Patents for G01B 11 - Measuring arrangements characterised by the use of optical means (73,862)
05/2005
05/26/2005US20050112475 Monitoring pattern configured to obtain information required for adjusting optical system; asymmetrical diffraction grating generates positive first order diffracted light and negative first order diffracted light; probing phase shifters
05/26/2005US20050111726 Parts manipulation and inspection system and method
05/26/2005US20050111081 Broad band deep ultraviolet/vacuum ultraviolet catadioptric imaging system
05/26/2005US20050111012 Laser survey device
05/26/2005US20050111009 Laser triangulation system
05/26/2005US20050111005 Lithographic interferometer system
05/26/2005US20050110893 Knife edge tracking system and method
05/26/2005US20050110868 System and method for inputting contours of a three-dimensional subject to a computer
05/26/2005US20050110198 Apparatus and method for simultaneously coating and measuring parts
05/26/2005US20050110000 Multiple sensor system
05/26/2005US20050109961 Imaging apparatus and method
05/26/2005US20050109959 Systems and methods for rapidly automatically focusing a machine vision inspection system
05/25/2005EP1533996A1 Systems and methods for rapidly automatically focusing a machine vision inspection system
05/25/2005EP1533989A2 Imaging apparatus and method
05/25/2005EP1533653A1 A stereo camera apparatus
05/25/2005EP1533594A1 Apparatus for detecting displacement
05/25/2005EP1532479A1 Device and method for inspecting an object
05/25/2005EP1532422A1 Sensor device for multiple measuring tasks
05/25/2005EP1532421A1 A method and a system for automatic measurement and tracking of logs, industrial wood and boards
05/25/2005EP1531770A2 Device and method for measuring an optical penetration in a tissue
05/25/2005DE4212404B4 Vorrichtung und Verfahren zur Bestimmung der räumlichen Form eines langgestreckten Bauteils Apparatus and method for determining the spatial form of an elongate member
05/25/2005DE10344922A1 Rundum-Scanner All-scanner
05/25/2005DE10342689B3 Making test bodies for testing measurement devices for micro bores with large aspect ratios involves stacking individual calibrated micro bore segments with small aspect rations to form test body as micro bore with large aspect ratio
05/25/2005DE10333119B3 Nichtinvasives Verfahren zur Charakterisierung und Identifizierung eingebetteter Mikrostrukturen A noninvasive method for the characterization and identification of embedded microstructures
05/25/2005CN1620627A Machine and method for inspecting ferrule of optical connector
05/25/2005CN1620341A Method and apparatus for detecting a liquid spray pattern
05/25/2005CN1620112A Multifunction target mark
05/25/2005CN1619790A Method for inspecting defect
05/25/2005CN1619299A Apparatus and method for detecting damage of glass base plate edge
05/25/2005CN1619288A Selecting a hypothetical profile to use in optical metrology with sample diffraction signal
05/25/2005CN1619256A Omnidirectional automatic regulating device of drilling needle detecting instrument for circuit board hold drilling and its feeding device
05/25/2005CN1619225A Operating device and operating method for an electric domestic appliance
05/25/2005CN1203363C 照明装置 Lighting device
05/25/2005CN1203292C Method for measuring object three dimension surface outline
05/25/2005CN1203291C Phase and time based focusing shiftable pickup and measuring instrument thereof
05/25/2005CA2488301A1 Laser survey device
05/24/2005US6898537 Measurement of diffracting structures using one-half of the non-zero diffracted orders
05/24/2005US6898486 Position detecting device and takeout apparatus with position detecting device
05/24/2005US6898478 Systems and methods of processing materials
05/24/2005US6898304 Hardware configuration for parallel data processing without cross communication
05/24/2005US6897966 Non-contacting mensuration system
05/24/2005US6897964 Thickness measuring apparatus, thickness measuring method, and wet etching apparatus and wet etching method utilizing them
05/24/2005US6897957 Material independent optical profilometer
05/24/2005US6897956 Apparatus and method for measuring alignment accuracy, as well as method and system for manufacturing semiconductor device
05/24/2005US6897946 Ranger finder device and camera
05/24/2005US6897938 Position measuring method and apparatus
05/24/2005US6897854 Electronic pen input device and coordinate detecting method therefor
05/24/2005US6897789 System for determining kind of vehicle and method therefor
05/24/2005US6897464 Active optical component alignment system and method
05/24/2005US6897462 Surface position detection device and exposure apparatus and exposure method achieved by utilizing detection device
05/24/2005US6896192 Spray can targeting and positioning system
05/24/2005US6896117 Apparatus for processing a sheet
05/24/2005CA2298363C A method of surveying a track
05/19/2005WO2005045891A2 Method and apparatus for measuring and monitoring coatings
05/19/2005WO2005045658A1 Position-detecting device and method
05/19/2005WO2005045403A1 Interferometric device
05/19/2005WO2005045363A1 3-dimensional shape detection device, imaging device, and 3-dimensional shape detection program
05/19/2005WO2005045362A1 Apparatus for interferometric eye length measurement with increased sensitivity
05/19/2005WO2005045361A2 Scanning interferometry for thin film thickness and surface measurements
05/19/2005WO2005026772A3 Self-compensating laser tracker
05/19/2005WO2004099713A3 Uniaxial thermal and/or mechanical deformation-measuring device, system and method employing a bragg grating optical fibre
05/19/2005WO2004079294A3 Characterizing and profiling complex surface structures using scanning interferometry
05/19/2005WO2004066028A3 Method for process optimization and control by comparison between 2 or more measured scatterometry signals
05/19/2005US20050105103 Optical techniques for measuring layer thicknesses and other surface characteristics of objects such as semiconductor wafers
05/19/2005US20050105102 Wafer stage position calibration method and system
05/19/2005US20050105100 Optical position measuring system and method using a low coherence light source
05/19/2005US20050105081 Sensor for determining the angular position of a radiating point source in two dimensions
05/19/2005US20050105077 Miniaturized cytometer for detecting multiple species in a sample
05/19/2005US20050105076 Three-dimensional location measurement sensor
05/19/2005DE10348950A1 Verfahren zur Volumenbestimmung von kleinen bewegten kugelförmigen Objekten Method for determining the volume of small moving spherical objects
05/19/2005DE10348684A1 Abstandsbild-Video-Kamera Distance Picture Video Camera
05/19/2005DE10347898A1 Light source beam guiding system, e.g. for sensor, has variable spacing and/or angle of two mirrors for varying deflection of outgoing light beam
05/19/2005DE10347608A1 Reference mark for photogrammetry/metrophotography has elements for fixing the center of the mark and for variable encoding of data on a circle around the center of the mark
05/19/2005DE10346850A1 Measuring or testing lateral dimension or volume of recess in layer on substrate surface, or properties of materials in recess, by irradiating and analyzing interaction of radiation with recess
05/19/2005DE10346467A1 Messgerät und -verfahren zum Prüfen der Schnittqualität eines Blattes Instrument and method for testing the cut quality of a leaf
05/19/2005DE10335565A1 Verfahren zur Überprüfung von periodischen Strukturen auf Lithographiemasken Proceedings for review of periodic structures on lithography masks
05/19/2005DE102004046584A1 Contactless optical method for determining three-dimensional position of object e.g. for production line automation in manufacturing plant, uses evaluation of object image provided by camera
05/19/2005DE102004009484A1 Optical distance sensor using the triangulation principle has lens associated with receiver with second main surface divided into N cylindrical lens segments in addition to first main surface with certain total opening
05/18/2005EP1531326A1 Material testing method
05/18/2005EP1531318A1 Process and apparatus for measuring a 3D shape of an object
05/18/2005CN2700827Y Detecting apparatus for moving object
05/18/2005CN1618008A Optical torque and angle sensor
05/18/2005CN1618007A Method and device for determining surface position at least with one forming pattern region
05/18/2005CN1618006A Aligning optical components of an optical measuring system
05/18/2005CN1618005A Senser for measuring three dimension shape and its measuring method
05/18/2005CN1618004A Method and apparatus for measuring stress in semiconductor wafers
05/18/2005CN1617009A Three-dimensional digital imaging method based on space lattice projection
05/18/2005CN1616918A Scaling mechanism for position measurer
05/18/2005CN1202403C Optical measuring apparatus and method for measuring objects position on machines
05/17/2005US6895360 Method to measure oxide thickness by FTIR to improve an in-line CMP endpoint determination
05/17/2005US6895359 Workpiece coordinate system origin setting method, workpiece coordinate system origin setting program and workpiece coordinate system origin setting device of a surface property measuring machine
05/17/2005US6895132 Multiplexable fiber-optic strain sensor system with temperature compensation capability
05/17/2005US6894788 Interferometric system for automated radius of curvature measurements
05/17/2005US6894783 Overlay alignment mark design
05/17/2005US6894781 Monitoring temperature and sample characteristics using a rotating compensator ellipsometer
05/17/2005US6894771 Wheel alignment apparatus and method utilizing three-dimensional imaging
05/17/2005US6894302 Surface inspection apparatus and method thereof
05/17/2005US6894261 Position measuring system for use in lithographic apparatus
05/17/2005US6893787 Method of a photolithography processing system
05/17/2005US6892465 Portable coordinate measurement machine with integrated magnetic mount