Patents for H05H 1 - Generating plasma; Handling plasma (22,647) |
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10/05/2011 | CN202001172U Microwave plasma automobile engine igniter |
10/05/2011 | CN201996383U Egetable washer using plasma for sterilization |
10/05/2011 | CN1782345B Spark igniter of gas turbine engine |
10/05/2011 | CN102210196A Plasma resistant coatings for plasma chamber components |
10/05/2011 | CN102209799A Insulator-interposed plasma processing device |
10/05/2011 | CN102209426A Plasma processing method and plasma processing apparatus |
10/05/2011 | CN102209425A Diagnostic device of radio frequency discharge plasma |
10/05/2011 | CN101479393B Method and device for introducing dust into a molten both of a pyrometallurgical installation |
10/05/2011 | CN101296745B Plasma abatement device |
10/05/2011 | CN101204123B Plasma arc torch providing angular shield flow injection |
10/04/2011 | US8029875 Plasma immersion ion processing for coating of hollow substrates |
10/04/2011 | US8029874 Plasma processing apparatus and method for venting the same to atmosphere |
10/04/2011 | US8029873 Film deposition method and film deposition apparatus of metal film |
10/04/2011 | US8029872 Application of a coating forming material onto at least one substrate |
10/04/2011 | US8029859 Method of depositing Ge-Sb-Te thin film |
09/29/2011 | WO2011119254A1 Particle trap employing a high temperature superconductor and an associated method of trapping particles |
09/29/2011 | WO2011116496A1 Radio frequency inductively coupled plasma generator confined using magnetic field produced by field coil with soft magnetic material shell |
09/29/2011 | WO2011063246A3 Methods and apparatus for controlling a plasma processing system |
09/29/2011 | WO2011049994A3 Current control in plasma processing systems |
09/29/2011 | WO2011049993A3 Rf isolation for power circuitry |
09/29/2011 | WO2011041087A3 Inductively-coupled plasma (icp) resonant source element |
09/29/2011 | WO2010094304A8 Electrode arrangement for generating a non-thermal plasma |
09/29/2011 | US20110236600 Smooth Silicon-Containing Films |
09/29/2011 | US20110236594 In-Situ Deposition of Film Stacks |
09/29/2011 | US20110236591 Bipolar rectifier power supply |
09/29/2011 | US20110234102 Apparatus for normal pressure plasma ignition and method for normal pressure plasma ignition using same |
09/29/2011 | US20110234101 Induction switch |
09/29/2011 | US20110234100 Substrate processing apparatus and method of manufacturing semiconductor device |
09/29/2011 | US20110234099 Plasma generation apparatus |
09/29/2011 | US20110234088 Optically-functional film and method of manufacturing the same, display and method of manufacturing the same |
09/29/2011 | US20110233170 Plasma processing apparatus and plasma processing method |
09/29/2011 | US20110232749 Layered element and photovoltaic device comprising such an element |
09/29/2011 | US20110232332 Ring plasma jet method and apparatus for making an optical fiber preform |
09/29/2011 | DE102010003284A1 Verfahren zur chemischen Aktivierung von Arbeitsgasen in abgeschlossenen Volumina Methods for chemical activation of work gases in confined volumes |
09/28/2011 | EP2369902A2 Plasma generation apparatus |
09/28/2011 | EP2369614A2 High-voltage circuit insertion-type discharge element |
09/28/2011 | EP2368411A1 High-performance plasma torch |
09/28/2011 | EP2367758A2 Plasma processes for producing silanes and derivatives thereof |
09/28/2011 | EP2367751A1 Device for producing hydrogen by means of an electron cyclotron resonance plasma |
09/28/2011 | EP1640470B1 Nitriding method and device |
09/28/2011 | CN201994322U 太阳能电池沉积用放电电极板阵列 Solar panel array discharge electrode deposition |
09/28/2011 | CN102204416A Plasma treatment apparatus and plasma antenna |
09/28/2011 | CN102204415A Flowable dielectric equipment and processes |
09/28/2011 | CN102204414A Device for generating a plasma discharge for patterning the surface of a substrate |
09/28/2011 | CN102204413A System for enhancing preignition conditions of thermonuclear fusion reactions |
09/28/2011 | CN102203920A Extended chamber liner for improved mean time between cleanings of process chambers |
09/28/2011 | CN102203919A Process kit having reduced erosion sensitivity |
09/28/2011 | CN102203317A Electrode circuit, film formation device, electrode unit, and film formation method |
09/28/2011 | CN102202829A System for thermally processing workpieces |
09/28/2011 | CN102202455A Plasma generation apparatus |
09/28/2011 | CN102202454A Switchable radio frequency power source system |
09/28/2011 | CN101692368B High-temperature superconductive magnet system for magnetically confined plasma propeller |
09/28/2011 | CN101452805B Processing container and plasma processing device |
09/28/2011 | CN101189920B An improved plasma torch for use in a waste processing chamber |
09/28/2011 | CN101167412B Interchangeable plasma nozzle interface |
09/27/2011 | US8026157 Gas mixing method realized by back diffusion in a PECVD system with showerhead |
09/27/2011 | US8025932 Self-limiting thin film synthesis achieved by pulsed plasma-enhanced chemical vapor deposition |
09/27/2011 | US8025775 Vacuum plasma generator |
09/27/2011 | US8025731 Gas injection system for plasma processing |
09/27/2011 | CA2631064C Furnace atmosphere activation method and apparatus |
09/22/2011 | WO2011115008A1 Etching method and etching device |
09/22/2011 | WO2011114840A1 Plasma processing device, plasma processing method, and method for manufacturing a semiconductor element |
09/22/2011 | WO2011114793A1 Plasma processing apparatus |
09/22/2011 | WO2011113848A1 Device for plasma treatment of living tissue |
09/22/2011 | WO2011062940A3 Large area plasma processing chamber with at-electrode rf matching |
09/22/2011 | US20110230819 Harmonic Cold Plasma Device and Associated Methods |
09/22/2011 | US20110229657 Apparatus and method for forming carbon protective layer |
09/22/2011 | US20110229656 In-liquid plasma film-forming apparatus, electrode for in-liquid plasma, and film-forming method using in-liquid plasma |
09/22/2011 | US20110226738 Methods of forming transparent structures and electrochromic devices |
09/22/2011 | US20110226728 Device for generating a plasma discharge for patterning the surface of a substrate |
09/22/2011 | US20110226422 Rf-driven ion source with a back-streaming electron dump |
09/22/2011 | DE102010011643A1 Vorrichtung und Verfahren zur Plasmabehandlung von lebendem Gewebe Apparatus and method for plasma treatment of living tissue |
09/22/2011 | DE102010011592A1 Hohlkathoden-Plasmaquelle sowie Verwendung der Hohlkathoden-Plasmaquelle Hollow cathode plasma source and use of the hollow cathode plasma source |
09/21/2011 | EP1485515B1 Evaluation of chamber components having textured coatings |
09/21/2011 | CN201986252U 大气压低温等离子体电刷发生装置及其阵列组合 Device and an array of combinations of atmospheric temperature plasma brush happen |
09/21/2011 | CN201986251U Arc plasma torch with Laval negative pole structure |
09/21/2011 | CN102197714A Plasma source for chamber cleaning and process |
09/21/2011 | CN102197713A Plasma processing device |
09/21/2011 | CN102197712A Disbanded cascaded array for generating and moving plasma clusters for active airflow control |
09/21/2011 | CN102196654A Cover fixing tool and inductive coupling plasma processing device |
09/21/2011 | CN102194639A Plasma treatment device and plasma treatment method |
09/21/2011 | CN101720500B Inductively coupled dual zone processing chamber with single planar antenna |
09/21/2011 | CN101660144B Plasma torch for chemical vapor deposition |
09/21/2011 | CN101376980B Process for improving strip steel wetting property |
09/21/2011 | CN101236892B Ion beam apparatus having plasma sheath controller |
09/20/2011 | US8021723 Method of plasma treatment using amplitude-modulated RF power |
09/15/2011 | WO2011111626A1 Surface treatment device |
09/15/2011 | WO2011111558A1 Film surface treatment device |
09/15/2011 | WO2011110391A1 Plasma generator |
09/15/2011 | WO2011110380A1 Method and arrangement for plasma treating a gas flow |
09/15/2011 | WO2011110343A1 Appliance, particularly kitchen appliance or laboratory table and deodorant device |
09/15/2011 | WO2011110342A1 Method and arrangement for treating an object with a low-temperature plasma |
09/15/2011 | WO2011110191A1 Method and arrangement for treating an object with a low- temperature plasma |
09/15/2011 | WO2011062755A3 Plasma source design |
09/15/2011 | WO2010094307A8 Treating device for treating a body part of a patient with a non-thermal plasma |
09/15/2011 | US20110223480 Nanoparticle decorated nanostructured material as electrode material and method for obtaining the same |
09/15/2011 | US20110223350 Method for producing thermoelectric material |
09/15/2011 | DE102011013571A1 Plasmaätzverfahren und Plasmaätzvorrichtung Plasma etching and plasma etching |
09/15/2011 | DE102010015891A1 Vorrichtung und Verfahren zur Herstellung nanoskaliger partikulärer Feststoffe und Plasmabrenner Apparatus and method for fabrication of nanoscale particulate solids and plasma torch |
09/15/2011 | DE102010011132A1 Verfahren und Anordnung zur Plasmabehandlung eines Gasstroms Method and apparatus for plasma treatment of a gas stream |