| Patents for H05H 1 - Generating plasma; Handling plasma (22,647) |
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| 02/14/2012 | US8114247 Plasma processing apparatus and focus ring |
| 02/09/2012 | WO2012018944A2 Dielectric barrier discharge cell with hermetically sealed electrodes and automatic washing of electrodes during operation of the cell |
| 02/09/2012 | WO2012018770A2 Control of plasma profile using magnetic null arrangement by auxiliary magnets |
| 02/09/2012 | WO2012018557A2 Symmetric vhf plasma power coupler with active uniformity steering |
| 02/09/2012 | WO2012018368A2 Parasitic plasma prevention in plasma processing chambers |
| 02/09/2012 | WO2012018367A2 Distributed multi-zone plasma source systems, methods and apparatus |
| 02/09/2012 | WO2012018024A1 Plasma treatment device |
| 02/09/2012 | WO2012017717A1 Vacuum processing apparatus and plasma processing method |
| 02/09/2012 | US20120034471 Thermal barrier systems including yttrium gradient layers and methods for the formation thereof |
| 02/09/2012 | US20120034423 Method of forming metal oxide film and metal oxide film |
| 02/09/2012 | US20120034394 Distributed multi-zone plasma source systems, methods and apparatus |
| 02/09/2012 | US20120034393 Formation method of coating |
| 02/09/2012 | US20120032596 Plasma source for large size substrate |
| 02/09/2012 | US20120031070 Apparatus, systems and methods for establishing plasma and using plasma in a rotating magnetic field |
| 02/08/2012 | EP2416629A1 Pulse-modulated high-frequency power control method and pulse-modulated high-frequency power source device |
| 02/08/2012 | EP2416351A1 Plasma etching apparatus |
| 02/08/2012 | EP2415897A1 Insulator-interposed plasma processing device |
| 02/08/2012 | EP2415331A1 Method and beam generator for creating a bundled plasma beam |
| 02/08/2012 | EP1518255B1 Thermal sprayed yttria-containing coating for plasma reactor |
| 02/08/2012 | EP1145277B1 Gas injection system for plasma processing |
| 02/08/2012 | CN102349357A Plasma processing apparatus |
| 02/08/2012 | CN102349356A Plasma processing apparatus |
| 02/08/2012 | CN102349355A Plasma torch with a lateral injector |
| 02/08/2012 | CN101565228B 纳秒脉冲放电等离子体处理难降解有机污水的设备 Nanosecond pulsed discharge plasma treatment of refractory organic wastewater facilities |
| 02/08/2012 | CN101472384B 大气压等离子反应器 An atmospheric pressure plasma reactor |
| 02/08/2012 | CN101451237B 具有多个等离子体反应区域的包括多个处理平台的等离子体反应室 A plasma reaction chamber comprising a plurality of processing platforms having a plurality of plasma reaction zone |
| 02/08/2012 | CN101394704B 等离子喷枪装置 Plasma torch means |
| 02/08/2012 | CN101098582B 用于外包覆光纤的等离子体炬 The plasma torch is used outside of the coated optical fiber |
| 02/08/2012 | CN101005727B 等离子体发生用电极和等离子体处理装置 Electrode plasma generating apparatus and a plasma processing |
| 02/07/2012 | US8110255 Method for preparation of hybrid comprising magnetite nanoparticles and carbon nitride nanotubes |
| 02/07/2012 | US8110155 Vortex reactor and method of using it |
| 02/03/2012 | DE202011109467U1 Plasmastromversorungssystem Plasma current Verso reasoning system |
| 02/02/2012 | WO2012015943A2 Encapsulated metal microtip microplasma devices, arrays and fabrication methods |
| 02/02/2012 | WO2012015147A2 Rf power distribution device and rf power distribution method |
| 02/02/2012 | US20120028032 Structural composite laminates |
| 02/02/2012 | US20120027956 Modification of nitride top layer |
| 02/02/2012 | US20120027955 Reactor and method for production of nanostructures |
| 02/02/2012 | US20120027949 Adhesive resin composition and bonding method |
| 02/02/2012 | US20120027151 Inductive plasma source and plasma containment |
| 02/02/2012 | US20120025726 Reversed-polarity pulse generating circuit for direct current plasma and direct current plasma power supply unit |
| 02/02/2012 | US20120025693 Anode of an arc plasma generator and the arc plasma generator |
| 02/02/2012 | DE102010038605A1 Zündschaltung zum Zünden eines mit Wechselleistung gespeisten Plasmas Ignition to ignite a plasma fed with AC power |
| 02/02/2012 | DE102010038603A1 Direct current plasma system, has direct current power supply connected to cathode and anode of plasma chamber, and switch connected between anode potential and plasma chamber potential |
| 02/02/2012 | CA2806576A1 Encapsulated metal microtip microplasma devices, arrays and fabrication methods |
| 02/01/2012 | EP2413671A2 Plasma torch |
| 02/01/2012 | EP2411138A1 Plasma reactor for the synthesis of nanopowders and materials processing |
| 02/01/2012 | EP2411058A1 Improved air decontamination device and method |
| 02/01/2012 | EP2198677B1 Device for injecting a liquid load to be mixed/converted inside a plasma needle or a gaseous flow |
| 02/01/2012 | EP1130634B1 Semiconductor device and method for forming silicon oxide film |
| 02/01/2012 | DE202011109320U1 Nockenarretierte Gasverteilungselektrode und -Elektrodenanordnung Nockenarretierte gas distribution electrode and electrode arrangement |
| 02/01/2012 | CN1812681B 限界等离子体和增强流动导通性的方法和装置 Bound plasma flow continuity and enhancement method and apparatus |
| 02/01/2012 | CN102341891A Film forming method and film forming apparatus |
| 02/01/2012 | CN102340921A Electronic cyclotron resonance magnetic module and electronic cyclotron resonance device |
| 02/01/2012 | CN102337490A Scram protection loop of plasma spraying device |
| 02/01/2012 | CN101530777B 一种等离子体化学反应装置 A chemical reaction apparatus plasma |
| 02/01/2012 | CN101442872B 电极组件以及包含该电极组件的等离子处理室 The electrode assembly comprising the electrode assembly and a plasma processing chamber |
| 02/01/2012 | CN101422088B 用于减少等离子体处理系统中的副产品沉积的方法和装置 Method and apparatus for reducing plasma processing system byproducts deposited |
| 02/01/2012 | CN101383272B 等离子体反应器室中的具有晶片边缘气体注射的阴极衬套 Plasma reactor chamber having a cathode liner of the wafer edge gas injection |
| 01/31/2012 | US8105661 Method for forming porous insulation film |
| 01/31/2012 | US8105660 Method for producing diamond-like carbon coatings using PECVD and diamondoid precursors on internal surfaces of a hollow component |
| 01/26/2012 | WO2012012200A1 Plasma processing apparatus and liner assembly for tuning electrical skews |
| 01/26/2012 | WO2012011332A1 Plasma generating device and method for producing radical, and washing and cleaning device and small electrical appliance using same |
| 01/26/2012 | WO2012011171A1 Etching device |
| 01/26/2012 | WO2012010299A1 Plasma treatment of substrates |
| 01/26/2012 | WO2012010264A1 Bellows-type compensator |
| 01/26/2012 | WO2012010207A1 Volumetrically oscillating plasma flows |
| 01/26/2012 | WO2011156240A3 Temperature controlled plasma processing chamber component with zone dependent thermal efficiencies |
| 01/26/2012 | WO2011156239A3 Temperature control in plasma processing apparatus using pulsed heat transfer fluid flow |
| 01/26/2012 | WO2011149790A3 Component temperature control by coolant flow control and heater duty cycle control |
| 01/26/2012 | WO2011145903A3 Plasma heating apparatus |
| 01/26/2012 | WO2011132903A3 Plasma processing apparatus |
| 01/26/2012 | WO2008125078A3 Method and device for cooling a gas |
| 01/26/2012 | US20120021502 Sensor for fast detection of e-coli |
| 01/26/2012 | US20120021252 Treating Surface of Substrate Using Inert Gas Plasma in Atomic Layer Deposition |
| 01/26/2012 | US20120021201 Anti-static wrapper for electronic component wrapping, coated with nano film and manufacturing method thereof |
| 01/26/2012 | US20120021139 Manufacturing method of display device and mold therefor |
| 01/26/2012 | US20120021138 Nanolayer deposition process for composite films |
| 01/26/2012 | US20120019143 Plasma Generator and Method for Controlling a Plasma Generator |
| 01/26/2012 | US20120018410 Microwave Plasma Generating Plasma and Plasma Torches |
| 01/26/2012 | US20120018402 Plasma processing apparatus and liner assembly for tuning electrical skews |
| 01/26/2012 | US20120018096 Process chamber having modulated plasma supply |
| 01/26/2012 | US20120017509 System and method for processing material to generate syngas |
| 01/26/2012 | DE19900128B4 Düse sowie Düsenanordnung für einen Brennerkopf eines Plasmaspritzgeräts Nozzle and nozzle assembly for a burner head of a plasma spray device |
| 01/25/2012 | EP2409321A2 Reactor lid assembly for vapor deposition |
| 01/25/2012 | EP2409320A2 Showerhead for vapor deposition |
| 01/25/2012 | EP2409318A2 Vapor deposition reactor system and methods thereof |
| 01/25/2012 | EP1656694B1 High aspect ratio etch using modulation of rf powers of various frequencies |
| 01/25/2012 | CN1632160B Arc evaporator, method for driving arc evaporator, and ion plating apparatus |
| 01/25/2012 | CN102334273A Alternating current power supply for sputtering apparatus |
| 01/25/2012 | CN102333412A High-energy multi-state low-temperature ionizer |
| 01/25/2012 | CN102333411A Partitioned energizing atmospheric-pressure non-equilibrium plasma generator |
| 01/25/2012 | CN102333410A Atmospheric pressure cold plasma jet device for etching photoresist materials |
| 01/25/2012 | CN102333409A Atmospheric plasma device and manufacturing method thereof |
| 01/25/2012 | CN101882647B Movable holder for silicon-based film solar cells |
| 01/25/2012 | CN101882646B Deposition clamp of film solar cell |
| 01/25/2012 | CN101426327B Plasma jet device |
| 01/25/2012 | CN101391340B Air plasma cutting machine |
| 01/24/2012 | US8103340 Treatment of biological material containing living cells using a plasma generated by a gas discharge |
| 01/24/2012 | US8101246 Device for carrying out a plasma-assisted process |
| 01/24/2012 | US8101150 Control of carbon nanotube diameter using CVD or PECVD growth |