Patents for H05H 1 - Generating plasma; Handling plasma (22,647)
10/2011
10/05/2011CN202001172U Microwave plasma automobile engine igniter
10/05/2011CN201996383U Egetable washer using plasma for sterilization
10/05/2011CN1782345B Spark igniter of gas turbine engine
10/05/2011CN102210196A Plasma resistant coatings for plasma chamber components
10/05/2011CN102209799A Insulator-interposed plasma processing device
10/05/2011CN102209426A Plasma processing method and plasma processing apparatus
10/05/2011CN102209425A Diagnostic device of radio frequency discharge plasma
10/05/2011CN101479393B Method and device for introducing dust into a molten both of a pyrometallurgical installation
10/05/2011CN101296745B Plasma abatement device
10/05/2011CN101204123B Plasma arc torch providing angular shield flow injection
10/04/2011US8029875 Plasma immersion ion processing for coating of hollow substrates
10/04/2011US8029874 Plasma processing apparatus and method for venting the same to atmosphere
10/04/2011US8029873 Film deposition method and film deposition apparatus of metal film
10/04/2011US8029872 Application of a coating forming material onto at least one substrate
10/04/2011US8029859 Method of depositing Ge-Sb-Te thin film
09/2011
09/29/2011WO2011119254A1 Particle trap employing a high temperature superconductor and an associated method of trapping particles
09/29/2011WO2011116496A1 Radio frequency inductively coupled plasma generator confined using magnetic field produced by field coil with soft magnetic material shell
09/29/2011WO2011063246A3 Methods and apparatus for controlling a plasma processing system
09/29/2011WO2011049994A3 Current control in plasma processing systems
09/29/2011WO2011049993A3 Rf isolation for power circuitry
09/29/2011WO2011041087A3 Inductively-coupled plasma (icp) resonant source element
09/29/2011WO2010094304A8 Electrode arrangement for generating a non-thermal plasma
09/29/2011US20110236600 Smooth Silicon-Containing Films
09/29/2011US20110236594 In-Situ Deposition of Film Stacks
09/29/2011US20110236591 Bipolar rectifier power supply
09/29/2011US20110234102 Apparatus for normal pressure plasma ignition and method for normal pressure plasma ignition using same
09/29/2011US20110234101 Induction switch
09/29/2011US20110234100 Substrate processing apparatus and method of manufacturing semiconductor device
09/29/2011US20110234099 Plasma generation apparatus
09/29/2011US20110234088 Optically-functional film and method of manufacturing the same, display and method of manufacturing the same
09/29/2011US20110233170 Plasma processing apparatus and plasma processing method
09/29/2011US20110232749 Layered element and photovoltaic device comprising such an element
09/29/2011US20110232332 Ring plasma jet method and apparatus for making an optical fiber preform
09/29/2011DE102010003284A1 Verfahren zur chemischen Aktivierung von Arbeitsgasen in abgeschlossenen Volumina Methods for chemical activation of work gases in confined volumes
09/28/2011EP2369902A2 Plasma generation apparatus
09/28/2011EP2369614A2 High-voltage circuit insertion-type discharge element
09/28/2011EP2368411A1 High-performance plasma torch
09/28/2011EP2367758A2 Plasma processes for producing silanes and derivatives thereof
09/28/2011EP2367751A1 Device for producing hydrogen by means of an electron cyclotron resonance plasma
09/28/2011EP1640470B1 Nitriding method and device
09/28/2011CN201994322U 太阳能电池沉积用放电电极板阵列 Solar panel array discharge electrode deposition
09/28/2011CN102204416A Plasma treatment apparatus and plasma antenna
09/28/2011CN102204415A Flowable dielectric equipment and processes
09/28/2011CN102204414A Device for generating a plasma discharge for patterning the surface of a substrate
09/28/2011CN102204413A System for enhancing preignition conditions of thermonuclear fusion reactions
09/28/2011CN102203920A Extended chamber liner for improved mean time between cleanings of process chambers
09/28/2011CN102203919A Process kit having reduced erosion sensitivity
09/28/2011CN102203317A Electrode circuit, film formation device, electrode unit, and film formation method
09/28/2011CN102202829A System for thermally processing workpieces
09/28/2011CN102202455A Plasma generation apparatus
09/28/2011CN102202454A Switchable radio frequency power source system
09/28/2011CN101692368B High-temperature superconductive magnet system for magnetically confined plasma propeller
09/28/2011CN101452805B Processing container and plasma processing device
09/28/2011CN101189920B An improved plasma torch for use in a waste processing chamber
09/28/2011CN101167412B Interchangeable plasma nozzle interface
09/27/2011US8026157 Gas mixing method realized by back diffusion in a PECVD system with showerhead
09/27/2011US8025932 Self-limiting thin film synthesis achieved by pulsed plasma-enhanced chemical vapor deposition
09/27/2011US8025775 Vacuum plasma generator
09/27/2011US8025731 Gas injection system for plasma processing
09/27/2011CA2631064C Furnace atmosphere activation method and apparatus
09/22/2011WO2011115008A1 Etching method and etching device
09/22/2011WO2011114840A1 Plasma processing device, plasma processing method, and method for manufacturing a semiconductor element
09/22/2011WO2011114793A1 Plasma processing apparatus
09/22/2011WO2011113848A1 Device for plasma treatment of living tissue
09/22/2011WO2011062940A3 Large area plasma processing chamber with at-electrode rf matching
09/22/2011US20110230819 Harmonic Cold Plasma Device and Associated Methods
09/22/2011US20110229657 Apparatus and method for forming carbon protective layer
09/22/2011US20110229656 In-liquid plasma film-forming apparatus, electrode for in-liquid plasma, and film-forming method using in-liquid plasma
09/22/2011US20110226738 Methods of forming transparent structures and electrochromic devices
09/22/2011US20110226728 Device for generating a plasma discharge for patterning the surface of a substrate
09/22/2011US20110226422 Rf-driven ion source with a back-streaming electron dump
09/22/2011DE102010011643A1 Vorrichtung und Verfahren zur Plasmabehandlung von lebendem Gewebe Apparatus and method for plasma treatment of living tissue
09/22/2011DE102010011592A1 Hohlkathoden-Plasmaquelle sowie Verwendung der Hohlkathoden-Plasmaquelle Hollow cathode plasma source and use of the hollow cathode plasma source
09/21/2011EP1485515B1 Evaluation of chamber components having textured coatings
09/21/2011CN201986252U 大气压低温等离子体电刷发生装置及其阵列组合 Device and an array of combinations of atmospheric temperature plasma brush happen
09/21/2011CN201986251U Arc plasma torch with Laval negative pole structure
09/21/2011CN102197714A Plasma source for chamber cleaning and process
09/21/2011CN102197713A Plasma processing device
09/21/2011CN102197712A Disbanded cascaded array for generating and moving plasma clusters for active airflow control
09/21/2011CN102196654A Cover fixing tool and inductive coupling plasma processing device
09/21/2011CN102194639A Plasma treatment device and plasma treatment method
09/21/2011CN101720500B Inductively coupled dual zone processing chamber with single planar antenna
09/21/2011CN101660144B Plasma torch for chemical vapor deposition
09/21/2011CN101376980B Process for improving strip steel wetting property
09/21/2011CN101236892B Ion beam apparatus having plasma sheath controller
09/20/2011US8021723 Method of plasma treatment using amplitude-modulated RF power
09/15/2011WO2011111626A1 Surface treatment device
09/15/2011WO2011111558A1 Film surface treatment device
09/15/2011WO2011110391A1 Plasma generator
09/15/2011WO2011110380A1 Method and arrangement for plasma treating a gas flow
09/15/2011WO2011110343A1 Appliance, particularly kitchen appliance or laboratory table and deodorant device
09/15/2011WO2011110342A1 Method and arrangement for treating an object with a low-temperature plasma
09/15/2011WO2011110191A1 Method and arrangement for treating an object with a low- temperature plasma
09/15/2011WO2011062755A3 Plasma source design
09/15/2011WO2010094307A8 Treating device for treating a body part of a patient with a non-thermal plasma
09/15/2011US20110223480 Nanoparticle decorated nanostructured material as electrode material and method for obtaining the same
09/15/2011US20110223350 Method for producing thermoelectric material
09/15/2011DE102011013571A1 Plasmaätzverfahren und Plasmaätzvorrichtung Plasma etching and plasma etching
09/15/2011DE102010015891A1 Vorrichtung und Verfahren zur Herstellung nanoskaliger partikulärer Feststoffe und Plasmabrenner Apparatus and method for fabrication of nanoscale particulate solids and plasma torch
09/15/2011DE102010011132A1 Verfahren und Anordnung zur Plasmabehandlung eines Gasstroms Method and apparatus for plasma treatment of a gas stream
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