| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 07/30/1992 | DE4202447A1 Trench profile with vertical walls - formed by dry etching using ambient contg. ammonia to produce passivation layer on trench walls |
| 07/30/1992 | DE4201661A1 Semiconductor integrated circuit mfr. - uses a deposited carbon@ film as intermediate layer to improve the accuracy of reproducing sub-micron dimensions |
| 07/30/1992 | DE4200753A1 MOSFET with very short channel lengths - uses a multiple implant of dopant in source-drain regions to provide an abrupt, shallow box-shaped dopant profile to minimise punch through |
| 07/30/1992 | DE4037444A1 Self adjusting contact windows in MOS technology - obtd. by selective etching of the silicon dioxide layer down to the silicon nitride stop layer by reactive ion beam with pure tri:fluoro methane |
| 07/29/1992 | EP0496681A1 Device for the distribution of microwave energy for excitation of a plasma |
| 07/29/1992 | EP0496655A1 A method of forming high purity metal silicides targets for sputtering |
| 07/29/1992 | EP0496639A2 Polysilicon thin film semiconductor device |
| 07/29/1992 | EP0496614A1 Method for forming contact hole in process of manufacturing semiconductor device |
| 07/29/1992 | EP0496605A2 Surface treating solutions and cleaning method |
| 07/29/1992 | EP0496564A1 Method and apparatus for etching diamond with plasma |
| 07/29/1992 | EP0496543A2 Method of forming silicon oxide film containing fluorine |
| 07/29/1992 | EP0496443A1 Semiconductor device and method of manufacturing such a semiconductor device |
| 07/29/1992 | EP0496424A2 Constant-voltage generating circuit |
| 07/29/1992 | EP0496382A2 Intrinsic gettering for a semiconducteur epitaxial wafer |
| 07/29/1992 | EP0496365A1 Compositions for the production of seed layers |
| 07/29/1992 | EP0496364A1 Composition for the production of seed layers |
| 07/29/1992 | EP0496360A2 Semiconductor memory cell |
| 07/29/1992 | EP0496357A2 Charge coupled device |
| 07/29/1992 | EP0496266A1 Method and apparatus for quality measure driven process control |
| 07/29/1992 | EP0496229A2 Etching solution for wet chemical treatment in semi-conductor fabrication |
| 07/29/1992 | EP0496169A1 Method of integrated circuit fabrication including filling windows with conducting material |
| 07/29/1992 | EP0496159A2 Partitioning method for E-beam lithography |
| 07/29/1992 | EP0496158A2 Proximity correction method for E-beam lithography |
| 07/29/1992 | EP0496078A1 A mold for manufacturing plastics integrated circuits incorporating a heat sink |
| 07/29/1992 | EP0496006A1 Wafer transfer apparatus |
| 07/29/1992 | EP0495994A1 Semiconductor device and its manufacturing method |
| 07/29/1992 | EP0495887A1 Improved routing system and method for integrated circuits |
| 07/29/1992 | EP0495812A1 Semiconductor structure and method of fabricating it |
| 07/29/1992 | EP0462209A4 Electron cyclotron resonance plasma source and method of operation |
| 07/29/1992 | EP0359777B1 Process for etching with gaseous plasma |
| 07/29/1992 | EP0233202B1 Fabricating a semiconductor device with buried oxide |
| 07/29/1992 | CN1063128A Method of treating metals by deposition of materials and furnace for implementing said method |
| 07/29/1992 | CN1017670B Integrated circuit isolation process |
| 07/29/1992 | CN1017669B Method of manufacturing semiconductor device |
| 07/28/1992 | US5134671 Monolithic integrated optical amplifier and photodetector |
| 07/28/1992 | US5134583 Nonvolatile semiconductor memory device having redundant data lines and page mode programming |
| 07/28/1992 | US5134581 Highly stable semiconductor memory with a small memory cell area |
| 07/28/1992 | US5134506 Liquid crystal device having a phase plate and particular dye composition |
| 07/28/1992 | US5134463 Soldering semiconductor chip to electrode |
| 07/28/1992 | US5134461 Nickel alloy layer prevents diffusion of nickel into gold layer |
| 07/28/1992 | US5134460 Semiconductor chips, tape automated bonding |
| 07/28/1992 | US5134458 Long size lead frame for semiconductor elements |
| 07/28/1992 | US5134456 Voltage divider for high-speed high-precision signal converting unit |
| 07/28/1992 | US5134455 Semiconductor integrated circuit device |
| 07/28/1992 | US5134454 Self-aligned integrated circuit bipolar transistor having monocrystalline contacts |
| 07/28/1992 | US5134453 Bulk transport charge-coupled device with linear input characteristic |
| 07/28/1992 | US5134452 MIS type FET semiconductor device with gate insulating layer having a high dielectric breakdown strength |
| 07/28/1992 | US5134451 MOS semiconductive device |
| 07/28/1992 | US5134450 Parallel transistor circuit with non-volatile function |
| 07/28/1992 | US5134449 Nonvolatile memory cell with field-plate switch |
| 07/28/1992 | US5134448 MOSFET with substrate source contact |
| 07/28/1992 | US5134447 Neutral impurities to increase lifetime of operation of semiconductor devices |
| 07/28/1992 | US5134446 Gallium arsenide, gallium indium arsenide |
| 07/28/1992 | US5134436 Exposure control method for adjusting the temperature of a workpiece holding chuck attracting surface based on memorized data |
| 07/28/1992 | US5134405 Electromagnetically anechoic chamber and shield structures therefor |
| 07/28/1992 | US5134317 Booster circuit for a semiconductor memory device |
| 07/28/1992 | US5134301 Ion implanting apparatus, having ion contacting surfaces made of high purity silicon, for fabricating semiconductor integrated circuit devices |
| 07/28/1992 | US5134299 Ion beam implantation method and apparatus for particulate control |
| 07/28/1992 | US5134298 Beam control method and apparatus |
| 07/28/1992 | US5134093 Passivating aluminum alloy |
| 07/28/1992 | US5134092 Process for forming deposited film and process for producing semiconductor device |
| 07/28/1992 | US5134091 Quantum effective device and process for its production |
| 07/28/1992 | US5134090 Method of fabricating patterned epitaxial silicon films utilizing molecular beam epitaxy |
| 07/28/1992 | US5134089 Thick field oxide |
| 07/28/1992 | US5134088 Precision resistor in self-aligned silicided mos process |
| 07/28/1992 | US5134086 Having increased cell capacitance provided by grains formed within polycrystalline silicon layers |
| 07/28/1992 | US5134085 Reduced-mask, split-polysilicon CMOS process, incorporating stacked-capacitor cells, for fabricating multi-megabit dynamic random access memories |
| 07/28/1992 | US5134083 Bipolar junction transistor |
| 07/28/1992 | US5134082 Method of fabricating a semiconductor structure having MOS and bipolar devices |
| 07/28/1992 | US5134058 Photoresist |
| 07/28/1992 | US5133989 Process for producing metal-polyimide composite article |
| 07/28/1992 | US5133986 Plasma enhanced chemical vapor processing system using hollow cathode effect |
| 07/28/1992 | US5133921 Method for manufacturing plastic encapsulated electronic semiconductor devices |
| 07/28/1992 | US5133850 Sputtering cathode for coating substrates in cathode sputtering apparatus |
| 07/28/1992 | US5133830 Precleaning by exposure to hydrogen ion beam, then exposure to microwave-activated chlorine gas plasma |
| 07/28/1992 | US5133826 Electron cyclotron resonance plasma source |
| 07/28/1992 | US5133795 Method of making a silicon package for a power semiconductor device |
| 07/28/1992 | US5133635 Method and apparatus for holding and conveying platelike substrates |
| 07/28/1992 | US5133285 Apparatus for transporting substrates |
| 07/28/1992 | US5133284 Gas-based backside protection during substrate processing |
| 07/28/1992 | US5133160 Process for the removal of specific crystal structures defects from semiconductor discs |
| 07/28/1992 | US5133136 Method of and apparatus for drying articles |
| 07/28/1992 | US5133119 Shearing stress interconnection apparatus and method |
| 07/26/1992 | CA2059892A1 Compositions for the production of seed layers |
| 07/26/1992 | CA2059891A1 Compositions for the production of seed layers |
| 07/25/1992 | CA2059841A1 Surface treating solutions and cleaning method |
| 07/23/1992 | WO1992012542A1 Method for manufacturing solar cell by selective epitaxial growth |
| 07/23/1992 | WO1992012540A1 Semiconductor device |
| 07/23/1992 | WO1992012539A1 Semiconductor memory of dynamic type |
| 07/23/1992 | WO1992012538A1 Semiconductor memory of dynamic type |
| 07/23/1992 | WO1992012537A1 Method for manufacturing memory cell of dram |
| 07/23/1992 | WO1992012536A1 AlGaAs NATIVE OXIDE |
| 07/23/1992 | WO1992012535A1 Process for forming silicon oxide film |
| 07/23/1992 | WO1992012534A1 Apparatus for forming thin film |
| 07/23/1992 | WO1992012533A1 Improved drying apparatus |
| 07/23/1992 | WO1992012518A1 Storage cell arrangement and process for operating it |
| 07/23/1992 | WO1992012498A1 Semiconductor device |
| 07/23/1992 | WO1992012466A1 Method of forming minute resist pattern |
| 07/23/1992 | WO1992012453A1 Single crystal silicon arrayed devices for display panels |
| 07/23/1992 | WO1992012405A1 Method and device for measuring the temperature of an object and heating method |