Patents for G01B 11 - Measuring arrangements characterised by the use of optical means (73,862)
12/2005
12/21/2005CN1232799C Adjusting device with optical regulating device having reflector
12/21/2005CN1232798C Linear movement reference device of cylindricity instrument with laser penetrance and reflection monitoring compensation
12/20/2005US6977782 Object lens producing device and producing method
12/20/2005US6977775 Method and apparatus for crystallizing semiconductor with laser beams
12/20/2005US6977732 Miniature three-dimensional contour scanner
12/20/2005US6977651 3-d model providing device
12/20/2005US6977631 Optical scanning system with variable focus lens
12/20/2005US6977368 Method for measuring position and position measuring device for carrying out said method
12/20/2005CA2391024C A track maintenance machine and a method of detecting a track position
12/20/2005CA2321841C Luminescent brittle coating in strain analysis
12/15/2005WO2005119592A1 Method for characterizing a digital imaging system
12/15/2005WO2005119226A1 Apparatus and method for inspecting semiconductor wafer
12/15/2005WO2005119172A1 Method and apparatus for inspecting front surface shape
12/15/2005WO2005119171A1 Device for measuring surface deformations
12/15/2005WO2005119170A2 Shape roughness measurement in optical metrology
12/15/2005WO2005119169A2 Beam profile complex reflectance system and method for thin film and critical dimension measurements
12/15/2005WO2005118428A1 Diameter measuring device
12/15/2005WO2005091837A3 Apparatus and method for determining orientation parameters of an elongate object
12/15/2005WO2005017489A3 Film mapping system
12/15/2005US20050277029 Microstructured pattern inspection method
12/15/2005US20050276513 Method for characterizing a digital imaging system
12/15/2005US20050276463 Visual inspection method and visual inspection apparatus
12/15/2005US20050275957 Imaging system and method employing off-axis illumination of an illumination modulator
12/15/2005US20050275850 Shape roughness measurement in optical metrology
12/15/2005US20050275848 Apparatus and methods for overlay, alignment mark, and critical dimension metrologies based on optical interferometry
12/15/2005US20050275841 Alignment marker and lithographic apparatus and device manufacturing method using the same
12/15/2005US20050275840 Optical position assessment apparatus and method
12/15/2005US20050275834 Method and apparatus for locating objects
12/15/2005US20050275833 Method and apparatus for detecting and characterizing an object
12/15/2005US20050275831 Method and apparatus for visual detection and inspection of objects
12/15/2005US20050275803 Stage apparatus and vision measuring apparatus
12/15/2005US20050274913 Object data input apparatus and object reconstruction apparatus
12/15/2005US20050274909 Level sensor for lithographic apparatus
12/15/2005US20050274901 System for scatterometric measurements and applications
12/15/2005DE10357062B4 System zur Messung der Verkippung von strukturierten Oberflächen System for measuring the tilt of structured surfaces
12/15/2005DE10346850B4 Verfahren zum Ermitteln einer Eigenschaft einer strukturierten Schicht A method for determining a property of a structured layer
12/15/2005DE102005011344A1 Sensorvorrichtung Sensor device
12/15/2005DE102004026275A1 Test body length measurement system has internal pressure of compensation body adjustable by feeding gas in or out of compensation body independently of vacuum in measurement body to reduce required drive forces
12/15/2005DE102004025999A1 Three-dimensional eye position detector for laser eye operation, has sensor for detecting reference object in two translatory directions, and distances of scanning points
12/15/2005DE102004025490A1 Optical measurement of reflective or transparent objects using laser, by applying e.g. condensate film that can be removed without contact
12/15/2005DE102004025252A1 Articulated vehicle coupling angle determining device, determines angles of incidence and/or spacing between signals reflected back from surface of second vehicle part
12/15/2005DE102004025210A1 Optical analog distance sensor, has light intensity at optical receiver dependent on reflector position
12/15/2005DE102004024785A1 Verfahren zur Vermessung topographischer Strukturen auf Bauelementen Method for measuring topographic structures on components
12/15/2005DE102004024378A1 Scannender Messroboter Scan finished measuring robot
12/15/2005DE102004024095A1 Beleuchtungsvorrichtung und bildgebendes medizinisches Untersuchungsgerät mit einer derartigen Beleuchtungsvorrichtung Lighting apparatus and imaging medical examination apparatus comprising an illumination device
12/15/2005DE102004023739A1 Messgerät und Verfahren zum Betreiben eines Messgeräts zur optischen Inspektion eines Objekts Meter and method for operating a measuring device for optical inspection of an object
12/15/2005DE102004022579A1 Method for establishing the residual length of the consumable electrode in a process oven has an optical transmission and receiving unit measuring reflected signals
12/15/2005CA2566589A1 Diameter measuring device
12/14/2005EP1605312A1 Radiation system, lithographic apparatus and device manufacturing method
12/14/2005EP1605311A2 Illumination device with light mixer for homogenisation of radiation distributions
12/14/2005EP1605228A2 Stage apparatus and vision measuring apparatus
12/14/2005EP1604193A2 Optical inspection system, illumination apparatus and method for imaging specular objects based on illumination gradients
12/14/2005EP1604191A1 A method and apparatus for determining one or more physical properties of a rolled smoking article or filter rod
12/14/2005EP1604169A2 Characterizing and profiling complex surface structures using scanning interferometry
12/14/2005EP1604168A2 Profiling complex surface structures using scanning interferometry
12/14/2005EP1603620A2 Determining the geometry and dimensions of a three-dimensional object
12/14/2005EP1603415A1 Improvements in or relating to machine vision equipmet
12/14/2005EP0727038B1 Devices and methods for detection of an analyte based upon light interference
12/14/2005CN2746365Y Side bend detection mechanism of ice-cream stick automatic detection and selection machine
12/14/2005CN2746364Y Thickness detection mechanism of ice-cream stick automatic detection and selection machine
12/14/2005CN1707363A Radiation system, lithographic apparatus, device manufacturing method and device manufactured thereby
12/14/2005CN1707248A Stage apparatus and vision measuring apparatus
12/14/2005CN1707220A Screw-thread steel three-parameter on-line measuring system
12/14/2005CN1231749C System and method for analyzing curvature and stress information of plate structure
12/14/2005CN1231743C Optical grating wedge plate and corner measuring device using same
12/14/2005CN1231742C Mechanical system apparatus for axle bush thickness automatic checking-sorting machine
12/14/2005CN1231741C Method of assisting sample inclination error adjustment
12/14/2005CN1231334C Workpiece regulating method for cutting machine
12/13/2005US6975960 Method for evaluating wafer configuration, wafer, and wafer sorting method
12/13/2005US6975410 Measuring device
12/13/2005US6975409 Illumination device; and coordinate measuring instrument having an illumination device
12/13/2005US6975408 Reflection scale and displacement measurement apparatus using the same
12/13/2005US6975407 Method of wafer height mapping
12/13/2005US6975405 Method and apparatus for measuring flatness and/or relative angle between top and bottom surfaces of a chip
12/13/2005US6975389 Deflection angle measuring device, optical signal switching system, information recording and replaying system, deflection angle measuring method, and optical signal switching method
12/13/2005US6975326 Image processing apparatus
12/13/2005US6974964 Method and apparatus for three-dimensional surface scanning and measurement of a moving object
12/13/2005US6974947 Apparatus and method for sensing rotation based on multiple sets of movement data
12/13/2005US6973739 Rigger-spread measuring instruments
12/13/2005US6973734 Method for providing sensory feedback to the operator of a portable measurement machine
12/08/2005WO2005116601A2 Method and apparatus for detecting pressure distribution in fluids
12/08/2005WO2005116579A1 Inspection of wood surface roughness
12/08/2005WO2005116578A2 Shape measurement method
12/08/2005WO2005116577A1 Method of adjusting imaging optical system, imaging device, positional deviation detecting device, mark identifying device and edge position detectinc device
12/08/2005WO2005115700A1 Method for robot-assisted measurement of measurable objects
12/08/2005WO2005115689A1 Substrate peripheral portion measuring device and method, substrate peripheral portion polishing apparatus and method, and substrate rinsing apparatus and method
12/08/2005WO2005088242A3 Method and scanning arrangement for the contactless scanning of three-dimensional objects and device for holding the objects
12/08/2005WO2005059823A3 Systems and methods for detecting defects in printed solder paste
12/08/2005US20050271954 Alignment mark, alignment apparatus and method, exposure apparatus, and device manufacturing method
12/08/2005US20050271264 Three-dimensional image measuring apparatus and method
12/08/2005US20050271263 Method of detecting projecting adherend and method for producing super plug using that method
12/08/2005US20050271262 Method and apparatus for inspecting a mura defect, and method of manufacturing a photomask
12/08/2005US20050270545 Three-dimensional measurement system
12/08/2005US20050270532 Laser line generating device
12/08/2005US20050270522 Surface inspection apparatus
12/08/2005US20050270511 Radiation system, lithographic apparatus, device manufacturing method and device manufactured thereby
12/08/2005US20050270496 Projector with a device for measuring angle of inclination
12/08/2005US20050270375 Camera calibrating apparatus and method
12/08/2005US20050269531 Apparatus for detecting light-transmissive sheet-like body
12/08/2005US20050268707 Non-contact method and system for tire analysis