/21/2005US6908569 Ruthenium silicide wet etch
06/16/2005CA2589168A1 Removal of mems sacrificial layers using supercritical fluid/chemical formulations
06/15/2005CN1626699A Removing liquid for tungsten metal and method for removing tungsten metal using such liquid
06/09/2005WO2005053004A1 Selective removal chemistries for sacrificial layers methods of production and uses thereof
06/09/2005US20050124517 Aqueous solution containing fluorine compound, amine and chelate compound
06/08/2005EP1538664A1 Etchant and etching method
06/08/2005CN1625590A An etchant for a wiring, a method for manufacturing the wiring using the etchant, a thin film transistor array panel including the wiring, and a method for manufacturing the same
06/02/2005WO2005050673A1 Functional paste
06/02/2005US20050118820 CMP abrasive, liquid additive for CMP abrasive and method for polishing substrate
06/01/2005EP1535318A1 Etching pastes for silicon surfaces and layers
06/01/2005EP1534643A1 Compositions for removing etching residue and use thereof
06/01/2005CN1623223A Chemistry for etching quaternary interface layers on InGaAsP mostly formed between GaAs and InxGa(1-x)P layers
05/2005
05/31/2005US6899596 Chemical mechanical polishing of dual orientation polycrystalline materials
05/26/2005WO2005047422A1 Selective etch and cleaning chemistries, methods of production and uses thereof
05/26/2005US20050109980 Polishing composition for CMP having abrasive particles
05/25/2005EP1532225A1 Etching pastes for titanium oxide surfaces
05/25/2005EP1303575B1 Liquid crystal polymers for flexible circuits
05/25/2005CN1203742C Etching liquid, and method for mfg .flexible distributing board
05/24/2005US6896826 Aqueous cleaning composition containing copper-specific corrosion inhibitor for cleaning inorganic residues on semiconductor substrate
05/10/2005US6890859 Methods of forming semiconductor structures having reduced defects, and articles and devices formed thereby
05/10/2005US6890452 Etching of silicon oxide-containing substrates; sulfonate containing surfactant
05/04/2005CN1612305A Unsaturated oxygenated fluorocarbons for selective anisotropic etch applications
05/03/2005US6887796 Method of wet etching a silicon and nitrogen containing material
05/03/2005US6887137 Chemical mechanical polishing slurry and chemical mechanical polishing method using the same
04/2005
04/21/2005US20050081883 Etching composition, method of preparing the same, method of etching an oxide film, and method of manufacturing a semiconductor device
04/19/2005US6881129 Fixed-abrasive chemical-mechanical planarization of titanium nitride
04/14/2005US20050079649 Etchant composition for sem image enhancement of p-n junction contrast
04/13/2005CN1605943A Hydrazine free etching liquid
04/13/2005CN1196759C Process for preparation of metal oxide slurry adaptable to chemical-mechanical polishing of semiconductor
03/2005
03/31/2005US20050070110 Etching solution, etching method and method for manufacturing semiconductor device
03/30/2005CN1194921C Method for production of mat glass by horizontally placing process
03/29/2005US6873452 Compositions and processes for format flexible, roll-to-roll manufacturing of electrophoretic displays
03/24/2005US20050061768 Methods of etching silicon nitride substantially selectively relative to an oxide of aluminum and methods of forming trench isolation within a semiconductor substrate
03/23/2005EP1516356A2 Acid etching mixture having reduced water content
03/23/2005CN1599038A Use of hypofluorites, fluoroperoxides, and/or fluorotrioxides as oxidizing agent in fluorocarbon etch plasmas
03/23/2005CN1598062A Particle-free polishing fluid for nickel-based coating planarization
03/15/2005US6866793 High selectivity and high planarity dielectric polishing
03/09/2005CN1592548A Method for mfg. printed circuitboard
03/03/2005WO2005019499A1 Liquid for removing degenerated metal layer and method for removing degenerated metal layer
03/03/2005US20050045852 Particle-free polishing fluid for nickel-based coating planarization
03/01/2005US6861010 Copper-based metal polishing composition, method for manufacturing a semiconductor device, polishing composition, aluminum-based metal polishing composition, and tungsten-based metal polishing composition
02/2005
02/24/2005WO2005017230A1 Etching solution for titanium-containing layer and method for etching titanium-containing layer
02/22/2005US6858540 Selective removal of tantalum-containing barrier layer during metal CMP
02/16/2005CN1580173A Polishing composition for magnetic disk
02/10/2005US20050032463 Polishing composition for magnetic disk
02/09/2005CN1576346A Polishing composition
02/09/2005CN1576345A Aqueous dispersion for chemical/mechanical polishing
02/09/2005CN1576339A 抛光组合物 The polishing composition
02/02/2005EP1501916A1 Non-corrosive cleaning compositions for removing etch residues
02/02/2005CN1575328A Aqueous cleaning composition containing copper-specific corrosion inhibitor for cleaning inorganic residues on semiconductor substrate
02/01/2005US6849200 Composition and process for wet stripping removal of sacrificial anti-reflective material
01/2005
01/20/2005US20050014383 Use of hypofluorites, fluoroperoxides, and/or fluorotrioxides as oxidizing agent in fluorocarbon etch plasmas
01/20/2005US20050011863 Method for inspecting a titanium-based component
01/20/2005US20050011859 Removing dielectric materials from layered substrates
01/19/2005EP1498941A2 Unsaturated oxygenated fluorocarbons for selective anisotropic etch applications
01/19/2005EP1498940A2 Use of hypofluorites, fluoroperoxides, and/or fluorotrioxides as oxidizing agent in fluorocarbon etch plasmas
01/19/2005EP1498731A2 Method for inspecting a titanium-base component
01/18/2005CA2307154C Polishing slurry
01/12/2005CN1184361C Process for metallizing a plastic surface
01/06/2005US20050003746 Polishing composition
01/06/2005US20050003674 Aqueous cleaning composition containing copper-specific corrosion inhibitor for cleaning inorganic residues on semiconductor substrate
01/06/2005US20050001199 Mixture containing ceria particles with bromoalcohol, polypotassium or ammonium acrylate, ammonium citrate or ammonium dodecylbenzenesulfonic acid; storage stability; neutral pH
01/05/2005EP1493789A1 Aqueous dispersion for chemical/mechanical polishing
01/04/2005US6838013 Transparent electrodes formed on a substrate by forming a bottom high index layer, a metallic conductive layer, and a top high index layer with a conductivity of at least about 400 Omega /square; and chemically etching the bottom layer
12/2004
12/30/2004US20040266210 Etchant for etching nitride and method for removing a nitride layer using the same
12/30/2004US20040262569 Etchant for etching double-layered copper structure and method of forming array substrate having double-layered copper structures
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