Patents for G01B 11 - Measuring arrangements characterised by the use of optical means (73,862)
11/2005
11/08/2005US6963407 Process end point detection apparatus and method, polishing apparatus, semiconductor device manufacturing method, and recording medium recorded with signal processing program
11/08/2005US6963390 In-situ interferometer arrangement
11/08/2005US6963389 Alignment method, exposure apparatus and device fabrication method
11/08/2005US6963331 Position information input apparatus and method
11/08/2005US6962670 invention employs fluorophores as compositional additives to at least one layer; fluorophores are exposed to electromagnetic radiation and resultant fluorescence is used a measure of thickness, or non-uniformity of thickness, of the layers
11/08/2005US6962448 Optical interlink between an optical transducer and optical data port
11/06/2005CA2506486A1 Positioning and marking tool
11/03/2005WO2005103610A1 Small displacement measuring method and instrument
11/03/2005WO2005103609A1 3-dimensional shape measurement device and 3-dimensional shape measurement method
11/03/2005WO2005103608A1 Continuous surface deformation measurement
11/03/2005WO2005103607A1 Pressure resistance inspecting method and pressure resistance inspecting apparatus for heat exchangers
11/03/2005WO2005103606A1 Method for locating and measuring deformations in a work of civil engineering
11/03/2005WO2005103605A1 Instrument for measuring the thickness of a coating on bottles
11/03/2005WO2005102832A1 Arrangement and method for parallel alignment of propeller shafts and means for parallel alignment
11/03/2005WO2005102149A1 Light projection target mire for curvature measurements
11/03/2005WO2005045891A3 Method and apparatus for measuring and monitoring coatings
11/03/2005US20050246131 Method and system for monitoring of fluid-filled domains in a medium based on interface waves propagating along their surfaces
11/03/2005US20050246108 Method and system for characterizing structural damage from observing surface distortions
11/03/2005US20050244570 Deposition thickness measuring method, material layer forming method, deposition thickness measuring apparatus, and material layer forming apparatus
11/03/2005US20050243330 Methods and apparatus for determining three dimensional configurations
11/03/2005US20050243327 Compact Optical Apparatus
11/03/2005US20050243326 Imaginary polarizing measuring method for simultaneously measuring the optical crystal thickness and the optic axis direction
11/03/2005US20050243323 Method and apparatus for automatic registration and visualization of occluded targets using ladar data
11/03/2005US20050243315 Method and apparatus for object alignment
11/03/2005US20050243310 Method for inspecting insulating film for film carrier tape for mounting electronic components thereon, inspection apparatus for inspecting the insulating film, punching apparatus for punching the insulating film, and method for controlling the punching apparatus
11/03/2005US20050243306 Device to determine the thickness of a conductive layer
11/03/2005US20050243301 Preceding vehicle recognition apparatus
11/03/2005US20050243296 Position detecting method and apparatus, exposure apparatus and device manufacturing method
11/03/2005US20050242285 Position detection apparatus, position detection method, exposure apparatus, device manufacturing method, and substrate
11/03/2005US20050241407 Optical measuring device
11/03/2005DE4304388B4 Vorrichtung und Verfahren zum Ermitteln von Umfangsmaßen länglicher Körper Apparatus and method for determining the circumferential dimensions of elongated body
11/03/2005DE202005012193U1 Optical path measurement device has a light source and linear optical sensor that is partially covered by a shadow-casting body so that the shadow thrown over it is dependent on its position relative to the light source
11/03/2005DE19947374B4 Verfahren zur Ermittlung geometrischer Abweichungen von Koordinatenmeßgeräten oder Werkzeugmaschinen Method for determining geometric deviations of coordinate measuring machines and machine tools
11/03/2005DE10393432T5 Phasenverteilungs-Messvorrichtung und Phasenverteilungs-Messverfahren Phase distribution measuring apparatus and phase distribution measuring method
11/03/2005DE10392553T5 Radjustierung durch drehenden optischen Sensor Radjustierung by rotating optical sensor
11/03/2005DE102004018968A1 Verfahren und Messeinrichtung zum Vermessen von Werkzeugen Procedures and measuring device for measuring tools
11/03/2005DE102004018458A1 Workpiece processing centre, has measurement device provided at assembly place and another measurement device with greater accuracy than former measurement device is in communication with former measurement device
11/03/2005DE102004018414A1 Shining object's optical measurement device for automobile industry, has rigid connection between measuring instrument and object, with connection shielding path of rays from instrument
11/03/2005DE102004018288A1 Approximate identification of object involves determining characteristics in defined region from graphic data in lines, columns or matrix form, determining numeric approximate value for object from graphic data by statistical classification
11/03/2005DE102004018106A1 High accuracy optical position detector for dynamic laser beam scanner mirror drives has light source feeding light guide rod coaxial with cylindrical screen with windows
11/03/2005DE102004017746A1 Verfahren und Vorrichtung zur Erfassung des Zustandes und zur Bearbeitung von Weichen in Gleisanlagen Method and apparatus for detecting the condition and editing course for tracks
11/03/2005DE102004013683A1 Messvorrichtung Measuring device
11/03/2005CA2779594A1 Method and system for monitoring of fluid-filled domains in a medium based on interface waves propagating along their surfaces
11/03/2005CA2779579A1 Method and system for monitoring of fluid-filled domains in a medium based on interface waves propagating along their surfaces
11/03/2005CA2779567A1 Method and system for monitoring of fluid-filled domains in a medium based on interface waves propagating along their surfaces
11/03/2005CA2779462A1 Method and system for monitoring of fluid-filled domains in a medium based on interface waves propagating along their surfaces
11/02/2005EP1591766A2 Optical measuring device and force sensor
11/02/2005EP1591751A2 Method and apparatus for measuring micro-structure, and micro-structure analytical system
11/02/2005EP1591750A1 Method and apparatus for controlling the thickness of a coating on a ribbon moved in its longitudinal direction
11/02/2005EP1590696A2 Full-filled optical measurements of surface properties of panels, substrates and wafers
11/02/2005EP1590627A1 Dimensioning system and method of dimensioning
11/02/2005EP1246741B1 Method and device for detecting seat occupancy by means of a video sensor system and foot room sensor system
11/02/2005EP1166169B1 Device for detecting the distance between the pupil plane and the frame plane
11/02/2005EP0877914B1 Scanning phase measuring method and system for an object at a vision station
11/02/2005EP0663069B1 Inspection machine
11/02/2005CN2738202Y Vehicle body form and position deviation detecting equipment
11/02/2005CN2738201Y Measuring device for tool machine
11/02/2005CN1692276A Method for judging graphite texture in gray cast iron, judging program recording medium and judging system
11/02/2005CN1692269A Fringe pattern discriminator for grazing incidence interferometer
11/02/2005CN1691883A Lighting condition determination method, element recognition device, surface mounting machine and element test apparatus
11/02/2005CN1691274A Apparatus and method for removing organic contamination adsorbed onto substrate, and apparatus and method for measuring thickness of thin film formed on substrate
11/02/2005CN1690649A Method and arrangement for the regulation of the layer thickness of a coating material on a web moved in its longitudinal direction
11/02/2005CN1690648A Method and apparatus for detecting drilling pin for PC board using multiple alternating light sources
11/02/2005CN1225375C Method for detecting fatigue driving based on multiple characteristic fusion
11/01/2005USRE38860 Scanning optical microscope
11/01/2005US6961679 Method and system of dynamic learning through a regression-based library generation process
11/01/2005US6961133 Method and apparatus for non-contact thickness measurement
11/01/2005US6961132 Interference system and semiconductor exposure apparatus having the same
11/01/2005US6961131 Film thickness measuring method of member to be processed using emission spectroscopy and processing method of the member using the measuring method
11/01/2005US6961116 Alignment system uses a self-referencing interferometer that produces two overlapping and relatively rotated images of an alignment markers.
11/01/2005US6960755 Contact sensor, and apparatus for protecting a protruding component
11/01/2005US6959592 Method and system for monitoring the deformations of a tire in motion
11/01/2005CA2355600C Position sensor and circuit for optical encoder
10/2005
10/27/2005WO2005100960A1 Surface defect examining device
10/27/2005WO2005100958A1 Process for monitoring the deposition performance of a coating device in a coating installation and device for carrying out said process
10/27/2005WO2005100911A2 An apparatus and method for optical determination of intermediate distances
10/27/2005WO2005100910A1 Three-dimensional shape measuring method and its equipment
10/27/2005WO2005100909A1 Measuring apparatus and method in a distribution system
10/27/2005WO2005100908A1 Mixed optical and mechanical sensor and associated resetting method
10/27/2005US20050240317 Material transport in-motion product dimensioning system and method
10/27/2005US20050240077 Device for metrology by laser mapping for a videoendoscopic probe
10/27/2005US20050239548 Information processor having input system using stroboscope
10/27/2005US20050239372 Substrate polishing apparatus
10/27/2005US20050239224 Method and apparatus for measuring relative dielectric constant
10/27/2005US20050238795 Method and arrangement for the regulation of the layer thickness of a coating material on a web moved in its longitudinal direction
10/27/2005US20050238237 Method and apparatus for determining the shape and the local surface normals of specular surfaces
10/27/2005US20050237748 Device for depicting a linear optical marking
10/27/2005US20050237581 Hand held portable three dimensional scanner
10/27/2005US20050237542 Method for the formation of a structure size measured value
10/27/2005US20050237541 In-situ interferometer arrangement
10/27/2005US20050237540 Measuring apparatus and exposure apparatus having the same
10/27/2005US20050237539 Thin film thickness measurement using multichannel infrared sensor
10/27/2005US20050237538 Optical mems cavity having a wide scanning range for measuring a sensing interferometer
10/27/2005US20050237537 Determination of thin film topograhpy
10/27/2005US20050237536 Interferometry systems and methods of using interferometry systems
10/27/2005US20050237535 Vibration resistant interferometry
10/27/2005US20050237534 Vibration resistant interferometry
10/27/2005US20050237517 Optical alignment method and system
10/27/2005US20050237516 Measurement device and process for determining the straightness of hollow cylindrical or hollow conical bodies and their orientation relative to one another
10/27/2005US20050237511 Optical beam detection device and optical beam detection system using therewith