H05H 1 - Generating plasma; Handling plasma

Patents for H05H 1 - Generating plasma; Handling plasma (22,647)
12/2011
12/28/2011	CN102301832A 用于压缩等离子体的系统和方法 System and method for compressing plasma
12/28/2011	CN102301458A 用于蚀刻的方法和设备 Method and apparatus for etching
12/28/2011	CN102301457A 电浆蚀刻装置 Plasma etching apparatus
12/28/2011	CN102300383A 一种电感耦合装置及应用该装置的等离子体处理设备 An inductively coupled plasma processing apparatus and its application device of the apparatus
12/28/2011	CN102299068A 基板处理方法 Substrate processing method
12/28/2011	CN101790276B 一种等离子体发生装置及方法 An apparatus and method for plasma generation
12/28/2011	CN101652016B 常压线状冷等离子体射流产生装置 Linear cold atmospheric plasma jet generating device
12/28/2011	CN101518161B 扩径管型等离子体生成装置 Radially enlarged tube-type plasma generating means
12/28/2011	CN101486502B 杀菌方法及杀菌装置和使用该装置的空调机、手干燥机及加湿器 Sterilization methods and sterilization equipment and use of the air conditioner of the device, hand dryers and humidifiers
12/28/2011	CN101385129B 微波等离子体源和等离子体处理装置 A microwave plasma source and a plasma processing apparatus
12/28/2011	CN101160014B 等离子体处理装置和可变阻抗装置的校正方法 Correction method and apparatus of the variable impedance of plasma processing apparatus
12/27/2011	US8084757 Contamination prevention in extreme ultraviolet lithography
12/27/2011	US8084105 Method of depositing boron nitride and boron nitride-derived materials
12/27/2011	US8084103 Method for treating a hydrophilic surface
12/27/2011	US8084086 Reliant thermal barrier coating system and related methods and apparatus of making the same
12/27/2011	US8083892 Apparatus for generating gas plasma, gas composition for generating plasma and method for manufacturing semiconductor device using the same
12/22/2011	WO2011158808A1 Inductively coupled plasma generation device
12/22/2011	WO2011157425A1 Apparatus for the continuous plasma treatment and/or plasma coating of a piece of material
12/22/2011	WO2011157424A1 Apparatus for the continuous plasma treatment and/or plasma coating of a piece of material
12/22/2011	WO2011156877A1 Plasma processing device
12/22/2011	WO2011156876A1 Plasma processing device
12/22/2011	US20110311837 Covering member for preventing erosion
12/22/2011	US20110309749 Method and apparatus for operating traveling spark igniter at high pressure
12/22/2011	US20110309050 Plasma processing device, plasma processing method and method of manufacturing element including substrate to be processed
12/22/2011	US20110309049 Techniques for plasma processing a substrate
12/22/2011	US20110308735 Vacuum processing apparatus
12/22/2011	US20110308734 Apparatus for large area plasma processing
12/22/2011	US20110308733 Plasma processing apparatus and gas supply member support device
12/22/2011	US20110308719 Metallized Polymeric Films
12/22/2011	US20110308461 Electron Beam Enhanced Nitriding System (EBENS)
12/22/2011	DE102010030294A1 Cold high frequency-excited plasma beam producing device for e.g. medical purpose, has high frequency generator, resonance coil, insulating body and high-voltage electrode arranged in housing so that components are circulated by process gas
12/22/2011	DE102010024244A1 Anordnung und Verfahren für die dropletarme Beschichtung Apparatus and method for coating dropletarme
12/22/2011	DE102010024135A1 Vorrichtung zur kontinuierlichen Plasmabehandlung und/oder Plasmabeschichtung eines Materialstücks Device for the continuous plasma treatment and / or plasma coating a piece of material
12/22/2011	DE102010024086A1 Vorrichtung zur kontinuierlichen Plasmabehandlung und/oder Plasmabeschichtung eines Materialstücks Device for the continuous plasma treatment and / or plasma coating a piece of material
12/21/2011	EP2398043A1 Thin film forming apparatus and thin film forming method
12/21/2011	EP2398042A1 Atomic layer growing apparatus and thin film forming method
12/21/2011	EP2398037A1 Assembly and method for low droplet coating of substrates with a vacuum arc vaporizer
12/21/2011	EP2396457A2 Plasma source with integral blade and method for removing materials from substrates
12/21/2011	EP2011375B1 High visibility plasma arc torch
12/21/2011	CN102293066A 等离子体处理装置 The plasma processing apparatus
12/21/2011	CN102293065A 等离子体处理装置 The plasma processing apparatus
12/21/2011	CN102293064A 等离子体处理装置 The plasma processing apparatus
12/21/2011	CN102293063A 等离子体处理装置 The plasma processing apparatus
12/21/2011	CN102293062A 用于气体输送系统的减少微粒处理 Reduce particulate delivery systems for gas processing
12/21/2011	CN102291925A 等离子体发电系统 Plasma generation system
12/21/2011	CN102291924A 一种新型等离子体处理装置 A novel plasma processing apparatus
12/21/2011	CN102291923A 一种等离子体喷枪 A plasma spray gun
12/21/2011	CN102291922A 一种离子产生装置 An ion generating device
12/21/2011	CN102291921A 增强装置及其使用方法 Enhancement device and method of use
12/21/2011	CN101842881B 等离子体处理装置 The plasma processing apparatus
12/21/2011	CN101720503B 等离子体处理装置 The plasma processing apparatus
12/21/2011	CN101453821B 一种宽范围等离子体密度调节装置 One kind of a wide range of plasma density adjustment device
12/20/2011	US8080290 Film formation method and apparatus for semiconductor process
12/20/2011	US8080282 Method for forming silicon carbide film containing oxygen
12/15/2011	WO2011156534A2 Multiple frequency power for plasma chamber electrode
12/15/2011	WO2011156413A2 Dielectric barrier discharge wind tunnel
12/15/2011	WO2011156240A2 Temperature controlled plasma processing chamber component with zone dependent thermal efficiencies
12/15/2011	WO2011156239A2 Temperature control in plasma processing apparatus using pulsed heat transfer fluid flow
12/15/2011	WO2011155408A1 Plasma processing apparatus
12/15/2011	WO2011154717A1 Compact fusion reactor
12/15/2011	WO2011153672A1 Movable jig for silicon-based thin film solar cell
12/15/2011	US20110306924 Atmospheric low-temperature micro plasma jet device for bio-medical application
12/15/2011	US20110305874 Hydrophobic substrate including a plasma-activated silicon oxycarbide primer
12/15/2011	US20110305847 Linear plasma system
12/15/2011	US20110303645 Power delivery unit, plasma spray system, and method of using plasma spray system
12/15/2011	US20110303643 Substrate processing method and substrate processing apparatus
12/15/2011	US20110303365 Plasma Etching Apparatus
12/15/2011	US20110303363 Plasma processing apparatus
12/15/2011	DE102008024486B4 Plasmastempel, Plasmabehandlungsvorrichtung, Verfahren zur Plasmabehandlung und Herstellungsverfahren für einen Plasmastempel Temple plasma, plasma treating apparatus, process for plasma treatment and manufacturing method for a plasma Temple
12/14/2011	EP2395819A2 Power delivery unit, plasma spray system, and method of using plasma spray system
12/14/2011	EP2394497A1 Plasma coating system and method for coating or treating the surface of a substrate
12/14/2011	EP2394496A1 Systems and methods for compressing plasma
12/14/2011	EP1927168B1 Optical pulse amplifier with high peak and high average power
12/14/2011	EP1484788B1 High-frequency power supply structure and plasma cvd device using the same
12/14/2011	EP1425777B1 Plasma processor coil
12/14/2011	EP1171900B1 Large area atmospheric-pressure plasma jet
12/14/2011	CN202077261U 用于等离子体源的微波天线上的保护管的覆层防护体 Protective body cladding protective tube microwave antenna for plasma source on
12/14/2011	CN1913093B 感应耦合等离子体对准装置及方法 Inductively coupled plasma alignment apparatus and method
12/14/2011	CN102282917A 等离子处理装置以及等离子生成装置 The plasma processing apparatus and a plasma generating means
12/14/2011	CN102282916A 等离子体生成装置及方法 Plasma generation device and method
12/14/2011	CN102282654A 蚀刻装置、分析装置、蚀刻处理方法、以及蚀刻处理程序 Etching apparatus, the analyzing apparatus, an etching treatment method, and etching treatment procedures
12/14/2011	CN102281698A 一种用脉冲调制改善等离子体特性的方法 A method of improving the plasma characteristics of the pulse modulator
12/14/2011	CN101726864B 氟硅硬性角膜接触镜表面等离子体亲水性改性方法 Fluorosilicone rigid contact lenses hydrophilic surface modification method of plasma
12/14/2011	CN101556909B 等离子体处理装置及其密封结构、密封方法 Apparatus and sealing structure, a sealing method plasma treatment
12/14/2011	CN101437352B 等离子体接力装置 Plasma relay device
12/14/2011	CN101128084B 等离子体生成装置、等离子体控制方法和基板制造方法 The plasma generating apparatus, the plasma control method and substrate manufacturing method
12/14/2011	CN101064986B 结合有多重磁芯的电感耦合等离子体反应器 Combined with multiple cores inductively coupled plasma reactor
12/14/2011	CN101049053B 用于等离子体处理表面的工艺和装置 Process and apparatus for plasma treatment of the surface
12/14/2011	CN101039543B 可调整高度的等离子体离子流探头 Adjustable height of the plasma ion current probe
12/14/2011	CN101016610B 混合式等离子-冷喷涂方法和设备 Hybrid Plasma - cold spray method and apparatus
12/13/2011	US8075952 Power loading substrates to reduce particle contamination
12/08/2011	WO2011152750A1 Heat-generating eletrode and method for manufacturing same
12/08/2011	WO2011151996A1 Plasma processing device and plasma processing method
12/08/2011	WO2011102884A3 Flush mounted fastener for plasma processing apparatus
12/08/2011	US20110300676 Method for Providing Lateral Thermal Processing of Thin Films on Low-Temperature Substrates
12/08/2011	US20110298376 Apparatus And Method For Producing Plasma
12/07/2011	EP2393343A2 Apparatus and method for a liquid cooled shield for improved piercing performance
12/07/2011	EP2392195A2 Apparatus for modifying the surfaces of web, plate and sheet products using a device for generating plasma
12/07/2011	EP1390964B1 Dipole ion source
12/07/2011	EP1388159B1 Magnetic mirror plasma source

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